Apparatus and method for detecting particles in reactive and toxic gases
    21.
    发明授权
    Apparatus and method for detecting particles in reactive and toxic gases 失效
    用于检测反应性和有毒气体中的颗粒的装置和方法

    公开(公告)号:US06469780B1

    公开(公告)日:2002-10-22

    申请号:US09217113

    申请日:1998-12-21

    IPC分类号: G01N100

    CPC分类号: G01N15/065 Y10S977/953

    摘要: An apparatus and a method are disclosed for detecting particles in a particle-containing gas at a pressure greater than about 0 psig. The apparatus includes a gas distribution line containing a pressurized gas having a pressure greater than about 0 psig and a condensation nucleus counter in fluid communication with the pressurized gas in the gas distribution line. The condensation nucleus counter is adapted to receive a stream of the pressurized gas at a pressure substantially equal to the pressure of the pressurized gas in the gas distribution line. The condensation nucleus counter is constructed of materials resistant to corrosion and to reaction with the pressurized gas, which may be one or more reactive or toxic gases, such as those used in microchip processing, or an inert gas.

    摘要翻译: 公开了用于以大于约0psig的压力检测含颗粒气体中的颗粒的装置和方法。 该装置包括:气体分配管线,其包含压力大于约0psig的加压气体,以及与气体分配管线中的加压气体流体连通的冷凝核计数器。 冷凝核计数器适于以基本上等于气体分配管线中的加压气体的压力的压力接收加压气体流。 冷凝核计数器由耐腐蚀和与加压气体反应的材料构成,加压气体可以是一种或多种反应性或有毒气体,例如用于微芯片处理的气体或惰性气体。

    Process and apparatus for removing particles from high purity gas systems
    22.
    发明授权
    Process and apparatus for removing particles from high purity gas systems 失效
    从高纯度气体系统中除去颗粒的方法和设备

    公开(公告)号:US06436170B1

    公开(公告)日:2002-08-20

    申请号:US09602933

    申请日:2000-06-23

    IPC分类号: B03C301

    摘要: An apparatus for removing particles from a gas in a high purity flowing gas system is provided which includes a flow tube inserted inline in the flowing gas system having an inlet and an outlet, a pressure sealed, electrically insulated feed-through integral to the flow tube, an emitter inserted through the feed-through into the flow tube to create a plasma in the gas to charge particles in the gas, and a collector surface in proximity to the emitter; whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. An apparatus for removing particles from a gas in a high purity gas containment vessel is also provided which includes a gas containment vessel having an inlet orifice, a pressure sealed, electrically insulated feed-through sealingly attached adjacent the inlet orifice, an emitter inserted through the feed-through into the gas containment vessel to create a plasma in the gas to charge particles in the gas; and a collector surface in proximity to the emitter, whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. Methods of using the above apparatus are also provided.

    摘要翻译: 提供了一种用于从高纯度流动气体系统中的气体中除去颗粒的装置,其包括在具有入口和出口的流动气体系统中嵌入的流动管,压力密封的,电绝缘的,与流管 ,通过所述馈通插入到所述流管中以在所述气体中产生等离子体以对所述气体中的颗粒进行充电的发射器以及靠近所述发射极的收集器表面; 由此发射极和集电器表面之间的电场将气体中的颗粒吸引到集电器表面。 还提供了一种用于从高纯度气体容纳容器中的气体中除去颗粒的装置,其包括具有入口孔的气体容纳容器,密封地连接在入口孔附近的压力密封的电绝缘进料口, 通入气体容纳容器以在气体中产生等离子体以对气体中的颗粒进行充电; 以及靠近发射极的集电极表面,由此发射极和集电极表面之间的电场将气体中的颗粒吸引到集电器表面。 还提供了使用上述装置的方法。

    Transmission of Ultrasonic Energy into Pressurized Fluids
    25.
    发明申请
    Transmission of Ultrasonic Energy into Pressurized Fluids 审中-公开
    超声能量传输到加压流体

    公开(公告)号:US20080202550A1

    公开(公告)日:2008-08-28

    申请号:US12110831

    申请日:2008-04-28

    IPC分类号: B08B3/12

    CPC分类号: B06B3/00 B08B3/12

    摘要: Ultrasonic probe comprising an elongate body having a first end and a second end, an ultrasonic transducer attached to the probe at or adjacent the first end, and an enlarged support section intermediate the ultrasonic transducer and the second end, wherein the enlarged support section has an equivalent diameter greater than an equivalent diameter of the body at any location between the enlarged support section and the ultrasonic transducer. The probe may be used to introduce ultrasonic energy into ultrasonic cleaning systems.

    摘要翻译: 超声波探头包括具有第一端和第二端的细长主体,在第一端处或邻近第一端附接到探针的超声波换能器,以及位于超声波换能器和第二端之间的扩大的支撑部分,其中扩大的支撑部分具有 等效直径大于在扩大的支撑部分和超声波换能器之间的任何位置处的本体的等效直径。 探头可用于将超声波能量引入超声波清洗系统。

    Process and apparatus for removing particles from high purity gas systems

    公开(公告)号:US06517608B2

    公开(公告)日:2003-02-11

    申请号:US10187342

    申请日:2002-06-28

    IPC分类号: B03C301

    摘要: An apparatus for removing particles from a gas in a high purity flowing gas system is provided which includes a flow tube inserted inline in the flowing gas system having an inlet and an outlet, a pressure sealed, electrically insulated feed-through integral to the flow tube, an emitter inserted through the feed-through into the flow tube to create a plasma in the gas to charge particles in the gas, and a collector surface in proximity to the emitter; whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. An apparatus for removing particles from a gas in a high purity gas containment vessel is also provided which includes a gas containment vessel having an inlet orifice, a pressure sealed, electrically insulated feed-through sealingly attached adjacent the inlet orifice, an emitter inserted through the feed-through into the gas containment vessel to create a plasma in the gas to charge particles in the gas; and a collector surface in proximity to the emitter, whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. Methods of using the above apparatus are also provided.

    Method for removal of flux and other residue in dense fluid systems
    30.
    发明授权
    Method for removal of flux and other residue in dense fluid systems 失效
    在稠密流体系统中去除助焊剂和其他残留物的方法

    公开(公告)号:US07195676B2

    公开(公告)日:2007-03-27

    申请号:US10890502

    申请日:2004-07-13

    IPC分类号: C23G1/00

    摘要: Method for removing flux residue and defluxing residue from an article using a dense processing fluid and a dense rinse fluid is disclosed herein. In one embodiment, there is provided a method comprising: introducing the article comprising contaminants into a processing chamber; contacting the article with a dense processing fluid comprising a dense fluid, at least one processing agent, and optionally a cosolvent to provide a partially treated article; and contacting the partially treated article with a dense rinse fluid comprising the dense fluid and optionally the cosolvent to provide a treated article wherein an agitation source is introducing during at least a portion of the first and/or the second contacting step.

    摘要翻译: 本文公开了使用致密加工流体和致密冲洗流体从制品中除去助熔剂残余物和脱硫残渣的方法。 在一个实施方案中,提供了一种方法,包括:将包含污染物的制品引入处理室; 使所述制品与包含致密流体,至少一种加工剂和任选的共溶剂的致密加工流体接触以提供部分处理的制品; 以及使所述部分处理的制品与包含所述致密流体和任选的共溶剂的致密冲洗流体接触以提供经处理的制品,其中在所述第一和/或所述第二接触步骤的至少一部分期间引入搅拌源。