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公开(公告)号:US20210240079A1
公开(公告)日:2021-08-05
申请号:US17003373
申请日:2020-08-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Juhyeon PARK , Su Min KIM , Yechan KIM , Ju-Young KIM , Jinjoo KIM , Hyunwoo KIM , Hyunji SONG , Songse YI , Suk Koo HONG
IPC: G03F7/038 , G03F7/004 , G03F7/38 , H01L21/027 , H01L21/3213 , G03F7/20
Abstract: A photolithography method and a method of manufacturing a semiconductor device, the photolithography method including applying a composition on a substrate to form a photoresist layer; performing an exposing process using extreme ultraviolet radiation (EUV) on the photoresist layer; and developing the photoresist layer to form photoresist patterns, wherein the composition includes a photosensitive resin, a photo-acid generator, a photo decomposable quencher, an additive, and a solvent, and the additive is a compound represented by the following Formula 4A: in Formula 4A, R1 to R5 are each independently hydrogen or iodine, at least one of R1 to R5 being iodine.
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公开(公告)号:US20230131429A1
公开(公告)日:2023-04-27
申请号:US17730532
申请日:2022-04-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jiyup KIM , Hyunwoo KIM , Hyun-Ji SONG , Juyoung KIM , Jinjoo KIM , Sunghwan PARK , Giyoung SONG
IPC: G03F7/004 , C07C381/12 , C07C309/12 , H01L21/027
Abstract: A photo-decomposable compound, a photoresist composition including the photo-decomposable compound, and a method of manufacturing an integrated circuit (IC) device using the photoresist composition, the photo-decomposable compound including a phenyl sulfonium cation component; and an anion component, wherein the phenyl sulfonium cation component has a protecting group, which is decomposable by an action of acid to generate an alkali-soluble group in response to exposure, the anion component generates acid in response to exposure, the protecting group is represented by *—C(═O)OR, in which R is a substituted or unsubstituted t-butyl group or a substituted or unsubstituted C3 to C30 alicyclic group, and * is a bonding site, and the protecting group is bonded to a phenyl group of the phenyl sulfonium cation component through an ether linking group.
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公开(公告)号:US20230130998A1
公开(公告)日:2023-04-27
申请号:US17966970
申请日:2022-10-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yechan KIM , Hyunwoo KIM , Jicheol PARK , Honggu IM
Abstract: A photoacid generator (PAG) and a photoresist composition including the PAG, the PAG being represented by Formula I below,
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公开(公告)号:US20230123035A1
公开(公告)日:2023-04-20
申请号:US17826234
申请日:2022-05-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Juhyeon PARK , Hyunwoo KIM , Suk Koo HONG , Su Min KIM , Yechan KIM , Jicheol PARK , Honggu IM
IPC: G03F7/039 , G03F7/004 , C08F228/02 , C08F220/18 , C08F226/02 , C08F220/30 , C08F214/18
Abstract: The present disclosure relates to a polymer for photoresist and a photoresist composition including the same. The polymer for photoresist may include a polymerization unit comprising a sensitizer, and a protection group. The polymerization unit may include a structure of chemical formula 1: wherein R1 is hydrogen, a halogen element, a methyl group, a trifluoromethyl group, a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, a substituted or unsubstituted aryl group having 6 to 18 carbon atoms, or a substituted or unsubstituted arylalkyl group having 6 to 18 carbon atoms, and n is an integer of 1 to 100,000.
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公开(公告)号:US20230016223A1
公开(公告)日:2023-01-19
申请号:US17747210
申请日:2022-05-18
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jihun HEO , Hyunwoo KIM , Jihoon PARK , Seungho HWANG
Abstract: According to certain embodiments of the disclosure, an electronic device comprising: a support member having a first hole; a first fingerprint sensor disposed in the first hole; and a non-conductive injection molding material integrally joining the support member and the first fingerprint sensor.
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公开(公告)号:US20220374054A1
公开(公告)日:2022-11-24
申请号:US17715165
申请日:2022-04-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jihun HEO , Hyunwoo KIM , Jihoon PARK , Seungho HWANG
Abstract: According to certain embodiments, a foldable electronic device comprises: a first housing; a hinge; a second housing coupled to the first housing by the hinge; a first display disposed on a front surface of the first housing, and a second display disposed on a front surface of the second housing; a sensor mounting module disposed in the second housing; a first fingerprint sensor that is mounted on the sensor mounting module and disposed between the front surface of the second housing and the second display; and a second fingerprint sensor that is mounted on the sensor mounting module and is disposed on a rear surface of the second housing.
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公开(公告)号:US20220337687A1
公开(公告)日:2022-10-20
申请号:US17850042
申请日:2022-06-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jihun HEO , Jihoon PARK , Seungho HWANG , Bongjae RHEE , Dongchurl KIM , Hyunwoo KIM , Sanggeun HAN
Abstract: An electronic device includes a display module including: a housing; a display including a first panel including a first surface, a second surface opposite the first surface, and a plurality of pixels interposed between the first surface and the second surface; a cover layer disposed on the first surface of the first panel; a second panel disposed on the second surface of the first panel; and a sensor coupled to the second surface of the first panel to provide a sensing area on the one surface of the housing.
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公开(公告)号:US20220252976A1
公开(公告)日:2022-08-11
申请号:US17567956
申请日:2022-01-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyun-Ji SONG , Hyunwoo KIM , Sukkoo HONG
IPC: G03F7/004
Abstract: Photoresist compositions may include a metal structure, a radical quencher including a phenolic compound, a photobase generator, and a solvent. To manufacture an integrated circuit (IC) device, a photoresist film is formed on a lower film using the photoresist composition. A first area, which is a portion of the photoresist film, is exposed to form a metal network from the metal structure in the first area of the photoresist film, a base is generated from the photobase generator in the first area of the photoresist film, and the radical quencher is deactivated using the base in the first area of the photoresist film. The photoresist film is developed to form a photoresist pattern including the first area. The lower film is processed using the photoresist pattern.
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公开(公告)号:US20210204135A1
公开(公告)日:2021-07-01
申请号:US17057848
申请日:2019-05-28
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jungil CHO , Soonhong KWON , Hyunwoo KIM , Minkyu SONG , Jongsung LEE , Joonghwan LEE , Yongsu CHUNG , Daesung CHOI
IPC: H04W12/122 , H04W12/73 , H04W12/02 , H04W12/61
Abstract: A method of identifying a malicious AP by a terminal apparatus includes obtaining first performance information related to hardware of a first AP based on a first beacon signal received from the first AP, comparing the first performance information with previously stored second performance information of a second AP, and determining whether the first AP is a malicious AP, based on a result of the comparing.
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公开(公告)号:US20210181349A1
公开(公告)日:2021-06-17
申请号:US17119370
申请日:2020-12-11
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Taehee LEE , Jinpyo GWAK , Hyunseok HONG , Hyunwoo KIM , Yeongrok LEE , Boseok MOON
IPC: G01S17/894 , G06T7/521 , G06T7/55 , G01S7/48
Abstract: An electronic apparatus is provided. The electronic apparatus according to the disclosure includes: a light emitter; a light receiver; a memory; and a processor, wherein the processor is configured to: acquire a first depth image based on first reflected light acquired during a first time period and store the first depth image in the memory, acquire a second depth image based on second reflected light acquired during a second time period following the first time period, and acquire distance information between the electronic apparatus and the object included in the second depth image by subtracting a first depth value of each pixel of the first depth image from a second depth value of each pixel of the second depth image, and correct the distance information by using a compensation value acquired based corresponding to time information on the second time period.
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