摘要:
An aluminum nitride ceramic including aluminum nitride grains and grain boundary phases comprises a grain boundary phase-rich layer including more amount of the grain boundary phases in a surface layer of the aluminum nitride ceramic than in an inside of the aluminum nitride ceramic. The grain boundary phases in the grain boundary phase-rich layer include at least one of rare earth element and alkali earth element.
摘要:
An aluminum nitride sintered body is provided, wherein an average crystal grain diameter is 2.0 μm or less, a crystalline phase detected by an X-ray diffractometer is an AlN phase only or an AlN phase and an AlON phase only, and SiO2 or MgO is present in an amount of more than 0.05 wt % to less than 1 wt %.
摘要:
There is provided a strengthened composite material that is able to improve yield, handling, and reliability when it is applied to members of semiconductor manufacturing apparatus. Five to 60 mol % ZrO2 is contained relative to Y2O3, and temperature after a sintering process is maintained between 1,200° C. to 1,500° C. for 5 minutes or longer or temperature falling speed to reach 1,200° C. is adjusted to 200° C./h or slower, thereby producing the composite material containing, as major crystalline phases, a Y2O3 solid solution in which ZrO2 is dissolved in Y2O3 and a ZrO2 solid solution in which Y2O3 is dissolved in ZrO2.
摘要翻译:提供了一种加强的复合材料,当其应用于半导体制造装置的构件时,能够提高产量,处理和可靠性。 相对于Y 2 O 3 3含有5至60mol%的ZrO 2 O 3,烧结过程之后的温度保持在1200℃之间 至1500℃,5分钟或更长时间或达到1200℃的温度下降速度调节至200℃/小时或更慢,从而产生含有主要结晶相的复合材料Y 2 其中ZrO 2 O 3溶解在Y 2 O 3 3中的固体溶液和ZrO 2 其中Y 2 O 3 3 N 2的固体溶解在ZrO 2中。
摘要:
An aluminum nitride ceramic including aluminum nitride grains and grain boundary phases comprises a grain boundary phase-rich layer including more amount of the grain boundary phases in a surface layer of the aluminum nitride ceramic than in an inside of the aluminum nitride ceramic. The grain boundary phases in the grain boundary phase-rich layer include at least one of rare earth element and alkali earth element.
摘要:
An aluminum nitride sintered body includes a polycrystalline structure in which grain boundary fracture toughness KICgb is 1.6 MPa·m1/2 or more. The grain boundary fracture toughness KICgb can be determined by the following equation: KICgb=KCIC·cos2(π·PIF/200) where KIC is fracture toughness (MPa·m1/2), and PIF is a percentage of the intergranular fracture (%).
摘要:
There are provided an acetalsulfonate derivative useful as an intermediate for medicines and agricultural chemicals, a process for industrially producing the derivative, and a process for industrially producing a styrene oxide derivative from the acetalsulfonate derivative or from a mandelic acid derivative. A process for producing an acetalsulfonate derivative which comprises a first step of esterifying a mandelic acid derivative to form a mandelic ester derivative, a second step of protecting the mandelic ester derivative by an acetal to form an acetal derivative, a third step of reducing the acetal derivative to form an ethanediol derivative and a fourth step of reacting the ethanediol derivative with a sulfonyl chloride derivative. A process for producing a styrene oxide derivative which comprises a deprotecting step of deacetalizing the acetalsulfonate derivative and a step of epoxidizing the sulfonate derivative obtained in the deprotecting step with the aid of a base catalyst.
摘要:
The object is to maintain the operations of a logistic system. The recovering method of the logistic system includes a plurality of controllers connected with each other via a local network. A recovery method for the logistic system comprises detecting an abnormal state of the plurality of controllers, outputting a switching requesting signal, receiving a control signal, and outputting the control signal. In outputting the switching requesting signal, when an abnormal controller that shows the abnormal state is detected, a switching requesting signal to switch from the abnormal controller to an alternate controller is outputted from the logistic system to the alternate controller. In receiving the control signal, a control signal that controls at least a part of operations of the logistic system instead of the abnormal controller is received from the alternate controller.
摘要:
The present inventors have found that an aluminum nitride sintered body excellent in flatness by polishing can be provided by improving the strength of a grain boundary; at the same time, by adding SiO2 or MgO, which forms a solid solution with aluminum nitride during a sintering process, with the result that it is no longer present as a grain boundary phase, in a small amount to an aluminum nitride powder, followed by sintering the aluminum nitride powder at a low temperature from more than 160° C. to less than 1750° C.
摘要:
A ceramic member comprises a ceramic sintered body and a metallic member, which includes a metal element and is formed to be in contact with the ceramic sintered body. An affected layer around the metallic member of the ceramic sintered body has a thickness of 300 μm or less.
摘要:
An L-proline derivative represented by: ##STR1## wherein R.sub.2 represents a lower alkyl group is prepared by reacting L-proline with a D-.alpha.-alkyl-.beta.-acylthiopropionic acid halide, ##STR2## wherein R.sub.1 represents an acyl group, X represents a halogen atom and R.sub.2 has the same meaning as defined above. The halide is added to an aqueous medium containing L-proline and a condensation agent for deacidification. The halide and L-proline are reacted while the reaction temperature and pH are maintained at 12.degree. C. or lower and within a range of 10.5-11.5, whereby a compound represented by: ##STR3## wherein R.sub.1 and R.sub.2 have the same meanings as defined above is obtained. The resulting compound is then subjected to deacylation under strong alkaline conditions without being isolated from the reaction mixture, thereby yielding the target L-proline derivative.