公开(公告)号：US20070268625A1

公开(公告)日：2007-11-22

申请号：US11439297

申请日：2006-05-22

申请人： Ming Jiang ,  Aron Pentek ,  Yi Zheng

发明人： Ming Jiang ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/147 ,  G11B5/127

CPC分类号： G11B5/3143 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. The exposed thin alumina layer over the trailing edge of the write pole can then either be removed or left intact to form a portion of a trailing shield gap layer. Another Rh layer can then be deposited to provide a non-magnetic trailing shield gap. A magnetic material is then deposited to form the trailing shield. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.

摘要翻译： 一种用于构造用于垂直磁记录的磁写头的方法，该写头具有带后挡板的写极。 在通过掩蔽和离子铣削磁性写入磁极层形成磁性写入磁极之后，沉积薄层的氧化铝。 随后沉积一层薄薄​​的Rh。 然后，沉积厚的氧化铝层，其厚度优选至少等于写入极层的高度。 然后执行化学机械抛光，直到暴露在写柱的顶部（后缘）上的Rh层的一部分。 然后进行诸如离子研磨的材料去除工艺以除去暴露在其下面的薄氧化铝层的暴露的Rh层。 然后可以将写入极的后缘上的暴露的薄氧化铝层去除或保持不变，以形成后屏蔽间隙层的一部分。 然后可以沉积另一个Rh层以提供非磁性的后屏蔽间隙。 然后沉积磁性材料以形成尾部屏蔽。 由于Rh拖尾间隙层是导电的，所以它也可以用作用于电镀磁性后屏蔽的种子层。

公开(公告)号：US07217666B2

公开(公告)日：2007-05-15

申请号：US10792330

申请日：2004-03-02

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

IPC分类号： H01L21/461

CPC分类号： B24B1/00 ,  G11B5/00 ,  G11B5/3116 ,  G11B5/3163 ,  H01L21/00 ,  Y10T29/49032 ,  Y10T29/49044 ,  Y10T29/49048

摘要： A method for forming a high aspect ratio magnetic structure in a magnetic write head using a combination of chemical mechanical polishing and reactive ion etching.

摘要翻译： 使用化学机械抛光和反应离子蚀刻的组合在磁写头中形成高纵横比磁结构的方法。

公开(公告)号：US07712206B2

公开(公告)日：2010-05-11

申请号：US11439297

申请日：2006-05-22

申请人： Ming Jiang ,  Aron Pentek ,  Yi Zheng

发明人： Ming Jiang ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H01R31/00

CPC分类号： G11B5/3143 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.

摘要翻译： 一种用于构造用于垂直磁记录的磁写头的方法，该写头具有带后挡板的写极。 在通过掩蔽和离子铣削磁性写入磁极层形成磁性写入磁极之后，沉积薄层的氧化铝。 随后沉积一层薄薄​​的Rh。 然后，沉积厚的氧化铝层，其厚度优选至少等于写入极层的高度。 然后执行化学机械抛光，直到暴露在写柱的顶部（后缘）上的Rh层的一部分。 然后进行诸如离子研磨的材料去除工艺以除去暴露在其下面的薄氧化铝层的暴露的Rh层。 由于Rh拖尾间隙层是导电的，所以它也可以用作用于电镀磁性后屏蔽的种子层。

公开(公告)号：US20090152234A1

公开(公告)日：2009-06-18

申请号：US11956277

申请日：2007-12-13

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.

摘要翻译： 一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。 该方法包括将磁性写入极材料沉积在衬底上，然后将磁性材料沉积在写入极材料上，随后是非磁性材料。 形成第一掩模，其具有前边缘以限定次级火炬点的位置，并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。 第一个掩模由配置为定义写入极的第二个掩模代替，并且执行离子铣削来定义写入极点。 从磁性层和非磁性层的阴影形成扩张的次级耀斑点。

公开(公告)号：US20050193550A1

公开(公告)日：2005-09-08

申请号：US10792330

申请日：2004-03-02

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

IPC分类号： B24B1/00 ,  C09K3/14 ,  H01L21/00

CPC分类号： B24B1/00 ,  G11B5/00 ,  G11B5/3116 ,  G11B5/3163 ,  H01L21/00 ,  Y10T29/49032 ,  Y10T29/49044 ,  Y10T29/49048

摘要： A method for forming a high aspect ratio magnetic structure in a magnetic write head using a combination of chemical mechanical polishing and reactive ion etching.

摘要翻译： 使用化学机械抛光和反应离子蚀刻的组合在磁写头中形成高纵横比磁结构的方法。

公开(公告)号：US07675709B2

公开(公告)日：2010-03-09

申请号：US11525789

申请日：2006-09-21

申请人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

发明人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

IPC分类号： G11B5/31 ,  G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A magnetic write head structure that maximizes write field strength while minimizing stray fields. The write pole structure maximizes write field strength by minimizing saturation of the magnetic pole tips, and minimizes stray field writing by preventing magnetic fields from extending laterally from the sides of the magnetic pole. The write head structure includes a write pole having a pole tip configured with a stair notched shape and a steep shouldered base beneath the stair notched portion. This configuration maximizes the amount of flux that can be delivered to the pole tip while also avoiding stray fields. The magnetic pole can also be configured with wing shaped extensions that extend laterally from the pole tip region but which are recessed from the ABS by a desired amount. The magnetic write head structure can be manufactured by forming a magnetic pole with a raised portion, depositing a write gap material over the magnetic pole and then forming a magnetic pedestal over the magnetic pole and write gap, the pedestal having a width significantly smaller than the width of the raised portion of the magnetic pole, a first ion mill can then be performed to notch and trim the magnetic pole. Then a non-magnetic layer such as alumina can be deposited and a second ion mill performed to form a stair notched configuration. An alumina bump can be formed prior to ion milling to provide a mask for forming the laterally extending, recessed wings in the pole tip of the magnetic pole.

摘要翻译： 磁写头结构，使写入场强度最大化，同时最小化杂散场。 写磁极结构通过最小化磁极尖端的饱和度来最大化写入场强度，并且通过防止磁场从磁极的侧面横向延伸来最小化杂散磁场写入。 写头结构包括具有构造为具有阶梯形切口形状的极尖的写入极和在阶梯切口部下方的陡峭的肩部基座。 该配置最大化可以传送到极尖的通量，同时也避免杂散场。 磁极还可以配置有翼形延伸部，其从极尖区域横向延伸，但是从ABS凹入所需量。 可以通过形成具有凸起部分的磁极来制造磁性写入头结构，在磁极上沉积写入间隙材料，然后在磁极和写入间隙上形成磁性基座，该基座具有明显小于 磁极的凸起部分的宽度，然后可以执行第一离子磨机来切割和修整磁极。 然后可以沉积诸如氧化铝的非磁性层，并且执行第二离子磨，以形成阶梯形缺口构型。 可以在离子研磨之前形成氧化铝凸块，以提供用于在磁极的极尖中形成横向延伸的凹入的翼的掩模。

公开(公告)号：US07083738B2

公开(公告)日：2006-08-01

申请号：US10632631

申请日：2003-07-31

申请人： Edward Hin Pong Lee ,  Aron Pentek ,  Wen-Chien David Hsiao

发明人： Edward Hin Pong Lee ,  Aron Pentek ,  Wen-Chien David Hsiao

IPC分类号： B29D11/00 ,  H01L21/00

CPC分类号： G11B5/1877 ,  G11B5/3163

摘要： A method for fabricating a magnetic head using a modified P1 cap process. A first pole is formed. A cap is formed above the first pole. A gap layer is formed above the cap. A second pole is formed above the gap layer. Exposed portions of the gap layer are removed. The cap and first pole are milled for creating a shoulder of the first pole tapered upwardly towards the cap. Another method for fabricating a magnetic head includes forming a first pole, forming a gap layer above the first pole, forming a second pole above the gap layer, forming a layer of photoresist above the second pole, patterning the photoresist such that the photoresist covers areas of the gap layer positioned towards the second pole, removing exposed portions of the gap layer, removing part of exposed portions of the first pole for forming steps in the first pole on opposite sides of the photoresist, removing the photoresist, and milling for creating a shoulder of the first pole tapering upwardly towards the cap.

摘要翻译： 一种使用改进的P 1帽工艺制造磁头的方法。 形成第一极。 在第一极上方形成帽。 在盖上形成间隙层。 在间隙层上方形成第二极。 去除间隙层的露出部分。 铣头和第一杆被铣削以产生第一杆的肩部向上朝向帽部锥形。 制造磁头的另一方法包括形成第一极，在第一极上方形成间隙层，在间隙层上方形成第二极，在第二极上形成光致抗蚀剂层，使光致抗蚀剂覆盖区域 间隔层定位成朝向第二极，去除间隙层的暴露部分，去除第一极的暴露部分的一部分，以在光致抗蚀剂的相对侧上的第一极中形成台阶，去除光致抗蚀剂，并研磨以产生 第一杆的肩部朝向帽部向上逐渐变细。

公开(公告)号：US20080074782A1

公开(公告)日：2008-03-27

申请号：US11525789

申请日：2006-09-21

申请人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

发明人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A magnetic write head structure that maximizes write field strength while minimizing stray fields. The write pole structure maximizes write field strength by minimizing saturation of the magnetic pole tips, and minimizes stray field writing by preventing magnetic fields from extending laterally from the sides of the magnetic pole. The write head structure includes a write pole having a pole tip configured with a stair notched shape and a steep shouldered base beneath the stair notched portion. This configuration maximizes the amount of flux that can be delivered to the pole tip while also avoiding stray fields. The magnetic pole can also be configured with wing shaped extensions that extend laterally from the pole tip region but which are recessed from the ABS by a desired amount. The magnetic write head structure can be manufactured by forming a magnetic pole with a raised portion, depositing a write gap material over the magnetic pole and then forming a magnetic pedestal over the magnetic pole and write gap, the pedestal having a width significantly smaller than the width of the raised portion of the magnetic pole, a first ion mill can then be performed to notch and trim the magnetic pole. Then a non-magnetic layer such as alumina can be deposited and a second ion mill performed to form a stair notched configuration. An alumina bump can be formed prior to ion milling to provide a mask for forming the laterally extending, recessed wings in the pole tip of the magnetic pole.

摘要翻译： 磁写头结构，使写入场强度最大化，同时最小化杂散场。 写磁极结构通过最小化磁极尖端的饱和度来最大化写入场强度，并且通过防止磁场从磁极的侧面横向延伸来最小化杂散磁场写入。 写头结构包括具有构造为具有阶梯形切口形状的极尖的写入极和在阶梯切口部下方的陡峭的肩部基座。 该配置最大化可以传送到极尖的通量，同时也避免杂散场。 磁极还可以配置有翼形延伸部，其从极尖区域横向延伸，但是从ABS凹入所需量。 可以通过形成具有凸起部分的磁极来制造磁性写入头结构，在磁极上沉积写入间隙材料，然后在磁极和写入间隙上形成磁性基座，该基座具有明显小于 磁极的凸起部分的宽度，然后可以执行第一离子磨机来切割和修整磁极。 然后可以沉积诸如氧化铝的非磁性层，并且执行第二离子磨，以形成阶梯形缺口构型。 可以在离子研磨之前形成氧化铝凸块，以提供用于在磁极的极尖中形成横向延伸的凹入的翼的掩模。

公开(公告)号：US20080141522A1

公开(公告)日：2008-06-19

申请号：US11611829

申请日：2006-12-15

申请人： Amanda Baer ,  Vladimir Nikitin ,  Aron Pentek ,  Neil Leslie Robertson

发明人： Amanda Baer ,  Vladimir Nikitin ,  Aron Pentek ,  Neil Leslie Robertson

IPC分类号： G11B5/127 ,  B05D5/12 ,  H04R31/00

CPC分类号： G11B5/3166 ,  G11B5/102 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/3169 ,  G11B5/3173 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： An optical lapping guide for determining an amount of lapping performed on a row of sliders in a process for manufacturing sliders for magnetic data recording. The optical lapping guide is constructed with a front edge that is at an angle with respect to an air bearing surface plane ABS plane, such that a portion of the lapping guides is in front of the ABS and portion of the lapping guide is behind the ABS. As lapping progresses, an increasing amount of the lapping guide will be exposed at the ABS and visible for inspection. Therefore, after a lapping process has been performed, the optical lapping guide can be inspected to determine the amount of material removed by lapping. The greater the amount of the lapping guide that is exposed and visible, the greater the amount of material removed by lapping.

摘要翻译： 光学研磨引导件，用于确定在用于制造用于磁数据记录的滑块的过程中对一排滑块执行的研磨量。 光学研磨引导件的前边缘相对于空气轴承表面平面ABS平面成一定角度，使得研磨导轨的一部分在ABS的前面，研磨导轨的一部分在ABS后面 。 随着研磨的进行，越来越多的研磨导轨将暴露在ABS处并可见以供检查。 因此，在进行研磨处理之后，可以检查光学研磨导向件以确定通过研磨去除的材料的量。 暴露和可见的研磨导轨的量越大，通过研磨去除的材料量就越大。

公开(公告)号：US20080072417A1

公开(公告)日：2008-03-27

申请号：US11525788

申请日：2006-09-21

申请人： Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek

发明人： Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard mask material such as conformally deposited alumina is then deposited full film over the mask and write pole material. An ion mill, such as in an Ar or CHF3 chemistry is then used to preferentially remove horizontally disposed portions of the alumina layer (hard mask layer), thereby forming vertical hard mask walls at the sides of the mask structure. An ion mill is then used to form the write pole, with the alumna side walls providing excellent masking for forming well defined write pole edges. A relatively gentle clean up process can then be performed to remove the remaining mask material and side walls. The use of the alumina side walls eliminated the need to use an alumina hard mask that extends over the entire top of the write pole, Because of this, after forming the write pole, a relatively gentle clean up such as TMAH etch and NMP can be used to remove the remaining mask and alumina walls from the write pole.

摘要翻译： 一种用于制造用于垂直磁写头的写极的方法。 该方法包括在磁性写入磁极材料的全部薄膜层上形成掩模结构。 然后将诸如保形沉积氧化铝的硬掩模材料层沉积在掩模上并写入极材料。 然后使用诸如Ar或CHF 3化学中的离子磨机来优先除去氧化铝层（硬掩模层）的水平设置的部分，从而在掩模结构的侧面形成垂直的硬掩模壁。 然后使用离子磨机形成写柱，校准侧壁为形成良好定义的写极边缘提供了优​​异的掩模。 然后可以执行相对温和的清理过程以除去剩余的掩模材料和侧壁。 使用氧化铝侧壁消除了使用在写入极的整个顶部上延伸的氧化铝硬掩模的需要。因此，在形成写入极之后，可以进行相对温和的清洁，例如TMAH蚀刻和NMP可以 用于从写入极上去除剩余的掩模和氧化铝壁。