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21.
公开(公告)号:US20240429237A1
公开(公告)日:2024-12-26
申请号:US18340463
申请日:2023-06-23
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Anton TOKRANOV , Man GU , Eric Scott KOZARSKY , George MULFINGER , Hong YU
IPC: H01L27/092 , H01L21/8238 , H01L29/66
Abstract: A semiconductor device includes an insulating layer, a first semiconductor layer over the insulating layer, a diffusion break structure between a first active region and a second active region and including a first insulating pattern over the insulating layer and an opening over the first insulating pattern, and a conductive gate material over the opening.
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公开(公告)号:US12170329B2
公开(公告)日:2024-12-17
申请号:US17692218
申请日:2022-03-11
Applicant: GlobalFoundries U.S. Inc.
Inventor: Anupam Dutta , Vvss Satyasuresh Choppalli , Rajendran Krishnasamy
IPC: H01L29/78 , H01L21/3215 , H01L21/8234 , H01L29/06 , H01L29/66
Abstract: According to various embodiments, there is provided a MOSFET device. The MOSFET device may include a substrate; a first doped region disposed in the substrate; a second doped region disposed in the substrate, wherein the first doped region and the second doped region are laterally adjacent to each other; a third doped region disposed in the first doped region; a fourth doped region disposed in the second doped region; a gate disposed on the substrate, over the first and second doped regions, and between the third and fourth doped regions; and at least one high resistance region embedded in at least the second doped region, wherein the first doped region has a first conductivity type, wherein the second doped region, the third doped region, and the fourth doped region have a second conductivity type, wherein the first conductivity type and the second conductivity type are different.
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公开(公告)号:US12170313B2
公开(公告)日:2024-12-17
申请号:US18324637
申请日:2023-05-26
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Vibhor Jain , Anthony K. Stamper , John J. Ellis-Monaghan , Steven M. Shank , Rajendran Krishnasamy
IPC: H01L29/06 , H01L21/763 , H01L29/08 , H01L29/165 , H01L29/66 , H01L29/737
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.
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公开(公告)号:US20240405019A1
公开(公告)日:2024-12-05
申请号:US18327107
申请日:2023-06-01
Applicant: GlobalFoundries U.S. Inc.
IPC: H01L27/06 , H01L21/8249
Abstract: A structure includes a first gate structure spaced from a second gate structure in a field effect transistor (FET) area of a substrate. A polysilicon resistor is in a space between the first gate structure and the second gate structure. The polysilicon resistor has a lower surface that is farther from the substrate than lower surfaces of the polysilicon bodies of the first and second gate structures. The polysilicon resistor may have a different polarity dopant compared to at least one of the polysilicon bodies of the first and second gate structures.
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公开(公告)号:US20240402426A1
公开(公告)日:2024-12-05
申请号:US18203321
申请日:2023-05-30
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Ryan Sporer , Karen Nummy
Abstract: Structures for a photonics chip that include a reflector and methods of forming such structures. The structure comprises a reflector including a dielectric layer on a semiconductor substrate, a plurality of trenches in the dielectric layer, and a reflector layer. Each trench includes a plurality of sidewalls, and the reflector layer includes a portion on the sidewalls of each trench. The structure further comprises a photonic component over the reflector.
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公开(公告)号:US12159926B2
公开(公告)日:2024-12-03
申请号:US18373598
申请日:2023-09-27
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Haiting Wang , Alexander Derrickson , Jagar Singh , Vibhor Jain , Andreas Knorr , Alexander Martin , Judson R. Holt , Zhenyu Hu
IPC: H01L29/735 , H01L29/08 , H01L29/417 , H01L29/66 , H01L29/737
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. A structure includes: an intrinsic base comprising semiconductor material in a channel region of a semiconductor substrate; an extrinsic base vertically above the intrinsic base; a raised collector region on the semiconductor substrate and laterally connected to the intrinsic base; and a raised emitter region on the semiconductor substate and laterally connected to the intrinsic base.
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公开(公告)号:US20240363741A1
公开(公告)日:2024-10-31
申请号:US18767418
申请日:2024-07-09
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Jagar SINGH
IPC: H01L29/735 , H01L29/08 , H01L29/10
CPC classification number: H01L29/735 , H01L29/0808 , H01L29/0821 , H01L29/1008
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bipolar transistors and methods of manufacture. The structure includes: an emitter in a semiconductor substrate; a collector in the semiconductor substrate; a base contact region in the semiconductor substrate and adjacent to the collector and the emitter; and a shallow trench isolation structure overlapping the base contact region and separating the base contact region from the emitter and the collector.
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公开(公告)号:US20240361529A1
公开(公告)日:2024-10-31
申请号:US18139128
申请日:2023-04-25
Applicant: GlobalFoundries U.S. Inc.
Inventor: Keith Donegan , Thomas Houghton , Yusheng Bian , Karen Nummy , Kevin Dezfulian , Takako Hirokawa
CPC classification number: G02B6/305 , G02B6/42 , G02B6/4206
Abstract: Structures including a cavity adjacent to an edge coupler and methods of forming such structures. The structure comprises a semiconductor substrate including a cavity with a sidewall, a dielectric layer on the semiconductor substrate, and an edge coupler on the dielectric layer. The structure further comprises a fill region including a plurality of fill features adjacent to the edge coupler. The fill region includes a reference marker at least partially surrounded by the plurality of fill features, and the reference marker has a perimeter that surrounds a surface area of the dielectric layer, and the surface area overlaps with a portion of the sidewall of the cavity.
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公开(公告)号:US12131904B2
公开(公告)日:2024-10-29
申请号:US17934220
申请日:2022-09-22
Applicant: GlobalFoundries U.S. Inc.
Inventor: Ramsey Hazbun , Alvin J. Joseph , Siva P. Adusumilli , Cameron Luce
IPC: H01L21/02
CPC classification number: H01L21/02433 , H01L21/02381 , H01L21/02639 , H01L21/02647
Abstract: Disclosed are semiconductor structure embodiments of a semiconductor-on-insulator region on a bulk substrate. The semiconductor-on-insulator region includes an upper semiconductor layer above and physically separated from the substrate by insulator-containing cavities (e.g., by dielectric layer and/or a pocket of trapped air, of trapped gas, or under vacuum) and, optionally, by a lower semiconductor layer. Disclosed method embodiments include forming openings that extend vertically through the upper semiconductor layer, through a sacrificial semiconductor layer and, optionally, through a lower semiconductor layer to the substrate. Then, a selective isotropic etch process is performed to form cavities, which extend laterally off the sides of the openings into the sacrificial semiconductor layer. Depending upon the embodiments, different process steps are further performed to form plugs in at least the upper portions of the openings and insulators (including dielectric layers and/or a pocket of trapped air, of trapped gas or under vacuum) in the cavities.
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公开(公告)号:US12125842B2
公开(公告)日:2024-10-22
申请号:US17831545
申请日:2022-06-03
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Anindya Nath , Souvick Mitra
CPC classification number: H01L27/0262 , H01L29/66371 , H01L29/7412
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to vertically stacked diode-trigger silicon controlled rectifiers and methods of manufacture. The structure includes: a silicon controlled rectifier in a trap rich region of a semiconductor substrate; and at least one diode built in polysilicon (gate material) and isolated by a gate-dielectric.
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