摘要:
A tool is provided to facilitate the assembly of a seal ring. The tool comprises an elongated body and a flange projecting radially from the elongated body. A first portion of the tool is configured to receive the placement of a seal ring and a retainer cap thereon. The retainer cap may carry attachment elements, such as screws, used to secure the retainer cap on the housing. To mount the seal ring, the tool is inserted through a shaft hole of the housing to clamp the seal ring and the retainer cap between the housing and a flange of the tool. The attachment elements then are tightened to fix the retainer cap on the housing, which secures the seal ring sandwiched between the retainer cap and the housing. After the assembly of the seal ring is completed, the tool may then be slidably removed.
摘要:
Method and apparatus for memory device testing at a higher clock rate than the clock rate provided by a memory tester. The method includes providing a memory tester capable of generating a first clock signal characterized by a first clock frequency, and applying the first clock signal to the memory device. The method also includes receiving a command for activating a high-clock-frequency test mode. The method generates a second clock signal in the memory device in response to the first clock signal. The second clock signal is characterized by a second clock frequency which is higher than the first clock frequency. The method then tests the memory device at the second clock frequency. In a specific embodiment, the method is applied to a serial flash memory device. The invention can also be applied to testing and operating other memory devices or systems that include synchronized circuits.
摘要:
A method of reducing sticking of a door of a semiconductor device processing apparatus is provided. The method comprises providing rinsing fluid to a lid of a semiconductor devise processing chamber so as to rinse particulates therefrom; and sliding a door that is operatively coupled to the lid so as to move between a closed position wherein the door occludes an opening formed in the lid, and an open position wherein the door does not occlude the opening. Numerous other aspects are provided.
摘要:
An automatic generation method, program and system to create knowledge, where a pair of parent concept and its children concept, decomposed from the parent concept, are used as elementary process knowledge, and by repeating decompositions of the elementary process knowledge to obtain detailed knowledge for achieving intention or design.
摘要:
Embodiments of the present invention relate to semiconductor device manufacturing, and more particularly to a horizontal megasonic module for cleaning substrates. In one embodiment an apparatus for cleaning a substrate is provided. The apparatus comprises a tank adapted to contain a cleaning fluid, a movable housing having a first side adapted to be placed in the cleaning fluid, a plurality of rotatable rollers coupled to the first side of the housing, the rollers positioned and including grooves to securely hold the substrate in a horizontal orientation, and one or more transducers adapted to direct vibrational energy through the cleaning fluid in the tank toward the substrate, wherein at least one of the transducers directs vibrational energy toward the substrate and substantially parallel to a major surface of the substrate.
摘要:
Embodiments of the invention generally relate to a modular, configurable system in which distinct cleaning and drying modules can be arranged in different combinations selectable by a user of the system. In one embodiment a configurable system for substrate cleaning is provided. The configurable system provides a frame including first and second bays, the first and second bays each adapted to hold one or more cleaning or drying modules, and a transfer area positioned between the first and second bays including a robot adapted to move substrates to and from the one or more modules positioned within the first and second bays, wherein the frame is adapted to hold a user selectable set of one or more cleaning or drying modules in the first and second bays.
摘要:
In a case where an access point lies outside the direct radio transmission range of a first radio station of a radio communications system, and a routing runs between the first radio station and the access point that includes at least one additional radio station is known to the first radio station and the access point, information can be transmitted from the first radio station to the access point and from the latter to the first radio station via the routing. When the access point receives information relating to an interruption in the known routing from a radio station in the routing, the first radio station downstream of the access point is informed of the interruption in the known routing and subsequently initiates a process for determining a new routing between the first radio station and the access point.
摘要:
The present invention concerns compounds and their use to inhibit the activity of a receptor tyrosine kinase. The invention is preferably used to treat cell proliferative disorders such as cancers characterized by over-activity or inappropriate activity HER2 or EGFR.
摘要:
A substrate handler is provided. In one embodiment, the substrate handler includes a first and second carriage coupled to a rail. A first robot having at least two grippers is attached to the first carrier. A second robot having at least one gripper is coupled to the second carriage. The first carriage is independently positionable along the rail relative to the second carriage. As each carriage has a separate actuator, the movements of the first and second robot are decoupled, thereby allowing increased throughput. The substrate handler is particularly suitable for using in a planarization system having an integrated substrate cleaner.
摘要:
Embodiments of a load cup for transferring a substrate are provided. The load cup includes a pedestal assembly having a substrate support and a de-chucking nozzle. The de-chucking nozzle is positioned to flow a fluid between the polishing head and the back side of a substrate during transfer of the substrate from the polishing head to the substrate support.