Method for forming a dual-damascene structure
    22.
    发明申请
    Method for forming a dual-damascene structure 审中-公开
    形成双镶嵌结构的方法

    公开(公告)号:US20060105567A1

    公开(公告)日:2006-05-18

    申请号:US10987780

    申请日:2004-11-12

    IPC分类号: H01L21/4763

    摘要: A dual-damascene structure is formed in a porous dielectric material using an anti-reflective coating. In accordance with one embodiment, during patterning and etching if the trench portions of the dual-damascene structure, the anti-reflective coating has a first density. After patterning and etching, the anti-reflective coating density is reduced. The reduction in the anti-reflective coating's density facilitates selective removal of the anti-reflective coating relative to the porous dielectric material.

    摘要翻译: 使用抗反射涂层在多孔电介质材料中形成双镶嵌结构。 根据一个实施例,在图案化和蚀刻期间,如果双镶嵌结构的沟槽部分,抗反射涂层具有第一密度。 在图案化和蚀刻之后,抗反射涂层密度降低。 抗反射涂层密度的降低有助于相对于多孔电介质材料的抗反射涂层的选择性去除。

    WAFER LEVEL SPECTROMETER
    29.
    发明申请

    公开(公告)号:US20120318966A1

    公开(公告)日:2012-12-20

    申请号:US13491442

    申请日:2012-06-07

    IPC分类号: G01J3/50 B82Y15/00

    摘要: A sensor apparatus for measuring characteristics of optical radiation has a substrate and a low profile spectrally selective detection system located within the substrate at one or more spatially separated locations. The spectrally selective detection system includes a generally laminar array of wavelength selectors optically coupled to a corresponding array of optical detectors. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    摘要翻译: 用于测量光辐射特性的传感器装置具有位于一个或多个空间分离位置的衬底内的衬底和低剖面光谱选择性检测系统。 光谱选择性检测系统包括光学耦合到相应阵列的光学检测器的波长选择器的大体层流阵列。 要强调的是,该摘要被提供以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。