Pressure sensor
    24.
    发明授权
    Pressure sensor 有权
    压力传感器

    公开(公告)号:US09422150B2

    公开(公告)日:2016-08-23

    申请号:US14584625

    申请日:2014-12-29

    摘要: According to one embodiment, a pressure sensor includes: a support section; a film section; and a strain sensing element. The film section is supported by the support section and deformable. The film section includes a first film and a second film. The first film includes a first region located in a central part and a second region located in a peripheral part around the first region. The second film is provided on the first region. The strain sensing element is provided on part of the second region. The strain sensing element includes a first magnetic layer; a second magnetic layer; and an intermediate layer. Magnetization of the first magnetic layer changes in response to deformation of the second region. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.

    摘要翻译: 根据一个实施例,压力传感器包括:支撑部分; 电影部分 和应变传感元件。 薄膜部分由支撑部分支撑并且可变形。 薄膜部分包括第一薄膜和第二薄膜。 第一膜包括位于中心部分的第一区域和位于围绕第一区域的周边部分中的第二区域。 在第一区域设置第二胶片。 应变传感元件设置在第二区域的一部分上。 应变传感元件包括第一磁性层; 第二磁性层; 和中间层。 响应于第二区域的变形,第一磁性层的磁化改变。 中间层设置在第一磁性层和第二磁性层之间。

    Strain sensor, pressure sensor, microphone, blood pressure sensor, personal digital assistant, and hearing aid
    25.
    发明授权
    Strain sensor, pressure sensor, microphone, blood pressure sensor, personal digital assistant, and hearing aid 有权
    应变传感器,压力传感器,麦克风,血压传感器,个人数字助理和助听器

    公开(公告)号:US09383268B2

    公开(公告)日:2016-07-05

    申请号:US14472721

    申请日:2014-08-29

    摘要: According to one embodiment, a strain sensor includes: a base; a strain sensing element; a magnetic field sensing element; and a processing unit. The strain sensing element includes a first magnetic layer having a first magnetization; a second magnetic layer having a second magnetization; and a first intermediate layer. In the strain sensing element an angle between a direction of the first magnetization and a direction of the second magnetization changes in accordance with a strain. The magnetic field sensing element includes a third magnetic layer having a third magnetization; a fourth magnetic layer having a fourth magnetization; and a second intermediate layer. In the magnetic field sensing an angle between a direction of the third magnetization and a direction of the fourth magnetization changes in accordance with a magnetic field.

    摘要翻译: 根据一个实施例,应变传感器包括:基座; 应变传感元件; 磁场感测元件; 和处理单元。 应变传感元件包括具有第一磁化强度的第一磁性层; 具有第二磁化强度的第二磁性层; 和第一中间层。 在应变传感元件中,第一磁化方向和第二磁化方向之间的角度根据应变而变化。 磁场感测元件包括具有第三磁化强度的第三磁性层; 具有第四磁化强度的第四磁性层; 和第二中间层。 在磁场中,感测第三磁化方向与第四磁化方向之间的角度根据磁场而变化。

    Pressure sensor, microphone, blood pressure sensor, and touch panel
    26.
    发明授权
    Pressure sensor, microphone, blood pressure sensor, and touch panel 有权
    压力传感器,麦克风,血压传感器和触摸屏

    公开(公告)号:US09250142B2

    公开(公告)日:2016-02-02

    申请号:US14047108

    申请日:2013-10-07

    摘要: According to one embodiment, a pressure sensor includes a base unit, a film unit, and a plurality of sensing elements. The plurality of sensing elements is provided on the film unit radially with respect to a centroid of the film unit. The plurality of sensing elements has a first side and a second side intersecting the first side. Each of the plurality of sensing elements includes a first magnetic layer, a second magnetic layer, and an intermediate layer. Each of the plurality of sensing elements has a shape anisotropy characterized by a length of the first side being longer than a length of the second side intersecting the first side. The plurality of sensing elements is provided at lines having radial configurations extending from the centroid to have a prescribed angle between the first side and the line.

    摘要翻译: 根据一个实施例,压力传感器包括基座单元,薄膜单元和多个感测元件。 多个感测元件相对于胶片单元的质心沿径向设置在胶片单元上。 多个感测元件具有与第一侧相交的第一侧和第二侧。 多个感测元件中的每一个包括第一磁性层,第二磁性层和中间层。 多个感测元件中的每一个具有形状各向异性,其特征在于第一侧的长度比与第一侧相交的第二侧的长度长。 多个感测元件设置在具有从质心延伸的径向构型的线上,以在第一侧和线之间具有规定的角度。

    STRAIN AND PRESSURE SENSING DEVICE, MICROPHONE, METHOD FOR MANUFACTURING STRAIN AND PRESSURE SENSING DEVICE, AND METHOD FOR MANUFACTURING MICROPHONE
    27.
    发明申请
    STRAIN AND PRESSURE SENSING DEVICE, MICROPHONE, METHOD FOR MANUFACTURING STRAIN AND PRESSURE SENSING DEVICE, AND METHOD FOR MANUFACTURING MICROPHONE 审中-公开
    应变和压力感测装置,麦克风,制造应变和压力感测装置的方法,以及制造麦克风的方法

    公开(公告)号:US20150118779A1

    公开(公告)日:2015-04-30

    申请号:US14582295

    申请日:2014-12-24

    IPC分类号: B81C1/00 G01L9/00

    摘要: According to one embodiment, a strain and pressure sensing device includes a semiconductor circuit unit and a sensing unit. The semiconductor circuit unit includes a semiconductor substrate and a transistor. The transistor is provided on a semiconductor substrate. The sensing unit is provided on the semiconductor circuit unit, and has space and non-space portions. The non-space portion is juxtaposed with the space portion. The sensing unit further includes a movable beam, a strain sensing element unit, and first and second buried interconnects. The movable beam has fixed and movable portions, and includes first and second interconnect layers. The fixed portion is fixed to the non-space portion. The movable portion is separated from the transistor and extends from the fixed portion into the space portion. The strain sensing element unit is fixed to the movable portion. The first and second buried interconnects are provided in the non-space portion.

    摘要翻译: 根据一个实施例,应变和压力感测装置包括半导体电路单元和感测单元。 半导体电路单元包括半导体衬底和晶体管。 晶体管设置在半导体衬底上。 感测单元设置在半导体电路单元上,并且具有空间和非空间部分。 非空间部分与空间部分并置。 感测单元还包括可移动光束,应变传感元件单元以及第一和第二掩埋互连。 可移动光束具有固定和可移动部分,并且包括第一和第二互连层。 固定部固定在非空间部。 可动部分与晶体管分离,并从固定部分延伸到空间部分。 应变传感元件单元固定在可动部上。 第一和第二掩埋互连件设置在非空间部分中。

    PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL
    28.
    发明申请
    PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 有权
    压力传感器,麦克风,血压传感器和触控面板

    公开(公告)号:US20140137668A1

    公开(公告)日:2014-05-22

    申请号:US14047108

    申请日:2013-10-07

    IPC分类号: G01L1/12

    摘要: According to one embodiment, a pressure sensor includes a base unit, a film unit, and a plurality of sensing elements. The plurality of sensing elements is provided on the film unit radially with respect to a centroid of the film unit. The plurality of sensing elements has a first side and a second side intersecting the first side. Each of the plurality of sensing elements includes a first magnetic layer, a second magnetic layer, and an intermediate layer. Each of the plurality of sensing elements has a shape anisotropy characterized by a length of the first side being longer than a length of the second side intersecting the first side. The plurality of sensing elements is provided at lines having radial configurations extending from the centroid to have a prescribed angle between the first side and the line.

    摘要翻译: 根据一个实施例,压力传感器包括基座单元,薄膜单元和多个感测元件。 多个感测元件相对于胶片单元的质心沿径向设置在胶片单元上。 多个感测元件具有与第一侧相交的第一侧和第二侧。 多个感测元件中的每一个包括第一磁性层,第二磁性层和中间层。 多个感测元件中的每一个具有形状各向异性,其特征在于第一侧的长度比与第一侧相交的第二侧的长度长。 多个感测元件设置在具有从质心延伸的径向构型的线上,以在第一侧和线之间具有规定的角度。

    Strain sensing element and pressure sensor

    公开(公告)号:US10746526B2

    公开(公告)日:2020-08-18

    申请号:US15920492

    申请日:2018-03-14

    摘要: According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.