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    Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
    4.
    发明授权
    Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices 失效
    拆分电极以最小化电荷瞬变，电机幅度失配误差，以及音叉陀螺仪和其他设备中垂直平移的灵敏度

    公开(公告)号：US5911156A

    公开(公告)日：1999-06-08

    申请号：US805013

    申请日：1997-02-24

    申请人： Paul A. Ward ,  Eric M. Hildebrant ,  Lance C. Niles ,  Marc S. Weinberg ,  Anthony S. Kourepenis

    发明人： Paul A. Ward ,  Eric M. Hildebrant ,  Lance C. Niles ,  Marc S. Weinberg ,  Anthony S. Kourepenis

    IPC分类号： G01C19/5719 ,  G01C19/00

    CPC分类号： G01C19/5719

    摘要： A micromechanical tuning fork gyroscope having two center electrodes is disclosed. The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes are equal, and hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does effect sense axis output signals.

    摘要翻译： 公开了一种具有两个中心电极的微机械音叉陀螺仪。 两个中心电极被相反极性的偏置电位激发。 相对偏置的中心电极在陀螺仪之间提供电对称性，从而减少电荷瞬变和对垂直平移的敏感性。 直接注入到质量块中的电流相等且相反，从而取消。 作用在证明质量块和交错电极上的电动机提升力相等，因此证明质量块以纯平移运动，从而减少同相偏差。 此外，垂直于陀螺仪平面的任何纯平移都会影响感测轴输出信号。

    Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope
    5.
    发明授权
    Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope 失效
    绝缘子导体陀螺仪陀螺仪中的电机幅度控制电路

    公开(公告)号：US06064169A

    公开(公告)日：2000-05-16

    申请号：US540809

    申请日：1995-10-11

    申请人： Paul A. Ward ,  Anthony S. Kourepenis ,  Marc S. Weinberg

    发明人： Paul A. Ward ,  Anthony S. Kourepenis ,  Marc S. Weinberg

    IPC分类号： G01C19/5719 ,  H03B5/30 ,  G05D15/00

    CPC分类号： G01C19/5719

    摘要： A control system for a tuning fork gyroscope uses motor frequency to control motor amplitude. The tuning fork gyroscope has a drive signal input and an output signal from which motor frequency is determined. A phase/frequency detector generates an error signal by comparing the actual oscillation phase of the output signal with the phase of a reference signal from a crystal controlled frequency synthesizer. The error signal is filtered in a feedback loop control to reduce phase detector ripple. The output of the loop controller is then used to determine the appropriate drive signal to drive the error signal to a constant and maintain a predetermined oscillation frequency.

    摘要翻译： 音叉陀螺仪的控制系统使用电机频率来控制电机振幅。 音叉陀螺仪具有驱动信号输入和确定电机频率的输出信号。 相位/频率检测器通过将输出信号的实际振荡相位与来自晶体控制频率合成器的参考信号的相位进行比较来产生误差信号。 误差信号在反馈回路控制中进行滤波，以减少相位检测器的纹波。 然后使用环路控制器的输出来确定适当的驱动信号以将误差信号驱动到恒定并保持预定的振荡频率。

    Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
    7.
    发明授权
    Temperature insensitive silicon oscillator and precision voltage reference formed therefrom 失效
    温度不敏感的硅振荡器和由此形成的精密电压基准

    公开(公告)号：US5783973A

    公开(公告)日：1998-07-21

    申请号：US804796

    申请日：1997-02-24

    申请人： Marc S. Weinberg ,  Paul A. Ward ,  Anthony S. Kourepenis

    发明人： Marc S. Weinberg ,  Paul A. Ward ,  Anthony S. Kourepenis

    IPC分类号： G01C19/574 ,  H03B5/30 ,  H03H9/02 ,  H03H9/24 ,  H03L1/02 ,  H03L7/099 ,  H03L7/00

    CPC分类号： G01C19/574 ,  H03H9/02448 ,  H03H9/2405 ,  H03H9/2426 ,  H03L1/02 ,  H03L7/099 ,  H03H2009/02496 ,  H03H2009/02511

    摘要： Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope. Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope, resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage.

    摘要翻译： 提供微机械加热的不敏感的硅谐振器，其具有与石英谐振器相当或优于石英谐振器的精度，并且由微机械的硅 - 玻璃工艺制造。 在一个实施例中，使用音叉陀螺仪实现这种谐振器。 使用硅谐振器启用辐射硬精密电压基准（PVR）。 相对于硅硅工艺振荡器的热敏感性降低，提供与石英振荡器相当的热敏感性。 通过采用基于音叉陀螺仪的微机械装置，谐振器由陀螺仪驱动和感测轴中的一个或两者制成。 构成谐振频率与频率标准相比较的振荡器环路的谐振器提供偏置电压作为参考电压。

    Force compensated comb drive
    8.
    发明授权
    Force compensated comb drive 有权
    强制补偿梳驱动

    公开(公告)号：US07302848B2

    公开(公告)日：2007-12-04

    申请号：US11076649

    申请日：2005-03-10

    申请人： Anthony S. Kourepenis ,  Marc S. Weinberg ,  Richard Elliott ,  Steven Daley

    发明人： Anthony S. Kourepenis ,  Marc S. Weinberg ,  Richard Elliott ,  Steven Daley

    IPC分类号： G01C19/00

    CPC分类号： G01C19/5719 ,  G01P15/125 ,  H02N1/008

    摘要： A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.

    摘要翻译： 用于微机电系统的力补偿梳驱动器包括用于提供代表物理量的输出信号的MEMS机构; 用于致动MEMS机构的梳齿驱动器; 梳状驱动电路，用于向梳状驱动器提供驱动信号，用于将由梳状驱动器施加的预定位移显影到MEMS机构; 响应于力的变化的自动增益控制，以向梳状驱动电路提供校正信号以维持预定的运动; 以及响应于校正信号的补偿装置，用于调整MEMS机构的输出信号，以补偿由于预定力的变化导致的输出信号中的误差。

    Integrated inertial stellar attitude sensor
    9.
    发明授权
    Integrated inertial stellar attitude sensor 有权
    集成惯性恒星姿态传感器

    公开(公告)号：US07216036B2

    公开(公告)日：2007-05-08

    申请号：US10621097

    申请日：2003-07-16

    申请人： Tye M. Brady ,  Anthony S. Kourepenis ,  William F. Wyman, Jr.

    发明人： Tye M. Brady ,  Anthony S. Kourepenis ,  William F. Wyman, Jr.

    IPC分类号： G01C21/00

    CPC分类号： G01C21/165 ,  B64G1/288 ,  B64G1/361 ,  B64G1/363 ,  G01C21/025

    摘要： An integrated inertial stellar attitude sensor for an aerospace vehicle includes a star camera system, a gyroscope system, a controller system for synchronously integrating an output of said star camera system and an output of said gyroscope system into a stream of data, and a flight computer responsive to said stream of data for determining from the star camera system output and the gyroscope system output the attitude of the aerospace vehicle.

    摘要翻译： 用于航空航天车辆的集成的惯性恒星姿态传感器包括星形摄像机系统，陀螺仪系统，用于将所述星形摄像机系统的输出和所述陀螺仪系统的输出同步地集成为数据流的控制器系统，以及飞行计算机 响应于所述数据流，用于从星形摄像机系统输出确定并且陀螺仪系统输出航空航天车辆的姿态。

    Beat frequency motor position detection scheme for tuning fork gyroscope and other sensors
    10.
    发明授权
    Beat frequency motor position detection scheme for tuning fork gyroscope and other sensors 失效
    音叉电机位置检测方案用于音叉陀螺仪等传感器

    公开(公告)号：US5747961A

    公开(公告)日：1998-05-05

    申请号：US541079

    申请日：1995-10-11

    申请人： Paul A. Ward ,  Anthony S. Kourepenis

    发明人： Paul A. Ward ,  Anthony S. Kourepenis

    IPC分类号： G01C19/5719 ,  G01P15/14

    CPC分类号： G01C19/5719 ,  G01P15/14

    摘要： A tuning fork gyroscope has an in-plane position sensitive pick-off to which an AC or AC+DC bias is applied. Intermodulation is exploited to produce beat-notes between the applied frequency and the motor frequency at amplitudes proportional to motor amplitude, but unaffected by error sources such as spurious substrate charge accumulation. The beat-notes are used to control motor amplitude without the effects of charge accumulation.

    摘要翻译： 音叉陀螺仪具有应用AC或AC + DC偏置的平面内位置敏感拾取器。 互调被用来在施加的频率和电动机频率之间产生与电机幅度成比例的幅度上的节拍，但不受诸如伪衬底电荷积累的误差源的影响。 节拍是用来控制电机振幅而不会产生电荷积累的影响。