PRESSURE SENSOR WITH CALIBRATION FUNCTION AND CALIBRATION METHOD THEREOF

    公开(公告)号:US20220196505A1

    公开(公告)日:2022-06-23

    申请号:US17371102

    申请日:2021-07-09

    Abstract: A pressure sensor with calibration function includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing, the at least one calibration element changes the pressure applied to the medium.

    Vibration sensor with monitoring function and vibration signal monitoring method thereof

    公开(公告)号:US11193819B2

    公开(公告)日:2021-12-07

    申请号:US16516543

    申请日:2019-07-19

    Abstract: A vibration sensor with monitoring function is provided, which includes a substrate, a microelectromechanical vibration sensor chip and an application-specific integrated circuit chip. The microelectromechanical vibration sensor chip is disposed on the substrate and detects a vibration applied to an object to generate a plurality of vibration signals. The application-specific integrated circuit chip is disposed on the substrate and electrically connected to the microelectromechanical vibration sensor chip, which includes a sampling module, a transform module and an analysis module. The sampling module receives and converts the vibration signals into a plurality of digital signals, and filters the digital signals to generate a plurality of time-domain data. The transform module transforms the time-domain data into a frequency-domain data according to a predetermined number. The analysis module executes a comparison process to compare the frequency-domain data with a predetermined spectrum feature table and generates a notification signal according to the comparison result.

    Multi-axis force sensor capable of reducing influence on the other when measuring one of the axial force and torque

    公开(公告)号:US11035746B2

    公开(公告)日:2021-06-15

    申请号:US16517685

    申请日:2019-07-22

    Abstract: A multi-axis force sensor including a central portion, an outer ring portion, and at least one sensing portion disposed along an axial direction of an axis is provided. The sensing portion includes a first and a second elements connected with each other, and at least one first and at least one second strain gauges. A first end surface of the first element is connected to the central portion, and a second end surface of the second element is connected to the outer ring portion. A normal vector of the first end surface is parallel to the axis and the axis passes through a centroid of the first end surface. When the first end surface is subjected to an axial force, a first strain of a first sensing region of the first element in the axial direction is smaller than a second strain of a second sensing region of the second element in the axial direction. When the first end surface is subjected to a first torque with respect to the axis, a first twist angle of the first sensing region with respect to the axis is greater than a second twist angle of the second sensing region with respect to the axis.

    Ball screw with tilt detector
    25.
    发明授权

    公开(公告)号:US10794682B2

    公开(公告)日:2020-10-06

    申请号:US16136277

    申请日:2018-09-20

    Abstract: A ball screw with tilt detector includes a screw rod, two screw nuts, a channel, a plurality of balls, and a tilt detector. The screw rod is extended along a direction of an axis. The two screw nuts are installed on the screw rod and capable of moving along the axis. The tilt detector is disposed between the two screw nuts to detect a tilt angle and a preload of the two screw nuts. The tilt detector includes a force receiving element, at least one first strain sensor, and at least one second strain sensor. The force receiving element includes a point symmetric ring-type structure, and the ring-type structure has two planes which are parallel to each other and respectively contact the two screw nuts.

    Interaction force detection apparatus

    公开(公告)号:US10436654B2

    公开(公告)日:2019-10-08

    申请号:US15430555

    申请日:2017-02-13

    Abstract: An interaction force detection apparatus includes a sensor, a driving element, a moving element, and a connecting element. The connecting element is connected to the driving element and the sensor. The driving element is adapted to interact with the moving element, so as to generate a pair of forces. The pair of forces includes a first force and a second force, and a magnitude of the first force is equal to that of the second force. The sensor detects the first force exerted on the driving element, and the second force is exerted on the moving element to generate a movement.

    APPARATUS WITH TWO ANCHORS
    27.
    发明申请

    公开(公告)号:US20190196520A1

    公开(公告)日:2019-06-27

    申请号:US15853850

    申请日:2017-12-25

    CPC classification number: G05D15/00 B41K3/62 G05G5/02

    Abstract: An apparatus with two anchors including a housing, a movable element, and a rotary element is provided. The housing includes a first expansion unit, a second expansion unit, and a linkage. First alignment structures are disposed in the movable element and anti-rotation structures are disposed in the linkage. When the movable element and the rotary element enter the housing from two ends and are coupled along an axis, the movable element and the rotary element can approach each other to expand the first expansion unit and the second expansion unit to fonn two anchors. The apparatus :with two anchors secures a sensor in a variety of environments such as walls or machines. When the apparatus with two anchors fixes a sensor in a hole of a stamping machine, the impact force does not cause stress concentration on the sensor so as to improve the reliability of the sensor.

    MICRO-ELECTROMECHANICAL APPARATUS FOR THERMAL ENERGY CONTROL

    公开(公告)号:US20180188220A1

    公开(公告)日:2018-07-05

    申请号:US15393265

    申请日:2016-12-29

    CPC classification number: G01N33/0073 B81B7/0096 G01N27/123 G01N27/128

    Abstract: A MEMS apparatus for thermal energy control including a sensor and an IC chip is provided. The sensor includes a heating device for heating a sensing element and a detecting device for detecting a physical quantity. The IC chip includes a memory unit for storing a target value of the sensing element and a data processing unit for convert the physical quantity to a converted value, where a gap value is defined by subtracting the converted value from the target value. Besides, a control unit of the IC chip sets a parameter value according to the gap value, and a driving unit adjusts a quantity of thermal energy generated by the heating device according to the parameter value to reduce heating time and frequency of the heating device thereby reducing electrical power consumption. The MEMS apparatus is applicable to MEMS sensors requiring controlled operating temperature, such as a gas sensor.

    MICRO-ELECTROMECHANICAL APPARATUS WITH PIVOT ELEMENT
    30.
    发明申请
    MICRO-ELECTROMECHANICAL APPARATUS WITH PIVOT ELEMENT 审中-公开
    微电子装置与传感器元件

    公开(公告)号:US20150308830A1

    公开(公告)日:2015-10-29

    申请号:US14576203

    申请日:2014-12-19

    CPC classification number: G01R33/02 G01C19/5712

    Abstract: A micro-electromechanical apparatus may include a substrate, a first frame, a plurality of first anchors, a region and a plurality of pivot elements. The plurality of first anchors and the region is disposed on the substrate. The region is surrounded by the plurality of first anchors. Each of the pivot elements includes a pivot end and a rotary end. Each of the pivot ends is connected to a corresponding first anchor and each of the rotary ends is connected to the first frame such that the first frame is able to rotate with respect to an axis passing the region. The micro-electromechanical apparatus having the pivot elements and the region is adapted for detecting multi-degree physical quantities such as angular velocities in at least two axes, angular velocities and accelerations, angular velocities and Earth's magnetic field.

    Abstract translation: 微机电设备可以包括基板,第一框架,多个第一锚固件,区域和多个枢轴元件。 多个第一锚固件和区域设置在基板上。 该区域被多个第一锚点包围。 每个枢轴元件包括枢转端和旋转端。 每个枢转端连接到对应的第一锚定器,并且每个旋转端连接到第一框架,使得第一框架能够相对于经过该区域的轴线旋转。 具有枢转元件和区域的微机电装置适于检测多度物理量,例如至少两个轴上的角速度,角速度和加速度,角速度和地球磁场。

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