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公开(公告)号：US06661826B2
公开(公告)日：2003-12-09
申请号：US10164885
申请日：2002-06-07
申请人： Richard C. Ujazdowski , Timothy S. Dyer , William N. Partlo , Michael Altheim , Brian Strate , Thomas Hofmann
发明人： Richard C. Ujazdowski , Timothy S. Dyer , William N. Partlo , Michael Altheim , Brian Strate , Thomas Hofmann
IPC分类号： H01S3223
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70483 , H01S3/036 , H01S3/038 , H01S3/225
摘要： A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece elongated electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.
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公开(公告)号：US20100054295A1
公开(公告)日：2010-03-04
申请号：US12590307
申请日：2009-11-05
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/0384
摘要： A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the high voltage electrode from a grounded gas discharge chamber; a preionizer longitudinally extending along at least a portion of the longitudinal extent of the high voltage electrode; a preionization shim integral with the electrode extending toward the preionizer. The preionizer may be formed integrally with the main insulator. The preionization shim may substantially cover the gap between the electrode and the preionizer. The apparatus and method may comprise an aerodynamic fairing attached to the high voltage electrode to present an aerodynamically smooth surface to the gas flow.
摘要翻译： 公开了以大于4kHz的输出激光脉冲重复率操作的脉冲气体放电激光器及其操作方法，其可以包括具有纵向范围的高压电极; 将高电压电极与接地气体放电室电绝缘的主绝缘体; 前置电离器，其沿所述高压电极的所述纵向延伸部分的至少一部分纵向延伸; 与电极一体的预电离垫片朝向前置电离器延伸。 前置电离器可以与主绝缘体一体地形成。 预电离垫片可以基本上覆盖电极和前置离子机之间的间隙。 该装置和方法可以包括附接到高压电极的空气动力学整流罩，以向气流呈现空气动力学平滑的表面。
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公开(公告)号：US07522650B2
公开(公告)日：2009-04-21
申请号：US10815387
申请日：2004-03-31
申请人： William N. Partlo , Yoshiho Amada , James A. Carmichael , Timothy S. Dyer , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Curtis L. Rettig , Brian D. Strate , Thomas D. Steiger , Fedor Trintchouk , Richard C. Ujazdowski
发明人： William N. Partlo , Yoshiho Amada , James A. Carmichael , Timothy S. Dyer , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Curtis L. Rettig , Brian D. Strate , Thomas D. Steiger , Fedor Trintchouk , Richard C. Ujazdowski
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/0384 , H01S3/041 , H01S3/0971 , H01S3/225
摘要： A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.
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公开(公告)号：US08855166B2
公开(公告)日：2014-10-07
申请号：US13352127
申请日：2012-01-17
申请人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
发明人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
IPC分类号： H01S3/08 , H01S3/036 , H01F38/10 , H01F3/10 , H01F27/22 , H01S3/041 , H01S3/225 , H01S3/097 , H01F27/26 , H01S3/04 , H01S3/23
CPC分类号： H01S3/036 , H01F3/10 , H01F27/22 , H01F27/266 , H01F38/10 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/225 , H01S3/2308
摘要： A system and method of operating a high repetition rate gas discharge laser system. The system includes a gas discharge chamber having a hot chamber output window heated by the operation of the gas discharge laser chamber, an output laser light pulse beam path enclosure downstream of the hot chamber window and comprising an ambient temperature window, a cooling mechanism cooling the beam path enclosure intermediate the output window and the ambient window. The gas discharge chamber can include a longitudinally and axially compliant ground rod, including a first end connected to a first chamber wall, a second end connected to a second chamber wall, the second chamber wall opposite the first chamber wall and a first portion formed into a helical spring, the ground rod providing mechanical support for a preionizer tube.
摘要翻译： 一种操作高重复率气体放电激光系统的系统和方法。 该系统包括气体放电室，其具有通过气体放电激光室的操作加热的热室输出窗口，在热室窗口下游的输出激光束脉冲光束路径，包括环境温度窗口，冷却机构 光束路径外壳在输出窗口和环境窗口之间。 气体放电室可以包括纵向和轴向柔性接地棒，包括连接到第一室壁的第一端，连接到第二室壁的第二端，与第一室壁相对的第二室壁和形成为第一室壁的第一部分 螺旋弹簧，接地棒提供机械支撑用于前置离子管。
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公开(公告)号：US08446928B2
公开(公告)日：2013-05-21
申请号：US12945719
申请日：2010-11-12
IPC分类号： H01S3/097
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： A movable electrode assembly for use in laser system includes a first electrode, a second electrode arranged opposite from the first electrode, the second electrode being spaced apart from the first electrode by a discharge gap and a discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A movable electrode assembly for integration into a housing of a laser system includes a first electrode having a discharge surface, a second electrode having a discharge surface, such that the discharge surface of the first electrode and the discharge surface of the second electrode face each other in a spaced apart setting that defines a desired discharge gap, and a mechanism for moveably adjusting the spaced apart setting toward the desired discharge gap. A method of adjusting a discharge gap is also disclosed.
摘要翻译： 用于激光系统的可移动电极组件包括第一电极，与第一电极相对设置的第二电极，第二电极通过放电间隙与第一电极间隔开，放电间隙调节器与至少一个 第二电极或第一电极，放电间隙调节器被配置为调节放电间隙。 用于集成到激光系统的壳体中的可动电极组件包括具有放电表面的第一电极，具有放电表面的第二电极，使得第一电极的放电表面和第二电极的放电表面彼此面对 在间隔开的设置中限定期望的放电间隙，以及用于可移动地将间隔开的设置调节到期望的放电间隙的机构。 还公开了一种调节放电间隙的方法。
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公开(公告)号：US08526481B2
公开(公告)日：2013-09-03
申请号：US13469009
申请日：2012-05-10
IPC分类号： H01S3/097
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： A movable electrode assembly for use in a laser system, includes a first electrode having a first discharge surface, a second electrode having a second discharge surface. The second electrode being arranged opposite from the first electrode. The second discharge surface being spaced apart from the first discharge surface by a discharge gap. A discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A method of adjusting a discharge gap is also disclosed.
摘要翻译： 一种用于激光系统的可动电极组件，包括具有第一放电表面的第一电极，具有第二放电表面的第二电极。 第二电极布置成与第一电极相对。 第二放电表面与第一放电表面间隔开放电间隙。 放电间隙调节器与第二电极或第一电极中的至少一个接合，放电间隙调节器被配置为调节放电间隙。 还公开了一种调节放电间隙的方法。
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公开(公告)号：US20120219032A1
公开(公告)日：2012-08-30
申请号：US13469009
申请日：2012-05-10
IPC分类号： H01S3/097
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： A movable electrode assembly for use in a laser system, includes a first electrode having a first discharge surface, a second electrode having a second discharge surface. The second electrode being arranged opposite from the first electrode. The second discharge surface being spaced apart from the first discharge surface by a discharge gap. A discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A method of adjusting a discharge gap is also disclosed.
摘要翻译： 一种用于激光系统的可动电极组件，包括具有第一放电表面的第一电极，具有第二放电表面的第二电极。 第二电极布置成与第一电极相对。 第二放电表面与第一放电表面间隔开放电间隙。 放电间隙调节器与第二电极或第一电极中的至少一个接合，放电间隙调节器被配置为调节放电间隙。 还公开了一种调节放电间隙的方法。
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公开(公告)号：US07856044B2
公开(公告)日：2010-12-21
申请号：US11787463
申请日：2007-04-16
IPC分类号： H01S3/097
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.
摘要翻译： 本文公开了用于在横向放电气体激光室中延伸一个或两个放电电极的系统和方法，其中一个或两个电极由于侵蚀而经受尺寸变化。 可以执行电极延伸以增加室的寿命，在室的寿命或两者都增加激光器性能。 可操作地，可以调整电极间间隔以维持电极之间的特定目标间隙距离或者优化激光输出光束的特定参数，例如带宽，脉冲到脉冲能量稳定性，光束尺寸等。
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公开(公告)号：US20110058580A1
公开(公告)日：2011-03-10
申请号：US12945719
申请日：2010-11-12
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： A movable electrode assembly for use in laser system includes a first electrode, a second electrode arranged opposite from the first electrode, the second electrode being spaced apart from the first electrode by a discharge gap and a discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A movable electrode assembly for integration into a housing of a laser system includes a first electrode having a discharge surface, a second electrode having a discharge surface, such that the discharge surface of the first electrode and the discharge surface of the second electrode face each other in a spaced apart setting that defines a desired discharge gap, and a mechanism for moveably adjusting the spaced apart setting toward the desired discharge gap. A method of adjusting a discharge gap is also disclosed.
摘要翻译： 用于激光系统的可移动电极组件包括第一电极，与第一电极相对设置的第二电极，第二电极通过放电间隙与第一电极间隔开，放电间隙调节器与至少一个 第二电极或第一电极，放电间隙调节器被配置为调节放电间隙。 用于集成到激光系统的壳体中的可动电极组件包括具有放电表面的第一电极，具有放电表面的第二电极，使得第一电极的放电表面和第二电极的放电表面彼此面对 在间隔开的设置中限定期望的放电间隙，以及用于可移动地将间隔开的设置调节到期望的放电间隙的机构。 还公开了一种调节放电间隙的方法。
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公开(公告)号：US20120120974A1
公开(公告)日：2012-05-17
申请号：US13352127
申请日：2012-01-17
申请人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
发明人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
CPC分类号： H01S3/036 , H01F3/10 , H01F27/22 , H01F27/266 , H01F38/10 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/225 , H01S3/2308
摘要： A system and method of operating a high repetition rate gas discharge laser system. The system includes a gas discharge chamber having a hot chamber output window heated by the operation of the gas discharge laser chamber, an output laser light pulse beam path enclosure downstream of the hot chamber window and comprising an ambient temperature window, a cooling mechanism cooling the beam path enclosure intermediate the output window and the ambient window. The gas discharge chamber can include a longitudinally and axially compliant ground rod, including a first end connected to a first chamber wall, a second end connected to a second chamber wall, the second chamber wall opposite the first chamber wall and a first portion formed into a helical spring, the ground rod providing mechanical support for a preionizer tube.
摘要翻译： 一种操作高重复率气体放电激光系统的系统和方法。 该系统包括气体放电室，其具有通过气体放电激光室的操作加热的热室输出窗口，在热室窗口下游的输出激光束脉冲光束路径，包括环境温度窗口，冷却机构 光束路径外壳在输出窗口和环境窗口之间。 气体放电室可以包括纵向和轴向柔性接地棒，包括连接到第一室壁的第一端，连接到第二室壁的第二端，与第一室壁相对的第二室壁和形成为第一室壁的第一部分 螺旋弹簧，接地棒提供机械支撑用于前置离子管。
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