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    Solid-state imaging device, method of manufacturing the same, and electronic apparatus
    22.
    发明授权
    Solid-state imaging device, method of manufacturing the same, and electronic apparatus 有权
    固态成像装置及其制造方法以及电子装置

    公开(公告)号：US08633559B2

    公开(公告)日：2014-01-21

    申请号：US12567180

    申请日：2009-09-25

    申请人： Hiromi Wano ,  Yoshiaki Kitano

    发明人： Hiromi Wano ,  Yoshiaki Kitano

    IPC分类号： H01L27/146

    CPC分类号： H01L27/14818 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/14629 ,  H01L27/14812

    摘要： A solid-state imaging device includes light-sensing sections serving as pixels, and waveguides each including a core layer and a cladding layer, the waveguides each being disposed at a position corresponding to one of the light-sensing sections. A cross-sectional structure of the waveguide taken in the horizontal direction of an imaging plane is different from a cross-sectional structure of the waveguide taken in the vertical direction of the imaging plane.

    摘要翻译： 固态成像装置包括用作像素的光感测部分和包括芯层和包覆层的波导，每个波导设置在与一个感光部分相对应的位置。 在成像平面的水平方向上截取的波导管的横截面结构与在成像平面的垂直方向上截取的波导的横截面结构不同。

    SOLID-STATE IMAGING DEVICE, MANUFACTURING METHOD AND DESIGNING METHOD THEREOF, AND ELECTRONIC DEVICE
    24.
    发明申请
    SOLID-STATE IMAGING DEVICE, MANUFACTURING METHOD AND DESIGNING METHOD THEREOF, AND ELECTRONIC DEVICE 有权
    固态成像装置，制造方法及其设计方法及电子装置

    公开(公告)号：US20110108705A1

    公开(公告)日：2011-05-12

    申请号：US12915638

    申请日：2010-10-29

    申请人： Kyoko Izuha ,  Hiromi Okazaki ,  Yoshiaki Kitano

    发明人： Kyoko Izuha ,  Hiromi Okazaki ,  Yoshiaki Kitano

    IPC分类号： H01L27/146 ,  H01L31/0232 ,  H01L31/18

    CPC分类号： H01L31/0232 ,  H01L27/14621 ,  H01L27/14632 ,  H01L27/14645 ,  H01L27/14685 ,  H01L27/14687 ,  H01L27/14689

    摘要： A solid-state imaging device includes: a semiconductor substrate that includes a photodiode separately provided for each of pixels disposed in a matrix on a light-receiving surface; a first insulating film formed on the semiconductor substrate so as to cover multilayer wiring formed on and in contact with the semiconductor substrate, wherein the first insulating film is formed using material of a first refractive index lower than a refractive index of the semiconductor substrate for at least bottom surface and top surface portions of the first insulating film; a second insulating film of a second refractive index higher than the first refractive index formed on the first insulating film; a third insulating film of a third refractive index higher than the second refractive index formed on the second insulating film; and a color filter formed on the third insulating film in a corresponding manner with each pixel so as to transmit light in a wavelength region of red, green, or blue.

    摘要翻译： 一种固态成像装置，包括：半导体基板，包括：分别设置在光接收表面上的矩阵中设置的每个像素的光电二极管; 第一绝缘膜，形成在半导体衬底上，以便覆盖在半导体衬底上形成并与其接触的多层布线，其中第一绝缘膜使用低于半导体衬底的折射率的第一折射率的材料形成， 所述第一绝缘膜的最小底表面和顶表面部分; 第二绝缘膜，其具有高于形成在所述第一绝缘膜上的所述第一折射率的第二折射率; 第三绝缘膜，其具有高于形成在所述第二绝缘膜上的所述第二折射率的第三折射率; 以及以与每个像素相应的方式形成在第三绝缘膜上的滤色器，以便透射红色，绿色或蓝色的波长区域中的光。