公开(公告)号：US09348226B2

公开(公告)日：2016-05-24

申请号：US10541032

申请日：2003-12-24

申请人： Isao Nishimura ,  Kouichi Fujiwara ,  Eiichi Kobayashi ,  Tsutomu Shimokawa ,  Atsushi Nakamura ,  Eiji Yoneda ,  Yong Wang

发明人： Isao Nishimura ,  Kouichi Fujiwara ,  Eiichi Kobayashi ,  Tsutomu Shimokawa ,  Atsushi Nakamura ,  Eiji Yoneda ,  Yong Wang

IPC分类号： G03F7/039 ,  G03F7/004 ,  G03F7/20

CPC分类号： G03F7/039 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/2006

摘要： A radiation-sensitive resin composition comprising an acid-labile group-containing resin obtained by living radical polymerization having a specific structure which is insoluble or scarcely soluble in alkali, but becomes alkali soluble by the action of an acid, and a photoacid generator, wherein the ratio of weight average molecular weight to number average molecular weight (weight average molecular weight/number average molecular weight) of the acid-labile group-containing resin is smaller than 1.5.

公开(公告)号：US20100324329A1

公开(公告)日：2010-12-23

申请号：US12873265

申请日：2010-08-31

申请人： Tomoki Nagai ,  Eiji Yoneda ,  Takuma Ebata ,  Takanori Kawakami ,  Makoto Sugiura ,  Tsutomu Shimokawa ,  Makoto Shimizu

发明人： Tomoki Nagai ,  Eiji Yoneda ,  Takuma Ebata ,  Takanori Kawakami ,  Makoto Sugiura ,  Tsutomu Shimokawa ,  Makoto Shimizu

IPC分类号： C07C309/04

CPC分类号： C09D133/14 ,  C07C309/10 ,  C07C309/12 ,  C07C309/19 ,  C07C309/20 ,  C07C381/12 ,  C07D209/76 ,  C08F20/38 ,  C08F28/00 ,  C08F28/02 ,  C08F214/18 ,  C08F220/12 ,  C08F220/18 ,  C08F220/24 ,  C08F220/28 ,  C08F228/02 ,  C09D141/00 ,  G03F7/0045 ,  G03F7/0392 ,  G03F7/0397

摘要： A compound is shown by the following formula (5) in which at least one of Rf groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A′ represents a substituted or unsubstituted, linear or branched alkylene group having 1 to 20 carbon atoms, an alkylene group having at least one hetero atom, or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, Mm+ represents an onium cation, m represents a natural number of 1 to 3, and p represents a natural number of 1 to 8.

摘要翻译： 下式（5）表示化合物，其中Rf基中的至少一个表示氟原子或具有1-10个碳原子的直链或支链全氟烷基，A'表示取代或未取代的直链或支链亚烷基 具有1至20个碳原子，具有至少一个杂原子的亚烷基或单键，G表示具有氟原子或单键的二价有机基团，Mm +表示鎓阳离子，m表示1的自然数 至3，p表示1至8的自然数。

公开(公告)号：US20090069521A1

公开(公告)日：2009-03-12

申请号：US11914024

申请日：2006-05-11

申请人： Tomoki Nagai ,  Eiji Yoneda ,  Takuma Ebata ,  Takanori Kawakami ,  Makoto Sugiura ,  Tsutomu Shimokawa ,  Makoto Shimizu

发明人： Tomoki Nagai ,  Eiji Yoneda ,  Takuma Ebata ,  Takanori Kawakami ,  Makoto Sugiura ,  Tsutomu Shimokawa ,  Makoto Shimizu

IPC分类号： C08F214/18 ,  C07C317/02 ,  C07C69/52 ,  C07D209/56 ,  C08F228/02

CPC分类号： C09D133/14 ,  C07C309/10 ,  C07C309/12 ,  C07C309/19 ,  C07C309/20 ,  C07C381/12 ,  C07D209/76 ,  C08F20/38 ,  C08F28/00 ,  C08F28/02 ,  C08F214/18 ,  C08F220/12 ,  C08F220/18 ,  C08F220/24 ,  C08F220/28 ,  C08F228/02 ,  C09D141/00 ,  G03F7/0045 ,  G03F7/0392 ,  G03F7/0397

摘要： A radiation-sensitive resin composition is provided which has high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, and pattern shape, and, in particular, a high resolution radiation-sensitive resin composition providing a wide DOF and excelling in LER. Also provided are a polymer which can be used in the composition and a novel compound useful for synthesizing the polymer. The novel compound is shown by the following formula (2), wherein R4 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, at least one of the Rfs represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, Mm+ represents a metal ion or an onium cation, m represents an integer of 1 to 3, and p is an integer of 1 to 8.

摘要翻译： 提供了对辐射具有高透明度的辐射敏感性树脂组合物，作为抗敏剂，例如灵敏度，分辨率和图案形状，具有优异的基本性能，特别是提供宽DOF和高分辨率辐射敏感性树脂组合物 优秀的LER。 还提供了可用于组合物中的聚合物和用于合成聚合物的新型化合物。 该新化合物由下式（2）表示，其中R4表示甲基，三氟甲基或氢原子，Rfs中的至少一个表示氟原子或具有1至10个的直链或支链全氟烷基 碳原子，A表示二价有机基团或单键，G表示具有氟原子或单键的二价有机基团，Mm +表示金属离子或鎓阳离子，m表示1〜3的整数，p表示 是1〜8的整数。

公开(公告)号：US6103996A

公开(公告)日：2000-08-15

申请号：US283869

申请日：1999-04-01

申请人： Eiji Yoneda ,  Mitsuteru Sugano

发明人： Eiji Yoneda ,  Mitsuteru Sugano

IPC分类号： G21C21/02 ,  B23K9/028 ,  B23K9/167

CPC分类号： B23K9/0286 ,  B23K2201/06

摘要： A method for manufacturing a fuel rod of the present invention includes a welding step of welding a cladding tube of said fuel rod to a plug by arc discharge; and a post welding step of subsequently discharging an arc to a welded portion by a predetermined arc current lower than that of the welding step. In the welding step and in the post welding step, the cladding tube and the plug are rotated with respect to an electrode for discharging the arc. The rotation speed of the cladding tube and the plug in the post welding step is higher than that in the welding step.

摘要翻译： 本发明的燃料棒的制造方法包括：通过电弧放电将所述燃料棒的包覆管焊接到塞子上的焊接工序; 以及后焊接步骤，其随后以比焊接步骤低的预定电弧电流将电弧放电到焊接部分。 在焊接步骤和后焊步骤中，包层管和插塞相对于用于排出电弧的电极旋转。 后焊接工序中的包层管和插塞的转速高于焊接工序。