Devices for high-density probing techniques and method of implementing the same

    公开(公告)号:US10718790B2

    公开(公告)日:2020-07-21

    申请号:US16378288

    申请日:2019-04-08

    IPC分类号: G01R1/073 G01R1/067

    摘要: A testing apparatus with reduced warping of the probe card and a method of reducing warping of a probe card of a testing apparatus are disclosed. The testing apparatus can include a testing head and a platform opposite the testing head, where the testing head and platform move relative to one another to bring a sample into contact with probing tips of the testing apparatus. The testing head can include a probe card printed circuit board, a stiffener, a discontinuous backer and a plurality of probing tips. The stiffener can be coupled to and reinforcing the probe card. The discontinuous backer can extend from the probe card to the stiffener, and can include at least one unfilled void extending from the stiffener to the probe card. The plurality of probing tips can extend from a distal end of the testing head.

    Three dimensional integrated circuit electrostatic discharge protection and prevention test interface

    公开(公告)号:US10652987B2

    公开(公告)日:2020-05-12

    申请号:US15882256

    申请日:2018-01-29

    摘要: The present disclosure provides a system and method for providing electrostatic discharge protection. A probe card assembly is provided which is electrically connected to a plurality of input/output channels. The probe card assembly can be contacted with a secondary assembly having an interposer electrically connected to one or more wafers each wafer having a device under test. Voltage can be forced on ones of the plural input/output channels of the probe card assembly to slowly dissipate charges resident on the wafer to thereby provide electrostatic discharge protection. A socket assembly adaptable to accept a 3DIC package is also provided, the assembly having a loadboard assembly electrically connected to a plurality of input/output channels. Once the 3DIC package is placed within the socket assembly, voltage is forced on ones of the input/output channels to slowly dissipate charges resident on the 3DIC package to thereby provide electrostatic discharge protection.

    Integrated fan-out package-on-package testing
    25.
    发明授权
    Integrated fan-out package-on-package testing 有权
    集成扇出封装封装测试

    公开(公告)号:US09417285B2

    公开(公告)日:2016-08-16

    申请号:US14141529

    申请日:2013-12-27

    摘要: A device for testing a bottom package of an integrated fan-out (InFO) Package-on-Package (PoP) comprises a bottom fixture having a space to accommodate the bottom package during testing and a detachable top cover, configured for conducting at least one test of the bottom package, wherein one or both of the bottom fixture and the top cover have a plurality of probing contacts for testing of the bottom package and wherein the device can be opened for placement of the bottom package under testing, and the cover is attachable to the bottom fixture for conducting the testing.

    摘要翻译: 用于测试集成扇出(InFO)封装封装(PoP)的底部封装的装置包括底部夹具,其具有在测试期间容纳底部封装的空间和可拆卸的顶盖,其被配置用于进行至少一个 底部包装的测试,其中底部固定装置和顶盖中的一个或两个具有多个用于测试底部包装的探测触点,并且其中该装置可以被打开以放置待测试的底部包装,并且盖是 可附接到底部夹具进行测试。

    Integrated circuit test system and method
    26.
    发明授权
    Integrated circuit test system and method 有权
    集成电路测试系统及方法

    公开(公告)号:US09372227B2

    公开(公告)日:2016-06-21

    申请号:US13792323

    申请日:2013-03-11

    IPC分类号: G01R31/20 G01R31/28

    CPC分类号: G01R31/2889 G01R31/2884

    摘要: A system for testing a device under test (DUT) includes a probe card and a test module. The probe card includes probe beds electrically coupled to a circuit board and a first plurality of electrical contacts coupled to the circuit board, which are for engaging respective ones of a plurality of electrical contacts of a test equipment module. Probes are coupled to respective probe beds and are disposed to engage electrical contacts of the DUT. The probe card includes a second plurality of electrical contacts coupled to the circuit board. The first and second pluralities of contacts are mutually exclusive. The test module includes a memory, a processor, and a plurality of electrical contacts electrically coupled to respective ones of the second plurality of electrical contacts of the probe card. The circuit board includes a first electrical path for electrically coupling the test equipment module to the test module.

    摘要翻译: 用于测试被测器件(DUT)的系统包括探针卡和测试模块。 探针卡包括电耦合到电路板的探针台和耦合到电路板的第一多个电触点,其用于接合测试设备模块的多个电触点中的相应的一个。 探针耦合到相应的探针台并且被设置成接合DUT的电触点。 探针卡包括耦合到电路板的第二多个电触点。 第一和第二个联系人是相互排斥的。 测试模块包括存储器,处理器和电耦合到探针卡的第二多个电触点中的相应电触头的多个电触头。 电路板包括用于将测试设备模块电耦合到测试模块的第一电路径。

    Three dimensional integrated circuit electrostatic discharge protection and prevention test interface
    27.
    发明授权
    Three dimensional integrated circuit electrostatic discharge protection and prevention test interface 有权
    三维集成电路静电放电防护测试接口

    公开(公告)号:US09252593B2

    公开(公告)日:2016-02-02

    申请号:US13716272

    申请日:2012-12-17

    摘要: The present disclosure provides a system and method for providing electrostatic discharge protection. A probe card assembly is provided which is electrically connected to a plurality of input/output channels. The probe card assembly can be contacted with a secondary assembly having an interposer electrically connected to one or more wafers each wafer having a device under test. Voltage can be forced on ones of the plural input/output channels of the probe card assembly to slowly dissipate charges resident on the wafer to thereby provide electrostatic discharge protection. A socket assembly adaptable to accept a 3DIC package is also provided, the assembly having a loadboard assembly electrically connected to a plurality of input/output channels. Once the 3DIC package is placed within the socket assembly, voltage is forced on ones of the input/output channels to slowly dissipate charges resident on the 3DIC package to thereby provide electrostatic discharge protection.

    摘要翻译: 本公开提供了一种用于提供静电放电保护的系统和方法。 提供一种电连接到多个输入/输出通道的探针卡组件。 探针卡组件可以与具有电连接到一个或多个晶片的插入器的次级组件接触,每个晶片具有被测器件。 可以将电压强制在探针卡组件的多个输入/输出通道中的一个上,以缓慢地耗散驻留在晶片上的电荷,从而提供静电放电保护。 还提供了适于接受3DIC封装的插座组件,该组件具有电连接到多个输入/输出通道的装载板组件。 一旦将3DIC封装放置在插座组件中,则强制在输入/输出通道之间施加电压以缓慢耗散驻留在3DIC封装上的电荷,从而提供静电放电保护。

    Capacitance Measurement Circuit And Method
    28.
    发明申请
    Capacitance Measurement Circuit And Method 有权
    电容测量电路及方法

    公开(公告)号:US20150168459A1

    公开(公告)日:2015-06-18

    申请号:US14132722

    申请日:2013-12-18

    IPC分类号: G01R17/00 G01R27/26

    CPC分类号: G01R27/2605 G01R31/2856

    摘要: A circuit that includes a stacked circuit layer, a plurality of test contact points and a comparator is disclosed. The stacked circuit layer includes a plurality of reference capacitors each having a reference capacitance. Each of the test contact points is electrically connecting to an under-test capacitor of an under-test module. The comparator compares the reference capacitance of one of the reference capacitors with an under-test capacitance of the under-test capacitor corresponding to one of the test contact points to measure a range of the under-test capacitance.

    摘要翻译: 公开了一种包括堆叠电路层,多个测试接触点和比较器的电路。 叠层电路层包括各自具有参考电容的多个参考电容器。 每个测试接触点电连接到被测试模块的测试不足的电容器。 比较器将参考电容器之一的参考电容与对应于一个测试接点的欠压电容器的受测电容进行比较,以测量未测试电容的范围。