公开(公告)号：US20230422491A1

公开(公告)日：2023-12-28

申请号：US17869752

申请日：2022-07-20

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Yung-Chen Chiu ,  Chi-Horn Pai ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chih-Kai Kang

IPC: H01L27/112

CPC classification number: H01L27/11206

Abstract: A method for fabricating a semiconductor device includes the steps of first providing a substrate comprising an one time programmable (OTP) device region, forming a shallow trench isolation (STI) in the substrate, removing part of the STI to form a first step on a corner of the substrate, forming a first gate oxide layer on the substrate, removing the first gate oxide layer to form a second step on the corner of the substrate, forming a second gate oxide layer on the substrate, and then forming a first gate structure on the substrate and the STI.

公开(公告)号：US20230380148A1

公开(公告)日：2023-11-23

申请号：US17844076

申请日：2022-06-20

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Chun-Hsien Lin ,  Chih-Kai Kang ,  Ting-Hsiang Huang ,  Chien-Liang Wu ,  Sheng-Yuan Hsueh ,  Chi-Horn Pai

IPC: H01L27/112

CPC classification number: H01L27/11206

Abstract: A method for fabricating a semiconductor device includes the steps of first providing a substrate having an one time programmable (OTP) device region, forming a shallow trench isolation (STI) in the substrate, forming a first doped region adjacent to the STI, removing part of the STI, and then forming a first gate structure on the substrate and the STI. Preferably, the first gate structure includes a high-k dielectric layer on the substrate and a gate electrode on the high-k dielectric layer, in which the high-k dielectric layer comprises a first L-shape.

公开(公告)号：US11765891B2

公开(公告)日：2023-09-19

申请号：US17391067

申请日：2021-08-02

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chun-Hsien Lin ,  Yung-Chen Chiu ,  Chien-Liang Wu ,  Te-Wei Yeh

IPC: H10B20/20 ,  H10B20/25

CPC classification number: H10B20/20 ,  H10B20/25

Abstract: A one-time programmable (OTP) memory cell includes a substrate having a first conductivity type and having an active area surrounded by an isolation region, a transistor disposed on the active area, and a capacitor disposed on the active area and electrically coupled to the transistor. The capacitor comprises a diffusion region of a second conductivity type in the substrate, a metallic film in direct contact with the active area, a capacitor dielectric layer on the metallic film, and a metal gate surrounded by the capacitor dielectric layer. The diffusion region and the metallic film constitute a capacitor bottom plate.

公开(公告)号：US20230223399A1

公开(公告)日：2023-07-13

申请号：US18119253

申请日：2023-03-08

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Te-Wei Yeh ,  Yi-Chun Chen

IPC: H01L27/06 ,  H01L29/778 ,  H01L29/205 ,  H01L21/306 ,  H01L29/40 ,  H01L21/765 ,  H01L21/8252 ,  H01L29/20 ,  H01L29/66

CPC classification number: H01L27/0605 ,  H01L29/7786 ,  H01L29/205 ,  H01L21/30621 ,  H01L29/402 ,  H01L27/0629 ,  H01L21/765 ,  H01L21/8252 ,  H01L28/20 ,  H01L29/2003 ,  H01L29/66462

Abstract: A resistor with GaN structures, including a GaN layer with a 2DEG resistor region and an undoped polysilicon resistor region, an AlGaN barrier layer on the GaN layer in the 2DEG resistor region, multiple p-type doped GaN capping layers arranged on the AlGaN barrier layer so that the GaN layer not covered by the p-type doped GaN capping layers in the 2DEG resistor region is converted into a 2DEG resistor, a passivation layer on the GaN layer, and an undoped polysilicon layer on the passivation layer in the undoped polysilicon resistor region and functions as an undoped polysilicon resistor.

公开(公告)号：US11631664B2

公开(公告)日：2023-04-18

申请号：US17075707

申请日：2020-10-21

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chien-Liang Wu ,  Te-Wei Yeh ,  Yi-Chun Chen

IPC: H01L27/06 ,  H01L29/20 ,  H01L29/205 ,  H01L29/40 ,  H01L29/66 ,  H01L29/778 ,  H01L49/02 ,  H01L21/306 ,  H01L21/765 ,  H01L21/8252

Abstract: A resistor-transistor-logic (RTL) circuit with GaN structure, including a GaN layer, a AlGaN barrier layer on the GaN layer, multiple p-type doped GaN capping layers on the AlGaN barrier layer, wherein parts of the p-type doped GaN capping layers in a high-voltage region and in a low-voltage region convert the underlying GaN layer into gate depletion areas, the GaN layer not covered by the p-type doped GaN capping layers in a resistor region becomes a 2DEG resistor.

公开(公告)号：US11532666B2

公开(公告)日：2022-12-20

申请号：US17207728

申请日：2021-03-21

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ting-Hsiang Huang ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chih-Kai Kang

IPC: H01L27/22 ,  H01L43/02 ,  H01L43/08

Abstract: A semiconductor device includes a substrate having a magnetic tunneling junction (MTJ) region and a logic region, a magnetic tunneling junction (MTJ) on the MTJ region, and a first metal interconnection on the MTJ. Preferably, a top view of the MTJ includes a circle, a top view of the first metal interconnection includes a flat oval overlapping the circle, and the MTJ includes a bottom electrode, a fixed layer, a free layer, a capping layer, and a top electrode.

公开(公告)号：US20220392905A1

公开(公告)日：2022-12-08

申请号：US17363015

申请日：2021-06-30

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Chun-Hsien Lin ,  Chih-Wei Yang ,  Chang-Chien Wong ,  Te-Wei Yeh ,  Sheng-Yuan Hsueh

IPC: H01L27/112

Abstract: A method for fabricating an one time programmable (OTP) device includes the steps of: forming a first gate structure and a second gate structure extending along a first direction on a substrate; forming a diffusion region adjacent to two sides of the first gate structure and the second gate structure; forming a silicide layer adjacent to the first gate structure; and patterning the first gate structure for forming a third gate structure and a fourth gate structure.

公开(公告)号：US20220344358A1

公开(公告)日：2022-10-27

申请号：US17329171

申请日：2021-05-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Chun-Hsien Lin ,  Sheng-Yuan Hsueh

IPC: H01L27/112 ,  H01L29/423 ,  H01L27/11

Abstract: A semiconductor device includes a substrate having an input/output (I/O) region, an one time programmable (OTP) capacitor region, and a core region, a first metal gate disposed on the I/O region, a second metal gate disposed on the core region, and a third metal gate disposed on the OTP capacitor region. Preferably, the first metal gate includes a first high-k dielectric layer, the second metal gate includes a second high-k dielectric layer, and the first high-k dielectric layer and the second high-k dielectric layer include an I-shape.

公开(公告)号：US11450670B1

公开(公告)日：2022-09-20

申请号：US17230975

申请日：2021-04-14

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Kun-Hsien Lee ,  Sheng-Yuan Hsueh ,  Chang-Chien Wong ,  Ching-Hsiang Tseng ,  Tsung-Hsun Wu ,  Chi-Horn Pai ,  Shih-Chieh Hsu

IPC: H01L27/108

Abstract: The invention provides a semiconductor memory cell, the semiconductor memory cell includes a substrate having a first conductivity type, a doped region in the substrate, wherein the doped region has a second conductivity type, and the first conductivity type is complementary to the second conductivity type, a capacitor insulating layer and an upper electrode on the doped region, a transistor on the substrate, and a shallow trench isolation disposed between the transistor and the capacitor insulating layer, and the shallow trench isolation is disposed in the doped region.

公开(公告)号：US10692928B1

公开(公告)日：2020-06-23

申请号：US16260129

申请日：2019-01-29

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ting-Hsiang Huang ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chih-Kai Kang

IPC: H01L27/22 ,  H01L29/66 ,  H01L43/12 ,  H01L43/08 ,  H01L29/08 ,  H01L29/49 ,  H01L43/02

Abstract: A semiconductor device includes: a dummy gate on a substrate; a first control gate on one side of the dummy gate and a second control gate on another side of the dummy gate; a well in the substrate, wherein the well comprises a first conductive type; a first source/drain region between the dummy gate and the first control gate, wherein the first source/drain region comprises a second conductive type; a second source/drain region between the dummy gate and the second control gate, wherein the second source/drain region comprises the second conductive type; and a doped region directly under the dummy gate, wherein the doped region comprises the first conductive type.