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    Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
    5.
    发明授权
    Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices 失效
    拆分电极以最小化电荷瞬变，电机幅度失配误差，以及音叉陀螺仪和其他设备中垂直平移的灵敏度

    公开(公告)号：US5911156A

    公开(公告)日：1999-06-08

    申请号：US805013

    申请日：1997-02-24

    申请人： Paul A. Ward ,  Eric M. Hildebrant ,  Lance C. Niles ,  Marc S. Weinberg ,  Anthony S. Kourepenis

    发明人： Paul A. Ward ,  Eric M. Hildebrant ,  Lance C. Niles ,  Marc S. Weinberg ,  Anthony S. Kourepenis

    IPC分类号： G01C19/5719 ,  G01C19/00

    CPC分类号： G01C19/5719

    摘要： A micromechanical tuning fork gyroscope having two center electrodes is disclosed. The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes are equal, and hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does effect sense axis output signals.

    摘要翻译： 公开了一种具有两个中心电极的微机械音叉陀螺仪。 两个中心电极被相反极性的偏置电位激发。 相对偏置的中心电极在陀螺仪之间提供电对称性，从而减少电荷瞬变和对垂直平移的敏感性。 直接注入到质量块中的电流相等且相反，从而取消。 作用在证明质量块和交错电极上的电动机提升力相等，因此证明质量块以纯平移运动，从而减少同相偏差。 此外，垂直于陀螺仪平面的任何纯平移都会影响感测轴输出信号。

    Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope
    6.
    发明授权
    Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope 失效
    绝缘子导体陀螺仪陀螺仪中的电机幅度控制电路

    公开(公告)号：US06064169A

    公开(公告)日：2000-05-16

    申请号：US540809

    申请日：1995-10-11

    申请人： Paul A. Ward ,  Anthony S. Kourepenis ,  Marc S. Weinberg

    发明人： Paul A. Ward ,  Anthony S. Kourepenis ,  Marc S. Weinberg

    IPC分类号： G01C19/5719 ,  H03B5/30 ,  G05D15/00

    CPC分类号： G01C19/5719

    摘要： A control system for a tuning fork gyroscope uses motor frequency to control motor amplitude. The tuning fork gyroscope has a drive signal input and an output signal from which motor frequency is determined. A phase/frequency detector generates an error signal by comparing the actual oscillation phase of the output signal with the phase of a reference signal from a crystal controlled frequency synthesizer. The error signal is filtered in a feedback loop control to reduce phase detector ripple. The output of the loop controller is then used to determine the appropriate drive signal to drive the error signal to a constant and maintain a predetermined oscillation frequency.

    摘要翻译： 音叉陀螺仪的控制系统使用电机频率来控制电机振幅。 音叉陀螺仪具有驱动信号输入和确定电机频率的输出信号。 相位/频率检测器通过将输出信号的实际振荡相位与来自晶体控制频率合成器的参考信号的相位进行比较来产生误差信号。 误差信号在反馈回路控制中进行滤波，以减少相位检测器的纹波。 然后使用环路控制器的输出来确定适当的驱动信号以将误差信号驱动到恒定并保持预定的振荡频率。

    Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
    8.
    发明授权
    Temperature insensitive silicon oscillator and precision voltage reference formed therefrom 失效
    温度不敏感的硅振荡器和由此形成的精密电压基准

    公开(公告)号：US5783973A

    公开(公告)日：1998-07-21

    申请号：US804796

    申请日：1997-02-24

    申请人： Marc S. Weinberg ,  Paul A. Ward ,  Anthony S. Kourepenis

    发明人： Marc S. Weinberg ,  Paul A. Ward ,  Anthony S. Kourepenis

    IPC分类号： G01C19/574 ,  H03B5/30 ,  H03H9/02 ,  H03H9/24 ,  H03L1/02 ,  H03L7/099 ,  H03L7/00

    CPC分类号： G01C19/574 ,  H03H9/02448 ,  H03H9/2405 ,  H03H9/2426 ,  H03L1/02 ,  H03L7/099 ,  H03H2009/02496 ,  H03H2009/02511

    摘要： Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope. Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope, resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage.

    摘要翻译： 提供微机械加热的不敏感的硅谐振器，其具有与石英谐振器相当或优于石英谐振器的精度，并且由微机械的硅 - 玻璃工艺制造。 在一个实施例中，使用音叉陀螺仪实现这种谐振器。 使用硅谐振器启用辐射硬精密电压基准（PVR）。 相对于硅硅工艺振荡器的热敏感性降低，提供与石英振荡器相当的热敏感性。 通过采用基于音叉陀螺仪的微机械装置，谐振器由陀螺仪驱动和感测轴中的一个或两者制成。 构成谐振频率与频率标准相比较的振荡器环路的谐振器提供偏置电压作为参考电压。

    Force compensated comb drive
    9.
    发明授权
    Force compensated comb drive 有权
    强制补偿梳驱动

    公开(公告)号：US07302848B2

    公开(公告)日：2007-12-04

    申请号：US11076649

    申请日：2005-03-10

    申请人： Anthony S. Kourepenis ,  Marc S. Weinberg ,  Richard Elliott ,  Steven Daley

    发明人： Anthony S. Kourepenis ,  Marc S. Weinberg ,  Richard Elliott ,  Steven Daley

    IPC分类号： G01C19/00

    CPC分类号： G01C19/5719 ,  G01P15/125 ,  H02N1/008

    摘要： A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.

    摘要翻译： 用于微机电系统的力补偿梳驱动器包括用于提供代表物理量的输出信号的MEMS机构; 用于致动MEMS机构的梳齿驱动器; 梳状驱动电路，用于向梳状驱动器提供驱动信号，用于将由梳状驱动器施加的预定位移显影到MEMS机构; 响应于力的变化的自动增益控制，以向梳状驱动电路提供校正信号以维持预定的运动; 以及响应于校正信号的补偿装置，用于调整MEMS机构的输出信号，以补偿由于预定力的变化导致的输出信号中的误差。

    Temperature compensated oscillating accelerometer with force multiplier
    10.
    发明授权
    Temperature compensated oscillating accelerometer with force multiplier 有权
    带力乘数的温度补偿型振荡加速度计

    公开(公告)号：US06269696B1

    公开(公告)日：2001-08-07

    申请号：US09483326

    申请日：2000-01-14

    申请人： Marc S. Weinberg ,  Nathan A. St. Michel ,  David S. Nokes ,  Jeffrey T. Borenstein

    发明人： Marc S. Weinberg ,  Nathan A. St. Michel ,  David S. Nokes ,  Jeffrey T. Borenstein

    IPC分类号： G01P1508

    CPC分类号： G01P15/097 ,  G01P1/006 ,  G01P2015/0828

    摘要： A temperature compensated oscillating accelerometer with force multiplier includes a support substrate; a tuning fork suspended above the substrate; a primary anchor device connected between the tuning fork and substrate; a proof mass having an input axis; a force multiplier interconnected between the proof mass and the tuning fork; and a force multiplier anchor connected to the substrate and disposed at approximately the same area along the input axis as the primary anchor for offsetting the opposing effects of thermal expansion and stiffness in response to variations in temperature.

    摘要翻译： 具有力乘数的温度补偿振荡加速度计包括支撑衬底; 悬挂在基板上方的音叉; 连接在音叉和基板之间的主锚装置; 具有输入轴的检验质量块; 在力量乘法器之间相互连接的证明质量块和音叉; 以及连接到基板并且沿着与主锚相关的输入轴线大致相同的区域设置的力乘数锚，用于抵消温度变化引起的热膨胀和刚度的相反影响。