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公开(公告)号：US20110015311A1
公开(公告)日：2011-01-20
申请号：US12887977
申请日：2010-09-22
申请人： Paul J. Buras , William D. Lee , James R. Butler
发明人： Paul J. Buras , William D. Lee , James R. Butler
IPC分类号： C08L95/00
CPC分类号： C09D195/00 , C08K3/20 , C08L95/00 , C08L2666/02
摘要： Asphalt compositions and methods of forming such are described herein. The asphalt compositions and methods of forming such are generally adapted to enable open air processing while producing asphalt compositions that exhibit properties capable of meeting SUPERPAVE™ specifications.
摘要翻译： 本文描述了沥青组合物及其形成方法。 沥青组合物及其形成方法通常适于在露出空气处理的同时生产具有能够满足SUPERPAVE TM规格的性能的沥青组合物。
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公开(公告)号：US09711324B2
公开(公告)日：2017-07-18
申请号：US13485186
申请日：2012-05-31
申请人： William D. Lee , Steve Drummond
发明人： William D. Lee , Steve Drummond
IPC分类号： H01J37/18 , H01J37/317
CPC分类号： H01J37/185 , H01J37/3171 , H01J2237/022 , H01J2237/184 , H01J2237/2001 , H01J2237/31701
摘要： An ion implantation system provides ions to a workpiece positioned in a process environment of a process chamber on a sub-ambient temperature chuck. An intermediate chamber having an intermediate environment is in fluid communication with an external environment and has a cooling station and heating station for cooling and heating the workpiece. A load lock chamber is provided between the process chamber and intermediate chamber to isolate the process environment from the intermediate environment. A positive pressure source provides a dry gas within the intermediate chamber at dew point that is less than a dew point of the external environment to the intermediate chamber. The positive pressure source isolates the intermediate environment from the external environment via a flow of the dry gas from the intermediate chamber to the external environment.
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公开(公告)号：US20130320208A1
公开(公告)日：2013-12-05
申请号：US13485186
申请日：2012-05-31
申请人： William D. Lee , Steve Drummond
发明人： William D. Lee , Steve Drummond
CPC分类号： H01J37/185 , H01J37/3171 , H01J2237/022 , H01J2237/184 , H01J2237/2001 , H01J2237/31701
摘要： An ion implantation system provides ions to a workpiece positioned in a process environment of a process chamber on a sub-ambient temperature chuck. An intermediate chamber having an intermediate environment is in fluid communication with an external environment and has a cooling station and heating station for cooling and heating the workpiece. A load lock chamber is provided between the process chamber and intermediate chamber to isolate the process environment from the intermediate environment. A positive pressure source provides a dry gas within the intermediate chamber at dew point that is less than a dew point of the external environment to the intermediate chamber. The positive pressure source isolates the intermediate environment from the external environment via a flow of the dry gas from the intermediate chamber to the external environment.
摘要翻译： 离子注入系统向位于次环境温度卡盘上的处理室的处理环境中的工件提供离子。 具有中间环境的中间室与外部环境流体连通，具有用于冷却和加热工件的冷却站和加热站。 在处理室和中间室之间设置负载锁定室，以将过程环境与中间环境隔离。 正压源在中间室内的露点处提供干燥气体，其露点小于外部环境对中间室的露点。 正压源通过干气从中间室流向外部环境，将中间环境与外部环境隔离开来。
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公开(公告)号：US08330129B1
公开(公告)日：2012-12-11
申请号：US13216812
申请日：2011-08-24
申请人： William D. Lee
发明人： William D. Lee
CPC分类号： H01J37/3171 , H01J37/244 , H01J2237/24542
摘要： One embodiment relates to an ion implanter. The ion implanter includes an ion source to generate an ion beam, as well as a scanner to scan the ion beam across a surface of a workpiece. The ion implanter also includes an array of absorption and radiation elements arranged to absorb energy of the scanned ion beam and radiate at least some of the absorbed energy away from the propagation direction. A detection element (e.g., an infrared detector) is arranged to detect energy (e.g., in the form of heat) radiated by the array of absorption and radiation elements and to determine a beam profile of the scanned ion beam based on the detected energy.
摘要翻译： 一个实施例涉及一种离子注入机。 离子注入机包括用于产生离子束的离子源，以及扫描器以横过工件的表面扫描离子束。 离子注入机还包括吸收和辐射元件的阵列，其布置成吸收扫描的离子束的能量并且辐射至少一些被吸收的能量远离传播方向。 检测元件（例如，红外检测器）被布置成检测由吸收和辐射元件阵列辐射的能量（例如，以热的形式），并且基于检测到的能量来确定扫描离子束的光束分布。
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公开(公告)号：US20140034846A1
公开(公告)日：2014-02-06
申请号：US13566013
申请日：2012-08-03
IPC分类号： G21K5/08
CPC分类号： H01J37/18 , H01J37/20 , H01J37/3171 , H01J2237/2001 , H01J2237/2002 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/31705 , H01L21/02002 , H01L21/67109 , H01L21/67201 , H01L21/67213 , H01L21/67742 , H01L21/67766
摘要： An ion implantation system provides ions to a workpiece positioned in a vacuum environment of a process chamber on a cooled chuck. A pre-chill station within the process chamber has a chilled workpiece support configured to cool the workpiece to a first temperature, and a post-heat station within the process chamber, has a heated workpiece support configured to heat the workpiece to a second temperature. The first temperature is lower than a process temperature, and the second temperature is greater than an external temperature. A workpiece transfer arm is further configured to concurrently transfer two or more workpieces between two or more of the chuck, a load lock chamber, the pre-chill station, and the post-heat station.
摘要翻译： 离子注入系统向位于冷却卡盘上的处理室的真空环境中的工件提供离子。 处理室内的预冷站具有构造成将工件冷却到第一温度的冷冻工件支撑件，并且处理室内的后加热站具有被配置为将工件加热到第二温度的加热工件支撑件。 第一温度低于处理温度，第二温度大于外部温度。 工件传送臂还被构造成在卡盘，加载锁定室，预冷站和后加热站之间的两个或更多个之间同时传送两个或更多个工件。
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公开(公告)号：US20120267546A1
公开(公告)日：2012-10-25
申请号：US13089830
申请日：2011-04-19
CPC分类号： B01D8/00 , H01J37/18 , H01J37/3171 , H01J2237/1825
摘要： A cold trap filter and method is provided for filtering chemical species from a vacuum system of an ion implantation system. A canister is in fluid communication with an exhaust of a high vacuum pump and an intake of a roughing pump used for evacuating an ion source chamber. One or more paddles are positioned within the canister, wherein each paddle has a cooling line in fluid communication with a coolant source. The coolant source passes a coolant through the cooling line, thus cooling the one or more paddles to a predetermined temperature associated with a condensation or deposition point of the chemical species, therein condensing or depositing the chemical species on the paddles while not interfering with a vacuum capacity of the high vacuum and roughing pumps. The paddles can also be electrically biased to electrostatically attract the chemical species to the paddles in one or more biasing steps.
摘要翻译： 提供了一种冷阱过滤器和方法，用于从离子注入系统的真空系统中过滤化学物质。 罐与高真空泵的废气和用于抽空离子源室的粗抽泵的进气口流体连通。 一个或多个桨叶位于罐内，其中每个桨叶具有与冷却剂源流体连通的冷却管线。 冷却剂源将冷却剂通过冷却管线，从而将一个或多个桨叶冷却到与化学物质的冷凝或沉积点相关联的预定温度，其中将化学物质冷凝或沉积在桨上，同时不干扰真空 高真空和粗抽泵的容量。 桨也可以被电偏置以在一个或多个偏压步骤中静电地将化学物质吸引到桨叶。
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27.发明申请ACTIVE DEW POINT SENSING AND LOAD LOCK VENTING TO PREVENT CONDENSATION ON WORKPIECES 审中-公开活动的DEW点感测和负载锁定，以防止工作上的冷凝公开(公告)号：US20110291030A1
公开(公告)日：2011-12-01
申请号：US13116580
申请日：2011-05-26
申请人： William D. Lee
发明人： William D. Lee
CPC分类号： H01J37/3171 , H01J37/185 , H01J2237/006 , H01J2237/184 , H01J2237/2001 , H01J2237/24585
摘要： A system, apparatus, and method is provided for preventing condensation on a workpiece in an end station of an ion implantation system. A workpiece is cooled in a first environment, and is transferred to a load lock chamber that is in selective fluid communication with the end station and a second environment, respectively. A workpiece temperature monitoring device is configured to measure a temperature of the workpiece in the load lock chamber. An external monitoring device measures a temperature and relative humidity in the second environment, and a controller is configured to determine a temperature of the workpiece at which condensation will not form on the workpiece when the workpiece is transferred from the load lock chamber to the second environment.
摘要翻译： 提供了一种系统，装置和方法，用于防止离子注入系统的终端中的工件上的冷凝。 工件在第一环境中被冷却，并且被转移到分别与终端站和第二环境选择性流体连通的负载锁定室。 工件温度监控装置被配置为测量加载锁定室中的工件的温度。 外部监视装置测量第二环境中的温度和相对湿度，并且控制器被配置为当工件从负载锁定室转移到第二环境时，确定在工件上不会形成冷凝的工件的温度 。
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公开(公告)号：US20110291023A1
公开(公告)日：2011-12-01
申请号：US13116661
申请日：2011-05-26
IPC分类号： B01J19/08
CPC分类号： H01J37/20 , H01J37/3171 , H01J2237/166 , H01J2237/2001 , H01J2237/20214
摘要： A workpiece scanning system is provided having a scan arm that rotates about a first axis and a chilled end effector rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis.
摘要翻译： 提供了一种工件扫描系统，其具有围绕第一轴线旋转的扫描臂以及围绕第二轴可旋转地联接到扫描臂的冷冻末端执行器，用于选择性地固定工件。 冷冻末端执行器具有夹紧板和用于冷却夹紧板的一个或多个冷却机构。 轴承沿着第二轴线定位并且将端部执行器可旋转地联接到扫描臂，并且沿着第二轴线定位密封件以在外部环境和内部环境之间提供压力障碍。 轴承和密封件中的一个或多个可以具有与其相关联的铁磁流体。 加热器组件靠近轴承和密封定位，其中加热器组件选择性地向轴承和密封提供预定量的热量，其中增加端部执行器围绕第二轴线旋转的倾向。
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公开(公告)号：US5890336A
公开(公告)日：1999-04-06
申请号：US19456
申请日：1998-02-05
IPC分类号： E04D5/12
CPC分类号： E04D5/12 , Y10T428/24273
摘要： Roofing assembly having a substrate covered with a base sheet which is perforated with a plurality of uniformly spaced clusters of vertical apertures designed to receive an adhesive to bond the base sheet to the substrate. The roofing assembly possesses improved wind uplift resistance.
摘要翻译： 屋顶组件具有覆盖有基片的基底，该基片穿孔具有多个均匀间隔的垂直孔的簇，设计成接收将基片粘合到基底上的粘合剂。 屋顶组件具有改善的风力提升阻力。
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公开(公告)号：US08692215B2
公开(公告)日：2014-04-08
申请号：US13116661
申请日：2011-05-26
CPC分类号： H01J37/20 , H01J37/3171 , H01J2237/166 , H01J2237/2001 , H01J2237/20214
摘要： A workpiece scanning system is provided having a scan arm that rotates about a first axis and a chilled end effector rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis.
摘要翻译： 提供了一种工件扫描系统，其具有围绕第一轴线旋转的扫描臂以及围绕第二轴可旋转地联接到扫描臂的冷冻末端执行器，用于选择性地固定工件。 冷冻末端执行器具有夹紧板和用于冷却夹紧板的一个或多个冷却机构。 轴承沿着第二轴线定位并且将端部执行器可旋转地联接到扫描臂，并且沿着第二轴线定位密封件以在外部环境和内部环境之间提供压力障碍。 轴承和密封件中的一个或多个可以具有与其相关联的铁磁流体。 加热器组件靠近轴承和密封定位，其中加热器组件选择性地向轴承和密封提供预定量的热量，其中增加端部执行器围绕第二轴线旋转的倾向。
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