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公开(公告)号:US07522650B2
公开(公告)日:2009-04-21
申请号:US10815387
申请日:2004-03-31
申请人: William N. Partlo , Yoshiho Amada , James A. Carmichael , Timothy S. Dyer , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Curtis L. Rettig , Brian D. Strate , Thomas D. Steiger , Fedor Trintchouk , Richard C. Ujazdowski
发明人: William N. Partlo , Yoshiho Amada , James A. Carmichael , Timothy S. Dyer , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Curtis L. Rettig , Brian D. Strate , Thomas D. Steiger , Fedor Trintchouk , Richard C. Ujazdowski
IPC分类号: H01S3/22
CPC分类号: H01S3/036 , H01S3/0384 , H01S3/041 , H01S3/0971 , H01S3/225
摘要: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.
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公开(公告)号:US07301980B2
公开(公告)日:2007-11-27
申请号:US10877737
申请日:2004-06-25
申请人: Thomas D. Steiger , Richard C. Ujazdowski , Timothy S. Dyer , Thomas P. Duffey , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Brian D. Strate
发明人: Thomas D. Steiger , Richard C. Ujazdowski , Timothy S. Dyer , Thomas P. Duffey , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Brian D. Strate
IPC分类号: H01S3/097
CPC分类号: H01S3/225 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/0971 , H01S3/09713
摘要: A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric discharge between the electrode elements in the laser gas. The anode comprising a first anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region, a pair of second anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an electrode center base portion integral with the first anode portion; and wherein each of the respective pair of second anode portions is mechanically bonded to the center base portion.
摘要翻译: 气体放电激光器包括含有卤素激光气体的激光室,限定阴极和阳极的两个电极元件,每个具有限定两个纵向边缘的放电接收区域,并且具有限定电极元件之间的放电宽度的区域宽度 在激光气体中。 阳极包括第一阳极部分,其包括限定第一阳极材料侵蚀速率的第一阳极材料,其完全位于放电接收区域内;一对第二阳极部分,包括限定第二阳极材料侵蚀速率的第二阳极材料,分别位于 所述第一阳极部分的每一侧并且至少部分地在所述放电接收区域内; 与所述第一阳极部分成一体的电极中心基部; 并且其中相应的一对第二阳极部分中的每一个机械地结合到中心基部。
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公开(公告)号:US07132123B2
公开(公告)日:2006-11-07
申请号:US10629364
申请日:2003-07-29
申请人: Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko , Walter Gillespie , Curtis Rettig
发明人: Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko , Walter Gillespie , Curtis Rettig
CPC分类号: G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0387 , H01S3/0388 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
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公开(公告)号:US06937635B2
公开(公告)日:2005-08-30
申请号:US10638247
申请日:2003-08-07
申请人: Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko , Walter Gillespie , Curtis Rettig
发明人: Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko , Walter Gillespie , Curtis Rettig
IPC分类号: G03F7/20 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/097 , H01S3/0979 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/20 , H01S3/09
CPC分类号: G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0387 , H01S3/0388 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译: 本发明提供了一种气体放电激光器,其具有至少一个长寿命的细长电极,用于在含氟激光气体中产生至少120亿个高压放电。 在优选实施例中,至少一个电极由具有相对低的阳极腐蚀速率的第一材料和具有相对较高的阳极侵蚀速率的第二阳极材料构成。 第一阳极材料位于电极的期望的阳极放电区域。 第二阳极材料沿第一材料的至少两个长边位于第一阳极材料附近。 在两种材料的激光冲蚀操作过程中,第二种材料的腐蚀速度较高,确保放电扩散到第二种材料上的任何趋势将迅速消除第二种材料,从而阻止放电扩散。 在优选实施例中,阳极如上所述,阴极也是双材料电极,其中第一材料在放电区域为C26000黄铜,第二材料为C36000黄铜。 脉冲功率系统以至少1KHz的速率提供电脉冲。 鼓风机以至少5m / s的速度在电极之间循环激光气体,并且提供热交换器以去除由鼓风机和排出物产生的热量。
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公开(公告)号:US06690706B2
公开(公告)日:2004-02-10
申请号:US10104502
申请日:2002-03-22
申请人: Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko
发明人: Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko
IPC分类号: H01S3097
CPC分类号: G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0387 , H01S3/0388 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
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公开(公告)号:US07230965B2
公开(公告)日:2007-06-12
申请号:US10672722
申请日:2003-09-26
CPC分类号: H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/09713 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要: Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.
摘要翻译: 公开了一种用于氟气体放电激光器的电极,其可以包括跨越所述一对侧壁和所述一对端壁之间的中心线轴线的冠,包括形成电极的放电区域的至少一部分的第一材料; 横截面的冠部具有以预旋转方向旋转的倾斜椭圆的上半部的形状,使得与椭圆形的短中心线轴线的切线与水平方向成一角度。 另一实施例可以包括具有顶部部分和分别与顶部部分相交的第一和第二侧壁部分的阳极刀片; 阳极叶片形成为顶部部分的横截面形状为曲线形状,并且沿着曲率半径与第一和第二侧壁部分的每一个的大体上直的部分相交,并且顶部部分斜切远离第一和第二侧壁部分的不对称排出侧 阳极。
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公开(公告)号:US06661826B2
公开(公告)日:2003-12-09
申请号:US10164885
申请日:2002-06-07
申请人: Richard C. Ujazdowski , Timothy S. Dyer , William N. Partlo , Michael Altheim , Brian Strate , Thomas Hofmann
发明人: Richard C. Ujazdowski , Timothy S. Dyer , William N. Partlo , Michael Altheim , Brian Strate , Thomas Hofmann
IPC分类号: H01S3223
CPC分类号: G03F7/70025 , G03F7/70041 , G03F7/70483 , H01S3/036 , H01S3/038 , H01S3/225
摘要: A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece elongated electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.
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公开(公告)号:US06972421B2
公开(公告)日:2005-12-06
申请号:US10409254
申请日:2003-04-08
申请人: Stephan T. Melnychuk , William N. Partlo , Igor V. Fomenkov , I. Roger Oliver , Richard M. Ness , Norbert Bowering , Oleh Khodykin , Curtis L. Rettig , Gerry M. Blumenstock , Timothy S. Dyer , Rodney D. Simmons , Jerzy R. Hoffman , R. Mark Johnson
发明人: Stephan T. Melnychuk , William N. Partlo , Igor V. Fomenkov , I. Roger Oliver , Richard M. Ness , Norbert Bowering , Oleh Khodykin , Curtis L. Rettig , Gerry M. Blumenstock , Timothy S. Dyer , Rodney D. Simmons , Jerzy R. Hoffman , R. Mark Johnson
IPC分类号: G21K5/00 , G01J1/00 , G03F7/20 , G21K5/02 , H01L21/027 , H01S3/00 , H05G2/00 , H05H1/06 , H05H1/24 , H01J35/20
CPC分类号: H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70166 , G03F7/70175 , G03F7/70916 , H01S3/005 , H05G2/005 , H05G2/008 , H05H1/06
摘要: The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
摘要翻译: 本发明提供了一种可靠,高重复率的生产线兼容高能光子源。 在真空室中产生含有活性物质的非常热的等离子体。 活性物质是具有期望的极紫外(EUV)范围内的发射线的原子元素。 包括充电电容器和包括脉冲变压器的磁压缩电路的脉冲电源提供电脉冲,其具有足够的能量和电势,足以以超过5瓦的速率在中间焦点处产生EUV光。 在由申请人带内设计的优选实施例中,中间焦点处的EUV光能量可以45瓦可扩展到105.8瓦特。
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公开(公告)号:US07368741B2
公开(公告)日:2008-05-06
申请号:US11107535
申请日:2005-04-14
申请人: Stephan T. Melnychuk , William N. Partlo , Igor V. Fomenkov , I. Roger Oliver , Richard M. Ness , Norbert R. Bowering , Oleh Khodykin , Curtis L. Rettig , Gerry M. Blumenstock , Timothy S. Dyer , Rodney D. Simmons , Jerzy R. Hoffman , R. Mark Johnson
发明人: Stephan T. Melnychuk , William N. Partlo , Igor V. Fomenkov , I. Roger Oliver , Richard M. Ness , Norbert R. Bowering , Oleh Khodykin , Curtis L. Rettig , Gerry M. Blumenstock , Timothy S. Dyer , Rodney D. Simmons , Jerzy R. Hoffman , R. Mark Johnson
IPC分类号: H01J35/20
CPC分类号: H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70166 , G03F7/70175 , G03F7/70916 , H01S3/005 , H05G2/005 , H05G2/008 , H05H1/06
摘要: The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
摘要翻译: 本发明提供了一种可靠,高重复率的生产线兼容高能光子源。 在真空室中产生含有活性物质的非常热的等离子体。 活性物质是具有期望的极紫外(EUV)范围内的发射线的原子元素。 包括充电电容器和包括脉冲变压器的磁压缩电路的脉冲电源提供电脉冲,其具有足够的能量和电势,足以以超过5瓦的速率在中间焦点处产生EUV光。 在由申请人带内设计的优选实施例中,中间焦点处的EUV光能量可以45瓦可扩展到105.8瓦特。
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公开(公告)号:US07366219B2
公开(公告)日:2008-04-29
申请号:US11000684
申请日:2004-11-30
申请人: J. Martin Algots , Robert A. Bergstedt , Walter D. Gillespie , Vladimir A. Kulgeyko , William N. Partlo , German E. Rylov , Richard L. Sandstrom , Brian Strate , Timothy S. Dyer
发明人: J. Martin Algots , Robert A. Bergstedt , Walter D. Gillespie , Vladimir A. Kulgeyko , William N. Partlo , German E. Rylov , Richard L. Sandstrom , Brian Strate , Timothy S. Dyer
IPC分类号: H01S3/22
CPC分类号: H01S3/1055 , G03F7/70025 , G03F7/70041 , H01S3/005 , H01S3/036 , H01S3/08 , H01S3/08004 , H01S3/08059 , H01S3/097 , H01S3/106 , H01S3/2251
摘要: A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic; a second tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse by changing the position of the dispersive center wavelength selection optic relative to the nominal optical path of the line narrowing module; wherein the second tuning mechanism coarsely selects a value for the center wavelength and the first tuning mechanism more finely selects the value for the center wavelength. The apparatus and method may further comprise at least one beam expanding and redirecting prism in the optical path of the line narrowing module; the first tuning mechanism selecting an angle of incidence of the at least a first spatially defined portion of the laser light pulse beam by changing the position of the at least one beam expanding prism relative to the nominal optical path of the line narrowing module. The first and second tuning mechanisms may be controlled by a center wavelength controller during a burst based upon feedback from a center wavelength detector detecting the center wavelength of at least one other pulse in the burst of pulses and the controller providing the feedback based upon an algorithm employing the detected center wavelength for the at least one other pulse in the burst. The first tuning mechanism may comprise an electro-mechanical course positioning mechanism and a fine positioning mechanism comprising an actuatable material that changes position or shape when actuated.
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