公开(公告)号：US20080066867A1

公开(公告)日：2008-03-20

申请号：US11709400

申请日：2007-02-22

申请人： Jin-Man Kim ,  Yun-Sik Yang ,  Young-Min Min ,  Sang-Ho Kim

发明人： Jin-Man Kim ,  Yun-Sik Yang ,  Young-Min Min ,  Sang-Ho Kim

IPC分类号： C23F1/00

CPC分类号： H01L21/68735 ,  H01L21/6831

摘要： There is provided a semiconductor etching apparatus which removes particles remaining on the upper surface of an electro static chuck (ESC) during an etching process, thereby preventing a chucking force from decreasing and minimizing a leak of helium. To prevent a failure of the etching process due to a wafer chucking failure, by preventing polymers from falling down on the upper part of the ESC when a wafer is dechucked or transferred, the semiconductor etching apparatus comprises: an ESC selectively holding a wafer to be entered and positioned inside a chamber, and including a lower electrode part to which RF power is applied; parts positioned at a stepped portion of the ESC and respectively surrounding a side of the ESC; and a gas flow blocking part blocking a gas flow in a vacuum path formed between the ESC and the parts.

摘要翻译： 提供了一种半导体蚀刻装置，其在蚀刻过程中除去静电卡盘（ESC）的上表面上残留的颗粒，从而防止夹紧力降低并使氦泄漏最小化。 为了防止由于晶片夹紧故障引起的蚀刻工艺的故障，通过在晶片脱扣或转印时防止聚合物落下于ESC的上部，半导体蚀刻装置包括：选择性地保持晶片的ESC 进入并定位在室内，并且包括施加RF功率的下电极部分; 位于ESC的阶梯部分并分别围绕ESC的一侧的部件; 以及阻塞在ESC和部件之间形成的真空路径中的气流的气流阻塞部。

公开(公告)号：US07764483B2

公开(公告)日：2010-07-27

申请号：US11709400

申请日：2007-02-22

申请人： Jin-Man Kim ,  Yun-Sik Yang ,  Young-Min Min ,  Sang-Ho Kim

发明人： Jin-Man Kim ,  Yun-Sik Yang ,  Young-Min Min ,  Sang-Ho Kim

IPC分类号： H02N13/00

CPC分类号： H01L21/68735 ,  H01L21/6831

摘要： There is provided a semiconductor etching apparatus which removes particles remaining on the upper surface of an electro static chuck (ESC) during an etching process, thereby preventing a chucking force from decreasing and minimizing a leak of helium. To prevent a failure of the etching process due to a wafer chucking failure, by preventing polymers from falling down on the upper part of the ESC when a wafer is dechucked or transferred, the semiconductor etching apparatus comprises: an ESC selectively holding a wafer to be entered and positioned inside a chamber, and including a lower electrode part to which RF power is applied; parts positioned at a stepped portion of the ESC and respectively surrounding a side of the ESC; and a gas flow blocking part blocking a gas flow in a vacuum path formed between the ESC and the parts.

摘要翻译： 提供了一种半导体蚀刻装置，其在蚀刻过程中除去静电卡盘（ESC）的上表面上残留的颗粒，从而防止夹紧力降低并使氦泄漏最小化。 为了防止由于晶片夹紧故障引起的蚀刻工艺的故障，通过在晶片脱扣或转印时防止聚合物落下于ESC的上部，半导体蚀刻装置包括：选择性地保持晶片的ESC 进入并定位在室内，并且包括施加RF功率的下电极部分; 位于ESC的阶梯部分并分别围绕ESC的一侧的部件; 以及阻塞在ESC和部件之间形成的真空路径中的气流的气流阻塞部。

公开(公告)号：US20060084269A1

公开(公告)日：2006-04-20

申请号：US11271835

申请日：2005-11-14

申请人： Young-Min Min ,  Dae-Kyu Choi ,  Do-In Bae ,  Yun-Sik Yang ,  Wan-Goo Hwang ,  Jin-Man Kim

发明人： Young-Min Min ,  Dae-Kyu Choi ,  Do-In Bae ,  Yun-Sik Yang ,  Wan-Goo Hwang ,  Jin-Man Kim

IPC分类号： H01L21/302

CPC分类号： H01L21/31116 ,  H01J37/321 ,  H01J37/32357 ,  Y02C20/30 ,  Y02P70/605

摘要： A method for manufacturing a semiconductor device may include: forming a main magnetic field having an axis, and forming a subsidiary magnetic field substantially parallel to the axis; applying an alternating current along a path between the main and the subsidiary magnetic fields; allowing a gas to flow along a flow path along the path of the current so that a gas plasma is generated from the gas; providing the gas plasma into a chamber separated from a position where the gas plasma is generated; and performing a process for manufacturing a semiconductor device by employing the gas plasma.

公开(公告)号：US20050070280A1

公开(公告)日：2005-03-31

申请号：US10948201

申请日：2004-09-24

申请人： Je-Hyun Jung ,  Sang-Do Lee ,  Joon-Ho Park ,  Jin-Man Kim ,  Tae-Won Kim ,  Young-ki Jeon

发明人： Je-Hyun Jung ,  Sang-Do Lee ,  Joon-Ho Park ,  Jin-Man Kim ,  Tae-Won Kim ,  Young-ki Jeon

IPC分类号： H04L12/28 ,  H04L12/66 ,  H04W48/18 ,  H04W88/06 ,  H04Q7/20

CPC分类号： H04W48/18 ,  H04W88/06

摘要： An apparatus and method for connecting to one of different types of access networks in a heterogeneous network system in which the access networks overlap each other. The apparatus and method include attempting to connect to one of said one or more access networks according to a preset priority and receiving a communication service through the access network when a connection to the access network is successful; and attempting to connect to an access network having a next priority according to the preset priority when the connection to the access network is unsuccessful.

摘要翻译： 一种用于连接到其中接入网络彼此重叠的异构网络系统中的不同类型的接入网络之一的装置和方法。 所述装置和方法包括：当与所述接入网络的连接成功时，根据预设优先级尝试连接到所述一个或多个接入网络之一并通过所述接入网络接收通信服务; 并且当与接入网络的连接不成功时，尝试根据预设优先级连接到具有下一优先级的接入网络。

公开(公告)号：US20050047399A1

公开(公告)日：2005-03-03

申请号：US10926146

申请日：2004-08-26

申请人： Sang-Do Lee ,  Jin-Man Kim ,  Tae-Won Kim ,  Hong-Sung Chang ,  Jae-Jeong Shim ,  Geun-Hwi Lim ,  Je-Hyun Jung

发明人： Sang-Do Lee ,  Jin-Man Kim ,  Tae-Won Kim ,  Hong-Sung Chang ,  Jae-Jeong Shim ,  Geun-Hwi Lim ,  Je-Hyun Jung

IPC分类号： H04L12/28 ,  H04L12/64 ,  H04L12/66 ,  H04L29/06 ,  H04W48/18 ,  H04W88/16 ,  H04W92/02

CPC分类号： H04L12/6418 ,  H04L65/80 ,  H04L2012/6443 ,  H04W48/18 ,  H04W88/16 ,  H04W92/02

摘要： An apparatus and method for seamlessly providing voice and data services to a user through an access terminal in a mobile communication system including a heterogeneous service & mobility gateway (HSMG) for an interworking service between a circuit network and a packet network, and various access networks overlapping each other. The access terminal notifies the HSMG that a voice call is received, if the access terminal that accessed a packet network receives a voice call. The HSMG sends a direction request to a circuit network upon receiving the notification indicating that the voice call is received. The access terminal directs to the circuit network and registers a new location upon receiving the direction request. The HSMG sets up an incoming voice call to the access terminal after the registration of a new location.

摘要翻译： 一种用于通过包括用于电路网络和分组网络之间的互通服务的异构服务和移动性网关（HSMG）的移动通信系统中的接入终端向用户无缝地提供语音和数据服务的装置和方法，以及各种接入网络 彼此重叠 如果访问分组网络的接入终端接收到语音呼叫，则接入终端通知HSMG接收到语音呼叫。 HSMG收到指示接收到语音呼叫的通知后，向电路网发送方向请求。 接入终端指向电路网络，并在接收到方向请求后注册新位置。 在新位置注册之后，HSMG设置接入终端的进入语音呼叫。

公开(公告)号：US06816029B2

公开(公告)日：2004-11-09

申请号：US09935582

申请日：2001-08-24

申请人： Dae-Kyu Choi ,  Young-Min Min ,  Sang-Mun Chon ,  Yun-Sik Yang ,  Jin-Man Kim

发明人： Dae-Kyu Choi ,  Young-Min Min ,  Sang-Mun Chon ,  Yun-Sik Yang ,  Jin-Man Kim

IPC分类号： H03H738

CPC分类号： H01J37/32082 ,  H01F2021/125 ,  H01J37/32183

摘要： An apparatus for matching the impedance of an RF generator to the impedance of an RF load, for use in manufacturing semiconductor devices by using a plasma. The apparatus includes a variable inductor coupled to a variable capacitor and an invariable capacitor, the variable inductor having two inductors coupled electrically with each other in series and disposed adjacent to each other. At least one of the two inductors is disposed movably to make the magnetic flux of the one inductor interfere with the magnetic flux of the other inductor, thereby to control the inductance of the variable inductor. In the case of a plasma enhanced semiconductor wafer processing system, the apparatus can reduce the time necessary to achieve an RF match between the RF generator and the RF load, thereby increasing the life of the apparatus.

摘要翻译： 一种用于将RF发生器的阻抗与RF负载的阻抗相匹配的装置，用于通过使用等离子体制造半导体器件。 该装置包括耦合到可变电容器和不变电容器的可变电感器，该可变电感器具有串联并彼此相邻布置的彼此电耦合的两个电感器。 两个电感器中的至少一个被可移动地设置，以使一个电感器的磁通量与另一个电感器的磁通量相互干扰，从而控制可变电感器的电感。 在等离子体增强半导体晶片处理系统的情况下，该装置可以减少在RF发生器和RF负载之间实现RF匹配所需的时间，从而延长设备的使用寿命。

公开(公告)号：US06684652B2

公开(公告)日：2004-02-03

申请号：US10134729

申请日：2002-04-30

申请人： Jin-Man Kim ,  Yun-Sik Yang ,  Sang-Jun Chun ,  Young-Min Min

发明人： Jin-Man Kim ,  Yun-Sik Yang ,  Sang-Jun Chun ,  Young-Min Min

IPC分类号： F25D1702

CPC分类号： H01L21/67248 ,  F25D17/02 ,  H01L21/6831

摘要： A refrigeration system regulates the temperature of an electrostatic wafer chuck disposed in a process chamber. The refrigeration system includes a heat exchanger disposed in a heat exchange relationship with the electrostatic chuck, a refrigerator, a temperature sensor, and a temperature controller for controlling the refrigerator to cool the coolant withdrawn from the heat exchanger to a desired temperature in response to the temperature detected by the temperature sensor. The heat exchanger forms a coolant passageway inside the electrostatic chuck, and the refrigerator is disposed outside the process chamber. The temperature sensor is disposed within the body of the electrostatic chuck. The temperature of the electrostatic chuck can be regulated so as to be maintained nearly constant because the temperature used to control the cooling of the coolant is measured directly from the body of the electrostatic chuck.

摘要翻译： 制冷系统调节设置在处理室中的静电晶片卡盘的温度。 制冷系统包括与静电卡盘热交换设置的热交换器，冰箱，温度传感器和温度控制器，用于控制冰箱以将从热交换器排出的冷却剂冷却至期望的温度 温度由温度传感器检测。 热交换器在静电卡盘内形成冷却剂通道，并且冰箱设置在处理室的外部。 温度传感器设置在静电卡盘的主体内。 由于用于控制冷却剂的冷却的温度直接从静电卡盘的主体测量，静电卡盘的温度可以被调节以保持几乎恒定。

公开(公告)号：US09379019B2

公开(公告)日：2016-06-28

申请号：US14701859

申请日：2015-05-01

申请人： Bum-Joon Youn ,  Tae-Sun Kim ,  Yeo-Jin Lee ,  Yu-Ra Kim ,  Jin-Man Kim ,  Jae-Kyung Seo ,  Ki-Man Lee

发明人： Bum-Joon Youn ,  Tae-Sun Kim ,  Yeo-Jin Lee ,  Yu-Ra Kim ,  Jin-Man Kim ,  Jae-Kyung Seo ,  Ki-Man Lee

IPC分类号： H01L21/8234 ,  H01L21/02 ,  H01L21/027 ,  H01L21/265 ,  H01L29/66 ,  H01L21/762 ,  H01L21/266

CPC分类号： H01L21/823431 ,  H01L21/26513 ,  H01L21/76224 ,  H01L21/76229 ,  H01L21/823418 ,  H01L21/823437 ,  H01L21/823481 ,  H01L29/0847 ,  H01L29/66545 ,  H01L29/66636

摘要： In a method, an isolation layer pattern is formed on a substrate to define first and second active fins. An ARC layer is formed on the isolation layer pattern to at least partially cover sidewalls of the first and second active fins. A level of a top surface of the ARC layer is equal to or less than, and equal to or greater than half of, those of the first and second active fins. A photoresist layer is formed on the first and second active fins and the ARC layer. A portion of the photoresist layer is removed to form a photoresist pattern covering the first active fin and exposing the second active fin. A portion of the ARC layer under the removed portion of the photoresist layer is removed to form an ARC layer pattern. Impurities are implanted into the exposed second active fin to form an impurity region.

摘要翻译： 在一种方法中，在衬底上形成隔离层图案以限定第一和第二活性鳍片。 在隔离层图案上形成ARC层，以至少部分地覆盖第一和第二活性鳍片的侧壁。 ARC层的顶表面的水平等于或小于等于或大于第一和第二活性翅片的一半的水平。 在第一和第二活性鳍片和ARC层上形成光致抗蚀剂层。 去除光致抗蚀剂层的一部分以形成覆盖第一活性鳍片并暴露第二活性鳍片的光致抗蚀剂图案。 除去光致抗蚀剂层去除部分之下的ARC层的一部分以形成ARC层图案。 将杂质植入暴露的第二活性鳍中以形成杂质区。

公开(公告)号：US09209849B2

公开(公告)日：2015-12-08

申请号：US12878230

申请日：2010-09-09

申请人： Jin-Man Kim ,  Chang-Ha Kim ,  Byung-Kyu Kim ,  Jun-Hui Lee

发明人： Jin-Man Kim ,  Chang-Ha Kim ,  Byung-Kyu Kim ,  Jun-Hui Lee

IPC分类号： H01Q11/12 ,  H04B1/04 ,  H04B1/18 ,  H01Q1/24 ,  H03H7/40

CPC分类号： H04B1/18 ,  H01Q1/242 ,  H03H7/40 ,  H04B1/0458

摘要： An apparatus for enhancing an efficiency of an antenna in a mobile terminal includes an antenna matcher whose setting is changed under control of a controller, the antenna matcher coupled to the antenna, a sensing unit for sensing whether or not a user holds the mobile terminal and a holding pattern in which the user holds the mobile terminal, and a controller for controlling the setting of the antenna matcher according to whether or not the user holds the mobile terminal and the holding pattern.

摘要翻译： 一种用于提高移动终端中的天线的效率的装置，包括天线匹配器，其设置在控制器的控制下改变，天线匹配器耦合到天线，感测单元，用于感测用户是否保持移动终端;以及 用户握持移动终端的保持模式，以及控制器，用于根据用户是否保持移动终端和保持模式来控制天线匹配器的设置。

公开(公告)号：US08076532B2

公开(公告)日：2011-12-13

申请号：US12412496

申请日：2009-03-27

申请人： Dae-Sik Lim ,  Joo-Hyeon Lee ,  Tae-Shin Kim ,  Tae-Hong Yang ,  Bon-Kyoung Koo ,  Sang-Phil Oh ,  Kwang-Pyo Lee ,  Hyun-Jung Oh ,  Sang-Hee Lee ,  Young-Yun Kong ,  Jin-Man Kim

发明人： Dae-Sik Lim ,  Joo-Hyeon Lee ,  Tae-Shin Kim ,  Tae-Hong Yang ,  Bon-Kyoung Koo ,  Sang-Phil Oh ,  Kwang-Pyo Lee ,  Hyun-Jung Oh ,  Sang-Hee Lee ,  Young-Yun Kong ,  Jin-Man Kim

IPC分类号： A01K67/027 ,  A01K67/00 ,  A01K67/033 ,  G01N33/00

CPC分类号： G01N33/5011 ,  C12N5/0629 ,  C12N2501/405 ,  G01N33/5088

摘要： Mechanisms regulating cell proliferation stop and differentiation initiation during the development stage of mammalian embryo, and the proteins involved therein, are presented. Differentiation regulators, methods of regulating differentiation, transgenic organisms with loss of expression of the differentiation regulator, and methods of preparing the transgenic organisms, are provided.

摘要翻译： 介绍了在哺乳动物胚胎发育阶段调节细胞增殖停止和分化起始的机制及其中涉及的蛋白质。 提供了分化调节剂，调节分化的方法，丧失表达分化调节剂的转基因生物以及制备转基因生物的方法。