摘要:
An exposure apparatus includes a first structure which supports a projection unit which projects an exposure beam onto a substrate, a first anti-vibration supporting leg which includes a first actuator and supports the first structure, a second structure which supports a substrate stage which aligns the substrate, a second anti-vibration supporting leg which includes a second actuator and supports the second structure, and a control unit which controls at least one of the first actuator and the second actuator to reduce the relative displacement between the first structure and the second structure.
摘要:
A downshift quality control for a predetermined downshift involving engagement of a predetermined hydraulically operated friction element, i.e., a low clutch, is disclosed. A hydraulic fluid supply circuit communicates with the low clutch and includes a variable flow restrictor, i.e., an orifice and a timing valve. The timing valve is operated by a solenoid under control of a control unit. The control unit monitors a speed ratio of a revolution speed of an internal combustion engine to a revolution speed of an output member of an automatic transmission and energizes or deenergizes the solenoid to shift the timing valve to a position where a passage bypassing the orifice is opened.
摘要:
When a shift command is issued the line pressure is dropped to a first low level until such time as the inertia phase of the shift begins. From this time the level of line pressure is raised and maintained at a second higher level until the end of the inertia phase. During the final stage of the shift, the level of line pressure is again lowered. A spike in the transmission torque output when tends to occur at the beginning of the inertia phase is attenuated, the level of torque which is transmitted during the inertia phase is elevated and spikes which tend to be produced by the final engagement are reduced by the temporarily lowered final stage line pressure level.
摘要:
A lock-up control in a motor vehicle includes a lock-up control solenoid for engaging a lock-up clutch in a torque converter. A hydraulic fluid temperature of hydraulic fluid used in the torque converter and also in the associated automatic transmission is detected. When the fluid temperature becomes higher than a predetermined temperature value, for example 120.degree. C. in the embodiment, a different lock-up shift point mapping is set which defines a lock-up range stretching beyond a predetermined gear position to include a gear position lower than the predetermined gear position. Thus, the lock-up range where the lock-up clutch should be engaged stretches, rendering the torque converter to stop stirring the hydraulic fluid therein when the fluid temperature is higher than the predetermined temperature value, effectively preventing further rise in the fluid temperature.
摘要:
The status of a lock-up clutch included in an automotive power unit T/C is monitored. In the event that the lock-up clutch is partially locked up or conditioned to produce so called "slip lock-up", ERF (electroheopectic fluid) filled engine mounts are conditioned to produce an increased amount of rigidity, while in the event that the lock-up clutch is fully engaged the engine mounts are induced to assume a more flexible state.In addition to this engine idling and shake, vibration can be attenuated by sensing the relative displacement between the power unit and the chassis.
摘要:
A shift valve for an automatic transmission wherein governor pressure acts on a spool in such a direction as to compress a first spring, and throttle representative pressure acts on a plug in such a direction as to compress the first spring. The shift control valve further comprises a second spring arranged to act on the spool in the same direction as the direction in which the governor pressure acts on the spool.
摘要:
A vibration isolation device which dampens vibration of an object. The device includes a vibration isolation unit that can be activated in a plurality of vibration isolation modes, an acquisition unit that acquires estimate information associated with vibration of a floor, in which the acquisition unit receives data associated with an influence degree of seismic vibration and an influence time zone of the seismic vibration from an external device, and a control unit that selects a vibration isolation mode from the plurality of vibration isolation modes, in accordance with the estimate information acquired by the acquisition unit, and activates the vibration isolation unit in the selected vibration isolation mode. The control unit switches between the vibration isolation modes of the vibration isolation unit in accordance with the influence degree and the influence time zone.
摘要:
A vibration isolation device which damps vibration of an object includes a vibration isolation unit which can be activated in a plurality of vibration isolation modes, an acquisition unit which acquires estimate information associated with vibration of a floor, and a control unit which selects a vibration isolation mode from the plurality of vibration isolation modes in accordance with the estimate information acquired by the acquisition unit, and activates the vibration isolation unit in the selected vibration isolation mode.
摘要:
A thermal processing operation is performed for a silicon wafer W (silicon single-crystal layer) in an atmosphere gas which is formed by a hydrogen gas or an inert gas or a mixture gas of these gases at a temperature in a range of 600° C. to 950° C. (here, the temperature should not be greater than 950° C.). By doing this, a quality of a surface of the silicon single-crystal layer is improved.
摘要:
A surge absorbing device with protection function to protect a circuit from overvoltage and overcurrent, comprising a gap or microgap surge absorbing element and a lower melting point metal wire connected therewith. A plurality of gap or microgap surge absorbing elements to the circuit to be protected, and each of the lower melting point metal wires respectively corresponding to each of gap or microgap surge absorbing elements being in contact with all of the gap or microgap surge absorbing elements.