Exposure apparatus
    21.
    发明申请
    Exposure apparatus 审中-公开
    曝光装置

    公开(公告)号:US20070035713A1

    公开(公告)日:2007-02-15

    申请号:US11446117

    申请日:2006-06-05

    申请人: Takashi Shibayama

    发明人: Takashi Shibayama

    IPC分类号: G03B27/58

    CPC分类号: G03F7/709 G03F7/70833

    摘要: An exposure apparatus includes a first structure which supports a projection unit which projects an exposure beam onto a substrate, a first anti-vibration supporting leg which includes a first actuator and supports the first structure, a second structure which supports a substrate stage which aligns the substrate, a second anti-vibration supporting leg which includes a second actuator and supports the second structure, and a control unit which controls at least one of the first actuator and the second actuator to reduce the relative displacement between the first structure and the second structure.

    摘要翻译: 曝光装置包括:第一结构,其支撑将曝光光束投影到基板上的投影单元;第一防振支撑腿,包括第一致动器并支撑第一结构;第二结构,其支撑基板台, 基板,包括第二致动器并支撑第二结构的第二防振支撑腿,以及控制单元,其控制第一致动器和第二致动器中的至少一个以减小第一结构和第二结构之间的相对位移 。

    Temperature responsive lock-up control for motor vehicle with automatic
transmission
    24.
    发明授权
    Temperature responsive lock-up control for motor vehicle with automatic transmission 失效
    带自动变速箱的机动车温度响应锁定控制

    公开(公告)号:US5050717A

    公开(公告)日:1991-09-24

    申请号:US500956

    申请日:1990-03-29

    申请人: Takashi Shibayama

    发明人: Takashi Shibayama

    IPC分类号: F16H59/72 F16H61/14

    摘要: A lock-up control in a motor vehicle includes a lock-up control solenoid for engaging a lock-up clutch in a torque converter. A hydraulic fluid temperature of hydraulic fluid used in the torque converter and also in the associated automatic transmission is detected. When the fluid temperature becomes higher than a predetermined temperature value, for example 120.degree. C. in the embodiment, a different lock-up shift point mapping is set which defines a lock-up range stretching beyond a predetermined gear position to include a gear position lower than the predetermined gear position. Thus, the lock-up range where the lock-up clutch should be engaged stretches, rendering the torque converter to stop stirring the hydraulic fluid therein when the fluid temperature is higher than the predetermined temperature value, effectively preventing further rise in the fluid temperature.

    摘要翻译: 机动车辆中的锁止控制包括锁定控制螺线管,用于接合变矩器中的锁止离合器。 检测在变矩器中以及相关的自动变速器中使用的液压油的液压油温度。 当在本实施例中流体温度变得高于预定温度值(例如120℃)时,设定不同的锁定换档点映射,其定义拉伸超过预定齿轮位置的锁定范围以包括齿轮位置 低于预定档位。 因此,锁止离合器应该接合的锁定范围延伸,使液压变矩器在流体温度高于预定温度值时停止搅拌其中的液压流体,从而有效防止流体温度的进一步上升。

    Control arrangement for engine/transmission power unit mount
    25.
    发明授权
    Control arrangement for engine/transmission power unit mount 失效
    发动机/变速箱动力装置的控制装置

    公开(公告)号:US5038886A

    公开(公告)日:1991-08-13

    申请号:US524367

    申请日:1990-05-16

    申请人: Takashi Shibayama

    发明人: Takashi Shibayama

    IPC分类号: B60K5/12 B60K5/00 F16F15/04

    CPC分类号: B60K5/00

    摘要: The status of a lock-up clutch included in an automotive power unit T/C is monitored. In the event that the lock-up clutch is partially locked up or conditioned to produce so called "slip lock-up", ERF (electroheopectic fluid) filled engine mounts are conditioned to produce an increased amount of rigidity, while in the event that the lock-up clutch is fully engaged the engine mounts are induced to assume a more flexible state.In addition to this engine idling and shake, vibration can be attenuated by sensing the relative displacement between the power unit and the chassis.

    摘要翻译: 监视包含在汽车动力单元T / C中的锁止离合器的状态。 在锁定离合器被部分锁定或调节以产生所谓的“滑动锁定”的情况下,ERF(电泳液)填充的发动机支架被调节以产生增加的刚度,而在 锁止离合器完全接合,发动机支架被诱导呈现更灵活的状态。 除了这种发动机怠速和晃动之外,振动可以通过感测动力单元和底盘之间的相对位移来衰减。

    Shift valve for automatic transmission
    26.
    发明授权
    Shift valve for automatic transmission 失效
    自动变速箱换档阀

    公开(公告)号:US4587887A

    公开(公告)日:1986-05-13

    申请号:US655677

    申请日:1984-09-28

    摘要: A shift valve for an automatic transmission wherein governor pressure acts on a spool in such a direction as to compress a first spring, and throttle representative pressure acts on a plug in such a direction as to compress the first spring. The shift control valve further comprises a second spring arranged to act on the spool in the same direction as the direction in which the governor pressure acts on the spool.

    摘要翻译: 一种用于自动变速器的换档阀,其中调速器压力沿着压缩第一弹簧的方向作用在阀芯上,并且节气门代表性压力沿着压缩第一弹簧的方向作用在插头上。 变速控制阀还包括第二弹簧,其被设置成沿着与调速器压力作用在阀芯上的方向相同的方向作用在阀芯上。

    Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method
    27.
    发明授权
    Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method 失效
    振动隔离装置,运算装置,曝光装置及装置的制造方法

    公开(公告)号:US07686144B2

    公开(公告)日:2010-03-30

    申请号:US12060587

    申请日:2008-04-01

    IPC分类号: F16M13/00

    CPC分类号: F16F15/02 G03F7/709

    摘要: A vibration isolation device which dampens vibration of an object. The device includes a vibration isolation unit that can be activated in a plurality of vibration isolation modes, an acquisition unit that acquires estimate information associated with vibration of a floor, in which the acquisition unit receives data associated with an influence degree of seismic vibration and an influence time zone of the seismic vibration from an external device, and a control unit that selects a vibration isolation mode from the plurality of vibration isolation modes, in accordance with the estimate information acquired by the acquisition unit, and activates the vibration isolation unit in the selected vibration isolation mode. The control unit switches between the vibration isolation modes of the vibration isolation unit in accordance with the influence degree and the influence time zone.

    摘要翻译: 一种抑制物体振动的隔振装置。 该装置包括能够以多种振动隔离模式启动的振动隔离单元,获取单元,其获取与地板的振动相关联的估计信息,其中采集单元接收与地震振动的影响程度相关的数据,以及 根据由所述获取单元获取的所述估计信息,从所述外部设备的地震振动的影响时间段和从所述多个隔振模式中选择隔振模式的控制单元,并且激活所述振动隔离单元 选择隔振模式。 控制单元根据影响程度和影响时区在隔振单元的隔振模式之间切换。

    VIBRATION ISOLATION DEVICE, ARITHMETIC APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    28.
    发明申请
    VIBRATION ISOLATION DEVICE, ARITHMETIC APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 失效
    振动隔离装置,算术装置,曝光装置和装置制造方法

    公开(公告)号:US20080246201A1

    公开(公告)日:2008-10-09

    申请号:US12060587

    申请日:2008-04-01

    IPC分类号: F16F15/00

    CPC分类号: F16F15/02 G03F7/709

    摘要: A vibration isolation device which damps vibration of an object includes a vibration isolation unit which can be activated in a plurality of vibration isolation modes, an acquisition unit which acquires estimate information associated with vibration of a floor, and a control unit which selects a vibration isolation mode from the plurality of vibration isolation modes in accordance with the estimate information acquired by the acquisition unit, and activates the vibration isolation unit in the selected vibration isolation mode.

    摘要翻译: 一种抑制物体振动的隔振装置,具有能够以多种振动隔离模式被起动的振动隔离单元,获取与地面振动相关的估计信息的采集单元,以及选择振动隔离的控制单元 模式,根据由所述获取单元获取的所述估计信息,从所述多个隔振模式开始,并且以所选择的隔振模式激活所述隔振单元。

    Process for producing silicon single crystal layer and silicon single crystal layer
    29.
    发明授权
    Process for producing silicon single crystal layer and silicon single crystal layer 有权
    硅单晶层和硅单晶层的制造方法

    公开(公告)号:US07229496B2

    公开(公告)日:2007-06-12

    申请号:US10506534

    申请日:2003-03-05

    IPC分类号: C30B15/20

    CPC分类号: C30B29/06 C30B33/00

    摘要: A thermal processing operation is performed for a silicon wafer W (silicon single-crystal layer) in an atmosphere gas which is formed by a hydrogen gas or an inert gas or a mixture gas of these gases at a temperature in a range of 600° C. to 950° C. (here, the temperature should not be greater than 950° C.). By doing this, a quality of a surface of the silicon single-crystal layer is improved.

    摘要翻译: 在由氢气或惰性气体形成的气氛气体或这些气体的混合气体中,在600℃的温度下对硅晶片W(硅单晶层)进行热处理操作 到950℃(这里温度不应该大于950℃)。 通过这样做,提高了硅单晶层的表面质量。

    Surge absorbing device to protect from overvoltage and overcurrent
    30.
    发明授权
    Surge absorbing device to protect from overvoltage and overcurrent 失效
    浪涌吸收装置可防止过电压和过流

    公开(公告)号:US5526218A

    公开(公告)日:1996-06-11

    申请号:US423129

    申请日:1995-04-18

    IPC分类号: H02H9/04 H02H1/00

    CPC分类号: H02H9/042

    摘要: A surge absorbing device with protection function to protect a circuit from overvoltage and overcurrent, comprising a gap or microgap surge absorbing element and a lower melting point metal wire connected therewith. A plurality of gap or microgap surge absorbing elements to the circuit to be protected, and each of the lower melting point metal wires respectively corresponding to each of gap or microgap surge absorbing elements being in contact with all of the gap or microgap surge absorbing elements.

    摘要翻译: 一种浪涌吸收装置,其具有保护电路免受过电压和过电流的保护功能,包括间隙或微隙浪涌吸收元件和与其连接的较低熔点金属线。 将要保护的电路的多个间隙或微隙浪涌吸收元件以及分别对应于每个间隙或微隙浪涌吸收元件的每个低熔点金属线与所有间隙或微隙浪涌吸收元件接触。