公开(公告)号：US09871229B2

公开(公告)日：2018-01-16

申请号：US14972932

申请日：2015-12-17

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Siddharth Harikrishna Mohan ,  Paul E. Burrows

IPC: H01L21/00 ,  H01L51/56 ,  H01L51/00 ,  C23C14/24 ,  C23C14/56 ,  B05B1/00 ,  H01L51/50

CPC classification number: H01L51/56 ,  B05B1/005 ,  C23C14/24 ,  C23C14/56 ,  H01L51/0005 ,  H01L51/0013 ,  H01L51/50

Abstract: An emissive layer deposited in graded manner using a plurality of nozzles is disclosed. A mixtures ejected from the plurality of nozzles may contain varying concentrations of host-to-dopant material. The nozzles, as disclosed, may be arranged in a sequential manner such that the order of the sequence is based on varying concentration of the host-to-dopant material. The nozzles may be configured to translate relative to an area of a substrate to allow sequential deposition.

公开(公告)号：US20170117503A1

公开(公告)日：2017-04-27

申请号：US15331065

申请日：2016-10-21

Applicant: Universal Display Corporation

Inventor： Siddharth Harikrishna Mohan ,  William E. Quinn ,  James Robert Kantor

IPC: H01L51/52 ,  H01L51/56

CPC classification number: H01L51/5253 ,  H01L2251/303

Abstract: A buffer layer is provided that can be fabricated over an OLED without the use of any oxygen-containing gas. The buffer layer reduces the possibility of damage to the underlying OLED due to use of oxygen-containing materials during deposition of subsequent barrier layers, and thereby allows for deposition of barrier layers without reducing the flexibility of the device.

公开(公告)号：US20160254487A1

公开(公告)日：2016-09-01

申请号：US15031088

申请日：2014-10-24

Applicant: UNIVERSAL DISPLAY CORPORATION ,  THE TRUSTEES OF PRINCETON UNIVERSITY

Inventor： Siddharth Harikrishna Mohan ,  Ruiqing Ma ,  William E. Quinn ,  Bhadrinarayana Lalgudi Visweswaran ,  Sigurd Wagner

IPC: H01L51/52 ,  B32B15/04 ,  B32B7/02 ,  H01L51/00

CPC classification number: H01L51/5253 ,  B32B7/02 ,  B32B15/04 ,  B32B2307/726 ,  C23C14/06 ,  C23C16/30 ,  C23C28/02 ,  C23C28/04 ,  C23C28/30 ,  C23C30/00 ,  H01L51/0034 ,  H01L51/0094 ,  H01L2251/301 ,  H01L2251/303 ,  H01L2251/558

Abstract: Disclosed is a novel moisture permeation barrier system for substrates and devices and method of making the same. The permeation barrier system includes two barrier layers. The first barrier layer is disposed over the substrate or an electronic device. The second barrier layer is then disposed over the first barrier layer. This system has relatively low permeability to moisture and is flexible. It may cover particles and provide moisture protection with a relatively small width edge seal.

Abstract translation: 公开了一种用于基板和装置的新型水分渗透阻挡系统及其制造方法。 渗透屏障系统包括两个阻挡层。 第一阻挡层设置在基板或电子装置上。 然后将第二阻挡层设置在第一阻挡层上。 该系统具有较低的水分渗透性和柔韧性。 它可以覆盖颗粒并提供具有较小宽度边缘密封的防潮保护。

公开(公告)号：US09142778B2

公开(公告)日：2015-09-22

申请号：US14081161

申请日：2013-11-15

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw

IPC: H01L51/40 ,  H01L51/00 ,  C23C14/04 ,  C23C14/12 ,  H01L51/56

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C14/12 ,  H01L51/56

Abstract: Sources, devices, and techniques for deposition of organic layers, such as for use in an OLED, are provided. A vaporizer may vaporize a material between cooled side walls and toward a mask having an adjustable mask opening. The mask opening may be adjusted to control the pattern of deposition of the material on a substrate, such as to correct for material buildup that occurs during deposition. Material may be collected from the cooled side walls for reuse.

Abstract translation: 提供了用于沉积有机层的源，器件和技术，例如用于OLED。 蒸发器可以将冷却的侧壁之间的材料蒸发并且朝向具有可调节的掩模开口的掩模蒸发。 可以调节掩模开口以控制材料在衬底上的沉积图案，以便校正在沉积期间发生的材料堆积。 可以从冷却的侧壁收集材料以供重新使用。

公开(公告)号：US20140235012A1

公开(公告)日：2014-08-21

申请号：US13896744

申请日：2013-05-17

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Gregory McGraw ,  Paul E. Burrows ,  Siddharth Harikrishna Mohan

IPC: H01L51/00 ,  H01L51/56 ,  B05B7/02

CPC classification number: H01L51/56 ,  C23C14/12 ,  C23C14/22 ,  C23C14/228 ,  H01L51/0004 ,  Y02E10/549

Abstract: Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.

Abstract translation: 本文公开的实施例提供具有具有一个或多个喷嘴的喷嘴模具的装置，每个喷嘴具有一个或多个集成的撇渣器。 使用集成的喷嘴/分离器结构允许在OVJP型沉积技术中进行更高分辨率的打印，而不需要通过允许相对狭窄的有机材料束而使用阴影掩模，该有机材料束可以距离基板相对高的距离放置 。

公开(公告)号：US11997866B2

公开(公告)日：2024-05-28

申请号：US17136404

申请日：2020-12-29

Applicant: Universal Display Corporation

Inventor： Siddharth Harikrishna Mohan ,  William E. Quinn ,  Ruiqing Ma ,  Emory Krall ,  Luke Walski

IPC: H10K50/842 ,  H10K50/11 ,  H10K50/81 ,  H10K50/82 ,  H10K50/822 ,  H10K50/844 ,  H10K59/121 ,  H10K59/122 ,  H10K59/124 ,  H10K71/00 ,  H10K77/10 ,  H10K102/00 ,  H10K50/813

CPC classification number: H10K50/8426 ,  H10K50/11 ,  H10K50/81 ,  H10K50/82 ,  H10K50/822 ,  H10K50/844 ,  H10K59/121 ,  H10K59/122 ,  H10K59/124 ,  H10K71/00 ,  H10K77/111 ,  H10K50/813 ,  H10K2102/311

Abstract: A novel thin film encapsulated OLED panel architecture and a method for making the panels with improved shelf life is disclosed. The OLED panel consists of a plurality of OLED pixels; each OLED pixel is individually hermetically sealed and isolated from its neighboring pixels. The organic stack of the OLED pixel is contained within its own hermetically sealed structure, achieved by making the structure on a barrier coated substrate and using a first barrier material as the grid and a second barrier for encapsulating the entire OLED pixel. The first barrier material provides the edge seal while the second barrier disposed over the pixel provides protection from top down moisture diffusion. By isolating and hermetically sealing individual pixels; any damage such as moisture and oxygen ingress due to defects or particles, delamination, cracking etc. can be effectively contained within the pixel thereby protecting other pixels in the panel.

公开(公告)号：US11121322B2

公开(公告)日：2021-09-14

申请号：US16689259

申请日：2019-11-20

Applicant: Universal Display Corporation

Inventor： Matthew King ,  William E. Quinn ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Elliot H. Hartford ,  Benjamin Swedlove ,  Gregg Kottas ,  Tomasz Trojacki ,  Julia J. Brown

IPC: C23C14/12 ,  C23C14/24 ,  H01L51/56 ,  H01L51/00 ,  H01L51/50 ,  H01L51/52 ,  C23C14/22

Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.

公开(公告)号：US11088324B2

公开(公告)日：2021-08-10

申请号：US16749154

申请日：2020-01-22

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw ,  Xin Xu

IPC: H01L21/00 ,  H01L51/00 ,  C23C14/24 ,  C23C14/12 ,  C23C14/04 ,  C23C14/54 ,  B41J2/14 ,  B41M3/00 ,  H01L51/56 ,  H01L51/50

Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.

公开(公告)号：US10858729B2

公开(公告)日：2020-12-08

申请号：US14730768

申请日：2015-06-04

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Matthew King ,  Elliot H. Hartford, Jr. ,  Siddharth Harikrishna Mohan ,  Benjamin Swedlove ,  Gregg Kottas

IPC: C23C14/12 ,  C23C14/54 ,  C23C14/22 ,  B41J2/045 ,  C23C14/04 ,  H01L51/56 ,  H01L51/00 ,  B05D1/00

Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.

公开(公告)号：US20200161550A1

公开(公告)日：2020-05-21

申请号：US16749154

申请日：2020-01-22

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw ,  Xin Xu

IPC: H01L51/00 ,  C23C14/54 ,  H01L51/56 ,  B41M3/00 ,  B41J2/14 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24

Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.