公开(公告)号：US20130019748A1

公开(公告)日：2013-01-24

申请号：US13638087

申请日：2011-03-30

Applicant: Hiroki Hisamori ,  Tatsuya Hayashi ,  Seiji Morihashi ,  Tomonori Kanougi

Inventor： Hiroki Hisamori ,  Tatsuya Hayashi ,  Seiji Morihashi ,  Tomonori Kanougi

IPC: B01D69/08 ,  B01D71/64 ,  B01D53/22

CPC classification number: C01B13/0255 ,  B01D53/228 ,  B01D69/02 ,  B01D69/08 ,  B01D71/64 ,  B01D2256/12 ,  B01D2257/102 ,  B01D2325/022

Abstract: The present invention relates to an asymmetric hollow fiber membrane for gas separation made of a soluble aromatic polyimide, wherein an orientation index is 1.3 or less, a separation coefficient α(P′O2/P′N2) as a permeation rate ratio of oxygen gas/nitrogen gas at 40° C. is 5.3 or more, and a tensile fracture elongation is 15% or more.

Abstract translation: 本发明涉及一种由可溶性芳族聚酰亚胺制成的气体分离用不对称中空纤维膜，其中取向指数为1.3以下，作为氧气的透过率的分离系数α（P'O2 / P'N2） /氮气在40℃时为5.3以上，拉伸断裂伸长率为15％以上。

公开(公告)号：US20120178312A1

公开(公告)日：2012-07-12

申请号：US13423638

申请日：2012-03-19

Applicant: Tatsuya Hayashi ,  Takayuki Nagumo

Inventor： Tatsuya Hayashi ,  Takayuki Nagumo

IPC: H01R4/28

CPC classification number: H01R4/4863 ,  H01R9/2408

Abstract: Provided is a push-type connector having a structure for preventing an operational error of a lever member of the connector by an operator. A first operating part 35a of a first lever member 3a at a first position is positioned anterior to a second operating part 35b of a second lever member 3b at a third position, in relation to the pushing direction of the lever. Further, first operating part 35a of first lever member 3a projects further than second operating part 35b of second lever member 3b in the direction toward the front end of the lever or the operator side. Therefore, second lever member 3b is not likely to be an obstacle to the operation of first lever member 3a, and first lever member 3a is not likely to be an obstacle to the operation of second lever member 3b.

公开(公告)号：US08115901B2

公开(公告)日：2012-02-14

申请号：US12273050

申请日：2008-11-18

Applicant: Tatsuya Hayashi

Inventor： Tatsuya Hayashi

IPC: G03B27/52 ,  H01L21/683

CPC classification number: G03B27/62 ,  G03F7/70708 ,  G03F7/70941

Abstract: An exposure apparatus is configured to expose a pattern formed on an original onto a substrate using extreme ultraviolet light. The exposure apparatus includes a stage configured to move at the time of exposure, an electrostatic chuck which is provided on the stage and is configured to hold the original, an electrode which is provided outside the electrostatic chuck on the stage via an insulator, and an electric field forming member which is provided so that an absolute value of an electric potential difference with respect to the electrode is greater than an absolute value of an electric potential difference with respect to the original at a position facing the electrode. The particle adherence to the original can be effectively avoided.

Abstract translation: 曝光装置被配置为使用极紫外光将形成在原稿上的图案曝光到基板上。 曝光装置包括：被配置为在曝光时移动的静电卡盘，设置在平台上并且被配置为将原稿保持的静电卡盘，经由绝缘体在静电卡盘的外侧设置在电平台上的电极， 电场形成部件被设置为使得相对于电极的电位差的绝对值大于在面向电极的位置处的相对于原稿的电位差的绝对值。 可以有效地避免粒子对原件的粘附。

公开(公告)号：US20110314838A1

公开(公告)日：2011-12-29

申请号：US13254826

申请日：2010-02-26

Applicant: Tatsuya Hayashi

Inventor： Tatsuya Hayashi

IPC: F17C9/02 ,  F17C13/04

CPC classification number: F17C9/02 ,  F17C2201/032 ,  F17C2205/0323 ,  F17C2205/0385 ,  F17C2223/0153 ,  F17C2227/0311 ,  F17C2227/0383 ,  F17C2227/044 ,  F17C2250/0636 ,  F17C2260/048

Abstract: The present invention relates to a gas supply device having a compact configuration that enables prevention of vaporized gas by requisite minimum heating means from being liquefied again and an installation area to be considerably reduced. The gas supply device is provided with: a tank configured to retain material liquid; and a mass flow controller that is connected to an inside of the tank through a first valve unit, and controls a flow rate of gas resulting from vaporizing the material liquid, in which inside an outer wall of the tank, an internal flow path is formed, and the internal flow path is provided with a generated gas lead-out line provided with: a first valve flow-in flow path connecting the inside of the tank and a first inlet port; and a first valve flow-out flow path connecting a first outlet port and an introduction port of the mass flow controller .

Abstract translation: 本发明涉及一种气体供给装置，其具有紧凑的结构，能够通过必要的最小加热装置再次液化而防止气化气体，并且安装面积显着减小。 气体供给装置设置有：保持材料液体的罐; 以及质量流量控制器，其通过第一阀单元连接到所述罐的内部，并且控制由所述液体的外壁内形成内部流路的材料液体蒸发产生的气体的流量 并且内部流路设置有产生的气体引出线，其具有：连接罐内部的第一阀流入流路和第一入口; 以及连接质量流量控制器的第一出口和引入口的第一阀流出流路。

公开(公告)号：US08062077B2

公开(公告)日：2011-11-22

申请号：US12989106

申请日：2009-03-24

Applicant: Tatsuya Hayashi ,  Takayuki Nagumo

Inventor： Tatsuya Hayashi ,  Takayuki Nagumo

IPC: H01R4/48

CPC classification number: H01R4/4863 ,  H01R9/2408

Abstract: Provided is a push-type connector having a structure for preventing an operational error of a lever member of the connector by an operator. A first operating part 35a of a first lever member 3a at a first position is positioned anterior to a second operating part 35b of a second lever member 3b at a third position, in relation to the pushing direction of the lever. Further, first operating part 35a of first lever member 3a projects further than second operating part 35b of second lever member 3b in the direction toward the front end of the lever or the operator side. Therefore, second lever member 3b is not likely to be an obstacle to the operation of first lever member 3a, and first lever member 3a is not likely to be an obstacle to the operation of second lever member 3b.

Abstract translation: 提供了一种具有用于防止操作者对连接器的杠杆构件的操作错误的结构的推式连接器。 在第一位置处的第一杆构件3a的第一操作部35a相对于杆的推动方向位于第三位置处的第二杆构件3b的第二操作部35b的前方。 此外，第一杆构件3a的第一操作部35a在朝向杆的前端或操作者侧的方向上比第二杆构件3b的第二操作部35b突出。 因此，第二杆构件3b不可能成为第一杆构件3a的操作的障碍物，并且第一杆构件3a不可能成为第二杆构件3b的操作的障碍。

公开(公告)号：US20110186646A1

公开(公告)日：2011-08-04

申请号：US13086550

申请日：2011-04-14

Applicant: Toshihide Tsuji ,  Tatsuya Hayashi

Inventor： Toshihide Tsuji ,  Tatsuya Hayashi

IPC: B05B5/00

CPC classification number: B05B5/043 ,  A01K1/0082 ,  B05B1/3006 ,  B05B1/3415 ,  B05B5/025 ,  B05B5/0533 ,  F24F5/0035 ,  F24F6/14 ,  F24F2006/146 ,  Y02A40/75 ,  Y02A40/76 ,  Y02B30/545 ,  Y02P60/54 ,  Y02P60/542

Abstract: Cooling water is pressurized and supplied via a pipe to an electrified atomization head installed in an atomization cooling area A, the jetted particles of the cooling water from the electrified atomization head are electrified and atomized. An electrification voltage is applied from a voltage application unit to the electrified atomization head, and the external electric field generated by applying a voltage between a water-side electrode unit and an induction electrode unit is applied to the cooling water in a jetting process so as to electrify the atomization water and facilitate adsorption to people.

Abstract translation: 冷却水通过管道被加压并供给到安装在雾化冷却区域A中的带电雾化头，来自带电雾化头的冷却水的喷射颗粒被电化并雾化。 从电压施加单元向带电雾化头施加起电电压，并且通过在水侧电极单元和感应电极单元之间施加电压而产生的外部电场在喷射过程中被施加到冷却水，以便 使雾化水通电并促进人们的吸附。

公开(公告)号：US20110126930A1

公开(公告)日：2011-06-02

申请号：US12957283

申请日：2010-11-30

Applicant: Tatsuya Hayashi ,  Kazuhiro Oya ,  Yuji Yamaguchi

Inventor： Tatsuya Hayashi ,  Kazuhiro Oya ,  Yuji Yamaguchi

IPC: E03B1/00

CPC classification number: F16L23/10 ,  F16K27/003 ,  Y10T137/8593

Abstract: In a fluid device composed of vertical and horizontal fluid lines, for a purpose of improving a compact size and of assuring ease of assembly, a plurality of vertical fluid lines are arranged in parallel to each other, and in the fluid device where, between the adjoining vertical fluid lines, a plurality of horizontal fluid lines for connecting them are arranged in parallel, one of the horizontal fluid lines connects pipes by using a flange joint to be fastened with a coupling ring, and the other one connects pipes by using joint pipes.

Abstract translation: 在由垂直和水平流体管线组成的流体装置中，为了改善紧凑的尺寸并确保组装的容易性，多个垂直流体管线彼此平行地布置，并且在流体装置中， 相邻的垂直流体管线，多个用于连接它们的水平流体管线平行布置，一个水平流体管线通过使用用联接环紧固的法兰接头连接管道，另一个通过使用接头管道 。

公开(公告)号：US07692762B2

公开(公告)日：2010-04-06

申请号：US12118797

申请日：2008-05-12

Applicant: Tatsuya Hayashi

Inventor： Tatsuya Hayashi

IPC: G03B27/52

CPC classification number: G03F7/70883 ,  G03F7/70841

Abstract: An EUV exposure apparatus is configured to maintain the reflective index of the optical element as high as possible and to minimize the maintenance frequency of the optical element by restraining attachments of released gas particles by degasifying to the optical element. An exposure apparatus is configured to expose a pattern of an original on a substrate by using extreme ultraviolet light. The exposure apparatus includes an optical element configured to receive the extreme ultraviolet light, a barrel configured to support the optical element, a chamber configured to store the barrel, and a partition wall configured outside and around an optical path of the extreme ultraviolet light in the barrel.

Abstract translation: EUV曝光装置被配置为保持光学元件的反射率尽可能高，并且通过对光学元件进行脱气来限制释放的气体颗粒的附着来最小化光学元件的维护频率。 曝光装置被配置为通过使用极紫外光来曝光原稿在基板上的图案。 曝光装置包括被配置为接收极紫外光的光学元件，被配置为支撑光学元件的镜筒，被配置为存储镜筒的腔室，以及配置在远紫外光的光路外侧和周围的隔壁 桶。

公开(公告)号：US20090128795A1

公开(公告)日：2009-05-21

申请号：US12273050

申请日：2008-11-18

Applicant: Tatsuya Hayashi

Inventor： Tatsuya Hayashi

IPC: G03B27/62

CPC classification number: G03B27/62 ,  G03F7/70708 ,  G03F7/70941

Abstract: An exposure apparatus is configured to expose a pattern formed on an original onto a substrate using extreme ultraviolet light. The exposure apparatus includes a stage configured to move at the time of exposure, an electrostatic chuck which is provided on the stage and is configured to hold the original, an electrode which is provided outside the electrostatic chuck on the stage via an insulator, and an electric field forming member which is provided so that an absolute value of an electric potential difference with respect to the electrode is greater than an absolute value of an electric potential difference with respect to the original at a position facing the electrode. The particle adherence to the original can be effectively avoided.

Abstract translation: 曝光装置被配置为使用极紫外光将形成在原稿上的图案曝光到基板上。 曝光装置包括：被配置为在曝光时移动的静电卡盘，设置在平台上并且被配置为将原稿保持的静电卡盘，经由绝缘体在静电卡盘的外侧设置在电平台上的电极， 电场形成部件被设置为使得相对于电极的电位差的绝对值大于在面向电极的位置处的相对于原稿的电位差的绝对值。 可以有效地避免粒子对原件的粘附。

公开(公告)号：US20060098907A1

公开(公告)日：2006-05-11

申请号：US10531519

申请日：2003-10-09

Applicant: Tatsuya Hayashi ,  Kiyotaka Kusunoki

Inventor： Tatsuya Hayashi ,  Kiyotaka Kusunoki

IPC: F16C32/06

CPC classification number: B21K1/04 ,  B21J5/12 ,  B21K23/00 ,  F16C17/045 ,  F16C17/107 ,  F16C33/107

Abstract: A hydrodynamic bearing device has favorable bearing performance and long endurance life. A thrust bearing part of the hydrodynamic bearing device has a second thrust surface. In the second thrust surface, a dynamic pressure generating groove area having a plurality of dynamic pressure generating grooves is formed in at least a part thereof in a radial direction. The action of dynamic pressure of lubricating oil increases the pressure in a thrust bearing clearance between an end of a flange part of an axial member and the second thrust surface, to support the axial member in an axial direction in a non-contact manner. The dynamic pressure generating groove area of the second thrust surface is formed by press working. The difference in height between the inner and outer peripheral edges of the surface of the dynamic pressure generating groove area regulated between or equal to 0 and 2 μm.

Abstract translation: 流体动力轴承装置具有良好的轴承性能和长寿命。 流体动力轴承装置的止推轴承部分具有第二推力表面。 在第二止推面中，在径向的至少一部分上形成具有多个动压产生槽的动压产生槽区域。 润滑油的动压作用增加了轴向构件的凸缘部分的端部与第二推力表面之间的止推轴承间隙中的压力，以非接触的方式在轴向方向上支撑轴向构件。 第二推动面的动压产生槽区域通过冲压加工形成。 动压产生槽面的内外周缘之间的高度差在0〜2μm之间。