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公开(公告)号:US11262385B2
公开(公告)日:2022-03-01
申请号:US16421982
申请日:2019-05-24
Applicant: Allegro MicroSystems, LLC
Inventor: Shaun D. Milano , Bryan Cadugan , Michael C. Doogue , Alexander Latham , William P. Taylor , Harianto Wong , Sundar Chetlur
Abstract: Systems and methods described herein are directed towards integrating a shield layer into a current sensor to shield a magnetic field sensing element and associated circuitry in the current sensor from electrical, voltage, or electrical transient noise. In an embodiment, a shield layer may be disposed along at least one surface of a die supporting a magnetic field sensing element. The shield layer may be disposed in various arrangements to shunt noise caused by a parasitic coupling between the magnetic field sensing element and the current carrying conductor away from the magnetic field sensing element.
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公开(公告)号:US11195826B2
公开(公告)日:2021-12-07
申请号:US16776680
申请日:2020-01-30
Applicant: Allegro MicroSystems, LLC
Inventor: Maxim Klebanov , Washington Lamar , Sagar Saxena , Chung C. Kuo , Sebastian Courtney , Sundar Chetlur
IPC: H01L27/02 , H02H9/04 , H01L29/866
Abstract: In one aspect an electronic device includes a substrate having one of a p-type doping or an n-type doping, a first well in the substrate, a second well in the substrate, a third well in the substrate between the first and second wells, a first terminal connected to the first well, a second terminal connected to the second well, an electrostatic discharge (ESD) clamp connected to the first and second terminals and a transient voltage source connected to the third well. A doping type of the first, second and third wells is the other one of the p-type or n-type doping. The ESD clamp is configured to clamp the first and second wells at a clamp voltage during an ESD event and the transient voltage source is configured to provide a voltage during the ESD event that is less than the clamp voltage.
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公开(公告)号:US20210242193A1
公开(公告)日:2021-08-05
申请号:US16776680
申请日:2020-01-30
Applicant: Allegro MicroSystems, LLC
Inventor: Maxim Klebanov , Washington Lamar , Sagar Saxena , Chung C. Kuo , Sebastian Courtney , Sundar Chetlur
IPC: H01L27/02 , H02H9/04 , H01L29/866
Abstract: In one aspect an electronic device includes a substrate having one of a p-type doping or an n-type doping, a first well in the substrate, a second well in the substrate, a third well in the substrate between the first and second wells, a first terminal connected to the first well, a second terminal connected to the second well, an electrostatic discharge (ESD) clamp connected to the first and second terminals and a transient voltage source connected to the third well. A doping type of the first, second and third wells is the other one of the p-type or n-type doping. The ESD clamp is configured to clamp the first and second wells at a clamp voltage during an ESD event and the transient voltage source is configured to provide a voltage during the ESD event that is less than the clamp voltage.
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公开(公告)号:US10566526B1
公开(公告)日:2020-02-18
申请号:US16122019
申请日:2018-09-05
Applicant: Allegro MicroSystems, LLC
Inventor: Yen Ting Liu , Maxim Klebanov , Paolo Campiglio , Sundar Chetlur
Abstract: A method includes depositing on a substrate a magnetoresistance stack, depositing a first hard mask on the magnetoresistance stack, depositing a first photoresist on the first hard mask, patterning the first photoresist to expose portions of the first hard mask, and etching the exposed portions of the first hard mask to expose a portion of the magnetoresistance stack. The method further includes stripping the first photoresist, etching the exposed portions of the magnetoresistance stack and the first hard mask to form a first intermediate structure having a base and a pillar structure, depositing an etch barrier on the first intermediate structure, and depositing a second hard mask on the etch barrier. A second photoresist is deposited on the second hard mask. The method further includes patterning the second photoresist to expose portions of the second hard mask, etching the exposed portions of the second hard mask, stripping the second photoresist, etching a portion of the second hard mask, a portion of the etch barrier and the base to form a second intermediate structure, and depositing a capping barrier on the second intermediate structure.
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公开(公告)号:US20180149677A1
公开(公告)日:2018-05-31
申请号:US15363285
申请日:2016-11-29
Applicant: Allegro MicroSystems, LLC
Inventor: Shaun D. Milano , Bryan Cadugan , Michael C. Doogue , Alexander Latham , William P. Taylor , Harianto Wong , Sundar Chetlur
CPC classification number: G01R15/148 , G01R15/202 , G01R15/205 , G01R15/207 , G01R19/0092 , H01L2224/16145 , H01L2224/48091 , H01L2224/48247 , H01L2224/48465 , H01L2224/73265 , H01L2924/00014 , H01L2924/00
Abstract: Systems and methods described herein are directed towards integrating a shield layer into a current sensor to shield a magnetic field sensing element and associated circuitry in the current sensor from electrical, voltage, or electrical transient noise. In an embodiment, a shield layer may be disposed along at least one surface of a die supporting a magnetic field sensing element. The shield layer may be disposed in various arrangements to shunt noise caused by a parasitic coupling between the magnetic field sensing element and the current carrying conductor away from the magnetic field sensing element.
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公开(公告)号:US20250067778A1
公开(公告)日:2025-02-27
申请号:US18944096
申请日:2024-11-12
Applicant: Allegro MicroSystems, LLC
Inventor: Shaun D. Milano , Bryan Cadugan , Michael C. Doogue , Alexander Latham , William P. Taylor , Harianto Wong , Sundar Chetlur
Abstract: Systems and methods described herein are directed towards integrating a shield layer into a current sensor to shield a magnetic field sensing element and associated circuitry in the current sensor from electrical, voltage, or electrical transient noise. In an embodiment, a shield layer may be disposed along at least one surface of a die supporting a magnetic field sensing element. The shield layer may be disposed in various arrangements to shunt noise caused by a parasitic coupling between the magnetic field sensing element and the current carrying conductor away from the magnetic field sensing element.
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27.
公开(公告)号:US20240074322A1
公开(公告)日:2024-02-29
申请号:US17823461
申请日:2022-08-30
Applicant: Allegro MicroSystems, LLC
Inventor: Maxim Klebanov , Yen Ting Liu , Sundar Chetlur , Paolo Campiglio , Samridh Jaiswal
CPC classification number: H01L43/12 , G01R33/0052 , H01F41/34 , H01L43/02
Abstract: In one aspect, a method includes depositing magnetoresistance (MR) layers of a MR element on a semiconductor structure; depositing a first hard mask on the MR layers; depositing and patterning a first photoresist on the first hard mask using photolithography to expose portions of the first hard mask; etching the exposed portions of the first hard mask; etching a portion of the MR layers using the first hard mask; depositing a second hard mask on a first capping layer; depositing and patterning a second photoresist on the second hard mask using photolithography to expose portions of the second hard mask; etching the exposed portions of the second hard mask; etching the MR element using the second hard mask; etching portions of the first hard mask down to a top MR layer of the MR element; and depositing a conducting material on the top MR layer to form an electroconductive contact.
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公开(公告)号:US20230361223A1
公开(公告)日:2023-11-09
申请号:US17662101
申请日:2022-05-05
Applicant: Allegro MicroSystems, LLC
Inventor: Sagar Saxena , Washington Lamar , Maxim Klebanov , Chung C. Kuo , Sebastian Courtney , Sundar Chetlur
CPC classification number: H01L29/87 , H01L29/0684
Abstract: In one aspect, a diode includes a substrate having a first type dopant; a buried layer having a second type dopant and formed within the substrate; an epitaxial layer having the second type dopant and formed above the buried layer; and a plurality of regions having the first type dopant within the epitaxial layer. The plurality of regions includes a first region, a second region, and a third region. The diode also includes a base well having the first type dopant and located within the epitaxial layer and in contact with the third and fourth regions. In a reverse-bias mode, the diode is an electrostatic discharge (ESD) clamp and forms parasitic transistors comprising a first bipolar junction transistor (BJT), a second BJT and a third BJT.
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公开(公告)号:US20230253507A1
公开(公告)日:2023-08-10
申请号:US17650418
申请日:2022-02-09
Applicant: Allegro MicroSystems, LLC
Inventor: Thomas S. Chung , Maxim Klebanov , Sundar Chetlur , James McClay
IPC: H01L29/788 , H01L29/08 , H01L29/66 , G11C16/10 , G11C16/14
CPC classification number: H01L29/7883 , G11C16/10 , G11C16/14 , H01L29/0847 , H01L29/66825
Abstract: In one aspect, a flash memory cell includes a well having a first-type dopant, a source having a second-type dopant and formed within the well, a drain having the second-type dopant and formed within the well, a floating gate above the well, a control gate above the floating gate, an oxide compound disposed between the floating gate and the control gate, and a tunnel oxide disposed between the floating gate and the well. The flash memory cell is configured, in one of a program mode or an erase mode, to move an electron from the source to the floating gate. The flash memory cell is configured, in the other one of the program or the erase mode, to move an electron is from the floating gate to the drain.
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30.
公开(公告)号:US11367830B2
公开(公告)日:2022-06-21
申请号:US17014129
申请日:2020-09-08
Applicant: Allegro MicroSystems, LLC
Inventor: Sundar Chetlur , Maxim Klebanov , Paolo Campiglio , Yen Ting Liu
Abstract: In one aspect, an integrated circuit includes a first conductive layer and a magnetoresistance element (MRE) disposed over and coupled to the first layer through first vias. The MRE is magnetized to produce a first magnetic orientation. The first layer is disposed over and coupled to a second conductive layer in the circuit through second vias. The circuit also includes a metal filler disposed proximate to the MRE. The metal filler is positioned over and coupled to the second layer through third vias. The circuit also includes a thermal dissipation path resulting from a physical input applied to the first MRE. The thermal dissipation path extends through the first through third vias, the first and second layers, an integrated circuit interconnection, and the metal filler.
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