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公开(公告)号:US20200264839A1
公开(公告)日:2020-08-20
申请号:US16791073
申请日:2020-02-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jaeyoung YANG , Donghee SUH , Hojun JAYGARL , Minsung KIM , Jinwoong KIM , Youngbin KIM , Kwangbin LEE , Youngmin LEE
Abstract: An electronic device includes a communication circuit, a display, a microphone, a processor operatively connected to the communication circuit, the display, and the microphone, and a memory operatively connected to the processor, wherein the memory is configured to store instructions which, when executed, cause the processor to control the electronic device to: transmit information related to a predetermined event to a server through the communication circuit in response to detection of the predetermined event through an application, display a user interface through the display in response to reception of information related to the user interface including at least one visual object selectable by a user to control a function of the application through the communication circuit, receive a user-uttered input for selecting one of the at least one visual object included in the user interface through the microphone, and transmit information related to the user-uttered input to the server through the communication circuit to perform a function corresponding to the visual object selected by the user-uttered input.
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公开(公告)号:US20250140509A1
公开(公告)日:2025-05-01
申请号:US18631735
申请日:2024-04-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Dongwan KIM , Minsung KIM , Youngseok SONG , Jisoo IM , Kanghee KIM , Younseon WANG , Junho IM
IPC: H01J37/02 , H01J37/305
Abstract: An ion neutralization module comprising a reflector configured to neutralize an ion, a frame configured to support the reflector, and a conductive adhesive between the reflector and the frame to attach the reflector to the frame.
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公开(公告)号:US20240167162A1
公开(公告)日:2024-05-23
申请号:US18215916
申请日:2023-06-29
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jihyeong LEE , Sangyeon OH , Minsung KIM , Byeongsang KIM , Yihwan KIM , Sangchul HAN
IPC: C23C16/458 , C23C16/46
CPC classification number: C23C16/4586 , C23C16/4581 , C23C16/46
Abstract: A substrate processing apparatus includes a chamber providing a space for performing a semiconductor process on a semiconductor substrate, and a substrate stage configured to support the semiconductor substrate. The substrate stage includes a platen having a seating surface to support the semiconductor substrate, the platen having a resistance heater and an RF electrode adjacent to the seating surface, a shaft under the platen, the shaft having a first through hole in a central region and a plurality of second through holes in a peripheral region surrounding the central region, an RF rod spaced apart from an inner wall of the first through hole, the RF rod electrically connected to the RF electrode, and a plurality of heater rods respectively within the plurality of second through holes and electrically connected to the resistance heater.
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公开(公告)号:US20240021129A1
公开(公告)日:2024-01-18
申请号:US18061588
申请日:2022-12-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Minsung KIM , Seung-Hoon BAEK
IPC: G09G3/20
CPC classification number: G09G3/2007 , G09G2320/0673 , G09G2310/061 , G09G2330/028 , G09G2310/08 , G09G2330/021 , G09G2320/0247
Abstract: A driving device of a display panel includes a reference voltage generator, a capacitor circuit, and a gamma voltage generator. The reference voltage generator is configured to generate a maximum gamma voltage and a minimum gamma voltage. The capacitor circuit is configured to, response to receiving the first driving voltage, charge a first charge based on a voltage difference between a first driving voltage and the maximum gamma voltage and charge a second charge based on a voltage difference between the first driving voltage and the minimum gamma voltage. The capacitor circuit is configured to, in response to receiving a second driving voltage, output a first gamma reference voltage and a second gamma reference voltage. The gamma voltage generator is configured to generate a plurality of gamma voltages based on the first gamma reference voltage and the second gamma reference voltage.
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公开(公告)号:US20230402258A1
公开(公告)日:2023-12-14
申请号:US18136448
申请日:2023-04-19
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yunhwan KIM , Dougyong SUNG , Namkyun KIM , Minsung KIM , Youngjin NOH
IPC: H01J37/32 , H01L21/683 , B33Y80/00
CPC classification number: H01J37/32449 , H01J37/32724 , H01J37/32568 , H01J37/32082 , H01L21/6833 , B33Y80/00 , H01J2237/2007 , H01J2237/032 , H01J2237/334 , H01J2237/2001
Abstract: A plasma processing apparatus includes a process chamber in which a substrate processing process is performed; an electrostatic chuck having a microcavity; a lower electrode disposed to be in contact with a lower surface of the electrostatic chuck; a high-frequency power supply applying high-frequency power to the lower electrode; a conductive supporter disposed to be spaced apart from a lower portion of the lower electrode and grounded thereto; and a discharge suppressor located between the lower electrode and the conductive supporter, having a gas supply flow path forming a portion of a gas supply line, and molded by three dimensional printing, wherein the gas supply flow path has a space portion having a length of 5 mm or less in a direction of an electric field formed by the high-frequency power and connecting upper and lower surfaces of the discharge suppressor.
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公开(公告)号:US20230187175A1
公开(公告)日:2023-06-15
申请号:US17859316
申请日:2022-07-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyosin KIM , Sungyong LIM , Minsung KIM , Dongyub KIM , Sungyeol KIM , Jongbeom MOON , Seungbo SHIM
CPC classification number: H01J37/32183 , H03H7/38 , H01J2237/24564
Abstract: Provided are a hybrid matcher capable of precisely performing impedance matching at a high speed when RF power is applied with a multi-level pulse in a facility using RF plasma, and an RF matching system including the hybrid matcher. The hybrid matcher includes a matching circuit in which a plurality of variable element-switch sets are connected to each other in parallel, the variable element-switch sets each including a variable impedance element and a switch connected to the variable impedance element in series and electrically operating therewith, a sensor disposed at a front stage of the matching circuit and configured to measure a current and a voltage of radio frequency (RF) power applied from an RF generator, a variable element driver configured to drive the variable impedance element, a switch driver configured to drive the switch, and a controller configured to control the variable element driver and the switch driver.
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公开(公告)号:US20210028052A1
公开(公告)日:2021-01-28
申请号:US16846792
申请日:2020-04-13
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jinho SO , Keonwoo KIM , Joohee KIM , Minsung KIM , Eultae KIM , Bora YOON
IPC: H01L21/687 , H01L21/67 , H01L21/68 , H01J37/32
Abstract: A substrate processing apparatus and a lift pin alignment apparatus, the substrate processing apparatus including a chamber; a substrate plate on which the substrate is seatable; a plurality of movable lift in the substrate plate to support the substrate; a leveling sensor configured to be loadable in the chamber on the lift pins; a controller configured to receive measurement values of roll (φ) and pitch (θ) of a plane of the lift pins to calculate a rotation matrix (T) of the plane from the measurement values of roll (φ) and pitch (θ), and to calculate travel distances of the lift pins for leveling the plane to be parallel with a horizontal reference plane by using the rotation matrix (T) and to output a lift pin control signal for aligning the lift pins; and a lift pin driver to move the lift pins according to the lift pin control signal.
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公开(公告)号:US20180024677A1
公开(公告)日:2018-01-25
申请号:US15637635
申请日:2017-06-29
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Minsung KIM , Jaehun JEONG , Haewoon PARK , Seung-Hoon BAEK , San-ho BYUN , Jinbong KIM , YoonKyung CHOI
IPC: G06F3/041 , G09G3/3275 , G09G3/3266 , G06F3/044 , G09G3/3233
CPC classification number: G06F3/0412 , G06F1/3262 , G06F3/0416 , G06F3/0418 , G06F3/044 , G09G3/3233 , G09G3/3266 , G09G3/3275 , G09G3/3648 , G09G3/3655 , G09G2300/0809 , G09G2310/0264 , G09G2320/029
Abstract: An operating method of a touch display driving integrated circuit that is connected with a touch display panel through touch sensing lines and data lines is provided. The method includes applying a common voltage to each touch sensing line, increasing voltages of the touch sensing lines and the data lines by a predetermined level, providing a first touch sensing signal to each touch sensing line, and sensing a touch of a user based on signal variations of the touch sensing lines.
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公开(公告)号:US20170271190A1
公开(公告)日:2017-09-21
申请号:US15420211
申请日:2017-01-31
Applicant: Samsung Electronics Co., Ltd.
Inventor: Minsung KIM , Myoung Soo PARK , Dougyong SUNG , Yun-Kwang JEON
IPC: H01L21/683 , H01J37/32 , H01L21/67
CPC classification number: H01L21/6833 , H01J37/3211 , H01J37/3244 , H01J37/32532 , H01J37/32715 , H01J37/32724 , H01J2237/334 , H01L21/67103 , H01L21/67248
Abstract: A substrate processing apparatus includes an electrostatic chuck which is made up of a base, a dielectric plate on the base, a chuck electrode in the dielectric plate, and a first heater section in the dielectric plate between the chuck electrode and the base. The first heater section includes first heaters that are separated from each other in a first direction, and respective first upper plate electrodes disposed between the first heaters and the base. The first upper plate electrodes are separated from each other in the first direction and respectively connected to the first heaters.
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