Magnetic memory device and method of fabricating the same
    21.
    发明授权
    Magnetic memory device and method of fabricating the same 有权
    磁记忆装置及其制造方法

    公开(公告)号:US07732222B2

    公开(公告)日:2010-06-08

    申请号:US11465075

    申请日:2006-08-16

    IPC分类号: H01L21/00

    摘要: There is provided a magnetic memory device and a method of forming the same. The magnetic memory device includes an invariable pinning pattern and a variable pinning pattern on a substrate. A tunnel barrier pattern is interposed between the invariable pinning pattern and the variable pinning pattern, and the pinned pattern is interposed between the invariable pinning pattern and the tunnel barrier pattern. A storage free pattern is interposed between the tunnel barrier pattern and the variable pinning pattern, and a guide free pattern is interposed between the storage free pattern and the variable pinning pattern. A free reversing pattern is interposed between the storage and guide free patterns. The free reversing pattern reverses a magnetization direction of the storage free pattern and a magnetization direction of the guide free pattern in the opposite directions.

    摘要翻译: 提供了一种磁存储器件及其形成方法。 磁存储器件在衬底上包括不变的钉扎图案和可变的钉扎图案。 在不变的钉扎图案和可变钉扎图案之间插入隧道势垒图案,并且钉扎图案介于不变钉扎图案和隧道屏障图案之间。 在隧道势垒图案和可变钉扎图案之间插入无存储图案,并且在存储空闲图案和可变钉扎图案之间插入无引导图案。 在存储和无引导模式之间插入一个自由的反转模式。 自由反转图案反转无存储图案的磁化方向和反向自由图案的磁化方向。

    Methods of fabricating multi-layer phase-changeable memory devices
    23.
    发明授权
    Methods of fabricating multi-layer phase-changeable memory devices 有权
    制造多层可相变存储器件的方法

    公开(公告)号:US07615401B2

    公开(公告)日:2009-11-10

    申请号:US12189477

    申请日:2008-08-11

    IPC分类号: H01L21/00

    摘要: A phase-changeable memory device includes a phase-changeable material pattern and first and second electrodes electrically connected to the phase-changeable material pattern. The first and second electrodes are configured to provide an electrical signal to the phase-changeable material pattern. The phase-changeable material pattern includes a first phase-changeable material layer and a second phase-changeable material layer. The first and second phase-changeable material patterns have different chemical, physical, and/or electrical characteristics. For example, the second phase-changeable material layer may have a greater resistivity than the first phase-changeable material layer. For instance, the first phase-changeable material layer may include nitrogen at a first concentration, and the second phase-changeable material layer may include nitrogen at a second concentration that is greater than the first concentration. Related devices and fabrication methods are also discussed.

    摘要翻译: 可变相存储器件包括相变材料图案,以及电连接到相变材料图案的第一和第二电极。 第一和第二电极被配置为向相变材料图案提供电信号。 相变材料图案包括第一相变材料层和第二相变材料层。 第一和第二可相变材料图案具有不同的化学,物理和/或电特性。 例如,第二相变材料层可以具有比第一相变材料层更大的电阻率。 例如,第一相变材料层可以包括第一浓度的氮,第二相变材料层可以包括大于第一浓度的第二浓度的氮。 还讨论了相关设备和制造方法。

    Phase changeable structure and method of forming the same
    24.
    发明授权
    Phase changeable structure and method of forming the same 有权
    相变结构及其形成方法

    公开(公告)号:US07569430B2

    公开(公告)日:2009-08-04

    申请号:US11674580

    申请日:2007-02-13

    IPC分类号: H01L21/82

    摘要: The present invention relates to a phase changeable structure having decreased amounts of defects and a method of forming the phase changeable structure. A stacked composite is first formed by (i) forming a phase changeable layer including a chalcogenide is formed on a lower electrode, (ii) forming an etch stop layer having a first etch rate with respect to a first etching material including chlorine on the phase changeable layer, and (iii) forming a conductive layer having a second etch rate with respect to the first etching material on the etch stop layer. The conductive layer of the stacked composite is then etched using the first etching material to form an upper electrode. The etch stop layer and the phase changeable layer are then etched using a second etching material that is substantially flee of chlorine to form an etch stop pattern and a phase changeable pattern, respectively.

    摘要翻译: 本发明涉及具有减少的缺陷量的相变结构和形成相变结构的方法。 首先通过(i)在下电极上形成包括硫族化物的相变层来形成堆叠复合体,(ii)形成相对于在相上包括氯的第一蚀刻材料具有第一蚀刻速率的蚀刻停止层 可变层,和(iii)形成相对于蚀刻停止层上的第一蚀刻材料具有第二蚀刻速率的导电层。 然后使用第一蚀刻材料蚀刻层叠复合体的导电层以形成上电极。 然后使用基本上不含氯的第二蚀刻材料来蚀刻蚀刻停止层和相变层,以分别形成蚀刻停止图案和相变图案。

    Multi-layer phase-changeable memory devices
    25.
    发明授权
    Multi-layer phase-changeable memory devices 有权
    多层可相变存储器件

    公开(公告)号:US07425735B2

    公开(公告)日:2008-09-16

    申请号:US11627775

    申请日:2007-01-26

    摘要: A phase-changeable memory device includes a phase-changeable material pattern and first and second electrodes electrically connected to the phase-changeable material pattern. The first and second electrodes are configured to provide an electrical signal to the phase-changeable material pattern. The phase-changeable material pattern includes a first phase-changeable material layer and a second phase-changeable material layer. The first and second phase-changeable material patterns have different chemical, physical, and/or electrical characteristics. For example, the second phase-changeable material layer may have a greater resistivity than the first phase-changeable material layer. For instance, the first phase-changeable material layer may include nitrogen at a first concentration, and the second phase-changeable material layer may include nitrogen at a second concentration that is greater than the first concentration. Related devices and fabrication methods are also discussed.

    摘要翻译: 可变相存储器件包括相变材料图案,以及电连接到相变材料图案的第一和第二电极。 第一和第二电极被配置为向相变材料图案提供电信号。 相变材料图案包括第一相变材料层和第二相变材料层。 第一和第二可相变材料图案具有不同的化学,物理和/或电特性。 例如,第二相变材料层可以具有比第一相变材料层更大的电阻率。 例如,第一相变材料层可以包括第一浓度的氮,第二相变材料层可以包括大于第一浓度的第二浓度的氮。 还讨论了相关设备和制造方法。

    MULTI-LAYER PHASE-CHANGEABLE MEMORY DEVICES AND METHODS OF FABRICATING THE SAME
    28.
    发明申请
    MULTI-LAYER PHASE-CHANGEABLE MEMORY DEVICES AND METHODS OF FABRICATING THE SAME 有权
    多层相变记忆体装置及其制造方法

    公开(公告)号:US20070215853A1

    公开(公告)日:2007-09-20

    申请号:US11627775

    申请日:2007-01-26

    IPC分类号: H01L47/00 H01L21/44

    摘要: A phase-changeable memory device includes a phase-changeable material pattern and first and second electrodes electrically connected to the phase-changeable material pattern. The first and second electrodes are configured to provide an electrical signal to the phase-changeable material pattern. The phase-changeable material pattern includes a first phase-changeable material layer and a second phase-changeable material layer. The first and second phase-changeable material patterns have different chemical, physical, and/or electrical characteristics. For example, the second phase-changeable material layer may have a greater resistivity than the first phase-changeable material layer. For instance, the first phase-changeable material layer may include nitrogen at a first concentration, and the second phase-changeable material layer may include nitrogen at a second concentration that is greater than the first concentration. Related devices and fabrication methods are also discussed.

    摘要翻译: 可变相存储器件包括相变材料图案,以及电连接到相变材料图案的第一和第二电极。 第一和第二电极被配置为向相变材料图案提供电信号。 相变材料图案包括第一相变材料层和第二相变材料层。 第一和第二可相变材料图案具有不同的化学,物理和/或电特性。 例如,第二相变材料层可以具有比第一相变材料层更大的电阻率。 例如,第一相变材料层可以包括第一浓度的氮,第二相变材料层可以包括大于第一浓度的第二浓度的氮。 还讨论了相关设备和制造方法。

    Method of writing to MRAM devices
    30.
    发明申请
    Method of writing to MRAM devices 有权
    写入MRAM设备的方法

    公开(公告)号:US20060039190A1

    公开(公告)日:2006-02-23

    申请号:US11097495

    申请日:2005-04-01

    IPC分类号: G11C11/00

    CPC分类号: G11C11/16

    摘要: A method of writing to magnetic random access memory (MRAM) devices is provided. The method includes preparing a digit line disposed on a semiconductor substrate, a bit line crossing over the digit line, and a magnetic tunnel junction (MTJ) interposed between the digit line and the bit line. The MTJ has a pinned layer, a tunneling insulating layer, and a synthetic anti-ferromagnetic (SAF) free layer which are sequentially stacked. In addition, the SAF free layer has a bottom free layer and a top free layer which are separated by an exchange spacer layer. An initial magnetization state of the MTJ is read and compared with a desired magnetization state. When the initial magnetization state is different from the desired magnetization state, a first write line pulse is applied to one of the digit line and the bit line, and a second write line pulse is applied to the other of the digit line and the bit line, thereby changing the magnetization state of the MTJ. The MTJ may be disposed at an angle equal to or greater than 0° and less than 90° to a line to which the second write line pulse is applied.

    摘要翻译: 提供了一种写入磁性随机存取存储器(MRAM)器件的方法。 该方法包括准备设置在半导体衬底上的数字线,与数字线交叉的位线以及置于数字线和位线之间的磁性隧道结(MTJ)。 MTJ具有钉扎层,隧道绝缘层和顺序层叠的合成反铁磁(SAF)层。 此外,SAF自由层具有由交换间隔层隔开的无底层和顶部自由层。 读取MTJ的初始磁化状态并与期望的磁化状态进行比较。 当初始磁化状态不同于期望的磁化状态时,第一写入线脉冲被施加到数字线和位线之一,并且第二写入线脉冲被施加到数字线和位线中的另一个 ,从而改变MTJ的磁化状态。 MTJ可以以与第二写入线脉冲施加的线等于或大于0°且小于90°的角度布置。