公开(公告)号：US5813892A

公开(公告)日：1998-09-29

申请号：US678565

申请日：1996-07-12

Applicant: Christopher J. Spindt ,  John M. Macaulay

Inventor： Christopher J. Spindt ,  John M. Macaulay

IPC: H01J1/304 ,  H01J3/02 ,  H01J9/02

CPC classification number: B82Y10/00 ,  H01J1/3042 ,  H01J3/022 ,  H01J9/025 ,  H01J2201/30403 ,  H01J2201/30457 ,  H01J2201/319

Abstract: A gated electron-emitter is fabricated according to the process in which charged particles are directed towards a track-susceptible layer (48) to form charged-particle tracks (50B.sub.1) through the track-susceptible layer. Apertures (52.sub.1) are formed through the track-susceptible layer by etching along the charged-particle tracks. A gate layer (46) is etched through the apertures to form gate openings (54.sub.1) through the gate layer. An insulating layer (24) is etched through the gate openings to form dielectric open spaces (56.sub.1, 94.sub.1, 106.sub.1, or 114.sub.1) through the insulating layer down to a resistive layer (22B) of an underlying conductive region (22). Electron-emissive elements (30B, 30/88D.sub.1, 98/102.sub.1, or 118.sub.1) are formed in the dielectric open spaces over the resistive layer.

Abstract translation: 根据其中带电粒子指向轨道敏感层（48）以通过轨道敏感层形成带电粒子轨迹（50B1）的工艺制造门控电子发射器。 通过沿着带电粒子轨迹的蚀刻，通过轨道敏感层形成孔径（521）。 通过孔径蚀刻栅极层（46），以形成通过栅极层的栅极开口（541）。 通过栅极开口蚀刻绝缘层（24），以形成通过绝缘层的下行导电区域（22）的电阻层（22B）的电介质开放空间（561,941,1061或1141）。 在电阻层上的电介质开放空间中形成电子发射元件（30B，30 / 88D1,98 / 1011或1181）。

公开(公告)号：US5753130A

公开(公告)日：1998-05-19

申请号：US665620

申请日：1996-06-18

Applicant: David A. Cathey ,  Kevin Tjaden

Inventor： David A. Cathey ,  Kevin Tjaden

IPC: H01J9/02 ,  H01J9/00

CPC classification number: H01J9/025 ,  H01J2201/30403

Abstract: A method for fabricating sharp asperities. A substrate is provided which has a mask layer disposed thereon, and a layer of micro-spheres is disposed superjacent the mask layer. The micro-spheres are for patterning the mask layer. Portions of the mask layer are selectively removed, thereby forming circular masks. The substrate is isotropically etched, thereby creating sharp asperities.

Abstract translation: 一种制造尖锐凹凸的方法。 提供了具有设置在其上的掩模层的基板，并且在该掩模层的上方布置一层微球。 微球用于图案化掩模层。 选择性地去除掩模层的一部分，从而形成圆形掩模。 基板被各向同性地蚀刻，从而产生尖锐的凹凸。

公开(公告)号：US5744195A

公开(公告)日：1998-04-28

申请号：US752234

申请日：1996-11-19

Applicant: Sungho Jin ,  Gregory Peter Kochanski ,  Lawrence Seibles ,  Wei Zhu

Inventor： Sungho Jin ,  Gregory Peter Kochanski ,  Lawrence Seibles ,  Wei Zhu

IPC: C30B29/04 ,  C30B30/02 ,  C30B31/20 ,  H01J1/304 ,  H01J9/02 ,  H01J29/04 ,  H01J31/12 ,  H01L21/205 ,  C23C16/26 ,  B05D3/06

CPC classification number: H01J1/3042 ,  H01J2201/30403 ,  H01J2201/30457 ,  H01J2329/00

Abstract: Applicants have discovered methods for making, treating and using diamonds which substantially enhance their capability for low voltage emission. Specifically, applicants have discovered that defect-rich diamonds--diamonds grown or treated to increase the concentration of defects--have enhanced properties of low voltage emission. Defect-rich diamonds are characterized in Raman spectroscopy by a diamond peak at 1332 cm.sup.-1 broadened by a full width at half maximum .DELTA.K in the range 5-15 cm.sup.-1 (and preferably 7-11 cm.sup.-1). Such defect-rich diamonds can emit electron current densities of 0.1 mA/mm.sup.2 or more at a low applied field of 25 V/.mu.m or less. Particularly advantageous structures use such diamonds in an array of islands or particles each less than 10 .mu.m in diameter at fields of 15 V/.mu.m or less.

Abstract translation: 申请人已经发现了用于制造，处理和使用金刚石的方法，其大大增强了它们的低电压发射能力。 具体来说，申请人已经发现，生长或处理以增加缺陷浓度的富含缺陷的钻石 - 金刚石具有增强的低电压发射性能。 富含缺陷的金刚石的特征在于在1332cm-1处的金刚石峰，在5-15cm -1（优选7-11cm -1）的范围内以最大DELTA K的全宽度加宽的拉曼光谱。 这样的富含缺陷的金刚石可以在25V /μm以下的低施加电场下发射0.1mA / mm 2以上的电子密度。 特别有利的结构在15V /μm或更小的场中使用直径小于10μm的岛或颗粒阵列中的这种金刚石。

公开(公告)号：US5739628A

公开(公告)日：1998-04-14

申请号：US654735

申请日：1996-05-29

Applicant: Naruaki Takada

Inventor： Naruaki Takada

IPC: H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J17/36

CPC classification number: H01J9/025 ,  H01J3/022 ,  H01J2201/30403

Abstract: A field emission type cold cathode device has a substrate whose upper surface is conductive, an insulating layer deposited on the conductive surface, a conductive gate layer, and a conical emitter electrode having a sharp apex formed in an opening in the insulating layer and the gate electrode. The insulating layer includes a first insulating film and a second insulating film. The insulating layer in the opening has an exposed surface arranged so that electrons emitted from near an end portion of the first insulating film are kept away from exposed surfaces of the insulating layer. In one form, the exposed surface of the first insulating film is disposed at a level lower than an unexposed surface of the first insulating film thus forming a recess. In another form, the second insulating film exposed in the opening is recessed relative to the first insulating film exposed in the opening.

Abstract translation: 场发射型冷阴极器件具有上表面导电的衬底，沉积在导电表面上的绝缘层，导电栅极层和具有形成在绝缘层中的开口中的尖锐顶端的锥形发射极，栅极 电极。 绝缘层包括第一绝缘膜和第二绝缘膜。 开口中的绝缘层具有布置成使得从第一绝缘膜的端部附近发射的电子远离绝缘层的暴露表面的暴露表面。 在一种形式中，第一绝缘膜的暴露表面设置在低于第一绝缘膜的未曝光表面的水平面上，从而形成凹陷。 在另一种形式中，暴露在开口中的第二绝缘膜相对于暴露在开口中的第一绝缘膜凹陷。

公开(公告)号：US5723052A

公开(公告)日：1998-03-03

申请号：US606829

申请日：1996-02-26

Applicant: David Nan-Chou Liu

Inventor： David Nan-Chou Liu

IPC: H01J3/02 ,  H01J29/08 ,  H01J31/12 ,  H01J9/227

CPC classification number: H01J29/085 ,  H01J3/022 ,  H01J31/127 ,  H01J2201/30403 ,  H01J2329/00

Abstract: Described are methods for making, and resultant structures of, a field emission display with soft luminescence and a comfortable image for a viewer of the display. The field emission display is formed with a baseplate and an opposing face plate. Field emission microtips are formed in openings in a conductive and insulating layer on the baseplate. An anode is formed on either the faceplate, or on the conductive layer surrounding each opening. Phosphorescent material is formed over the anode. A blocking layer is formed between the phosphor and the faceplate, such that during operation of the display direct light emission from the phosphor is blocked, resulting in indirect phosphorescence and a more comfortable display image. An optional reflective layer may be added over the conductive layer to increase phosphorescence.

Abstract translation: 描述了用于制造具有软发光的场致发射显示和用于显示器的观看者的舒适图像的结果的方法。 场发射显示器形成有基板和相对的面板。 场致发射微尖端形成在基板上的导电绝缘层的开口中。 在面板上或在围绕每个开口的导电层上形成阳极。 在阳极上形成磷光材料。 在荧光体和面板之间形成阻挡层，使得在显示器的操作期间，来自磷光体的直接发光被阻挡，导致间接磷光和更舒适的显示图像。 可以在导电层上添加可选的反射层以增加磷光。

公开(公告)号：US5583393A

公开(公告)日：1996-12-10

申请号：US217416

申请日：1994-03-24

Applicant: Gary W. Jones

Inventor： Gary W. Jones

IPC: H01J1/304 ,  H01J23/06 ,  H01J29/08 ,  H01J29/20 ,  H01J31/12 ,  H01J37/073 ,  H01J63/04 ,  H01J1/30 ,  H01J29/18

CPC classification number: H01J63/04 ,  H01J1/304 ,  H01J23/06 ,  H01J29/085 ,  H01J31/127 ,  H01J2201/30403 ,  H01J2201/30426 ,  H01J2201/319 ,  H01J2237/06341 ,  H01J2237/08 ,  H01J2237/0835

Abstract: A field emitter device for selective emission of an electron and/or ion beam comprising a substrate member having an array of field emitter elements thereon, in which the field emitter elements and/or substrate member have a varied conformation producing a beam of appropriate focused and/or directional character. Also disclosed is a display article for producing an output in response to impingement of electron beams thereon, comprising a substrate member on which is disposed an array of phosphor elements, with a diamond-like film coated on the phosphor elements to maintain the phosphor elements in position on the substrate member. Also disclosed is a field emission apparatus comprising such field emitter device and display article, such as a flat panel display.

Abstract translation: 一种用于选择性地发射电子和/或离子束的场发射器件，包括其上具有阵列的场发射极元件的衬底构件，其中场发射极元件和/或衬底构件具有变化的构象，产生适当聚焦的光束， /或方向角色。 还公开了一种用于响应于其上的电子束的撞击而产生输出的显示器件，包括：衬底构件，荧光体元件阵列上布置有金刚石膜，以将荧光体元件保持在 位置。 还公开了包括这样的场发射器装置和显示制品的场致发射装置，例如平板显示器。

公开(公告)号：US5578902A

公开(公告)日：1996-11-26

申请号：US402750

申请日：1995-03-13

Applicant: Kenneth G. Vickers

Inventor： Kenneth G. Vickers

IPC: H01J29/08 ,  H01J1/53

CPC classification number: H01J29/085 ,  H01J2201/30403

Abstract: A field emission display apparatus comprised of an emitter plate 2 having a plurality of column conductors 9 intersecting a plurality of row conductors 6, and electron emitters 5 at the intersection of each of the row and column conductors. An anode plate 62 is adjacent to the emitter plate 2, the anode plate 62 comprising conductive stripes 90 which are alternately covered by material luminescing in the three primary colors. The conductive stripes 90 covered by the same luminescent material are electrically interconnected to form comb-like structures corresponding to each of the colors. The anode plate 62 contains an active region 58. The conductive stripes 90 have a first width W.sub.7 within the active region 58 and a second different width W.sub.8 outside of the active region 58.

Abstract translation: 一种场发射显示装置，包括具有与多个行导体6相交的多个列导体9的发射极板2和在每个行和列导体的交叉处的电子发射器5。 阳极板62与发射极板2相邻，阳极板62包括由三原色发光的材料交替覆盖的导电条纹90。 由相同的发光材料覆盖的导电条纹90电连接以形成对应于每种颜色的梳状结构。 阳极板62包含有源区域58.导电条纹90在有源区域58内具有第一宽度W7，在有源区域58之外具有第二不同宽度W8。

公开(公告)号：US5578185A

公开(公告)日：1996-11-26

申请号：US383408

申请日：1995-01-31

Applicant: David L. Bergeron ,  John M. Macaulay ,  Roger W. Barton ,  Jeffrey D. Morse

Inventor： David L. Bergeron ,  John M. Macaulay ,  Roger W. Barton ,  Jeffrey D. Morse

IPC: H01J1/30 ,  H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J29/04 ,  H01J31/12 ,  C25D5/02

CPC classification number: B82Y10/00 ,  H01J1/3042 ,  H01J3/022 ,  H01J9/025 ,  H01J2201/30403 ,  H01J2201/30457 ,  H01J2201/319

Abstract: A method is provided for creating gated filament structures for a field emission display. A multi-layer structure is provided that includes a substrate, an insulating layer, a metal gate layer positioned on a top surface of the insulating layer and a gate encapsulation layer positioned on a top surface of the metal gate layer. A plurality of gates are provided and define a plurality of apertures on the top of the insulating layer. A plurality of spacers are formed in the apertures at their edges on the top surface of the insulating layer. The spacers are used as masks for etching the insulating layer and form a plurality of pores in the insulating layer. The pores are plated with a filament material to create a plurality of filaments. The pores can be overplated to create the plurality of filaments. The filaments are vertically self-aligned in the pores.

Abstract translation: 提供了一种用于产生用于场致发射显示器的门控灯丝结构的方法。 提供了一种多层结构，其包括基板，绝缘层，位于绝缘层的顶表面上的金属栅极层和位于金属栅极层顶表面上的栅极封装层。 提供多个栅极并且在绝缘层的顶部上限定多个孔。 在绝缘层的顶表面上的边缘处的孔中形成多个间隔物。 间隔物用作蚀刻绝缘层并在绝缘层中形成多个孔的掩模。 用细丝材料电镀细孔以产生多根长丝。 孔可以被过度铺展以产生多根细丝。 细丝在孔中垂直自对准。

公开(公告)号：US5552659A

公开(公告)日：1996-09-03

申请号：US269312

申请日：1994-06-29

Applicant: John M. Macaulay ,  Christopher J. Spindt ,  Patrick A. Corcoran ,  Lee H. Veneklasen

Inventor： John M. Macaulay ,  Christopher J. Spindt ,  Patrick A. Corcoran ,  Lee H. Veneklasen

IPC: H01J3/02 ,  H01J1/02

CPC classification number: H01J3/022 ,  H01J2201/30403 ,  H01J2201/30457 ,  H01J2329/00

Abstract: An electron emitter contains a gate layer (38), an underlying dielectric layer (36), an intermediate non-insulating layer (34) situated below the dielectric layer, and a lower non-insulating region (32) situated below the intermediate non-insulating layer. A multiplicity of electron-emissive particles (42) are situated over the non-insulating region at the bottom of an opening (40) extending through the three layers. The ratio of the thickness of the dielectric layer to the thickness of the intermediate non-insulating layer is in the range of 1:1 to 4:1, while the ratio of the mean diameter of the opening to the thickness of the intermediate non-insulating layer is in the range 1:1 to 10:1. The presence of the intermediate non-insulating layer improves the collimation of the beam of electrons emitted from the electron-emissive elements. The electron emitter is manufactured according to a simple, readily controllable process.

Abstract translation: 电子发射器包括栅极层（38），下面的介电层（36），位于电介质层下面的中间非绝缘层（34）和位于中间非绝缘层下面的下部非绝缘区域（32） 绝缘层。 多个电子发射颗粒（42）位于延伸穿过三层的开口（40）底部的非绝缘区域的上方。 介电层的厚度与中间非绝缘层的厚度之比在1：1至4：1的范围内，而开口的平均直径与中间非绝缘层的厚度之比 绝缘层的范围为1：1至10：1。 中间非绝​​缘层的存在改善了从电子发射元件发射的电子束的准直。 电子发射器是根据简单易操控制造的。

公开(公告)号：US5542866A

公开(公告)日：1996-08-06

申请号：US363872

申请日：1994-12-27

Applicant: Chun-hui Tsai

Inventor： Chun-hui Tsai

IPC: H01J9/50 ,  H01J1/30 ,  H01J9/42

CPC classification number: H01J9/50 ,  H01J2201/30403 ,  H01J2329/00 ,  Y02W30/828

Abstract: A flat panel display having a repair capability, a process for repairing such a display having defects involving short circuits between a field emission tip and an adjacent conductor, and a process for forming a flat panel display with repair capability, are described. The flat panel display has a dielectric base substrate, upon which are formed cathode columns of parallel, spaced conductors. Gate lines, also formed of parallel, spaced conductors, are located over and perpendicular to the cathode columns. A dielectric layer is formed between the cathode columns and the gate lines. Pixels of the display are located at the intersections of the cathode columns and the gate lines. A plurality of openings are formed in the gate lines and in the dielectric layer, at each of the pixels. A plurality of field emission microtips, at each of the pixels, connects to and extends up from the cathode columns and into the openings. Slots in the gate lines are formed contiguously between the openings and parallel to the direction of the gate lines, whereby the slots provide a repair capability. The flat panel display is tested to detect the defect, located at an emitter location. The gate line is cut, preferably with a laser beam, on both sides of the emitter location, so that the cuts and slots electrically isolate the defective emitter from the rest of the gate line.

Abstract translation: 描述了具有修复能力的平板显示器，用于修复具有涉及场致发射尖端和相邻导体之间的短路的缺陷的显示器的处理以及用于形成具有修复能力的平板显示器的工艺。 平板显示器具有电介质基底，在其上形成平行的间隔导体的阴极柱。 栅极线也由平行的间隔导体形成，位于阴极柱之上并垂直于阴极柱。 在阴极柱和栅极线之间形成介电层。 显示器的像素位于阴极柱和栅极线的交点处。 在栅极线和电介质层中，在每个像素处形成多个开口。 在每个像素处的多个场致发射微尖端连接到阴极柱并向上延伸到开口中。 栅极线中的狭缝在开口之间连续形成并且平行于栅极线的方向，由此狭缝提供修复能力。 测试平板显示器以检测位于发射器位置的缺陷。 栅极线在发射器位置的两侧被切割，优选地具有激光束，使得切口和槽将缺陷发射器与栅极线的其余部分电隔离。