公开(公告)号：US06521901B1

公开(公告)日：2003-02-18

申请号：US09451683

申请日：1999-11-30

Applicant: Bassam Shamoun ,  David Trost

Inventor： Bassam Shamoun ,  David Trost

IPC: G01B1126

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  G03F1/00 ,  H01J37/3174 ,  H01J2237/31794

Abstract: The present invention relates generally to methods, apparatuses and materials to reduce or minimize the heating of a substrate (and associated distortions of the photomask) caused by electron-beam energy deposited in the substrate during patterning. The present invention provides useful materials and methods for reducing such reflection or re-radiation effects, leading to temperature stability of the substrate, reduced thermal distortion and the possibility of increased patterning accuracy. The infrared absorbing materials of the present invention also possess sufficient electrical conductivity to dissipate scattered electrons residing on the material, and sufficient thermal conductivity to dissipate heat rapidly and not result in local heating or significant temperature rise of the absorber.

Abstract translation: 本发明一般涉及减少或最小化在图案化期间由衬底中沉积的电子束能量引起的衬底加热（和光掩模的相关变形）的方法，装置和材料。 本发明提供用于减少这种反射或再辐射效应的有用的材料和方法，导致衬底的温度稳定性，降低的热变形和增加图案精度的可能性。 本发明的红外线吸收材料还具有足够的电导率以消散驻留在材料上的散射电子，并且具有足够的导热性以快速散发热量，并且不会导致吸收体的局部加热或显着的温度升高。

公开(公告)号：US06424879B1

公开(公告)日：2002-07-23

申请号：US09291167

申请日：1999-04-13

Applicant: Francis C. Chilese ,  Bassam Shamoun ,  David Trost

Inventor： Francis C. Chilese ,  Bassam Shamoun ,  David Trost

IPC: G06F1900

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/30455 ,  H01J2237/30461

Abstract: An electron beam writing system includes an electron beam patterning machine operable to emit an electron beam to form a pattern on a substrate. A computer control system, coupled to the electron beam patterning machine, has a plurality of pre-computed distortion maps. Each distortion map describes expected distortions of the substrate caused by bulk heating resulting from exposure to the electron beam. The computer control system controls the electron beam patterning machine using the distortion maps in order to adjust for the expected distortions.

Abstract translation: 电子束写入系统包括可操作以发射电子束以在衬底上形成图案的电子束图案形成机。 耦合到电子束图案机的计算机控制系统具有多个预先计算的失真图。 每个失真图描述了由于暴露于电子束而产生的体积加热引起的基板的预期失真。 计算机控制系统使用失真图来控制电子束图形机，以便对预期的失真进行调整。

公开(公告)号：US06328733B1

公开(公告)日：2001-12-11

申请号：US09354927

申请日：1999-07-15

Applicant: David Trost

Inventor： David Trost

IPC: A61B1818

CPC classification number: A61B18/203 ,  A61B18/201 ,  A61B2017/00747 ,  A61B2017/00973 ,  A61B2018/00452 ,  A61B2018/20359 ,  A61B2218/008 ,  A61F2/10

Abstract: A surgical laser scanner having optics that scans a pulsed laser beam onto a target tissue is disclosed. The laser scanner has a lens and a scanning mirror or mirrors located upstream of the lens at a distance substantially equal to the focal length of the lens. The laser beam hits the scanning mirror and is reflected onto the lens in a pattern defined by sequential positions of the scanning mirror. The laser beam is projected onto the target tissue by the lens in a direction parallel to the optical axis of the lens. The projected pattern has a constant size regardless of the distance between the laser scanner and the target tissue.

Abstract translation: 公开了具有将脉冲激光束扫描到目标组织上的光学器件的外科激光扫描仪。 激光扫描仪具有位于透镜上游的透镜和扫描镜或反射镜，其距离基本上等于透镜的焦距。 激光束照射扫描镜并以由扫描镜的顺序位置限定的图案反射到透镜上。 激光束通过透镜在平行于透镜的光轴的方向上投影到目标组织上。 无论激光扫描仪和目标组织之间的距离如何，投影图案都具有恒定的尺寸。

公开(公告)号：US5957915A

公开(公告)日：1999-09-28

申请号：US898719

申请日：1997-07-22

Applicant: David Trost

Inventor： David Trost

IPC: A61B17/00 ,  A61B18/00 ,  A61B18/20 ,  A61F2/10 ,  A61B17/36

CPC classification number: A61B18/203 ,  A61B18/201 ,  A61B2017/00747 ,  A61B2017/00973 ,  A61B2018/00452 ,  A61B2018/2095 ,  A61B2218/008 ,  A61F2/10

Abstract: A surgical laser scanner having optics that scans a pulsed laser beam onto a target tissue is disclosed. The laser scanner has a lens and a scanning mirror or mirrors located upstream of the lens at a distance substantially equal to the focal length of the lens. The laser beam hits the scanning mirror and is reflected onto the lens in a pattern defined by sequential positions of the scanning mirror. The laser beam is projected onto the target tissue by the lens in a direction parallel to the optical axis of the lens. The projected pattern has a constant size regardless of the distance between the laser scanner and the target tissue.

Abstract translation: 公开了具有将脉冲激光束扫描到目标组织上的光学器件的外科激光扫描仪。 激光扫描仪具有位于透镜上游的透镜和扫描镜或反射镜，其距离基本上等于透镜的焦距。 激光束照射扫描镜并以由扫描镜的顺序位置限定的图案反射到透镜上。 激光束通过透镜在平行于透镜的光轴的方向上投影到目标组织上。 无论激光扫描仪和目标组织之间的距离如何，投影图案都具有恒定的尺寸。

公开(公告)号：US5743902A

公开(公告)日：1998-04-28

申请号：US377131

申请日：1995-01-23

Applicant: David Trost

Inventor： David Trost

IPC: A61B17/00 ,  A61B18/00 ,  A61B18/20 ,  A61F2/10 ,  A61B17/36

CPC classification number: A61B18/203 ,  A61B18/201 ,  A61B2017/00747 ,  A61B2017/00973 ,  A61B2018/00452 ,  A61B2018/2095 ,  A61B2218/008 ,  A61F2/10

Abstract: A surgical laser scanner having optics that scans a pulsed laser beam onto a target tissue is disclosed. The laser scanner has a lens and a scanning mirror or mirrors located upstream of the lens at a distance substantially equal to the focal length of the lens. The laser beam hits the scanning mirror and is reflected onto the lens in a pattern defined by sequential positions of the scanning mirror. The laser beam is projected onto the target tissue by the lens in a direction parallel to the optical axis of the lens. The projected pattern has a constant size regardless of the distance between the laser scanner and the target tissue.

公开(公告)号：US5659563A

公开(公告)日：1997-08-19

申请号：US331359

申请日：1994-10-27

Applicant: Edward D. Reed ,  David Trost

Inventor： Edward D. Reed ,  David Trost

IPC: G02B6/42 ,  H01S3/04 ,  H01S3/042 ,  H01S3/0915 ,  H01S3/092 ,  H01S3/23 ,  H01S3/08

CPC classification number: G02B6/4296 ,  H01S3/042 ,  H01S3/092 ,  H01S3/2383 ,  H01S3/005 ,  H01S3/025 ,  H01S3/0407 ,  H01S3/0931 ,  H01S3/10046 ,  H01S3/10053 ,  H01S3/1022 ,  Y10S165/303 ,  Y10S165/314

Abstract: A pulsed solid state laser system is disclosed which utilizes a plurality of individual laser rods which are sequentially pumped and whose beans are combined into a single interleaved output bean. The individual laser rods are pumped at an average power level which is below that for maximum output power from each rod, thereby obviating the need for refrigeration cooling. A compact optical system is disclosed which permits a constant beam size even at different pump levels and other advantages. A compact cooling system is also disclosed.

Abstract translation: 公开了一种脉冲固态激光系统，其利用了顺序泵浦的多个单独的激光棒，并将其组合成单个交错输出豆。 单个激光棒的平均功率水平被泵浦，该功率水平低于来自每个杆的最大输出功率的激光棒，从而避免了对制冷冷却的需要。 公开了一种紧凑的光学系统，即使在不同的泵水平和其他优点下也允许恒定的光束尺寸。 还公开了紧凑的冷却系统。

公开(公告)号：US5625638A

公开(公告)日：1997-04-29

申请号：US327886

申请日：1994-10-24

Applicant: David Trost

Inventor： David Trost

IPC: G02B6/032 ,  H01S3/08

CPC classification number: G02B6/032

Abstract: A device is disclosed for delivering laser radiation to a target. The device includes an elongated, hollow, tubular member having an input end and a delivery end. A window is mounted near the delivery end of the device. The window provides a seal preventing smoke and debris from contaminating the interior of the device. In the preferred embodiment, the window is formed from a crystalline material, such as diamond, which has low absorption level for laser light and excellent thermal characteristics. In addition, the thickness of the window is selected to reduce reflection losses and increase the transmission level through the window without the need for fragile antireflection coatings.

Abstract translation: 公开了用于将激光辐射传送到目标的装置。 该装置包括具有输入端和输送端的细长的中空管状构件。 窗口安装在设备的输送端附近。 窗户提供防止烟雾和碎屑污染设备内部的密封。 在优选实施例中，窗口由诸如金刚石的结晶材料形成，其对于激光具有低吸收水平和优异的热特性。 此外，窗口的厚度被选择以减少反射损失并且通过窗口增加透射水平，而不需要易碎的抗反射涂层。

公开(公告)号：US5304174A

公开(公告)日：1994-04-19

申请号：US100722

申请日：1993-08-02

Applicant: Robert B. Estrada ,  David Trost

Inventor： Robert B. Estrada ,  David Trost

IPC: A01G25/16 ,  A61B19/00 ,  G05D22/02 ,  A61B17/36

CPC classification number: G05D22/02 ,  A01G25/165 ,  A01G25/167 ,  A61B2034/742 ,  Y10T137/189 ,  Y10T403/32614 ,  Y10T403/7047

Abstract: An improved apparatus for manually manipulating a surgical laser beam is disclosed. The preferred embodiment of the invention includes a mirror nominally positioned at a 45 degree angle to the incident laser beam, a joy stick for manipulating the mirror, and a linkage interconnecting the two. The mirror is mounted to allow it to rotate about two mutually perpendicular and intersecting axes. The linkage operates to direct the reflected laser beam in two orthogonal dimensions such that a ratio between the movement of the reflected beam in each dimension is equivalent to the ratio of the movement of the joy stick in each dimension. This yields a reflected laser beam that moves a distance proportional to the amount of motion input to the joy stick. The reduction or amplification ratio between the input motion and the reflected laser beam motion remains constant, regardless of the direction of motion. In this manner, by moving the joy stick in a circular motion, the reflected laser beam also moves in a circular motion, rather than in an elliptical motion. A simplified joint that allows spherical rotation and axial translation between its two members is also disclosed. In the preferred embodiment, an adjustable hand rest is provided that moves out of the way when not in use.

Abstract translation: 公开了一种用于手动操作外科激光束的改进的装置。 本发明的优选实施例包括一个与入射激光束成45度角的镜子，用于操纵反射镜的操纵杆以及将两者相互连接的连杆。 镜子被安装成允许其围绕两个相互垂直和相交的轴线旋转。 联动操作以将反射的激光束引导成两个正交的尺寸，使得反射光束在每个维度上的运动之间的比率等于每个维度中的操纵杆的移动比。 这产生一个反射激光束，该反射激光束与输入到操纵杆的运动量成正比的距离。 输入运动与反射激光束运动之间的减小或放大比率保持恒定，而与运动方向无关。 以这种方式，通过以圆周运动来移动操纵杆，反射的激光束也以圆周运动而不是椭圆运动而移动。 还公开了允许其两个构件之间的球面旋转和轴向平移的简化接头。 在优选实施例中，提供了可调节的扶手，其在不使用时移动。

公开(公告)号：US5296961A

公开(公告)日：1994-03-22

申请号：US690068

申请日：1991-04-23

Applicant: David Trost ,  Philip Baumeister ,  Dennis Fischer

Inventor： David Trost ,  Philip Baumeister ,  Dennis Fischer

IPC: G02B5/26 ,  G02B5/28 ,  G02B21/32

CPC classification number: G02B5/282

Abstract: A dichroic optical filter including a substrate that is substantially transparent to visible radiation, and an oxide semiconductor layer on the substrate for reflecting an infrared wavelength (such as an infrared treatment beam wavelength). An example of a suitable oxide semiconductor for reflecting a treatment beam from a CO.sub.2 layer is indium tin oxide. Preferably, the filter includes a specially designed multilayer coating on the oxide semiconductor layer to enhance the reflection of infrared and longer wavelength radiation. This multilayer coating includes alternating quarter-wave layers of high and low refractive index materials, each having an optical thickness substantially equal to a quarter-wavelength of infrared radiation to be reflected. Preferably also, the multilayer coating includes a thin multilayer coating between each pair of adjacent quarter-wave layers, with these thin multilayer coatings being designed to enhance the filter's transmission of visible radiation, while not significantly affecting the filter's reflection of infrared wavelengths. Also preferably, the multilayer coating includes a second multilayer coating which reflects a narrow band of visible radiation (such as visible radiation from a HeNe laser aiming beam), while transmitting most visible wavelengths.