Semiconductor device and method for fabricating the same
    28.
    发明授权
    Semiconductor device and method for fabricating the same 有权
    半导体装置及其制造方法

    公开(公告)号:US08536704B2

    公开(公告)日:2013-09-17

    申请号:US13271835

    申请日:2011-10-12

    IPC分类号: H01L23/532

    摘要: An interlayer insulating film containing oxygen and carbon is formed on a semiconductor substrate. A groove is formed in the interlayer insulating film. An auxiliary film containing predetermined first and second metallic elements is formed on a bottom surface and a sidewall of the formed groove. Then, an interconnect body layer containing copper is formed to fill the groove. By performing a thermal treatment, a first barrier film containing a compound of the first metallic element and an oxygen element of the interlayer insulating film, and a second barrier film containing a compound of the second metallic element and carbon element of the interlayer insulating film are formed on the interlayer insulating film on the bottom surface and the sidewall of the groove.

    摘要翻译: 在半导体衬底上形成含有氧和碳的层间绝缘膜。 在层间绝缘膜中形成沟槽。 在形成的槽的底面和侧壁上形成含有预定的第一和第二金属元件的辅助膜。 然后,形成包含铜的互连体层以填充凹槽。 通过进行热处理,含有第一金属元素的化合物和层间绝缘膜的氧元素的第一阻挡膜和含有层间绝缘膜的第二金属元素和碳元素的化合物的第二阻挡膜是 形成在槽的底面和侧壁上的层间绝缘膜上。

    Projection lens unit
    30.
    发明授权
    Projection lens unit 失效
    投影镜头单元

    公开(公告)号:US07023629B2

    公开(公告)日:2006-04-04

    申请号:US10424138

    申请日:2003-04-28

    IPC分类号: G02B7/02

    CPC分类号: G02B7/10 G02B7/021 G02B7/028

    摘要: A projection lens unit compensates for thermal expansion and contraction. The unit comprises a coupler at the front surface of a CRT, a lens unit body for projecting an image onto a screen by controlling and magnifying the light from the CRT, a plurality of legs secured to the coupler for supporting the lens unit body at more than three points, a slide mechanism (latch arms and latch engaging slots provided between the legs and the lens unit body for slidably supporting the legs for movement along the optical axis relative to the lens unit body, and expansion/contraction bars provided between the legs and the lens unit body for compensating for the thermally induced expansion/contraction, with one end engaged with a leg and the other end engaged with the base of the lens unit body.

    摘要翻译: 投影透镜单元补偿热膨胀和收缩。 该单元包括在CRT的前表面处的耦合器,透镜单元主体,用于通过控制和放大来自CRT的光将图像投影到屏幕上,多个腿固定到耦合器,用于将透镜单元主体支撑在更多的位置 滑动机构(设置在腿部和透镜单元本体之间的闩锁臂和闩锁接合槽,用于可滑动地支撑腿部,用于沿着光轴相对于透镜单元主体运动,以及设置在腿部之间的伸缩杆) 以及用于补偿热诱导的伸缩的透镜单元体,其一端与腿接合,另一端与透镜单元体的基部接合。