公开(公告)号：US20100107870A1

公开(公告)日：2010-05-06

申请号：US12261737

申请日：2008-10-30

Applicant: Richard Morton ,  Yoshiho Amada

Inventor： Richard Morton ,  Yoshiho Amada

IPC: B03C3/06 ,  B23P11/00 ,  B01D46/00

CPC classification number: B03C3/49 ,  B03C3/06 ,  B03C3/155 ,  B03C2201/04 ,  H01S3/0343 ,  H01S3/036 ,  H01S3/041 ,  H01S3/073 ,  H01S3/09713 ,  H01S3/225 ,  Y10S55/05 ,  Y10S55/38 ,  Y10S264/48 ,  Y10T29/49826

Abstract: A method for making a metal fluoride trap comprising: assembling a precipitation tube assembly including a plurality of precipitation tubes supported between a first tube end support and a second tube end support; assembling a precipitation tube, flowsheet and filter media assembly including: wrapping a flowsheet around at least one full circumference of the plurality of precipitation tubes, wherein the flowsheet has a width less than a length of the plurality of precipitation tubes between the first tube end support and the second tube end support; and wrapping a filter media around the wrapped flowsheet, wherein the filter media and the flowsheet are wrapped so as to have a diameter less than an inner diameter of an outer casing of the metal fluoride trap; inserting the precipitation tube, flowsheet and filter media assembly into the outer casing of the metal fluoride trap; allowing the flowsheet to expand; and pressing the filter media between the flowsheet and an inner surface of the outer casing of the metal fluoride trap. A method of filtering gas in metal fluoride trap is also disclosed. A metal fluoride trap apparatus is also disclosed.

Abstract translation: 一种制造金属氟化物阱的方法，包括：组装沉淀管组件，其包括支撑在第一管端支撑件和第二管端支撑件之间的多个沉淀管; 组装沉淀管，流程图和过滤介质组件，包括：围绕所述多个沉淀管的至少一个整周包裹流程图，其中所述流程的宽度小于所述多个沉淀管在所述第一管端支撑件 和第二管端支撑件; 以及围绕所述包裹的流动片包裹过滤介质，其中所述过滤介质和所述流动片被包裹以具有小于所述金属氟化物阱的外壳的内径的直径; 将沉淀管，流程图和过滤介质组件插入金属氟化物阱的外壳中; 允许流程图扩展; 并且在流动板和金属氟化物阱的外壳的内表面之间按压过滤介质。 还公开了一种在金属氟​​化物阱中过滤气体的方法。 还公开了一种金属氟化物捕集装置。

公开(公告)号：US07522650B2

公开(公告)日：2009-04-21

申请号：US10815387

申请日：2004-03-31

Applicant: William N. Partlo ,  Yoshiho Amada ,  James A. Carmichael ,  Timothy S. Dyer ,  Walter D. Gillespie ,  Bryan G. Moosman ,  Richard G. Morton ,  Curtis L. Rettig ,  Brian D. Strate ,  Thomas D. Steiger ,  Fedor Trintchouk ,  Richard C. Ujazdowski

Inventor： William N. Partlo ,  Yoshiho Amada ,  James A. Carmichael ,  Timothy S. Dyer ,  Walter D. Gillespie ,  Bryan G. Moosman ,  Richard G. Morton ,  Curtis L. Rettig ,  Brian D. Strate ,  Thomas D. Steiger ,  Fedor Trintchouk ,  Richard C. Ujazdowski

IPC: H01S3/22

CPC classification number: H01S3/036 ,  H01S3/0384 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225

Abstract: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

公开(公告)号：US20080310960A1

公开(公告)日：2008-12-18

申请号：US11818829

申请日：2007-06-15

Applicant: Yoshiho Amada ,  Thomas D. Steiger ,  Richard C. Ujazdowski

Inventor： Yoshiho Amada ,  Thomas D. Steiger ,  Richard C. Ujazdowski

IPC: F01D5/14

CPC classification number: F04D29/283 ,  F04D17/04 ,  F04D29/666 ,  H01S3/036 ,  H01S3/09713

Abstract: A cross-flow fan impeller for circulating gas in a transversely excited, pulsed, gas discharge laser is disclosed and may comprise a plurality of hubs, the hubs spaced apart along the impeller's rotation axis and establishing at least two impeller segments wherein a first segment has an output flow within 80-120% of a second segment and the first and second segment having differing blade pass frequencies. In some embodiments of this aspect, the first segment may have n number of blades the second segment m number of blades, and m≢n. In one embodiment, the impeller may be configured with n=29 and m=23 and in another embodiment, the impeller may be configured with n=23 and m=19. The impeller may be configured wherein n and m are prime numbers.

Abstract translation: 公开了一种用于在横向激发的脉冲式气体放电激光器中循环气体的横流风扇叶轮，并且可以包括多个毂，所述轮毂沿着叶轮的旋转轴线间隔开并且建立至少两个叶轮段，其中第一段具有 输出流在第二段的80-120％之内，第一和第二段具有不同的叶片通过频率。 在该方面的一些实施例中，第一段可以具有n个叶片，第二段m个叶片，并且mnn。 在一个实施例中，叶轮可以配置为n = 29和m = 23，在另一个实施例中，叶轮可以配置为n = 23和m = 19。 可以配置叶轮，其中n和m是素数。

公开(公告)号：US5535233A

公开(公告)日：1996-07-09

申请号：US131530

申请日：1993-10-04

Applicant: Hakaru Mizoguchi ,  Yoshiho Amada ,  Noritoshi Ito

Inventor： Hakaru Mizoguchi ,  Yoshiho Amada ,  Noritoshi Ito

IPC: H01S3/03 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/097

CPC classification number: H01S3/038 ,  H01S3/03 ,  H01S3/0385 ,  H01S3/0971

Abstract: A laser device is capable reducing fluctuation of the beam width of the output laser beam due to abrasion of its discharge electrodes. A part of the contour shape of a section perpendicular to the longitudinal axis of the chamber of the laser device in at least one of the electrodes, which part confronts the other one of the electrodes, has a shape of a circular arc having a predetermined radius. The width of at least one of the two electrode may be substantially equal to the width of electric discharge taken place between the electrodes. Further, a conductor member may be disposed on each side of the electrode along its longitudinal axis to reduce electric field strength therearound.

Abstract translation: 激光装置由于其放电电极的磨损而能够减少输出激光束的光束宽度的波动。 在至少一个电极中的与激光装置的腔室的纵向轴线垂直的部分的轮廓形状的一部分，其部分面对另一个电极，具有具有预定半径的圆弧形状 。 两个电极中的至少一个的宽度可以基本上等于在电极之间发生的放电的宽度。 此外，导体构件可以沿着其纵向轴线设置在电极的每一侧上以降低其周围的电场强度。

公开(公告)号：US20070071058A1

公开(公告)日：2007-03-29

申请号：US11241850

申请日：2005-09-29

Applicant: Yoshiho Amada ,  James Carmichael ,  Richard Morton ,  Richard Ness

Inventor： Yoshiho Amada ,  James Carmichael ,  Richard Morton ,  Richard Ness

IPC: H01S3/22 ,  H01S3/03 ,  H01S3/097 ,  H01S3/223

CPC classification number: H01S3/03 ,  H01S3/0381 ,  H01S3/0388 ,  H01S3/225

Abstract: A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first electrode from ground; a second electrode electrically insulated from the source of high voltage and together with the first electrode forming an elongated discharge region between portions of the first and second electrodes respectively extending along a longitudinal axis of each of the first and second electrodes, defining electrode discharge receiving region end portions; a plurality of current return tines electrically connected to the second electrode and to ground, the tines distributed along the longitudinal extent of the elongated discharge region; a second insulating mechanism electrically isolating the second electrode from ground except through the plurality of current return tines.

Abstract translation: 公开了一种可以包括氟气放电激光器系统和电极支撑系统的装置和方法，该系统可以包括电连接到高电压源的第一电极; 将第一电极与地绝缘的第一绝缘机构; 与第一电极电绝缘的第二电极，与第一电极一起形成分别沿第一和第二电极的纵向轴线延伸的第一和第二电极的部分之间的细长放电区，限定电极放电接收区域 端部; 多个电流返回齿电连接到第二电极并接地，所述尖齿沿着细长放电区域的纵向延伸; 除了通过多个电流返回齿之外，第二绝缘机构将第二电极与地电隔离。

公开(公告)号：US6151350A

公开(公告)日：2000-11-21

申请号：US155184

申请日：1998-09-22

Applicant: Hiroshi Komori ,  Yoshiho Amada ,  Osamu Wakabayashi

Inventor： Hiroshi Komori ,  Yoshiho Amada ,  Osamu Wakabayashi

IPC: H01S3/041 ,  H01S3/036 ,  H01S3/134 ,  H01S3/22

CPC classification number: H01S3/036

Abstract: A gas laser outputs a prescribed high power from the start of laser oscillation immediately after the laser gas is changed. The laser, in which used laser gas in a laser chamber (1) is replaced with a fresh laser gas, is provided with: a gas leaving means, which leaves a prescribed amount of used gas for mixing with the fresh laser gas during laser gas replacement, or an impurity gas adding means which provides a prescribed amount of impurity gas for mixing with the fresh laser gas; and a controller (11). It is preferable that the concentration of the used gas after a replacement is within a range of 1.5-60%. The gas leaving means can be a gas discharge control mechanism (10), which controls the amount of used gas exhausted so that a prescribed amount of used gas can be left for mixing with the fresh gas, or a laser gas container (21), which can provide a prescribed amount of stored used gas for mixing with the fresh gas. The impurity gas adding means can be a laser gas cylinder containing a prescribed concentration of impurity gas or an impurity gas container (44).

Abstract translation: PCT No.PCT / JP97 / 00845 Sec。 371日期：1998年9月22日 102（e）1998年9月22日PCT 1997年3月17日PCT公布。 公开号WO97 / 36352 日期1997年10月2日气体激光器在激光气体变化后立即从激光振荡开始输出规定的高功率。 在激光室（1）中使用的激光气体被新鲜的激光气体代替的激光器设置有：气体离开装置，其在激光气体期间留下规定量的用于与新鲜激光气体混合的废气 替换或杂质气体添加装置，其提供规定量的用于与新鲜激光气体混合的杂质气体; 和控制器（11）。 更换后的废气浓度优选在1.5〜60％的范围内。 气体离开装置可以是气体排出控制机构（10），其控制排出的废气量使得可以留出规定量的废气与新鲜气体混合，或者激光气体容器（21）， 其可以提供规定量的用于与新鲜气体混合的用过的二氧化碳。 杂质气体添加装置可以是含有规定浓度的杂质气体或杂质气体容器（44）的激光气瓶。

公开(公告)号：US08814522B2

公开(公告)日：2014-08-26

申请号：US11818829

申请日：2007-06-15

Applicant: Yoshiho Amada ,  Thomas D. Steiger ,  Richard C. Ujazdowski

Inventor： Yoshiho Amada ,  Thomas D. Steiger ,  Richard C. Ujazdowski

IPC: H01S3/22

CPC classification number: F04D29/283 ,  F04D17/04 ,  F04D29/666 ,  H01S3/036 ,  H01S3/09713

Abstract: A cross-flow fan impeller for circulating gas in a transversely excited, pulsed, gas discharge laser is disclosed and may comprise a plurality of hubs, the hubs spaced apart along the impeller's rotation axis and establishing at least two impeller segments wherein a first segment has an output flow within 80-120% of a second segment and the first and second segment having differing blade pass frequencies. In some embodiments of this aspect, the first segment may have n number of blades the second segment m number of blades, and m≠n. In one embodiment, the impeller may be configured with n=29 and m=23 and in another embodiment, the impeller may be configured with n=23 and m=19. The impeller may be configured wherein n and m are prime numbers.

Abstract translation: 公开了一种用于在横向激发的脉冲式气体放电激光器中循环气体的横流风扇叶轮，并且可以包括多个毂，所述轮毂沿着叶轮的旋转轴线间隔开并且建立至少两个叶轮段，其中第一段具有 输出流在第二段的80-120％之内，第一和第二段具有不同的叶片通过频率。 在该方面的一些实施例中，第一段可以具有n个叶片，第二段m个叶片，m≠n。 在一个实施例中，叶轮可以配置为n = 29和m = 23，在另一个实施例中，叶轮可以配置为n = 23和m = 19。 可以配置叶轮，其中n和m是素数。

公开(公告)号：US5463650A

公开(公告)日：1995-10-31

申请号：US365323

申请日：1994-12-28

Applicant: Noritoshi Ito ,  Yoshiho Amada ,  Osamu Wakabayashi

Inventor： Noritoshi Ito ,  Yoshiho Amada ,  Osamu Wakabayashi

IPC: G03F7/20 ,  H01S3/134 ,  H01S3/225 ,  H01S3/22

CPC classification number: H01S3/134 ,  H01S3/225

Abstract: An apparatus used for elimination of the influence of spiking in an excimer laser device. The values of predetermined parameters which contribute to the spiking such as oscillation suspension time in a successive pulse oscillation are obtained. Discharge voltage for each of the successive laser beam pulses is changed on the basis of the obtained parameter values such that subsequent successive laser beam pulses have the same energy. The discharge voltage is stored according to time elapsed after the start of the successive pulse oscillation, and discharge voltage is controlled such that stored discharge voltage corresponds to the measured elapsed time. During the time when a stepper is not performing processing using the laser beam, the laser beam pulse is oscillated under predetermined conditions and the energy of the resulting pulses is detected. The stored discharge voltage is corrected on the basis of the detected magnitude of the pulse energy, a desired magnitude of the pulse energy and the predetermined conditions. The discharge voltage is controlled such that the corrected discharge voltage is obtained during the time when the stepper performs the processing using the laser beam.

Abstract translation: 用于消除在准分子激光装置中尖峰的影响的装置。 获得有助于尖峰的预定参数的值，例如连续脉冲振荡中的振荡停止时间。 基于获得的参数值改变每个连续激光束脉冲的放电电压，使得后续的连续的激光束脉冲具有相同的能量。 放电电压根据连续脉冲振荡开始后经过的时间进行存储，并且控制放电电压，使得存储的放电电压对应于测量的经过时间。 在步进器不使用激光束进行处理的时间期间，激光束脉冲在预定条件下振荡，并且检测所得到的脉冲的能量。 基于检测到的脉冲能量的大小，脉冲能量的期望幅度和预定条件来校正存储的放电电压。 控制放电电压，使得在步进器使用激光束进行处理的时间期间获得校正的放电电压。

公开(公告)号：US4975919A

公开(公告)日：1990-12-04

申请号：US296120

申请日：1988-11-17

Applicant: Yoshiho Amada ,  Osamu Wakabayashi ,  Masahiko Kowaka

Inventor： Yoshiho Amada ,  Osamu Wakabayashi ,  Masahiko Kowaka

IPC: H01L21/30 ,  H01L21/027 ,  H01S3/106 ,  H01S3/137 ,  H01S3/225

CPC classification number: H01S3/137 ,  H01S3/225

Abstract: According to present invention, the central wavelength of the central wave of the output laser beam, and the sideband wave power or central wave power of the output laser beam are detected, and the wavelength selective characteristics of wavelength selective elements disposed between a laser chamber and a rear mirror are controlled such that the detected central wavelength falls within a desired allowable range and that the detected power becomes minimum or maximum.

Abstract translation: PCT No.PCT / JP88 / 00293 Sec。 371日期：1988年11月17日 102（e）日期1988年11月17日PCT提交1988年3月18日PCT公布。 出版物WO88 / 07276 日期为1988年9月22日。根据本发明，检测输出激光束的中心波的中心波长，输出激光束的边带波功率或中心波功率，波长选择性波长选择特性 控制设置在激光室和后反射镜之间的元件，使得所检测的中心波长落在所需的容许范围内，并且检测的功率变为最小或最大。

公开(公告)号：US07819945B2

公开(公告)日：2010-10-26

申请号：US12261737

申请日：2008-10-30

Applicant: Richard Morton ,  Yoshiho Amada

Inventor： Richard Morton ,  Yoshiho Amada

IPC: B03C3/36

CPC classification number: B03C3/49 ,  B03C3/06 ,  B03C3/155 ,  B03C2201/04 ,  H01S3/0343 ,  H01S3/036 ,  H01S3/041 ,  H01S3/073 ,  H01S3/09713 ,  H01S3/225 ,  Y10S55/05 ,  Y10S55/38 ,  Y10S264/48 ,  Y10T29/49826

Abstract: A method for making a metal fluoride trap including: assembling a precipitation tube assembly including a plurality of precipitation tubes supported between a first tube end support and a second tube end support; assembling a precipitation tube, flowsheet and filter media assembly including: wrapping a flowsheet around at least one full circumference of the plurality of precipitation tubes, wherein the flowsheet has a width less than a length of the plurality of precipitation tubes between the first tube end support and the second tube end support; and wrapping a filter media around the wrapped flowsheet, wherein the filter media and the flowsheet are wrapped so as to have a diameter less than an inner diameter of an outer casing of the metal fluoride trap; inserting the precipitation tube, flowsheet and filter media assembly into the outer casing of the metal fluoride trap; allowing the flowsheet to expand; and pressing the filter media between the flowsheet and an inner surface of the outer casing of the metal fluoride trap. A method of filtering gas in a metal fluoride trap is also disclosed. A metal fluoride trap apparatus is also disclosed.

Abstract translation: 一种制造金属氟化物阱的方法，包括：组装沉淀管组件，其包括支撑在第一管端支撑件和第二管端支撑件之间的多个沉淀管; 组装沉淀管，流程图和过滤介质组件，包括：围绕所述多个沉淀管的至少一个整周包裹流程图，其中所述流程的宽度小于所述多个沉淀管在所述第一管端支撑件 和第二管端支撑件; 以及围绕所述包裹的流动片包裹过滤介质，其中所述过滤介质和所述流动片被包裹以具有小于所述金属氟化物阱的外壳的内径的直径; 将沉淀管，流程图和过滤介质组件插入金属氟化物阱的外壳中; 允许流程图扩展; 并且在流动板和金属氟化物阱的外壳的内表面之间按压过滤介质。 还公开了一种在金属氟​​化物阱中过滤气体的方法。 还公开了一种金属氟化物捕集装置。