公开(公告)号：US3010397A

公开(公告)日：1961-11-28

申请号：US1758660

申请日：1960-03-25

Applicant: ENERGA

Inventor： WILLIAM BRANDT EDGAR

IPC: H01J37/22

CPC classification number: H01J37/224

公开(公告)号：US2894160A

公开(公告)日：1959-07-07

申请号：US45498154

申请日：1954-09-09

Applicant: EMANUEL SHELDON EDWARD

Inventor： EMANUEL SHELDON EDWARD

IPC: H01J37/22

CPC classification number: H01J37/224

公开(公告)号：US2799779A

公开(公告)日：1957-07-16

申请号：US56158756

申请日：1956-01-26

Applicant: LEITZ ERNST GMBH

Inventor： GUSTAV WEISSENBERG

IPC: G01Q60/00 ,  H01J37/22 ,  H01J37/29

CPC classification number: H01J37/224 ,  H01J37/29

公开(公告)号：US2439644A

公开(公告)日：1948-04-13

申请号：US62785645

申请日：1945-11-10

Applicant: GEN ELECTRIC

Inventor： BACHMAN CHARLES H

IPC: H01J37/22 ,  H01J37/295

CPC classification number: H01J37/224 ,  H01J37/295

公开(公告)号：US2425833A

公开(公告)日：1947-08-19

申请号：US53662744

申请日：1944-05-20

Applicant: RCA CORP

Inventor： RUNGE FRANK E

IPC: H01J37/22

CPC classification number: H01J37/224

公开(公告)号：US2241432A

公开(公告)日：1941-05-13

申请号：US22877638

申请日：1938-09-07

Applicant: VON ARDENNE MANFRED ,  VON BORRIES BODO

Inventor： VON ARDENNE MANFRED ,  VON BORRIES BODO

IPC: D04B15/78 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28

CPC classification number: H01J37/224 ,  D04B15/78 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2802

公开(公告)号：US11658003B2

公开(公告)日：2023-05-23

申请号：US17430019

申请日：2019-11-22

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Yasumasa Hamana ,  Hiroyuki Watanabe ,  Kenshi Shimano ,  Hiroji Nishizawa

IPC: H01J37/22 ,  H01J9/22

CPC classification number: H01J37/224 ,  H01J9/22

Abstract: A method of manufacturing a phosphor panel includes: forming a phosphor layer having a plurality of phosphor particles on an exit window; forming an organic film on the phosphor layer; forming a metal reflection film on the organic film; forming an oxide film on the metal reflection film; removing the organic film by firing; and forming an oxide film integrally covering a surface of the metal reflection film and surfaces of the phosphor particles by atomic layer deposition.

公开(公告)号：US20190108969A1

公开(公告)日：2019-04-11

申请号：US16088880

申请日：2016-03-28

Applicant: Hitachi High-Technologies Corporation

Inventor： Tomohiko OGATA ,  Masaki HASEGAWA ,  Hisaya MURAKOSHI ,  Katsunori ONUKI ,  Noriyuki KANEOKA

IPC: H01J37/147 ,  H01J37/22 ,  H01J37/29

CPC classification number: H01J37/147 ,  H01J37/04 ,  H01J37/05 ,  H01J37/224 ,  H01J37/226 ,  H01J37/29

Abstract: The objective of the present invention is to propose a charged particle beam device with which an imaging optical system and an irradiation optical system can be adjusted with high precision. In order to achieve this objective, provided is a charged particle beam device comprising: a first charged particle column which serves as an irradiation optical signal; a deflector that deflects charged particles which have passed through the inside of the first charged particle column toward an object; and a second charged particle column which serves as an imaging optical system. The charged particle beam device is provided with: a light source that emits light toward the object; and a control device that obtains, on the basis of detection charged particles generated according to irradiation of light emitted from the light source, a plurality of deflection signals which maintain a certain deflection state, and that selects or calculates, from the plurality of deflection signals or from relationship information produced from the plurality of deflection signals, a deflection signal that satisfies a predetermined condition.

公开(公告)号：US09613790B2

公开(公告)日：2017-04-04

申请号：US15064954

申请日：2016-03-09

Applicant: JEOL Ltd.

Inventor： Yasuhide Nakagawa

IPC: H01J49/00 ,  H01J49/48 ,  H01J49/44 ,  H01J37/22 ,  H01J37/285 ,  G01N23/227

CPC classification number: H01J49/48 ,  G01N23/2273 ,  H01J37/224 ,  H01J37/285 ,  H01J49/0004 ,  H01J49/44 ,  H01J2237/057 ,  H01J2237/24485

Abstract: An electron spectrometer includes: an energy analyzer section that energy-analyzes electrons emitted from a specimen; a micro-channel plate that amplifies the electrons analyzed by the energy analyzer section; a fluorescent screen that converts the electrons amplified by the micro-channel plate into light; a camera that photographs the fluorescent screen; and an effective range calculation section that calculates an effective range of the fluorescent screen within a camera image photographed by the camera, the effective range calculation section performing a process that acquires a plurality of the camera images photographed while causing the energy analyzer section to analyze the electrons with a different center energy, a process that converts the plurality of camera images respectively into a plurality of spectra, and a process that calculates the effective range of the fluorescent screen within the camera image based on the plurality of spectra.

公开(公告)号：US20160035536A1

公开(公告)日：2016-02-04

申请号：US14451289

申请日：2014-08-04

Applicant: Raytheon Company

Inventor： Bruce Chignola ,  Timothy M. Norcott ,  Brandon W. Blackburn ,  Paul F. Martin ,  Kenneth A. Levenson

IPC: H01J37/22 ,  H01J37/26 ,  H01J37/244

CPC classification number: H01J37/224 ,  H01J37/244 ,  H01J37/261 ,  H01J2237/04 ,  H01J2237/2446 ,  H01J2237/24585

Abstract: A particle beam detector is disclosed. The particle beam detector can include a particle beam receiving portion configured to convert particle beam energy to heat, and a plurality of temperature measuring devices disposed about the particle beam receiving portion. A location of a particle beam on the particle beam receiving portion can be determined by a temperature difference between at least two of the plurality of temperature measuring devices.

Abstract translation: 公开了一种粒子束检测器。 粒子束检测器可以包括被配置为将粒子束能量转换成热的粒子束接收部分，以及围绕粒子束接收部分设置的多个温度测量装置。 颗粒束在粒子束接收部分上的位置可以通过多个温度测量装置中的至少两个之间的温度差来确定。