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公开(公告)号:US20180090538A1
公开(公告)日:2018-03-29
申请号:US15276000
申请日:2016-09-26
Applicant: OmniVision Technologies, Inc.
Inventor: Xin Wang , Dajiang Yang , Qin Wang , Duli Mao , Dyson Hsin-Chih Tai
IPC: H01L27/146
CPC classification number: H01L27/14685 , H01L27/14621 , H01L27/14629
Abstract: An image sensor includes a substrate, a plurality of light sensitive pixels, a first plurality of color filters, a plurality of reflective sidewalls, and a second plurality of color filters. The light sensitive pixels are formed on said substrate. The first plurality of color filters is disposed over a first group of the light sensitive pixels. The reflective sidewalls are formed on each side of each of the first plurality of color filters. The second plurality of color filters are disposed over a second group of light sensitive pixels and each color filter of the second plurality of color filters is separated from each adjacent filter of said first plurality of color filters by one of the reflective sidewalls. In a particular embodiment an etch-resistant layer is disposed over the first plurality of color filters and the second group of light sensitive pixels.
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公开(公告)号:US20240194719A1
公开(公告)日:2024-06-13
申请号:US18079201
申请日:2022-12-12
Applicant: OMNIVISION TECHNOLOGIES, INC.
IPC: H01L27/146
CPC classification number: H01L27/14643 , H01L27/14603 , H01L27/14612 , H01L27/14689
Abstract: An image sensor including a plurality of photodiodes disposed within a semiconductor substrate proximate to a first side of the semiconductor substrate, a first transfer gate and a second transfer gate that are each disposed proximate to the first side of the semiconductor substrate and coupled to a respective one of the plurality of photodiodes, and a floating diffusion region coupled to the first transfer gate and the second transfer gate is described. The first transfer gate is laterally separated from the second transfer gate by a separation distance. The floating diffusion region extends laterally within the semiconductor substrate a distance greater than the separation distance between the first transfer gate and the second transfer gate. The floating diffusion region includes a central portion surrounded by a peripheral portion. A first dopant concentration of the central portion is greater than a second dopant concentration of the peripheral portion.
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公开(公告)号:US11750906B2
公开(公告)日:2023-09-05
申请号:US17558199
申请日:2021-12-21
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Yuanwei Zheng , Qin Wang , Cunyu Yang , Guannan Chen , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
Abstract: An image sensor includes a substrate. An array of photodiodes is disposed in the substrate. A plurality of spacers is arranged in a spacer pattern. At least one spacer of the plurality of spacers has an aspect ratio of 18:1 or greater. A buffer layer is disposed between the substrate and the spacer pattern. An array of color filters is disposed in the spacer pattern.
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公开(公告)号:US20230215900A1
公开(公告)日:2023-07-06
申请号:US17568909
申请日:2022-01-05
Applicant: OMNIVISION TECHNOLOGIES, INC.
IPC: H01L27/146
CPC classification number: H01L27/14638 , H01L27/1463
Abstract: Pixels, such as for image sensors and electronic devices, include a photodiode formed in a semiconductor substrate, a floating diffusion, and a transfer structure selectively coupling the photodiode to the floating diffusion. The transfer structure includes a transfer gate formed on the semiconductor substrate, and a vertical channel structure including spaced apart first doped regions formed in the semiconductor substrate between the transfer gate and the photodiode. Each spaced apart first doped region is doped at a first dopant concentration with a first-type dopant. The spaced apart first doped regions are formed in a second doped region doped at a second dopant concentration with a second-type dopant of a different conductive type.
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公开(公告)号:US20220059600A1
公开(公告)日:2022-02-24
申请号:US16998815
申请日:2020-08-20
Applicant: OMNIVISION TECHNOLOGIES, INC.
IPC: H01L27/146
Abstract: A device includes a photodiode, a floating diffusion region, a transfer gate, and a channel region. The photodiode is disposed in a semiconductor material. The photodiode is coupled to generate charges in response to incident light. The photodiode has a substantially uniform doping profile throughout a depth of the photodiode in the semiconductor material. The floating diffusion region is disposed in the semiconductor material. The transfer gate is disposed between the photodiode and the floating diffusion region, wherein the transfer gate includes a plurality of fin structures. The channel region associated with the transfer gate is in the semiconductor material proximate to the transfer gate. The transfer gate is coupled to transfer the charge from the photodiode to the floating diffusion region through the channel region in response to a transfer signal coupled to be received by the transfer gate.
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公开(公告)号:US11245823B2
公开(公告)日:2022-02-08
申请号:US16539931
申请日:2019-08-13
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Yuanwei Zheng , Qin Wang , Cunyu Yang , Guannan Chen , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
IPC: H04N5/225 , G02B7/00 , G02B5/20 , G02B3/00 , H01L27/146
Abstract: An image sensor includes a substrate. An array of photodiodes is disposed in the substrate. A plurality of spacers is arranged in a spacer pattern. At least one spacer of the plurality of spacers has an aspect ratio of 18:1 or greater. A buffer layer is disposed between the substrate and the spacer pattern. An array of color filters is disposed in the spacer pattern.
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公开(公告)号:US20210057466A1
公开(公告)日:2021-02-25
申请号:US16548697
申请日:2019-08-22
Applicant: OmniVision Technologies, Inc.
IPC: H01L27/146
Abstract: A pixel array includes a semiconductor substrate, a plurality of isolation layer segments, and a plurality of photodiodes. Each of the plurality of isolation layer segments extends through the semiconductor substrate in a first direction. Each of the plurality of isolation layer segments encloses a portion of the semiconductor substrate in a plane perpendicular to the first direction. The plurality of isolation layer segments form a grid that defines a plurality of isolated sections of the semiconductor substrate. The plurality of isolated sections of the semiconductor substrate include the portions of the semiconductor substrate. Each of the photodiodes is formed in a respective one of the plurality of isolated sections of the semiconductor substrate.
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公开(公告)号:US20210051250A1
公开(公告)日:2021-02-18
申请号:US16539931
申请日:2019-08-13
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Yuanwei Zheng , Qin Wang , Cunyu Yang , Guannan Chen , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
Abstract: An image sensor includes a substrate. An array of photodiodes is disposed in the substrate. A plurality of spacers is arranged in a spacer pattern. At least one spacer of the plurality of spacers has an aspect ratio of 18:1 or greater. A buffer layer is disposed between the substrate and the spacer pattern. An array of color filters is disposed in the spacer pattern.
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公开(公告)号:US10116889B2
公开(公告)日:2018-10-30
申请号:US15443783
申请日:2017-02-27
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Qin Wang , Duli Mao , Dyson H. Tai , Lindsay Alexander Grant
Abstract: An image sensor includes an array of split dual photodiode (DPD) pairs. First groupings of the array of split DPD pairs consist entirely of either first-dimension split DPD pairs or entirely of second-dimension split DPD pairs. Each first grouping of the array of split DPD pairs consisting of the first-dimension split DPD pairs is adjacent to an other first grouping of the array of split DPD pairs consisting of the second-dimension split DPD pairs. The first-dimension is orthogonal to the second-dimension. A plurality of floating diffusion (FD) regions is arranged in each first grouping of the split DPD pairs. Each one of a plurality of transfer transistors is coupled to a respective photodiode of a respective split DPD pair, and is coupled between the respective photodiode and a respective one of the plurality of FD regions.
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公开(公告)号:US10079261B1
公开(公告)日:2018-09-18
申请号:US15680005
申请日:2017-08-17
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Qin Wang , Bill Phan , Sing-Chung Hu , Gang Chen
IPC: H01L27/146 , H01L29/417 , H01L21/3215 , H01L21/02 , H01L21/306 , H01L21/311
CPC classification number: H01L27/14643 , H01L21/02532 , H01L21/30604 , H01L21/31111 , H01L21/3215 , H01L27/1461 , H01L27/14612 , H01L27/1463 , H01L27/14636 , H01L27/14689 , H01L29/41783
Abstract: An image sensor includes a plurality of photodiodes and a floating diffusion disposed in a semiconductor material. The image sensor also includes a plurality of transfer gates coupled between the plurality of photodiodes and the floating diffusion to transfer the image charge generated in the plurality of photodiodes into the floating diffusion. Peripheral circuitry is disposed proximate to the plurality of photodiodes and coupled to receive the image charge from the plurality of photodiodes. A shallow trench isolation structure is laterally disposed, at least in part, between the plurality of photodiodes and the peripheral circuitry to prevent electrical crosstalk between the plurality of photodiodes and the peripheral circuitry. The peripheral circuitry includes one or more transistors including a source electrode and a drain electrode that are raised above a surface of the semiconductor material.
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