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21.发明申请公开(公告)号：US20090166519A1
公开(公告)日：2009-07-02
申请号：US12348272
申请日：2009-01-02
IPC分类号： G01D5/34
CPC分类号： G01D5/34776 , G01D5/34784 , G01D5/38
摘要： An optical encoder and method for measuring displacement information using an optical encoder uses an encoder member with multiple digital diffractive optic regions to optically diffract an incident beam of light to produce output beams of light having intensity distribution patterns, which are used to generate electrical signals that provide relative displacement information of the encoder member.
摘要翻译： 用于使用光学编码器测量位移信息的光学编码器和方法使用具有多个数字衍射光学区域的编码器构件来光学衍射入射光束以产生具有强度分布图案的输出光束，其用于产生电信号， 提供编码器构件的相对位移信息。
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22.发明授权公开(公告)号：US07128804B2
公开(公告)日：2006-10-31
申请号：US09749921
申请日：2000-12-29
IPC分类号： H01L21/306
CPC分类号： H01J37/32467 , H01J37/32477 , H01J37/32559
摘要： A corrosion resistant component of a plasma chamber includes a liquid crystalline polymer. In a preferred embodiment, the liquid crystalline polymer (LCP) is provided on an aluminum component having an anodized or non-anodized surface. The liquid crystalline polymer can also be provided on an alumina component. The liquid crystalline polymer can be deposited by a method such as plasma spraying. The liquid crystalline polymer may also be provided as a preformed sheet or other shape adapted to cover the exposed surfaces of the reaction chamber. Additionally, the reactor components may be made entirely from liquid crystalline polymer by machining the component from a solid block of liquid crystalline polymer or molding the component from the polymer. The liquid crystalline polymer may contain reinforcing fillers such as glass or mineral fillers.
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公开(公告)号：US06537429B2
公开(公告)日：2003-03-25
申请号：US09749925
申请日：2000-12-29
IPC分类号： C23C1400
CPC分类号： H01J37/32495 , B01J19/0073 , B01J19/02 , B01J2219/0231 , B01J2219/025 , C23C16/0272 , C23C16/27 , C23C16/4404 , Y10T428/26 , Y10T428/30 , Y10T428/31678
摘要： A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof.
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公开(公告)号：US10244220B2
公开(公告)日：2019-03-26
申请号：US15425987
申请日：2017-02-06
IPC分类号： H04N13/106 , H04N13/243 , G06T1/00 , H04N13/111 , H04N13/15 , H04N13/00
摘要： A multi-camera time slice system and method of producing a three-dimensional (3D) integrated time slice image array uses multiple cameras to capture a subject to produce an array of subject images with transparent backgrounds. The array of subject images with transparent backgrounds is merged with an array of foreground images with transparent backgrounds and an array of background images, which are captured in a similar manner as the array of subject images, to produce the 3D integrated time slice image array.
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25.发明申请公开(公告)号：US20170230631A1
公开(公告)日：2017-08-10
申请号：US15425987
申请日：2017-02-06
CPC分类号： H04N13/106 , G06T1/0007 , H04N13/111 , H04N13/15 , H04N13/243 , H04N2013/0092
摘要： A multi-camera time slice system and method of producing a three-dimensional (3D) integrated time slice image array uses multiple cameras to capture a subject to produce an array of subject images with transparent backgrounds. The array of subject images with transparent backgrounds is merged with an array of foreground images with transparent backgrounds and an array of background images, which are captured in a similar manner as the array of subject images, to produce the 3D integrated time slice image array.
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公开(公告)号：US20100102644A1
公开(公告)日：2010-04-29
申请号：US12604975
申请日：2009-10-23
申请人： Christopher C. Chang
发明人： Christopher C. Chang
IPC分类号： H02K41/02
摘要： A linear brushless DC motor uses a movable coil assembly, which includes at least one coil, an amplifier and a motor controller, that is configured to move relative to a stationary base assembly. The coil, the amplifier and the motor controller are assembled so that the coil, the amplifier and the motor controller are collectively displaced when the movable coil assembly is moved relative to the stationary base assembly.
摘要翻译： 线性无刷DC电动机使用可移动线圈组件，其包括至少一个线圈，放大器和电动机控制器，其被构造成相对于固定基座组件移动。 组合线圈，放大器和电动机控制器，使得当可动线圈组件相对于固定基座组件移动时，线圈，放大器和电动机控制器被集体地移位。
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公开(公告)号：US07405532B2
公开(公告)日：2008-07-29
申请号：US11544826
申请日：2006-10-06
申请人： Christopher C. Chang
发明人： Christopher C. Chang
IPC分类号： H02P8/34
摘要： A microstepper motor device and method of controlling the device uses a microcontroller that provides current sinusoidal values from at least one array of sinusoidal values to power circuitry of the device in response to control signals. The power circuitry is connected to a stepper motor of the device to supply power signals to the stepper motor using the current sinusoidal values. The microcontroller is configured to index the at least one array of sinusoidal values to the current sinusoidal values in response to the control signals as part of an interrupt service routine of the microcontroller. The microcontroller is further configured to transmit the current sinusoidal values to the power circuitry as part of a non-interrupt routine of the microcontroller.
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公开(公告)号：US20080084176A1
公开(公告)日：2008-04-10
申请号：US11544826
申请日：2006-10-06
申请人： Christopher C. Chang
发明人： Christopher C. Chang
IPC分类号： G05B19/40
摘要： A microstepper motor device and method of controlling the device uses a microcontroller that provides current sinusoidal values from at least one array of sinusoidal values to power circuitry of the device in response to control signals. The power circuitry is connected to a stepper motor of the device to supply power signals to the stepper motor using the current sinusoidal values. The microcontroller is configured to index the at least one array of sinusoidal values to the current sinusoidal values in response to the control signals as part of an interrupt service routine of the microcontroller. The microcontroller is further configured to transmit the current sinusoidal values to the power circuitry as part of a non-interrupt routine of the microcontroller.
摘要翻译： 微型电机装置和控制装置的方法使用微控制器，其响应于控制信号，从正弦值的至少一个阵列向装置的电源电路提供电流正弦值。 电源电路连接到设备的步进电机，以使用当前正弦值向步进电机提供电源信号。 微控制器被配置为响应于作为微控制器的中断服务程序的一部分的控制信号将正弦值的至少一个阵列索引到当前正弦值。 微控制器还被配置为将电流正弦值作为微控制器的非中断程序的一部分传送到电源电路。
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公开(公告)号：US06805952B2
公开(公告)日：2004-10-19
申请号：US09749917
申请日：2000-12-29
IPC分类号： B32B300
CPC分类号： H01J37/32477 , C23C4/00 , C23C4/04 , C23C4/10 , Y02T50/67 , Y10T428/24355 , Y10T428/26 , Y10T428/263 , Y10T428/264 , Y10T428/31678 , Y10T428/31681 , Y10T428/31721
摘要： Components for use in plasma processing chambers having plasma exposed surfaces with surface roughness characteristics that promote polymer adhesion. The roughened surfaces are formed by plasma spraying a coating material such as a ceramic or high temperature polymer onto the surface of the component. The plasma sprayed components of the present invention can be used for plasma reactor components having surfaces exposed to the plasma during processing. Suitable components include chamber walls, chamber liners, baffle rings, gas distribution plates, plasma confinement rings, and liner supports. By improving polymer adhesion, the plasma sprayed component surfaces can reduce the levels of particle contamination in the process chamber thereby improving yields and reducing down-time required for cleaning and/or replacing chamber components.
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30.发明授权Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof 失效半导体加工设备的富勒烯涂层部件及其制造方法公开(公告)号：US06790242B2
公开(公告)日：2004-09-14
申请号：US09749923
申请日：2000-12-29
IPC分类号： H01L2100
CPC分类号： B82Y30/00 , B01J19/02 , B01J2219/0204 , B01J2219/0263 , B01J2219/0277 , B01J2219/0295 , C23C16/4404 , H01J37/32477 , Y10S423/39 , Y10S423/40 , Y10S977/844 , Y10S977/847 , Y10T29/41
摘要： A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a fullerene containing surface and process for manufacturing thereof.
摘要翻译： 诸如等离子体室的半导体加工设备的耐腐蚀部件包括含富勒烯的表面及其制造方法。
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