公开(公告)号：US20200049505A1

公开(公告)日：2020-02-13

申请号：US16655096

申请日：2019-10-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US10480942B2

公开(公告)日：2019-11-19

申请号：US15273312

申请日：2016-09-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US10466052B2

公开(公告)日：2019-11-05

申请号：US15201133

申请日：2016-07-01

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.

公开(公告)号：US10458794B2

公开(公告)日：2019-10-29

申请号：US15454907

申请日：2017-03-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

IPC: G01C19/5712

Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.

公开(公告)号：US09575092B2

公开(公告)日：2017-02-21

申请号：US14258911

申请日：2014-04-22

Applicant: STMicroelectronics S.r.l.

Inventor： Fabiano Frigoli ,  Giuseppe Ballotta ,  Massimo Greppi ,  Luca Giuseppe Falorni ,  Paolo Aranzulla

IPC: G01R1/04 ,  G01R31/28

CPC classification number: G01R31/2887 ,  G01R1/0408 ,  G01R1/0483 ,  G01R31/2891 ,  G01R31/2893

Abstract: An embodiment of a device for positioning a miniaturized piece, including: a positioning structure, which forms a first cavity, designed to receive with play the miniaturized piece, and a second cavity communicating with the first cavity; at least one electrical-contact terminal, facing the second cavity and electrically coupleable to an electronic testing device, designed to carry out an electrical test on the miniaturized piece; and an actuator device, which causes a vibration of the positioning structure, the vibration being such that the miniaturized piece translates, in use, towards the second cavity, until it penetrates at least in part into the second cavity.

Abstract translation: 一种用于定位小型化件的装置的实施例，包括：定位结构，其形成第一腔体，设计成用于放置小型化件接收，以及与第一腔体连通的第二腔室; 至少一个电接触端子，面向第二腔并电耦合到电子测试装置，设计用于对小型化件进行电测试; 以及致动器装置，其引起定位结构的振动，振动使得小型化件在使用中朝向第二腔平移，直到其至少部分地进入第二腔。

公开(公告)号：US09404747B2

公开(公告)日：2016-08-02

申请号：US14067051

申请日：2013-10-30

Applicant: STMicroelectronics S.r.l.

Inventor： Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/56 ,  G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.

Abstract translation: 一种微机电陀螺仪，包括：支撑体; 第一可移动质量块和第二可移动质量块，它们可根据第一驱动轴线振荡并围绕相应的第一和第二感测轴线可倾斜，并且相对于对称中心对称布置; 第一感测电极和与第一和第二可移动质量相关联并且相对于第一和第二感测轴对称地布置在支撑体上的第二感测电极，第一和第二可移动质量体电容耦合到相应的第一感测电极，并且 相应的第二感测电极，桥接元件，其弹性地联接到第一可移动质量块的相应内端和第二可移动质量块，并且联接到支撑体，以便能够围绕横向于第一驱动轴线的轴线倾斜。

公开(公告)号：US11906306B2

公开(公告)日：2024-02-20

申请号：US17750074

申请日：2022-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： Giacomo Langfelder ,  Leonardo Gaffuri Pagani ,  Luca Guerinoni ,  Luca Giuseppe Falorni ,  Patrick Fedeli ,  Paola Carulli

IPC: G01C19/5776 ,  G01C19/5712

CPC classification number: G01C19/5712 ,  G01C19/5776

Abstract: In an embodiment a circuit includes an inertial measurement unit configured to be oscillated via a driving signal provided by driving circuitry, a lock-in amplifier configured to receive a sensing signal from the inertial measurement unit and a reference demodulation signal which is a function of the driving signal and provide an inertial measurement signal based on the sensing signal, wherein the reference demodulation signal is affected by a variable phase error, phase meter circuitry configured to receive the driving signal and the sensing signal and provide, as a function of a phase difference between the driving signal and the sensing signal, a phase correction signal for the reference demodulation signal and a correction node configured to apply the phase correction signal to the reference demodulation signal so that, in response to the phase correction signal being applied to the reference demodulation signal, the phase error is maintained in a vicinity of a reference value.

公开(公告)号：US11808573B2

公开(公告)日：2023-11-07

申请号：US17728635

申请日：2022-04-25

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca Guerinoni ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5712 ,  G01C19/5755 ,  G01C19/574 ,  B81B3/00

CPC classification number: G01C19/5712 ,  B81B3/0018 ,  G01C19/574 ,  G01C19/5755 ,  B81B2201/0242

Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.

公开(公告)号：US11740088B2

公开(公告)日：2023-08-29

申请号：US17524609

申请日：2021-11-11

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca Guerinoni ,  Luca Giuseppe Falorni

IPC: G01C25/00 ,  G01C19/5712

CPC classification number: G01C19/5712 ,  G01C25/005

Abstract: A microelectromechanical gyroscope includes: the support structure; a sensing mass, coupled to the support structure with degrees of freedom along a driving direction and a sensing direction perpendicular to each other; and a calibration structure facing the sensing mass and separated from the sensing mass by a gap having an average width, the calibration structure being movable with respect to the sensing mass so that displacements of the calibration structure cause variations in the average width of the gap. A calibration actuator controls a relative position of the calibration structure with respect to the sensing mass and the average width of the gap.

公开(公告)号：US20220390234A1

公开(公告)日：2022-12-08

申请号：US17750074

申请日：2022-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： Giacomo Langfelder ,  Leonardo Gaffuri Pagani ,  Luca Guerinoni ,  Luca Giuseppe Falorni ,  Patrick Fedeli ,  Paola Carulli

IPC: G01C19/5712 ,  G01C19/5776

Abstract: In an embodiment a circuit includes an inertial measurement unit configured to be oscillated via a driving signal provided by driving circuitry, a lock-in amplifier configured to receive a sensing signal from the inertial measurement unit and a reference demodulation signal which is a function of the driving signal and provide an inertial measurement signal based on the sensing signal, wherein the reference demodulation signal is affected by a variable phase error, phase meter circuitry configured to receive the driving signal and the sensing signal and provide, as a function of a phase difference between the driving signal and the sensing signal, a phase correction signal for the reference demodulation signal and a correction node configured to apply the phase correction signal to the reference demodulation signal so that, in response to the phase correction signal being applied to the reference demodulation signal, the phase error is maintained in a vicinity of a reference value.