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公开(公告)号:US10008615B1
公开(公告)日:2018-06-26
申请号:US15437740
申请日:2017-02-21
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Ya-Sheng Feng , Chi-Cheng Huang , Ping-Chia Shih , Hung-Wei Lin , Yu-Chun Chen , Ling-Hsiu Chou , An-Hsiu Cheng
IPC: H01L29/423 , H01L29/792 , H01L29/66 , H01L21/8234
Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a semiconductor substrate having a tunneling well, a tunneling oxide layer, a charge storage layer and a control gate. The tunneling oxide layer is disposed on the tunneling well. The tunneling oxide layer includes a first tunneling oxide segment having a first thickness, a second tunneling oxide segment having a second thickness, and a third tunneling oxide segment having a third thickness, and the first thickness, the second thickness and the third thickness are different from each other. The charge storage layer is disposed on the tunneling oxide layer, and the control gate is disposed on the charge storage layer.
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公开(公告)号:US20170194511A1
公开(公告)日:2017-07-06
申请号:US15007280
申请日:2016-01-27
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yu-Chun Chen , Chun-Hung Cheng , Yu-Chieh Lin , Ya-Sheng Feng , Ping-Chia Shih , Ling-Hsiu Chou
IPC: H01L29/792 , H01L29/66
CPC classification number: H01L29/792 , H01L29/6656 , H01L29/66833
Abstract: A non-volatile memory (NVM) device includes a substrate, a charge trapping structure, a first gate electrode and a spacer. The charge trapping structure is disposed on the substrate. The first gate electrode is disposed on the charge trapping structure. The spacer is disposed on at least one sidewall of the first gate electrode and the charge trapping structure. Wherein, the charge trapping structure has a lateral size substantially greater than that of the first gate electrode.
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公开(公告)号:US09368484B1
公开(公告)日:2016-06-14
申请号:US14723482
申请日:2015-05-28
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yu-Chun Chen , Ping-Chen Chang , Tien-Hao Tang , Kuan-Cheng Su
IPC: H01L27/02 , H01L27/088 , H01L29/78 , H01L29/06
CPC classification number: H01L27/0266 , H01L27/0248 , H01L27/0886 , H01L27/1211 , H01L29/0649 , H01L29/0653 , H01L29/0847 , H01L29/1033 , H01L29/41791 , H01L29/7851
Abstract: A fin type ESD protection device includes at least one first fin, at least one second fin, and at least one gate structure. The first fin is disposed on a semiconductor substrate, and a source contact contacts the first fin. The second fin is disposed on the semiconductor substrate, and a drain contact contacts the second fin. The first fin and the second fin extend in a first direction respectively, and the first fin is separated from the second fin. The gate structure is disposed between the source contact and the drain contact. The first fin is separated from the drain contact, and the second fin is separated from the source contact.
Abstract translation: 翅片型ESD保护装置包括至少一个第一鳍片,至少一个第二鳍片和至少一个栅极结构。 第一翅片设置在半导体衬底上,源极触点接触第一鳍片。 第二鳍片设置在半导体衬底上,漏极接触件接触第二鳍片。 第一鳍片和第二鳍片分别在第一方向上延伸,并且第一鳍片与第二鳍片分离。 栅极结构设置在源极触点和漏极触点之间。 第一鳍片与漏极接触部分开,第二鳍片与源极接触部分离开。
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公开(公告)号:US20150123184A1
公开(公告)日:2015-05-07
申请号:US14071670
申请日:2013-11-05
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chang-Tzu Wang , Yu-Chun Chen , Tien-Hao Tang , Kuan-Cheng Su
IPC: H01L27/092 , H01L27/06 , H01L23/60 , H01L29/78
CPC classification number: H01L27/0925 , H01L21/823892 , H01L27/0274 , H01L27/0629 , H01L27/092 , H01L27/0924 , H01L29/785
Abstract: A CMOS device includes a substrate, a pMOS transistor and an nMOS transistor formed on the substrate, and a gated diode. The gated diode includes a floating gate formed on the substrate in between the pMOS transistor and the nMOS transistor and a pair of a p-doped region and an n-doped region formed in the substrate and between the pMOS transistor and the nMOS transistor. The n-doped region is formed between the floating gate and the nMOS transistor, and the p-doped region is formed between the floating gate and the pMOS transistor.
Abstract translation: CMOS器件包括衬底,pMOS晶体管和形成在衬底上的nMOS晶体管,以及门控二极管。 门控二极管包括形成在pMOS晶体管和nMOS晶体管之间的衬底上的浮置栅极和形成在衬底中以及在pMOS晶体管和nMOS晶体管之间的一对p掺杂区域和n掺杂区域。 在浮置栅极和nMOS晶体管之间形成n掺杂区域,并且在浮置栅极和pMOS晶体管之间形成p掺杂区域。
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公开(公告)号:US12063871B2
公开(公告)日:2024-08-13
申请号:US18230189
申请日:2023-08-04
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chiu-Jung Chiu , Ya-Sheng Feng , I-Ming Tseng , Yi-An Shih , Yu-Chun Chen , Yi-Hui Lee , Chung-Liang Chu , Hsiu-Hao Hu
Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.
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公开(公告)号:US20230380296A1
公开(公告)日:2023-11-23
申请号:US18230189
申请日:2023-08-04
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chiu-Jung Chiu , Ya-Sheng Feng , I-Ming Tseng , Yi-An Shih , Yu-Chun Chen , Yi-Hui Lee , Chung-Liang Chu , Hsiu-Hao Hu
Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.
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公开(公告)号:US11765983B2
公开(公告)日:2023-09-19
申请号:US17972542
申请日:2022-10-24
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chiu-Jung Chiu , Ya-Sheng Feng , I-Ming Tseng , Yi-An Shih , Yu-Chun Chen , Yi-Hui Lee , Chung-Liang Chu , Hsiu-Hao Hu
Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.
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公开(公告)号:US20230040932A1
公开(公告)日:2023-02-09
申请号:US17972542
申请日:2022-10-24
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chiu-Jung Chiu , Ya-Sheng Feng , I-Ming Tseng , Yi-An Shih , Yu-Chun Chen , Yi-Hui Lee , Chung-Liang Chu , Hsiu-Hao Hu
Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.
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公开(公告)号:US11515471B2
公开(公告)日:2022-11-29
申请号:US16988707
申请日:2020-08-09
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chiu-Jung Chiu , Ya-Sheng Feng , I-Ming Tseng , Yi-An Shih , Yu-Chun Chen , Yi-Hui Lee , Chung-Liang Chu , Hsiu-Hao Hu
Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.
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公开(公告)号:US11011575B2
公开(公告)日:2021-05-18
申请号:US16655251
申请日:2019-10-17
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Ya-Sheng Feng , Yu-Chun Chen , Chiu-Jung Chiu
Abstract: A circuit selector of embedded magnetoresistive random access memory (EMRAM) includes a transistor comprising a source/drain terminal coupled to a first magnetic tunneling junction (MTJ) and a second MTJ, a gate terminal, and a drain/source terminal coupled to a voltage source. Preferably, the first MTJ includes a first free layer, a first barrier layer, and a first pinned layer, in which the first free layer is coupled to the source/drain terminal and the first pinned layer is coupled to a first circuit. The second MTJ includes a second free layer, a second barrier layer, and a second pinned layer, in which the second pinned layer is coupled to the source/drain terminal and the second free layer is coupled to a second circuit.
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