公开(公告)号：US06862934B2

公开(公告)日：2005-03-08

申请号：US10264887

申请日：2002-10-04

申请人： Marc S. Weinberg ,  Anthony S. Kourepenis ,  William D. Sawyer ,  Jeffrey T. Borenstein ,  James H. Connelly ,  Amy E. Duwel ,  Christopher M. Lento ,  James R. Cousens

发明人： Marc S. Weinberg ,  Anthony S. Kourepenis ,  William D. Sawyer ,  Jeffrey T. Borenstein ,  James H. Connelly ,  Amy E. Duwel ,  Christopher M. Lento ,  James R. Cousens

IPC分类号： B81B3/00 ,  B81C1/00 ,  G01C19/5719 ,  H01L21/683 ,  G01P15/08

CPC分类号： H01L21/6835 ,  G01C19/5719 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2924/3025

摘要： A tuning fork gyroscope typically including at least one proof mass with an upper sense plate disposed above the proof mass and a lower sense plate disposed below the proof mass and means for sensing changes in the nominal gaps between the sense plate and the proof mass and for outputting a signal indicative of the gyroscope angular rate.

摘要翻译： 音叉陀螺仪通常包括至少一个检验质量块，其中布置在检测质量块上方的上感测板和布置在检验质量下方的下感测板，以及用于感测感测板和检测质量块之间的标称间隙的变化的装置， 输出表示陀螺仪角速度的信号。

公开(公告)号：US5892153A

公开(公告)日：1999-04-06

申请号：US752570

申请日：1996-11-21

申请人： Marc S. Weinberg ,  John C. Pinson

发明人： Marc S. Weinberg ,  John C. Pinson

IPC分类号： G01C19/5719 ,  G01P9/04

CPC分类号： G01C19/5719

摘要： Guard bands which reduce or eliminate force and sensitivity associated with proof mass motion normal to the substrate as a result of voltage transients is disclosed. The guard bands are biased to reduce the coupling ratio to zero and thereby enable starting and improved performance. Various configurations of guard bands may be employed including distinct inner and outer guard bands, distinct inner guard bands only, extended sense electrodes below inner sensing combs with no outer guards, distinct outer guard bands with extended sense electrodes, and sense electrodes extended beneath both drive and sensing combs.

摘要翻译： 公开了减少或消除由于电压瞬变而与基板垂直的质量运动相关联的力和灵敏度的保护带。 保护带被偏置以将耦合比降低到零，从而实现起动和改进的性能。 可以采用保护带的各种配置，包括不同的内部和外部保护带，仅有不同的内部保护带，在没有外部保护的内部感测梳以下的扩展感测电极，具有扩展感测电极的不同外部保护带，以及在两个驱动器之下延伸的感测电极 和感应梳。

公开(公告)号：US5767405A

公开(公告)日：1998-06-16

申请号：US584377

申请日：1996-01-11

申请人： Jonathan J. Bernstein ,  Marc S. Weinberg

发明人： Jonathan J. Bernstein ,  Marc S. Weinberg

IPC分类号： G01C19/5719 ,  H03H9/02 ,  G01P9/04

CPC分类号： G01C19/5719 ,  H03H9/02259 ,  H03H2009/02496 ,  H03H2009/02511

摘要： A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support beams and the substrate are positioned on the substrate beneath each end of the support beams. In an alternative embodiment, piezoelectric sense capacitors are disposed on the flexures for detecting rotation of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes or within the piezoelectric capacitors is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.

摘要翻译： 一种微型的音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。 振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。 附加的质量形成在振动元件上以提高传感器的灵敏度。 用于检测支撑梁和基板之间的电容变化的感测电极定位在支撑梁的每个端部下方的基板上。 在替代实施例中，压电感测电容器设置在挠曲件上以检测支撑电极的旋转。 驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。 在支撑电极和感测电极之间提供激励。 由组件的旋转引起的信号的任何变化以及所产生的支撑电极和感测电极之间或压电电容器内的电容变化被感测为惯性速率的量度。 可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。

公开(公告)号：US5388458A

公开(公告)日：1995-02-14

申请号：US981167

申请日：1992-11-24

申请人： Marc S. Weinberg ,  Anthony Petrovich

发明人： Marc S. Weinberg ,  Anthony Petrovich

IPC分类号： G01C19/5607 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： A resonantly vibrating or tuning fork rate sensor in which a quartz beam is instrumented with electrodes in first and second regions forming respective sense and drive electrodes wherein the piezoelectric resonance affect of the quartz material between the drive electrodes is used as a tuning element for an oscillator circuit. The electrodes are driven in a balanced voltage mode and sensed in a common mode rejection differential amplifier while leads running to the electrodes along the quartz beam are placed at positions of minimal field strength for improving the signal to noise ratio of the device. The rate sensor utilizes a multi-electrode pattern in order to make such lead placement possible. The sense pattern and drive pattern may be either in one orientation with the drive electrodes proximate to the body of the quartz resonator or in a second pattern with the sense electrodes proximate to the body. Both the drive electrodes and the sense electrodes operate on the piezoelectric principal, utilizing constriction to induce vibration from the drive electrodes and sensing the current generated from piezoelectric effect resulting from the vibrational compression which occurs out of the plane of vibration during inertial rate input. Alternatively, a capacitive electrode structure may be utilized as a pick-off.

摘要翻译： 一种谐振振动或音叉速率传感器，其中在形成相应感测和驱动电极的第一和第二区域中，石英束被装配有电极，其中驱动电极之间的石英材料的压电共振影响被用作振荡器的调谐元件 电路。 电极以平衡电压模式驱动并且在共模抑制差分放大器中感测，而沿着石英束的电极的引线被放置在最小场强的位置，以提高器件的信噪比。 速率传感器利用多电极图案以使得这种引线放置成为可能。 感测图案和驱动图案可以处于与驱动电极靠近石英谐振器的主体的一个方向上，或者处于具有接近身体的感测电极的第二图案中。 驱动电极和感测电极都在压电体上工作，利用收缩来引起来自驱动电极的振动，并且感测由在惯性速率输入期间出现在振动平面之外的振动压缩产生的压电效应产生的电流。 或者，可以使用电容电极结构作为拾取器。

公开(公告)号：US4458536A

公开(公告)日：1984-07-10

申请号：US395266

申请日：1982-07-06

申请人： Byong-Ho Ahn ,  Raymond Carroll ,  Kenneth Fertig ,  Michele S. Sapuppo ,  Howard L. Watson ,  Marc S. Weinberg

发明人： Byong-Ho Ahn ,  Raymond Carroll ,  Kenneth Fertig ,  Michele S. Sapuppo ,  Howard L. Watson ,  Marc S. Weinberg

IPC分类号： G01V1/18 ,  G01V1/16 ,  G01P15/02 ,  G01P15/13

CPC分类号： G01V1/184

摘要： A single vibration sensor having the capability of sensing vibration along three rotational axes as well as three translational axes and exhibiting consistent dynamics over a wide frequency range. The sensor includes an elongated mass formed of a generally rigid material suspended in a fluid within a housing. The exterior surface of the mass is spaced from the interior surface of the housing to permit limited freedom of motion of the mass within the housing. The mass is provided with multiaxial radial and axial electromagnetic suspensions, and is typically supported by a fluid within the housing. Rotational positioning is provided by a signal generator, torque generator combination. Vibration is sensed by additive or differential measurements of current changes in the coils of different axes of the suspensions or electromagnetic signal and torque generator combinations. The sensor is conveniently implemented as a single degree of freedom inertial gyroscope without the gyroscope wheel and adapted to permit sensing of current changes in coils provided to achieve suspension or suspension and signal and torque generation functions.

摘要翻译： 单个振动传感器具有检测沿三个旋转轴的振动能力以及三个平移轴的能力，并且在宽频率范围内表现出一致的动态特性。 传感器包括由悬挂在壳体内的流体中的大致刚性材料形成的细长质量块。 物体的外表面与壳体的内表面间隔开，以允许质量在壳体内的有限的运动自由度。 质量体设置有多轴径向和轴向电磁悬浮液，并且通常由壳体内的流体支撑。 旋转定位由信号发生器，扭矩发生器组合提供。 通过对悬架或电磁信号和扭矩发生器组合的不同轴的线圈中的电流变化的相加或差分测量来检测振动。 该传感器方便地实现为无陀螺仪轮的单自由度惯性陀螺仪，并且适于允许感测提供的线圈中的电流变化以实现悬架或悬架以及信号和扭矩产生功能。

公开(公告)号：US07468138B2

公开(公告)日：2008-12-23

申请号：US11496229

申请日：2006-07-31

申请人： Marc S. Weinberg ,  Brian Cunningham ,  Eric Hildebrant

发明人： Marc S. Weinberg ,  Brian Cunningham ,  Eric Hildebrant

IPC分类号： H04R17/00

CPC分类号： G01N29/022 ,  G01L9/0025 ,  G01N2291/0423 ,  G01N2291/0427 ,  Y10T29/42

摘要： A method for manufacturing a flexural plate wave sensor, the method including the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over said etch stop layer, depositing a piezoelectric layer over said membrane layer, forming a comb pattern with drive teeth which span across an entire length of the piezoelectric layer on said piezoelectric layer, etching a cavity through the substrate, the cavity having substantially parallel interior walls, and removing a portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer.

摘要翻译： 一种用于制造弯曲板波传感器的方法，所述方法包括以下步骤：在衬底上沉积蚀刻停止层，在所述蚀刻停止层上沉积膜层，在所述膜层上沉积压电层，形成具有 驱动齿跨越所述压电层上的压电层的整个长度，通过衬底蚀刻空腔，空腔具有基本上平行的内壁，以及去除腔和膜层之间的一部分蚀刻停止层以暴露 膜层的一部分。

公开(公告)号：US07402425B2

公开(公告)日：2008-07-22

申请号：US10791108

申请日：2004-03-02

申请人： Marc S. Weinberg ,  Jeffrey Borenstein ,  Christopher E. Dubé ,  Ralph Hopkins ,  Edwin Carlen

发明人： Marc S. Weinberg ,  Jeffrey Borenstein ,  Christopher E. Dubé ,  Ralph Hopkins ,  Edwin Carlen

IPC分类号： C12M1/34

CPC分类号： G01N33/54373 ,  G01N27/227 ,  G01N27/3276 ,  G01N2291/02863 ,  Y10S436/806

摘要： Electrostatic capacitance measurements are used to detect chemical or biological analytes, or chemical interactions, with great sensitivity. A diaphragm is coated with a material capable of selectively interacting with an analyte of interest, and interaction of the analyte with the coating exerts stresses tangential to the diaphragm's surface. These stresses cause diaphragm displacements that are sensed as varying capacitance.

摘要翻译： 静电电容测量用于高灵敏度地检测化学或生物分析物或化学相互作用。 膜片涂有能够与感兴趣的分析物选择性相互作用的材料，分析物与涂层的相互作用产生与膜片表面相切的应力。 这些应力会导致膜片位移被感测为变化的电容。

公开(公告)号：US07109633B2

公开(公告)日：2006-09-19

申请号：US10675398

申请日：2003-09-30

申请人： Marc S. Weinberg ,  Brian Cunningham ,  Eric Hildebrant

发明人： Marc S. Weinberg ,  Brian Cunningham ,  Eric Hildebrant

IPC分类号： H01L41/08

CPC分类号： G01N29/022 ,  G01L9/0025 ,  G01N2291/0423 ,  G01N2291/0427 ,  Y10T29/42

摘要： A flexural plate wave sensor including a flexural plate having a length and a width and a comb pattern over the flexural plate with drive teeth disposed across the entire length of the flexural plate to reduce the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexure plate wave sensor.

摘要翻译： 一种弯曲板式波片传感器，其包括弯曲板上的长度和宽度的弯曲板以及弯曲板上的梳状图案，驱动齿设置在弯曲板的整个长度上，以减少板中激发的本征模的数量，从而简化了操作 和挠性板波传感器的设计。

公开(公告)号：US06257059B1

公开(公告)日：2001-07-10

申请号：US09405721

申请日：1999-09-24

申请人： Marc S. Weinberg ,  Jonathan J. Bernstein ,  Gregory A. Kirkos ,  Tommy W. Lee ,  Anthony Petrovich

发明人： Marc S. Weinberg ,  Jonathan J. Bernstein ,  Gregory A. Kirkos ,  Tommy W. Lee ,  Anthony Petrovich

IPC分类号： G01C1900

CPC分类号： G01C19/5719

摘要： A micromechanical tuning fork gyroscope has an input axis out of the plane of the structure. In one embodiment, capacitor plates are provided in parallel strips beneath two apertured, planar proof masses suspended from a substrate by a support structure. The proof masses are paired and set in opposed vibrational motion by an electrostatic comb drive. In response to an input angular rate about the out-of-plane input axis, the proof masses translate with respect to the striped capacitors, thereby varying the capacitance between the capacitor strips and the proof masses as a function of the input rate. In another embodiment, proof mass combs of a comb drive are meshed between fixed drive combs which are electrically excited in pairs 180° out of phase. As the proof masses translate in response to an angular input, the distance between the proof mass combs and the fixed combs varies, thereby varying the capacitance between the combs resulting in an unbalanced voltage on the proof masses that is detected as an indication of input rate. The out-of-plane tuning fork gyroscope can be combined with two in-plane tuning fork gyroscopes to provide a complete three-axis inertial measurement unit from a single wafer or on a single chip.

摘要翻译： 微机械音叉陀螺仪具有离开结构平面的输入轴。 在一个实施例中，电容器板以平行的条带设置在由支撑结构从衬底悬挂的两个有孔的平坦的防护块下方。 证明质量通过静电梳驱动器配对并设置在相反的振动运动中。 响应于关于平面外输入轴的输入角速率，证明质量相对于条纹电容器平移，从而根据输入速率改变电容器条和证明质量块之间的电容。 在另一个实施例中，梳状驱动器的校准质量梳被啮合在固定的驱动梳之间，它们被成对180度异相电激励。 当证明质量响应于角度输入时，证明质量梳与固定梳之间的距离发生变化，从而改变梳子之间的电容，导致作为输入速率的指示被检测到的校验质量块上的不平衡电压 。 外置音叉陀螺仪可以与两个平面内的音叉陀螺仪相结合，从单个晶片或单个芯片提供完整的三轴惯性测量单元。

公开(公告)号：US06064169A

公开(公告)日：2000-05-16

申请号：US540809

申请日：1995-10-11

申请人： Paul A. Ward ,  Anthony S. Kourepenis ,  Marc S. Weinberg

发明人： Paul A. Ward ,  Anthony S. Kourepenis ,  Marc S. Weinberg

IPC分类号： G01C19/5719 ,  H03B5/30 ,  G05D15/00

CPC分类号： G01C19/5719

摘要： A control system for a tuning fork gyroscope uses motor frequency to control motor amplitude. The tuning fork gyroscope has a drive signal input and an output signal from which motor frequency is determined. A phase/frequency detector generates an error signal by comparing the actual oscillation phase of the output signal with the phase of a reference signal from a crystal controlled frequency synthesizer. The error signal is filtered in a feedback loop control to reduce phase detector ripple. The output of the loop controller is then used to determine the appropriate drive signal to drive the error signal to a constant and maintain a predetermined oscillation frequency.

摘要翻译： 音叉陀螺仪的控制系统使用电机频率来控制电机振幅。 音叉陀螺仪具有驱动信号输入和确定电机频率的输出信号。 相位/频率检测器通过将输出信号的实际振荡相位与来自晶体控制频率合成器的参考信号的相位进行比较来产生误差信号。 误差信号在反馈回路控制中进行滤波，以减少相位检测器的纹波。 然后使用环路控制器的输出来确定适当的驱动信号以将误差信号驱动到恒定并保持预定的振荡频率。