摘要:
A method for fabricating a floating gate in a non-volatile memory device and a floating gate fabricated using the same are provided. A conductive layer having upper and lower portions is formed over a substrate with field regions formed therein. A hard mask layer is formed over the conductive layer. Next, a photoresist pattern is formed over the hard mask layer. The hard mask layer is etched to form a hard mask pattern, using the photoresist pattern as an etching mask. The upper portion of the conductive layer is slope-etched, leaving the lower portion of the conductive layer intact, using the photoresist pattern as an etching mask. The slope-etched upper portion of the conductive layer is again vertically etched and the lower portion of the conductive layer is concurrently slope-etched, using the hard pattern as an etching mask. With the present invention, a bridge between floating gates can be reduced, and field loss can be reduced during processing steps such as an ONO etching process.
摘要:
Nanotube filaments comprising carbon, boron and nitrogen of the general formula BxCyNz, having high-aspect ratio and high-crystallinity produced by a pressurized vapor/condenser method and a process of production. The process comprises thermally exciting a boron-containing target in a chamber containing a carbon source and nitrogen at a pressure which is elevated above atmospheric pressure.
摘要:
Nanotube filaments comprising carbon, boron and nitrogen of the general formula BxCyNz, having high-aspect ratio and high-crystallinity produced by a pressurized vapor/condenser method and a process of production. The process comprises thermally exciting a boron-containing target in a chamber containing a carbon source and nitrogen at a pressure which is elevated above atmospheric pressure.
摘要:
Provided is a field emission X-ray tube. The field emission X-ray tube includes a cathode electrode provided to one end of a vacuum vessel and including a field emission emitter, an anode electrode provided to the other end of the vacuum vessel in an extending direction of the vacuum vessel, and a gate electrode provided on an outer surface of the vacuum vessel adjacent to the cathode electrode.
摘要:
The present invention relates to a process for preparing dimethyl ether from methanol. More particularly, this invention relates to an improved process for preparing dimethyl ether with high yield useful as a clean fuel as well as a raw material in chemical industry performed via a catalytic system, wherein dehydration of methanol is first carried out by using a hydrophilic solid acid catalyst and then subsequent dehydration of methanol is carried out continuously by using a hydrophobic zeolite solid acid catalyst in the concurrent presence of unreacted methanol, dimethyl ether produced and water.
摘要:
Formation of a boron nitride nanotube nanocomposite film by combining a boron nitride nanotube solution with a matrix such as a polymer or a ceramic to form a boron nitride nanotube/polyimide mixture and synthesizing a boron nitride nanotube/polyimide nanocomposite film as an electroactive layer.
摘要:
Provided is an epoxy resin composition including a nano-sized radioactive radiation shielding material which has superior shielding effects for against radiation, and to a method for preparing same. In particular, the method for preparing the epoxy resin composition for neutron shielding, includes the steps of: a step of mixing a boron compound powder for absorbing neutrons, optionally a high density metal powder for shielding from against gamma rays and a flame retardant powder, respectively separately or in combination, with an amine-based curing agent to obtain a mixture of a curing agent and a powder; an ultrasonic wave treating step of applying ultrasonic waves to the mixture to coat the surface of the powder with the amine-based curing agent and to disperse the powder in the curing agent; and a dispersing step of mixing and dispersing the amine-based curing agent, that was dispersed and includes the powder treated with ultrasonic waves, in an epoxy resin.
摘要:
A novel method to develop highly conductive functional materials which can effectively shield various electromagnetic effects (EMEs) and harmful radiations. Metallized nanotube polymer composites (MNPC) are composed of a lightweight polymer matrix, superstrong nanotubes (NT), and functional nanoparticle inclusions. MNPC is prepared by supercritical fluid infusion of various metal precursors (Au, Pt, Fe, and Ni salts), incorporated simultaneously or sequentially, into a solid NT-polymer composite followed by thermal reduction. The infused metal precursor tends to diffuse toward the nanotube surface preferentially as well as the surfaces of the NT-polymer matrix, and is reduced to form nanometer-scale metal particles or metal coatings. The conductivity of the MNPC increases with the metallization, which provides better shielding capabilities against various EMEs and radiations by reflecting and absorbing EM waves more efficiently. Furthermore, the supercritical fluid infusion process aids to improve the toughness of the composite films significantly regardless of the existence of metal.
摘要:
Provided is an epoxy resin composition including a nano-sized radioactive radiation shielding material which has superior shielding effects for against radiation, and to a method for preparing same. In particular, the method for preparing the epoxy resin composition for neutron shielding, includes the steps of: a step of mixing a boron compound powder for absorbing neutrons, optionally a high density metal powder for shielding from against gamma rays and a flame retardant powder, respectively separately or in combination, with an amine-based curing agent to obtain a mixture of a curing agent and a powder; an ultrasonic wave treating step of applying ultrasonic waves to the mixture to coat the surface of the powder with the amine-based curing agent and to disperse the powder in the curing agent; and a dispersing step of mixing and dispersing the amine-based curing agent, that was dispersed and includes the powder treated with ultrasonic waves, in an epoxy resin.
摘要:
Provided is a field emission X-ray tube. The field emission X-ray tube includes a cathode electrode provided to one end of a vacuum vessel and including a field emission emitter, an anode electrode provided to the other end of the vacuum vessel in an extending direction of the vacuum vessel, and a gate electrode provided on an outer surface of the vacuum vessel adjacent to the cathode electrode.