公开(公告)号：US20240404600A1

公开(公告)日：2024-12-05

申请号：US18800057

申请日：2024-08-10

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Eli Lusky

IPC: G11C16/10 ,  H10B20/25 ,  H10B41/10 ,  H10B41/27 ,  H10B41/35 ,  H10B41/41 ,  H10B43/10 ,  H10B43/27 ,  H10B43/35 ,  H10B43/40

Abstract: A semiconductor device including: a first level including memory control circuits (include a plurality of refresh circuits for the memory units) which include first transistors; a second level including a first array of memory cells including second transistors self-aligned to at least one of the third transistors; a third level disposed on top of the second level disposed on top of first level, the third level including a second array of memory cells including third transistors; a fourth level disposed on top of the third level, the fourth level including a third array of memory cells including fourth transistors, second level is bonded to the first level, a plurality of slits disposed through the second level, the third level, and the fourth level, the slits enable gate replacement of a plurality of the third transistors, where the second array of memory cells include a plurality of independently controlled memory units.

公开(公告)号：US12120880B1

公开(公告)日：2024-10-15

申请号：US18527356

申请日：2023-12-03

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H10B43/27 ,  H01L23/528 ,  H01L27/02 ,  H01L29/167 ,  H01L29/47 ,  H01L29/78 ,  H01L29/792 ,  H10B41/10 ,  H10B41/20 ,  H10B43/10 ,  H10B43/20 ,  H10B53/20

CPC classification number: H10B43/27 ,  H01L23/5283 ,  H01L27/0207 ,  H01L29/167 ,  H01L29/47 ,  H01L29/7827 ,  H01L29/792 ,  H10B43/10 ,  H10B43/20 ,  H10B41/10 ,  H10B41/20 ,  H10B53/20

Abstract: A 3D semiconductor device including: a first level including a single crystal layer and a memory control circuit including first transistors and at least one power-down control circuit; a first metal layer overlaying the single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors disposed atop the third metal layer with at least one including a metal gate; third transistors disposed atop the second transistors; a fourth metal layer atop the third transistors; a memory array including word-lines and at least four memory mini arrays, each including at least four rows by four columns of memory cells, each of the memory cells includes at least one of the second transistors or at least one of the third transistors; a connection path from the fourth metal to the third metal including a via disposed through the memory array.

公开(公告)号：US20240334702A1

公开(公告)日：2024-10-03

申请号：US18738967

申请日：2024-06-10

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Eli Lusky

IPC: H10B43/27 ,  H01L23/00 ,  H01L25/065 ,  H01L25/18 ,  H10B80/00

CPC classification number: H10B43/27 ,  H01L24/08 ,  H01L25/0657 ,  H01L25/18 ,  H10B80/00 ,  H01L2224/08145 ,  H01L2924/1431 ,  H01L2924/14511

Abstract: A 3D memory device including: a first structure including a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel, where the memory cell includes at least one charge trap structure, and where the at least one memory transistor is self-aligned to an overlaying another the at least one memory transistor, both being processed following a same lithography step; and a control level including a memory controller circuit, where the control level includes a plurality of latch sense amplifiers, where the control level is bonded to the first structure, and where the bonded includes hybrid bonding.

公开(公告)号：US20240334701A1

公开(公告)日：2024-10-03

申请号：US18738721

申请日：2024-06-10

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H10B43/27 ,  H01L23/528 ,  H01L27/02 ,  H01L29/167 ,  H01L29/47 ,  H01L29/78 ,  H01L29/792 ,  H10B41/10 ,  H10B41/20 ,  H10B43/10 ,  H10B43/20 ,  H10B53/20

CPC classification number: H10B43/27 ,  H01L23/5283 ,  H01L27/0207 ,  H01L29/167 ,  H01L29/47 ,  H01L29/7827 ,  H01L29/792 ,  H10B43/10 ,  H10B43/20 ,  H10B41/10 ,  H10B41/20 ,  H10B53/20

Abstract: A 3D semiconductor device including: a first level including a single crystal layer and a memory control circuit including first transistors and at least one cache memory unit; a first metal layer overlaying the single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors disposed atop the third metal layer with at least one including a metal gate; third transistors disposed atop the second transistors; a fourth metal layer atop the third transistors; a memory array including word-lines and at least four memory mini arrays, each including at least four rows by four columns of memory cells, each of the memory cells includes at least one of the second transistors or at least one of the third transistors; a connection path from the fourth metal to the third metal including a via disposed through the memory array.

公开(公告)号：US20240324166A1

公开(公告)日：2024-09-26

申请号：US18731340

申请日：2024-06-02

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Brian Cronquist

IPC: H10B10/00 ,  G11C16/04 ,  H10B12/00 ,  H10B41/10 ,  H10B41/35 ,  H10B41/41 ,  H10B43/10 ,  H10B43/35 ,  H10B43/40

CPC classification number: H10B10/125 ,  G11C16/0483 ,  H10B10/18 ,  H10B12/50 ,  H10B41/10 ,  H10B41/35 ,  H10B41/41 ,  H10B43/10 ,  H10B43/35 ,  H10B43/40

Abstract: A semiconductor device including: a first level including at least four independently controlled first memory arrays, where the first level includes first transistors; a second level disposed on top of the first level, where the second level includes second memory arrays; and a third level disposed on top of the second level, where the third level includes third transistors and a plurality of third metal layers, where the third level is bonded to the second level, where the bonded includes oxide to oxide bonding regions and a plurality of metal to metal bonding regions, where the first level includes first filled holes, where the second level includes second filled holes, where the second filled holes are aligned to the first filled holes with a more than 1 nm but less than 40 nm alignment error, and where the third level includes at least one SRAM memory array.

公开(公告)号：US20240274534A1

公开(公告)日：2024-08-15

申请号：US18622992

申请日：2024-03-31

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H01L23/528 ,  G11C16/04 ,  H01L23/522 ,  H10B41/10 ,  H10B41/27 ,  H10B41/35 ,  H10B43/10 ,  H10B43/27 ,  H10B43/35

CPC classification number: H01L23/5283 ,  G11C16/0483 ,  H01L23/5226 ,  H10B41/10 ,  H10B41/27 ,  H10B41/35 ,  H10B43/10 ,  H10B43/27 ,  H10B43/35

Abstract: A method of making a 3D multilayer semiconductor device, the method comprising: providing a first substrate comprising a first level, said first level comprising a first single crystal silicon layer; providing a second substrate comprising a second level, said second level comprising a second single crystal silicon layer; performing an epitaxial growth of a SiGe layer on top of said second single crystal silicon layer; performing an epitaxial growth of a third single crystal silicon layer on top of said SiGe layer; forming a plurality of second transistors each comprising a single crystal channel; forming a plurality of metal layers interconnecting said plurality of second transistors; and then performing a bonding of said second level onto said first level, wherein performing said bonding comprises making oxide-to-oxide bond zones, and performing removal of a majority of said second single crystal silicon layer.

公开(公告)号：US20240260262A1

公开(公告)日：2024-08-01

申请号：US18594804

申请日：2024-03-04

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H10B41/27 ,  G11C16/04 ,  H10B12/00 ,  H10B41/10 ,  H10B43/10 ,  H10B43/27 ,  H10B63/00

CPC classification number: H10B41/27 ,  G11C16/0483 ,  H10B12/20 ,  H10B41/10 ,  H10B43/10 ,  H10B43/27 ,  H10B63/84

Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer and a memory control circuit, the memory control circuit including a plurality of first transistors; a first metal layer overlaying the first single crystal layer, a second metal layer overlaying the first metal layer, a plurality of second transistors disposed atop the second metal layer, a third metal layer disposed above the plurality of second transistors; and a memory array including word-lines and memory cells, where the memory array includes at least four memory mini arrays, where at least one of the plurality of second transistors includes a metal gate, where each of the memory cells includes at least one of the plurality of second transistors, and where the memory control circuit includes at least one In-Out interface controller circuit.

公开(公告)号：US12041791B2

公开(公告)日：2024-07-16

申请号：US18431177

申请日：2024-02-02

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Brian Cronquist

IPC: H10B80/00 ,  H01L23/00 ,  H01L25/00 ,  H01L25/18

CPC classification number: H10B80/00 ,  H01L24/08 ,  H01L25/18 ,  H01L25/50 ,  H01L2224/08145

Abstract: A semiconductor device including: a first level including a plurality of first memory arrays, a plurality of first transistors, and a plurality of first metal layers; a second level disposed on top of the first level, where the second level includes a plurality of second memory arrays; and a third level disposed on top of the second level, where the third level includes a plurality of third transistors and a plurality of third metal layers, the third level is bonded to the second level, where the bonded includes oxide to oxide bonding regions and a plurality of metal to metal bonding regions, where the first level includes first filled holes (FFHs), where the second level includes second filled holes (SFHs), where the SFHs are aligned to the FFHs with a more than 1 nm but less than 40 nm alignment error, where the third level includes a plurality of Look-Up-Table circuits.

公开(公告)号：US12021028B2

公开(公告)日：2024-06-25

申请号：US18389582

申请日：2023-11-14

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Brian Cronquist

IPC: H01L23/528 ,  H01L23/522 ,  H01L25/065 ,  H10B10/00 ,  H10B12/00 ,  H10B41/35 ,  H10B43/35 ,  H10B69/00

CPC classification number: H01L23/5283 ,  H01L23/5226 ,  H01L25/0652 ,  H10B10/125 ,  H10B12/37 ,  H10B41/35 ,  H10B43/35 ,  H10B69/00 ,  H01L2225/06541

Abstract: A 3D device including: a first level including first transistors and a first interconnect; a second level including second transistors and is overlaying the first level; at least four electronic circuit units (ECUs); and a redundancy circuit, where each of the ECUs includes a first circuit which includes a portion of the first transistors, where each of the ECUs includes a second circuit, the second circuit including a portion of the second transistors, where each of the at least four ECUs includes a first vertical bus, where the first vertical bus provides electrical connections between the first circuit and the second circuit, where each of the at least four ECUs includes at least one processor and at least one memory array, where the second level is bonded to the first level, and the bonded includes oxide to oxide bonding regions and metal to metal bonding regions.

公开(公告)号：US20240206194A1

公开(公告)日：2024-06-20

申请号：US18431177

申请日：2024-02-02

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han ,  Brian Cronquist

IPC: H10B80/00 ,  H01L23/00 ,  H01L25/00 ,  H01L25/18

CPC classification number: H10B80/00 ,  H01L24/08 ,  H01L25/18 ,  H01L25/50 ,  H01L2224/08145

Abstract: A semiconductor device including: a first level including a plurality of first memory arrays, a plurality of first transistors, and a plurality of first metal layers; a second level disposed on top of the first level, where the second level includes a plurality of second memory arrays; and a third level disposed on top of the second level, where the third level includes a plurality of third transistors and a plurality of third metal layers, the third level is bonded to the second level, where the bonded includes oxide to oxide bonding regions and a plurality of metal to metal bonding regions, where the first level includes first filled holes (FFHs), where the second level includes second filled holes (SFHs), where the SFHs are aligned to the FFHs with a more than 1 nm but less than 40 nm alignment error, where the third level includes a plurality of Look-Up-Table circuits.