Seal installation tool
    21.
    发明授权
    Seal installation tool 失效
    密封安装工具

    公开(公告)号:US07636996B2

    公开(公告)日:2009-12-29

    申请号:US12047597

    申请日:2008-03-13

    申请人: Hui Chen

    发明人: Hui Chen

    IPC分类号: B23P19/04

    摘要: A tool is provided to facilitate the assembly of a seal ring. The tool comprises an elongated body and a flange projecting radially from the elongated body. A first portion of the tool is configured to receive the placement of a seal ring and a retainer cap thereon. The retainer cap may carry attachment elements, such as screws, used to secure the retainer cap on the housing. To mount the seal ring, the tool is inserted through a shaft hole of the housing to clamp the seal ring and the retainer cap between the housing and a flange of the tool. The attachment elements then are tightened to fix the retainer cap on the housing, which secures the seal ring sandwiched between the retainer cap and the housing. After the assembly of the seal ring is completed, the tool may then be slidably removed.

    摘要翻译: 提供了一种便于组装密封环的工具。 该工具包括细长主体和从细长主体径向突出的凸缘。 该工具的第一部分构造成接收其上的密封环和保持器盖的放置。 保持器帽可以携带用于将保持器盖固定在壳体上的附接元件,例如螺钉。 为了安装密封环,工具通过壳体的轴孔插入,以将密封环和保持器盖夹在壳体和工具的凸缘之间。 然后紧固附接元件以将保持器盖固定在壳体上,其将密封环固定在夹持器盖和壳体之间。 在完成密封环的组装之后,可以可滑动地移除该工具。

    Clock frequency doubler method and apparatus for serial flash testing
    22.
    发明授权
    Clock frequency doubler method and apparatus for serial flash testing 有权
    用于串行闪存测试的时钟倍频器方法和装置

    公开(公告)号:US07502267B2

    公开(公告)日:2009-03-10

    申请号:US11526124

    申请日:2006-09-22

    IPC分类号: G11C7/00 G11C11/34 G11C8/00

    摘要: Method and apparatus for memory device testing at a higher clock rate than the clock rate provided by a memory tester. The method includes providing a memory tester capable of generating a first clock signal characterized by a first clock frequency, and applying the first clock signal to the memory device. The method also includes receiving a command for activating a high-clock-frequency test mode. The method generates a second clock signal in the memory device in response to the first clock signal. The second clock signal is characterized by a second clock frequency which is higher than the first clock frequency. The method then tests the memory device at the second clock frequency. In a specific embodiment, the method is applied to a serial flash memory device. The invention can also be applied to testing and operating other memory devices or systems that include synchronized circuits.

    摘要翻译: 用于以比由存储器测试器提供的时钟速率更高的时钟速率测试存储器件的方法和装置。 该方法包括提供能够产生以第一时钟频率为特征的第一时钟信号并将第一时钟信号施加到存储器件的存储器测试器。 该方法还包括接收用于激活高时钟频率测试模式的命令。 该方法响应于第一时钟信号在存储器件中产生第二时钟信号。 第二时钟信号的特征在于高于第一时钟频率的第二时钟频率。 然后该方法以第二个时钟频率测试存储器件。 在具体实施例中,该方法被应用于串行闪存设备。 本发明还可以应用于测试和操作包括同步电路的其它存储器件或系统。

    LID FOR A SEMICONDUCTOR DEVICE PROCESSING APPARATUS AND METHODS FOR USING THE SAME
    23.
    发明申请
    LID FOR A SEMICONDUCTOR DEVICE PROCESSING APPARATUS AND METHODS FOR USING THE SAME 审中-公开
    用于半导体器件加工装置的夹具及其使用方法

    公开(公告)号:US20090025757A1

    公开(公告)日:2009-01-29

    申请号:US12245740

    申请日:2008-10-04

    IPC分类号: B08B3/04

    摘要: A method of reducing sticking of a door of a semiconductor device processing apparatus is provided. The method comprises providing rinsing fluid to a lid of a semiconductor devise processing chamber so as to rinse particulates therefrom; and sliding a door that is operatively coupled to the lid so as to move between a closed position wherein the door occludes an opening formed in the lid, and an open position wherein the door does not occlude the opening. Numerous other aspects are provided.

    摘要翻译: 提供一种降低半导体器件处理装置的门的粘附的方法。 该方法包括向半导体设备处理室的盖子提供冲洗流体以从其中冲洗微粒; 以及滑动可操作地联接到所述盖的门,以便在所述门闭合形成在所述盖中的开口的闭合位置与所述门不闭塞所述开口的打开位置之间移动。 提供了许多其他方面。

    Automatic knowledge creating system
    24.
    发明授权
    Automatic knowledge creating system 有权
    自动知识创建系统

    公开(公告)号:US07480642B2

    公开(公告)日:2009-01-20

    申请号:US10478980

    申请日:2002-05-27

    IPC分类号: G06F17/00 G06N5/02

    CPC分类号: G06N5/00

    摘要: An automatic generation method, program and system to create knowledge, where a pair of parent concept and its children concept, decomposed from the parent concept, are used as elementary process knowledge, and by repeating decompositions of the elementary process knowledge to obtain detailed knowledge for achieving intention or design.

    摘要翻译: 一种创建知识的自动生成方法,程序和系统,其中从母体概念分解的父对象概念及其子概念被用作基本过程知识,并且通过重复分解基本过程知识以获得详细知识 实现意图或设计。

    HORIZONTAL MEGASONIC MODULE FOR CLEANING SUBSTRATES
    25.
    发明申请
    HORIZONTAL MEGASONIC MODULE FOR CLEANING SUBSTRATES 审中-公开
    用于清洁基板的水平微型模块

    公开(公告)号:US20080156360A1

    公开(公告)日:2008-07-03

    申请号:US11961587

    申请日:2007-12-20

    IPC分类号: B08B3/00

    CPC分类号: B08B3/00 B08B3/04 B08B3/12

    摘要: Embodiments of the present invention relate to semiconductor device manufacturing, and more particularly to a horizontal megasonic module for cleaning substrates. In one embodiment an apparatus for cleaning a substrate is provided. The apparatus comprises a tank adapted to contain a cleaning fluid, a movable housing having a first side adapted to be placed in the cleaning fluid, a plurality of rotatable rollers coupled to the first side of the housing, the rollers positioned and including grooves to securely hold the substrate in a horizontal orientation, and one or more transducers adapted to direct vibrational energy through the cleaning fluid in the tank toward the substrate, wherein at least one of the transducers directs vibrational energy toward the substrate and substantially parallel to a major surface of the substrate.

    摘要翻译: 本发明的实施例涉及半导体器件制造,更具体地涉及用于清洁衬底的水平兆声模块。 在一个实施例中,提供了一种用于清洁基底的装置。 该设备包括适于容纳清洁流体的罐,具有适于放置在清洁流体中的第一侧的可移动壳体,与壳体的第一侧耦合的多个可旋转辊,辊定位并包括槽以牢固地 将所述基板保持在水平方向,以及一个或多个换能器,其适于将振动能量引导通过所述罐中的所述清洁流体朝向所述基板,其中所述换能器中的至少一个将振动能量引向所述基板并基本上平行于 底物。

    SYSTEMS AND METHODS FOR MODULAR AND CONFIGURABLE SUBSTRATE CLEANING
    26.
    发明申请
    SYSTEMS AND METHODS FOR MODULAR AND CONFIGURABLE SUBSTRATE CLEANING 审中-公开
    用于模块化和可配置的基板清洁的系统和方法

    公开(公告)号:US20080156359A1

    公开(公告)日:2008-07-03

    申请号:US11963458

    申请日:2007-12-21

    IPC分类号: B08B3/00

    摘要: Embodiments of the invention generally relate to a modular, configurable system in which distinct cleaning and drying modules can be arranged in different combinations selectable by a user of the system. In one embodiment a configurable system for substrate cleaning is provided. The configurable system provides a frame including first and second bays, the first and second bays each adapted to hold one or more cleaning or drying modules, and a transfer area positioned between the first and second bays including a robot adapted to move substrates to and from the one or more modules positioned within the first and second bays, wherein the frame is adapted to hold a user selectable set of one or more cleaning or drying modules in the first and second bays.

    摘要翻译: 本发明的实施例一般涉及模块化的可配置系统,其中不同的清洁和干燥模块可以以由系统的用户选择的不同组合来布置。 在一个实施例中,提供了一种用于衬底清洁的可配置系统。 可配置系统提供包括第一和第二托架的框架,每个适于保持一个或多个清洁或干燥模块的第一和第二托架以及定位在第一和第二托架之间的传送区域,包括适于将基板移动到和从 一个或多个模块定位在第一和第二托架内,其中框架适于在第一和第二托架中容纳用户可选择的一个或多个清洁或干燥模块组。

    Method for determining a path in a local radio communication
    27.
    发明申请
    Method for determining a path in a local radio communication 有权
    用于确定本地无线电通信中的路径的方法

    公开(公告)号:US20070133464A1

    公开(公告)日:2007-06-14

    申请号:US10577670

    申请日:2004-10-21

    IPC分类号: H04Q7/00

    摘要: In a case where an access point lies outside the direct radio transmission range of a first radio station of a radio communications system, and a routing runs between the first radio station and the access point that includes at least one additional radio station is known to the first radio station and the access point, information can be transmitted from the first radio station to the access point and from the latter to the first radio station via the routing. When the access point receives information relating to an interruption in the known routing from a radio station in the routing, the first radio station downstream of the access point is informed of the interruption in the known routing and subsequently initiates a process for determining a new routing between the first radio station and the access point.

    摘要翻译: 在接入点位于无线电通信系统的第一无线电台的直接无线电传输范围之外的情况下,并且在包括至少一个附加无线电台站的第一无线电站和接入点之间的路由运行是已知的 第一无线电站和接入点,信息可以从第一无线电站通过路由从第一无线电台传送到接入点,从后者到第一无线电台。 当接入点在路由中从无线电站接收到与已知路由中断有关的信息时,接入点下游的第一个无线电台被通知已知路由中的中断,随后发起确定新路由的过程 在第一个无线电台和接入点之间。

    METHOD AND APPARATUS FOR VERTICAL TRANSFER OF SEMICONDUCTOR SUBSTRATES IN A CLEANING MODULE
    29.
    发明申请
    METHOD AND APPARATUS FOR VERTICAL TRANSFER OF SEMICONDUCTOR SUBSTRATES IN A CLEANING MODULE 审中-公开
    半导体基板在清洁模块中垂直传输的方法和装置

    公开(公告)号:US20060254715A1

    公开(公告)日:2006-11-16

    申请号:US11382828

    申请日:2006-05-11

    IPC分类号: H01L21/306

    摘要: A substrate handler is provided. In one embodiment, the substrate handler includes a first and second carriage coupled to a rail. A first robot having at least two grippers is attached to the first carrier. A second robot having at least one gripper is coupled to the second carriage. The first carriage is independently positionable along the rail relative to the second carriage. As each carriage has a separate actuator, the movements of the first and second robot are decoupled, thereby allowing increased throughput. The substrate handler is particularly suitable for using in a planarization system having an integrated substrate cleaner.

    摘要翻译: 提供衬底处理器。 在一个实施例中,衬底处理器包括联接到轨道的第一和第二托架。 具有至少两个夹持器的第一机器人附接到第一托架。 具有至少一个夹持器的第二机器人联接到第二托架。 第一托架可相对于第二托架沿轨道独立定位。 当每个滑架具有单独的致动器时,第一和第二机器人的运动被解耦,从而允许增加的产量。 衬底处理器特别适合于在具有集成衬底清洁器的平面化系统中使用。