摘要:
Disclosed is a technique for reducing the leak current by reducing contamination of metal composing a polymetal gate of a MISFET. Of a polycrystalline silicon film, a WN film, a W film, and a cap insulating film formed on a gate insulating film on a p-type well (semiconductor substrate), the cap insulating film, the W film, and the WN film are etched and the over-etching of the polycrystalline silicon film below them is performed. Then, a sidewall film is formed on sidewalls of these films. Thereafter, after etching the polycrystalline silicon film with using the sidewall film as a mask, a thermal treatment is performed in an oxidation atmosphere, by which a light oxide film is formed on the sidewall of the polycrystalline silicon film. As a result, the contamination on the gate insulating film due to the W and the W oxide can be reduced, and also, the diffusion of these materials into the semiconductor substrate (p-type well) and the resultant increase of the leak current can be prevented.
摘要:
A refresh characteristic of a DRAM memory cell is improved and the performance of a MISFET formed in the periphery thereof and constituting a logic circuit is improved. Each gate electrode in a memory cell area is formed of p type polycrystalline silicon, and a cap insulating film on each gate electrode and a sidewall film on the sidewall thereof are formed of a silicon oxide film. A polycrystalline silicon film formed on the gate electrodes and between the gate electrodes is polished by a CMP method, and thereby contact electrodes are formed. Also, sidewall films each composed of a laminated film of the silicon oxide film and the polycrystalline silicon film are formed on the sidewall of the gate electrodes in the logic circuit area, and these films are used as a mask to form semiconductor areas. As a result, it is possible to reduce the boron penetration and form contact electrodes in a self-alignment manner. In addition, the performance of the MISFET constituting the logic circuit can be improved.
摘要:
Disclosed is a technique for reducing the leak current by reducing contamination of metal composing a polymetal gate of a MISFET: Of a polycrystalline silicon film, a WN film, a W film, and a cap insulating film formed on a gate insulating film on a p-type well (semiconductor substrate), the cap insulating film, the W film, and the WN film are etched and the over-etching of the polycrystalline silicon film below them is performed. Then, a sidewall film is formed on sidewalls of these films. Thereafter, after etching the polycrystalline silicon film with using the sidewall film as a mask, a thermal treatment is performed in an oxidation atmosphere, by which a light oxide film is formed on the sidewall of the polycrystalline silicon film. As a result, the contamination on the gate insulating film due to the W and the W oxide can be reduced, and also, the diffusion of these materials into the semiconductor substrate (p-type well) and the resultant increase of the leak current can be prevented.
摘要:
A nickel metal-hydride cell having a paste type nickel positive electrode containing nickel hydroxide and a cobalt conducting aid selected from the group consisting of metal cobalt and cobalt compounds, a negative electrode which comprises a hydrogen absorbing alloy having a composition of the formula: MmNi5−x+yMx in which Mm is a rare earth element, M is a metal element, 0
摘要:
A cell comprising an electrode body having positive and negative electrodes which are spirally wound with interposing a separator therebetween and a cell case in which the electrode body is inserted, wherein a pair of the negative electrodes face respective surfaces of the positive electrode through the separator, and the negative electrodes are in contact with each other substantially in the second and subsequent turns, or wherein the negative electrode comprises a metal substrate and a pair of layers of electrode active material formed on both surfaces of the substrate, provided that the negative electrode which is present in at least one of the innermost and outermost turns of electrode body carries the layer of the electrode active material only on one side of the substrate, and each layer of the electrode active material of the negative electrode faces the positive electrode through the separator.
摘要:
A cell comprising a negative electrode made of metal lithium or a lithium alloy, a positive electrode which comprises polyaniline and has a main peak around 3.0 V versus a lithium electrode and a sub-peak around 3.6 V versus a lithium electrode with a height ratio of the sub-peak to the main peak being not smaller than 0.25 in a discharge capacity distribution curve in the discharge voltage range between 3.8 V and 2.5 V versus a lithium electrode, and a non-aqueous organic electrolytic solution containing a lithium salt dissolved therein, which has long discharge life, high energy density, good charge-discharge cycle characteristics and improve load characteristics.
摘要:
An optical data recording medium provided with a recording layer, the recording medium having excellent durability to light and heat, superior writing sensitivity and a high C/N value, wherein at least one a group of anion selected from a group of hexafluorophosphate ion (PF.sub.6 .sup.-), trifluoromethane sulfonate ion (CF.sub.3 SO.sub.3 .sup.-) or thiocyanate ion (SCN.sup.-) is present as the anion in an indol cyanine dye having a methyne chain present in the recording layer of the optical data recording medium.
摘要:
A photoelectric type displacement detecting apparatus, such as a digital display dial gauge micrometer, with an improved frequency response, comprising optical lattice means, light emitting means for irradiating the optical lattice means with a detecting light, light receiving means for receiving a transmission or reflective light from the optical lattice means, and a detection circuit for generating an output signal indicative of relative movement in the lattice. The frequency characteristic of a phototransistor adapted in the light receiving means depends on the input impedance of a base-grounded transistor to maintain the current supplied to the light emitting means constant and to improve the frequency response in the detection apparatus.
摘要:
A liquid fuel cell comprising a plurality of unit fuel cells each having a positive electrode (8) for reducing oxygen, a negative electrode (9) for oxidizing liquid fuel, and an electrolyte layer (10) interposed between the positive electrode (8) and the negative electrode (9), and a section (3) for storing liquid fuel (4), wherein power can be generated stably while reducing the size by arranging the plurality of unit fuel cells on the substantially same plane. Each electrolyte layer of the unit fuel cell preferably constitutes a continuous integrated electrolyte layer.
摘要:
A method for forming a semiconductor device includes, in order, consecutively depositing a gate insulating film and a silicon layer on a semiconductor substrate, implanting boron into the silicon layer, diffusing the boron by heat-treating the silicon layer, implanting phosphorous into the silicon layer, diffusing at least the phosphorous by heat-treating the silicon layer, and patterning the silicon layer by using a dry etching technique.