公开(公告)号：US20220214783A1

公开(公告)日：2022-07-07

申请号：US17705514

申请日：2022-03-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeong Won KO ,  Mun Hwi KIM ,  Joon Hwan KIM ,  Hye Jin KIM ,  Kyung Wook RO ,  Myoung Soo PARK ,  Jung Woo SHIN ,  Ji Hun LEE ,  Han Ju CHO

IPC: G06F3/0482 ,  G06F3/04886 ,  G06F9/48 ,  G06F1/16 ,  G06F9/451 ,  G06F3/048

Abstract: Disclosed is an electronic device that includes a display that outputs execution screens of a plurality of applications, a memory that stores the plurality of applications, and a processor electrically connected with the display and the memory. The processor retrieves a history of one or more applications among the plurality of applications that were previously executed in the electronic device, in response to a user input detected by the electronic device and outputs the history on the display based on information about the one or more applications and information about layouts of execution screens of the one or more applications. If at least one of the one or more applications is selected from the history, the processor outputs an execution screen of the selected application on the display according to the corresponding layout.

公开(公告)号：US20210181906A1

公开(公告)日：2021-06-17

申请号：US17184744

申请日：2021-02-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeong Won KO ,  Mun Hwi KIM ,  Joon Hwan KIM ,  Hye Jin KIM ,  Kyung Wook RO ,  Myoung Soo PARK ,  Jung Woo SHIN ,  Ji Hun LEE ,  Han Ju CHO

IPC: G06F3/0482 ,  G06F3/0488 ,  G06F9/48 ,  G06F1/16 ,  G06F9/451 ,  G06F3/048

Abstract: Disclosed is an electronic device that includes a display that outputs execution screens of a plurality of applications, a memory that stores the plurality of applications, and a processor electrically connected with the display and the memory. The processor retrieves a history of one or more applications among the plurality of applications that were previously executed in the electronic device, in response to a user input detected by the electronic device and outputs the history on the display based on information about the one or more applications and information about layouts of execution screens of the one or more applications. If at least one of the one or more applications is selected from the history, the processor outputs an execution screen of the selected application on the display according to the corresponding layout.

公开(公告)号：US20130224675A1

公开(公告)日：2013-08-29

申请号：US13778328

申请日：2013-02-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Myoung Soo PARK

IPC: F27D5/00

CPC classification number: F27D5/00 ,  F27D5/0037

Abstract: An electrostatic chuck device includes a surface to support a substrate, an electrode to generate electrostatic force for the substrate, and a plurality of heaters to heat different regions of the surface. The plurality of heaters include a first heater to heat a first region to a first temperature, a second heater to heat a second region to a second temperature, and a third heater to heat a third region to a third temperature between the first and second temperatures. The second region is closer to a peripheral area of the surface than the first region, and the third region between the first and second regions.

Abstract translation: 静电吸盘装置包括用于支撑衬底的表面，用于为衬底产生静电力的电极，以及用于加热表面的不同区域的多个加热器。 多个加热器包括将第一区域加热至第一温度的第一加热器，将第二区域加热至第二温度的第二加热器，以及将第三区域加热至第一和第二温度之间的第三温度的第三加热器 。 第二区域比第一区域更靠近表面的周边区域，并且第一区域和第二区域之间的第三区域。

公开(公告)号：US20230251759A1

公开(公告)日：2023-08-10

申请号：US18135538

申请日：2023-04-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeong Won KO ,  Mun Hwi KIM ,  Joon Hwan KIM ,  Hye Jin KIM ,  Kyung Wook RO ,  Myoung Soo PARK ,  Jung Woo SHIN ,  Ji Hun LEE ,  Han Ju CHO

IPC: G06F3/0482 ,  G06F3/04886 ,  G06F9/48 ,  G06F1/16 ,  G06F9/451 ,  G06F3/048

CPC classification number: G06F3/0482 ,  G06F3/04886 ,  G06F9/48 ,  G06F1/1616 ,  G06F1/1652 ,  G06F9/451 ,  G06F3/048 ,  G06F2209/482 ,  G06F2203/04803

Abstract: Disclosed is an electronic device that includes a display that outputs execution screens of a plurality of applications, a memory that stores the plurality of applications, and a processor electrically connected with the display and the memory. The processor retrieves a history of one or more applications among the plurality of applications that were previously executed in the electronic device, in response to a user input detected by the electronic device and outputs the history on the display based on information about the one or more applications and information about layouts of execution screens of the one or more applications. If at least one of the one or more applications is selected from the history, the processor outputs an execution screen of the selected application on the display according to the corresponding layout.

公开(公告)号：US20180188910A1

公开(公告)日：2018-07-05

申请号：US15860879

申请日：2018-01-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeong Won KO ,  Mun Hwi KIM ,  Joon Hwan KIM ,  Hye Jin KIM ,  Kyung Wook RO ,  Myoung Soo PARK ,  Jung Woo SHIN ,  Ji Hun LEE ,  Han Ju CHO

IPC: G06F3/0482 ,  G06F3/0488 ,  G06F1/16 ,  G06F9/48

Abstract: Disclosed is an electronic device that includes a display that outputs execution screens of a plurality of applications, a memory that stores the plurality of applications, and a processor electrically connected with the display and the memory. The processor retrieves a history of one or more applications among the plurality of applications that were previously executed in the electronic device, in response to a user input detected by the electronic device and outputs the history on the display based on information about the one or more applications and information about layouts of execution screens of the one or more applications. If at least one of the one or more applications is selected from the history, the processor outputs an execution screen of the selected application on the display according to the corresponding layout.

公开(公告)号：US20170271190A1

公开(公告)日：2017-09-21

申请号：US15420211

申请日：2017-01-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minsung KIM ,  Myoung Soo PARK ,  Dougyong SUNG ,  Yun-Kwang JEON

IPC: H01L21/683 ,  H01J37/32 ,  H01L21/67

CPC classification number: H01L21/6833 ,  H01J37/3211 ,  H01J37/3244 ,  H01J37/32532 ,  H01J37/32715 ,  H01J37/32724 ,  H01J2237/334 ,  H01L21/67103 ,  H01L21/67248

Abstract: A substrate processing apparatus includes an electrostatic chuck which is made up of a base, a dielectric plate on the base, a chuck electrode in the dielectric plate, and a first heater section in the dielectric plate between the chuck electrode and the base. The first heater section includes first heaters that are separated from each other in a first direction, and respective first upper plate electrodes disposed between the first heaters and the base. The first upper plate electrodes are separated from each other in the first direction and respectively connected to the first heaters.

公开(公告)号：US20200126827A1

公开(公告)日：2020-04-23

申请号：US16703270

申请日：2019-12-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Minsung KIM ,  Myoung Soo PARK ,  Dongyun YEO ,  Dougyong SUNG ,  Suho LEE ,  Yun-Kwang JEON

IPC: H01L21/67 ,  H01L21/324 ,  H01J37/32 ,  H01L21/3065 ,  H01L21/683 ,  H02N13/00

Abstract: An electrostatic chuck, a substrate processing apparatus, and a method of manufacturing a semiconductor device are provided. The electrostatic chuck comprises a chuck base, an insulation plate on the chuck base, a first heater comprising a cell heater in the insulation plate, and a heater controller configured to control the cell heater. The heater controller obtains a resistance of the cell heater and compares the resistance with a threshold value to control a heating power provided to the cell heater.

公开(公告)号：US20190148205A1

公开(公告)日：2019-05-16

申请号：US16248328

申请日：2019-01-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minsung KIM ,  Myoung Soo PARK ,  Dougyong SUNG ,  Yun-Kwang JEON

IPC: H01L21/683 ,  H01L21/67 ,  H01J37/32

Abstract: An electrostatic chuck includes a base, a dielectric plate on the base, a chuck electrode in the dielectric plate, and a lower heater section including lower heaters in the dielectric plate between the chuck electrode and the base, and a lower ground electrode between the lower heaters and the base. The chuck further includes an upper heater section including upper heaters between the lower heaters and the chuck electrode, and a upper ground electrode between the upper heaters and the lower heaters, and a plurality of via contact electrodes connecting the upper ground electrode into the lower ground electrode.

公开(公告)号：US20180174802A1

公开(公告)日：2018-06-21

申请号：US15804304

申请日：2017-11-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seungkyu LIM ,  DOUGYONG SUNG ,  Myoung Soo PARK ,  Jaehoon KIM ,  Eunyoung LEE ,  Seiwon CHUNG ,  YOSHIHISA HIRANO

IPC: H01J37/32 ,  H01L21/67

CPC classification number: H01J37/32119 ,  H01J37/3211 ,  H01J37/32183 ,  H01J37/32642 ,  H01J2237/334 ,  H01L21/67069 ,  H01L21/6831

Abstract: A dielectric window, a plasma system including the same, a method of fabricating the same, and a method of manufacturing a semiconductor device are provided. The method of manufacturing the semiconductor device may include steps of providing a substrate in a plasma chamber, performing a plasma treatment on a surface of the substrate, and removing the substrate from the plasma chamber, wherein the plasma chamber comprises the dielectric window. The dielectric window may include a dielectric material disk with at least one void, a filler filled in the void to allow the dielectric material disk to have a flat surface, and a passivation layer provided on the filler and the dielectric material disk.

公开(公告)号：US20160343547A1

公开(公告)日：2016-11-24

申请号：US15148440

申请日：2016-05-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seungkyu LIM ,  Myoung Soo PARK ,  Dougyong SUNG

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/27 ,  C23C16/50 ,  H01L21/683 ,  H01L21/67

CPC classification number: H01J37/32642 ,  C23C16/26 ,  C23C16/27 ,  C23C16/4404 ,  C23C16/4581 ,  C23C16/50 ,  H01J37/32477 ,  H01J37/32853 ,  H01L21/6831 ,  H01L21/68757

Abstract: Provided is a substrate processing system including a plasma processing module and a protection layer coated on the plasma processing module. The protection layer may include a diamond film.

Abstract translation: 提供了包括等离子体处理模块和涂覆在等离子体处理模块上的保护层的衬底处理系统。 保护层可以包括金刚石膜。