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公开(公告)号：US07041988B2
公开(公告)日：2006-05-09
申请号：US10431782
申请日：2003-05-08
CPC分类号： B82Y10/00 , B82Y40/00 , G21K1/093 , H01J37/153 , H01J37/3177 , H01J2237/1536
摘要： An electron beam exposure apparatus for exposing wafer with an electron beam, includes: a first electromagnetic lens system for making the electron beam incident substantially perpendicularly on a first plane be incident on a second plane substantially perpendicularly; a second electromagnetic lens system for making the electron beam that was substantially perpendicularly incident on the second plane be incident on the wafer substantially perpendicularly; a rotation correction lens provided within the first electromagnetic lens system for correcting rotation of the electron beam caused by at least the first electromagnetic lens system; a deflection system for deflecting the electron beam to a position on the wafer; and a deflection-correction optical system provided within the second electromagnetic lens system for correcting deflection aberration caused by the deflection system.
摘要翻译： 一种用电子束曝光晶片的电子束曝光装置，包括：用于使基本上垂直于第一平面的电子束入射到第二平面上的第一电磁透镜系统基本垂直入射; 用于使基本上垂直入射在第二平面上的电子束的第二电磁透镜系统基本上垂直入射在晶片上; 旋转校正透镜，设置在第一电磁透镜系统内，用于校正由至少第一电磁透镜系统引起的电子束的旋转; 用于将电子束偏转到晶片上的位置的偏转系统; 以及设置在第二电磁透镜系统内用于校正由偏转系统引起的偏转像差的偏转校正光学系统。
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22.发明授权Multi-beam exposure apparatus using a multi-axis electron lens, fabrication method of a semiconductor device 有权使用多轴电子透镜的多光束曝光装置，半导体装置的制造方法公开(公告)号：US06787780B2
公开(公告)日：2004-09-07
申请号：US09824880
申请日：2001-04-04
IPC分类号： H01J3712
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3177 , H01J2237/0635 , H01J2237/1205
摘要： An electron beam exposure apparatus for exposing a wafer includes: a multi-axis electron lens operable to converge a plurality of electron beams independently of each other; and a lens-intensity adjuster including a substrate provided to be substantially parallel to the multi-axis electron lens, and a lens-intensity adjusting unit operable to adjust the lens intensity of the multi-axis electron lens applied to the electron beams passing through the lens openings, respectively.
摘要翻译： 用于曝光晶片的电子束曝光装置包括：可操作以彼此独立地会聚多个电子束的多轴电子透镜; 以及透镜强度调节器，其包括设置为基本上平行于所述多轴电子透镜的基板，以及透镜强度调节单元，其可操作以调节施加到通过所述多轴电子透镜的电子束的多轴电子透镜的透镜强度 镜头开口。
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公开(公告)号：US08071877B2
公开(公告)日：2011-12-06
申请号：US12412425
申请日：2009-03-27
IPC分类号： H05K5/02
CPC分类号： H05K5/0073
摘要： A box for accommodating an electric connection box is provided. The box includes a lower cover which has a plurality of walls for surrounding a space to accommodate the electric connection box toward a predetermined insertion direction, and an upper cover. The plurality of walls includes: a first wall which extends along the insertion direction; second and third walls which extend from the first wall in a direction intersecting the insertion direction and faces each other; a fourth wall which extends from the first, second and third walls at a deep side of the insertion direction so as to support the electric connection box; and a fifth wall which extends from the second and third walls along the insertion direction, and is substantially parallel to the first wall so as to press-sandwich the electric connection box by the first and fifth walls.
摘要翻译： 提供一种用于容纳电连接盒的盒子。 该盒包括一个下盖，该下盖具有多个壁，用于围绕一个空间以便朝着预定的插入方向容纳电连接盒，以及一个上盖。 多个壁包括：沿插入方向延伸的第一壁; 第二和第三壁，其在与插入方向相交的方向上从第一壁延伸并彼此面对; 第四壁，其从所述第一，第二和第三壁在所述插入方向的深侧延伸，以支撑所述电连接盒; 以及第五壁，其从第二和第三壁沿着插入方向延伸，并且基本上平行于第一壁，以便通过第一壁和第五壁将电连接盒夹紧。
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公开(公告)号：US08009527B2
公开(公告)日：2011-08-30
申请号：US11941488
申请日：2007-11-16
申请人： Shinichi Hamaguchi , Yuzo Shimizu , Daisuke Furukawa , Naoto Shimada , Toshihiro Kuroda , Toyonori Kusuhara , Hiroaki Yamamoto
发明人： Shinichi Hamaguchi , Yuzo Shimizu , Daisuke Furukawa , Naoto Shimada , Toshihiro Kuroda , Toyonori Kusuhara , Hiroaki Yamamoto
IPC分类号： G11B7/00
CPC分类号： G11B7/1353 , G11B7/1275 , G11B7/1381 , G11B2007/0006
摘要： The optical pickup device according to the present invention includes: a light source which emits a first light at a first wavelength, a second light at a second wavelength and a third light at a third wavelength; an optical path combining unit which combines vectors of the first, second and third light emitted by the light source, and matches optical axes of the first light and the third light; a light collection unit which condenses the light from the optical path combining unit into the optical information storage medium; a diffraction element which diffracts reflected light from the optical information storage medium; a first photo detector, a second photo detector and a third photo detector which receives the diffracted light from the first diffraction element; and a prevention unit formed between the first diffraction element and the first photo detector, the second photo detector and the third photo detector, and which prevents irradiation of + first-order diffracted light diffracted by the first diffraction element into the first photo detector, the second photo detector, and the third photo detector.
摘要翻译： 根据本发明的光拾取装置包括：发射第一波长的第一光，第二波长的第二光和第三波长的第三光的光源; 光路组合单元，其组合由所述光源发射的所述第一，第二和第三光的矢量，并且匹配所述第一光和所述第三光的光轴; 光收集单元，其将来自光路组合单元的光聚合到光信息存储介质中; 衍射元件，其衍射来自光学信息存储介质的反射光; 第一光检测器，第二光检测器和第三光检测器，其接收来自第一衍射元件的衍射光; 以及防止单元，形成在第一衍射元件和第一光电检测器，第二光电检测器和第三光电检测器之间，并且防止第一衍射元件衍射的+一级衍射光照射到第一光检测器中， 第二光检测器和第三光检测器。
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公开(公告)号：US07560209B2
公开(公告)日：2009-07-14
申请号：US11438735
申请日：2006-05-22
IPC分类号： G03G15/00
CPC分类号： G03G15/751 , G03G5/0503 , G03G5/0507 , G03G5/14704 , G03G5/14726 , G03G2215/00957 , G03G2215/0119
摘要： An electrophotographic image forming apparatus, comprises an electrophotographic photoreceptor; an image forming section for forming a toner image on a surface of the electrophotographic photoreceptor; an intermediate transfer member; a first transferring section for transferring the toner image formed on the surface of the electrophotographic photoreceptor to a surface of the intermediate transfer member; and a second transferring section for transferring the toner image transferred on the surface the intermediate transfer member to a recording medium; wherein the electrophotographic photoreceptor comprises a surface layer forming the surface thereof and containing particles having a number average primary particle diameter of 1 to 300 nm and the surface of the electrophotographic photoreceptor has a hardness of 200 to 350 N/mm2 in universal hardness which is lower than the hardness in universal hardness of the surface of the intermediate transfer member.
摘要翻译： 电子照相图像形成装置，包括电子照相感光体; 图像形成部分，用于在电子照相感光体的表面上形成调色剂图像; 中间转印部件; 用于将形成在电子照相感光体的表面上的调色剂图像转印到中间转印部件的表面的第一转印部分; 以及第二转印部分，用于将在中间转印部件的表面上转印的调色剂图像转印到记录介质上; 其中电子照相感光体包括形成其表面的表面层，并含有数均一次粒径为1〜300nm的粒子，电子照相感光体的表面的硬度为200〜350N / mm 2，通用硬度较低 比中间转印部件表面的通用硬度硬度高。
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公开(公告)号：US07247826B2
公开(公告)日：2007-07-24
申请号：US11384291
申请日：2006-03-21
CPC分类号： G02B5/32 , G02B7/04 , G02B27/1073 , G02B27/1093 , G02B27/40 , G11B7/123 , G11B7/1275 , G11B7/131 , G11B7/1353 , G11B7/1356 , G11B2007/0006
摘要： An optical path coupling member aligns an optical axis directed to a light condensing member of the first wavelength light having a shortest wavelength with that of the third wavelength light having a longest wavelength. A diffraction element condenses +2nd order diffracted light of the first wavelength light and +1st order diffracted light of the second wavelength light and third wavelength light into a first photodetector, the −2nd order diffracted light of the first wavelength light and −1st order diffracted light of the third wavelength light into a second photodetector, and −1st order diffracted light of the remaining second wavelength light into a photodetector, using ±2nd order diffracted light of the first wavelength light and ±1st order diffracted light of the second wavelength light and third wavelength light as signal light from an optical information recording medium. Consequently, the overall size of the optical pickup apparatus is reduced.
摘要翻译： 光路耦合部件将具有最短波长的第一波长光的聚光部件的光轴与具有最长波长的第三波长光的光轴对准。 衍射元件将第一波长光的+ 2级衍射光和第二波长光和第三波长光的+ 1级衍射光聚合成第一光电检测器，第一波长光和-1级衍射的-2级衍射光 使用第二波长光的±2级衍射光和第二波长光的±1级衍射光，将第三波长的光照射到第二光电检测器中，并将剩余的第二波长的光的-1级衍射光转换成光电检测器，并且 第三波长光作为来自光学信息记录介质的信号光。 因此，光拾取装置的总体尺寸减小。
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公开(公告)号：US20060237624A1
公开(公告)日：2006-10-26
申请号：US11384291
申请日：2006-03-21
CPC分类号： G02B5/32 , G02B7/04 , G02B27/1073 , G02B27/1093 , G02B27/40 , G11B7/123 , G11B7/1275 , G11B7/131 , G11B7/1353 , G11B7/1356 , G11B2007/0006
摘要： An optical path coupling member aligns an optical axis directed to a light condensing member of the first wavelength light having a shortest wavelength with that of the third wavelength light having a longest wavelength. A diffraction element condenses +2nd order diffracted light of the first wavelength light and +1st order diffracted light of the second wavelength light and third wavelength light into a first photodetector, the −2nd order diffracted light of the first wavelength light and −1st order diffracted light of the third wavelength light into a second photodetector, and −1st order diffracted light of the remaining second wavelength light into a photodetector, using ±2nd order diffracted light of the first wavelength light and ±1st order diffracted light of the second wavelength light and third wavelength light as signal light from an optical information recording medium. Consequently, the overall size of the optical pickup apparatus is reduced.
摘要翻译： 光路耦合部件将具有最短波长的第一波长光的聚光部件的光轴与具有最长波长的第三波长光的光轴对准。 衍射元件将第一波长光的+ 2级衍射光和第二波长光和第三波长光的+ 1级衍射光聚合成第一光电检测器，第一波长光和-1级衍射的-2级衍射光 使用第二波长光的±2级衍射光和第二波长光的±1级衍射光，将第三波长的光照射到第二光电检测器中，并将剩余的第二波长的光的-1级衍射光转换成光电检测器，并且 第三波长光作为来自光学信息记录介质的信号光。 因此，光拾取装置的总体尺寸减小。
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公开(公告)号：US20060007809A1
公开(公告)日：2006-01-12
申请号：US10526964
申请日：2003-09-08
IPC分类号： G11B7/00
CPC分类号： G11B7/131 , G11B7/0901 , G11B7/0903 , G11B7/123 , G11B7/1353 , G11B7/1381 , G11B2007/0006
摘要： There is provided an optical pickup compliant with a three-beam method, a phase difference method, a push-pull method and a three-beam push-pull method, comprising: an emission light source (105) for emitting two or more light components of different wavelengths; a diffraction element (107); a light collector (103); a hologram element (108); a plurality of photodetectors (206); and operation means for performing an operation on outputs of the plurality of photodetectors (206). The plurality of photodetectors (206) are at least eight photodetectors (P1 to P8) which are necessary for the execution of the three-beam method, the phase difference method, and the push-pull method. The operation means includes a switch (212) for switching between a terminal for obtaining a sub signal of the three-beam push-pull method and a terminal for obtaining a tracking signal of the three-beam method.
摘要翻译： 提供一种符合三光束法，相位差法，推挽法和三光束推挽法的光学拾取器，包括：发射光源（105），用于发射两个或更多个光分量 不同波长; 衍射元件（107）; 光收集器（103）; 全息元件（108）; 多个光电检测器（206）; 以及用于对所述多个光电检测器（206）的输出执行操作的操作装置。 多个光电检测器（206）是执行三光束方法，相位差法和推挽方法所必需的至少八个光电检测器（P 1至P 8）。 操作装置包括用于在用于获得三光束推挽方法的子信号的终端和用于获得三光束方法的跟踪信号的终端之间切换的开关（212）。
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29.发明授权公开(公告)号：US06764925B2
公开(公告)日：2004-07-20
申请号：US09965409
申请日：2001-09-26
IPC分类号： H01L2146
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/2022 , G03F7/7045 , H01J37/3177 , H01J2237/31757
摘要： A semiconductor device manufacturing system for manufacturing a semiconductor device on a wafer, comprising: a first exposure apparatus for exposing the wafer using a light source while moving the wafer with a predetermined interval; and a second exposure apparatus for exposing the wafer by irradiating a plurality of electron beams on the wafer, the plurality of electron beams having an interval of substantially N times or 1/N times, where N is a natural number, of the predetermined interval.
摘要翻译： 一种用于在晶片上制造半导体器件的半导体器件制造系统，包括：第一曝光装置，用于在以预定间隔移动所述晶片的同时使用光源曝光所述晶片; 以及第二曝光装置，用于通过在所述晶片上照射多个电子束来使所述晶片曝光，所述多个电子束具有所述预定间隔的N是大约N倍或1 / N倍的间隔，其中N是自然数。
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公开(公告)号：US09038839B2
公开(公告)日：2015-05-26
申请号：US12361571
申请日：2009-01-29
CPC分类号： H02G3/081
摘要： A box includes a first cover and a second cover have engaging mechanisms which engage the one end of the first cover to the one end of the second cover, and have retaining mechanisms which retain the other end of the first cover to the other end of the second cover. The first cover and the second cover are fit to each other in a normal state when the engaging mechanisms are engaged with each other and the retaining mechanisms are retained normally. When an engagement between the engaging mechanisms is in an abnormal state, a projection abuts against at least the other of the one end of the first cover and the one end of the second cover so that a gap is formed and the interior component housed in the internal space can be seen through the gap.
摘要翻译： 盒包括第一盖和第二盖，其具有将第一盖的一端接合到第二盖的一端的接合机构，并且具有将第一盖的另一端保持在第二盖的另一端的保持机构 第二封。 当接合机构彼此接合并且保持机构保持正常时，第一盖和第二盖在正常状态下彼此配合。 当接合机构之间的接合处于异常状态时，突起至少抵靠第一盖的一端和第二盖的一端中的另一端，使得形成间隙，并且将内部部件容纳在 通过差距可以看出内部空间。
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