METHOD OF PROVIDING SPEECH RECOGNITION SERVICE AND ELECTRONIC DEVICE FOR SAME

    公开(公告)号:US20200264839A1

    公开(公告)日:2020-08-20

    申请号:US16791073

    申请日:2020-02-14

    Abstract: An electronic device includes a communication circuit, a display, a microphone, a processor operatively connected to the communication circuit, the display, and the microphone, and a memory operatively connected to the processor, wherein the memory is configured to store instructions which, when executed, cause the processor to control the electronic device to: transmit information related to a predetermined event to a server through the communication circuit in response to detection of the predetermined event through an application, display a user interface through the display in response to reception of information related to the user interface including at least one visual object selectable by a user to control a function of the application through the communication circuit, receive a user-uttered input for selecting one of the at least one visual object included in the user interface through the microphone, and transmit information related to the user-uttered input to the server through the communication circuit to perform a function corresponding to the visual object selected by the user-uttered input.

    SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

    公开(公告)号:US20240167162A1

    公开(公告)日:2024-05-23

    申请号:US18215916

    申请日:2023-06-29

    CPC classification number: C23C16/4586 C23C16/4581 C23C16/46

    Abstract: A substrate processing apparatus includes a chamber providing a space for performing a semiconductor process on a semiconductor substrate, and a substrate stage configured to support the semiconductor substrate. The substrate stage includes a platen having a seating surface to support the semiconductor substrate, the platen having a resistance heater and an RF electrode adjacent to the seating surface, a shaft under the platen, the shaft having a first through hole in a central region and a plurality of second through holes in a peripheral region surrounding the central region, an RF rod spaced apart from an inner wall of the first through hole, the RF rod electrically connected to the RF electrode, and a plurality of heater rods respectively within the plurality of second through holes and electrically connected to the resistance heater.

    DISPLAY PANEL DRIVING DEVICE AND DISPLAY PANEL DRIVING METHOD

    公开(公告)号:US20240021129A1

    公开(公告)日:2024-01-18

    申请号:US18061588

    申请日:2022-12-05

    Abstract: A driving device of a display panel includes a reference voltage generator, a capacitor circuit, and a gamma voltage generator. The reference voltage generator is configured to generate a maximum gamma voltage and a minimum gamma voltage. The capacitor circuit is configured to, response to receiving the first driving voltage, charge a first charge based on a voltage difference between a first driving voltage and the maximum gamma voltage and charge a second charge based on a voltage difference between the first driving voltage and the minimum gamma voltage. The capacitor circuit is configured to, in response to receiving a second driving voltage, output a first gamma reference voltage and a second gamma reference voltage. The gamma voltage generator is configured to generate a plurality of gamma voltages based on the first gamma reference voltage and the second gamma reference voltage.

    HYBRID MATCHER AND RADIO FREQUENCY MATCHING SYSTEM INCLUDING THE HYBRID MATCHER

    公开(公告)号:US20230187175A1

    公开(公告)日:2023-06-15

    申请号:US17859316

    申请日:2022-07-07

    CPC classification number: H01J37/32183 H03H7/38 H01J2237/24564

    Abstract: Provided are a hybrid matcher capable of precisely performing impedance matching at a high speed when RF power is applied with a multi-level pulse in a facility using RF plasma, and an RF matching system including the hybrid matcher. The hybrid matcher includes a matching circuit in which a plurality of variable element-switch sets are connected to each other in parallel, the variable element-switch sets each including a variable impedance element and a switch connected to the variable impedance element in series and electrically operating therewith, a sensor disposed at a front stage of the matching circuit and configured to measure a current and a voltage of radio frequency (RF) power applied from an RF generator, a variable element driver configured to drive the variable impedance element, a switch driver configured to drive the switch, and a controller configured to control the variable element driver and the switch driver.

    LIFT PIN ALIGNMENT METHOD AND ALIGNMENT APPARATUS AND SUBSTRATE PROCESSING APPARATUS

    公开(公告)号:US20210028052A1

    公开(公告)日:2021-01-28

    申请号:US16846792

    申请日:2020-04-13

    Abstract: A substrate processing apparatus and a lift pin alignment apparatus, the substrate processing apparatus including a chamber; a substrate plate on which the substrate is seatable; a plurality of movable lift in the substrate plate to support the substrate; a leveling sensor configured to be loadable in the chamber on the lift pins; a controller configured to receive measurement values of roll (φ) and pitch (θ) of a plane of the lift pins to calculate a rotation matrix (T) of the plane from the measurement values of roll (φ) and pitch (θ), and to calculate travel distances of the lift pins for leveling the plane to be parallel with a horizontal reference plane by using the rotation matrix (T) and to output a lift pin control signal for aligning the lift pins; and a lift pin driver to move the lift pins according to the lift pin control signal.

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