公开(公告)号：US09185788B2

公开(公告)日：2015-11-10

申请号：US14288092

申请日：2014-05-27

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine

IPC: H01J65/04 ,  H05H1/24 ,  H01J61/30

CPC classification number: H05H1/24 ,  H01J61/30 ,  H01J65/04 ,  H05G2/003 ,  H05G2/008

Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The plasma cell also includes a top flow control element disposed above the plasma generation, which includes an internal channel configured to direct a plume of the plasma upward, and a bottom flow control element disposed below the plasma generation region, which includes an internal channel configured to direct gas upward toward the plasma generation region. The top flow control element and the bottom flow control element are arranged within the transmission element to form one or more gas return channels for transferring gas from a region above the plasma generation region to a region below the plasma generation region.

Abstract translation: 用于控制对流的等离子体单元包括被配置为从照明源接收照明的传输元件，以便在气体体积的等离子体产生区域内产生等离子体。 等离子体单元还包括设置在等离子体产生之上的顶部流量控制元件，其包括被配置为引导等离子体羽流向上的内部通道，以及设置在等离子体产生区域下方的底部流量控制元件，其包括配置在内部通道 以将气体向上引导到等离子体产生区域。 顶部流量控制元件和底部流量控制元件布置在传动元件内以形成用于将气体从等离子体产生区域上方的区域传送到等离子体产生区域下方的区域的一个或多个气体返回通道。

公开(公告)号：US09097577B2

公开(公告)日：2015-08-04

申请号：US13529582

申请日：2012-06-21

Applicant: Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Matthew Derstine

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Matthew Derstine

IPC: F21V13/00 ,  G01J3/02 ,  G02B26/06 ,  H01J65/04

CPC classification number: G01J3/021 ,  G01J3/0208 ,  G02B26/06 ,  H01J65/04

Abstract: A system for compensating abberative effects caused by a bulb of a plasma cell includes an illumination source configured to generate illumination; a plasma cell, the plasma cell including a bulb for containing a volume of gas; an ellipse configured to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas; and one or more adaptive optical elements configured to compensate for aberrations produced by one or more optical elements, the one or more adaptive optics elements positioned along an illumination pathway between the illumination source and the plasma cell.

Abstract translation: 用于补偿由等离子体电池的灯泡引起的阻尼效应的系统包括被配置为产生照明的照明源; 等离子体电池，所述等离子体电池包括用于容纳一定体积气体的灯泡; 被配置为将来自照明源的照明聚焦到气体体积中以在气体体积内产生等离子体的椭圆形; 以及配置成补偿由一个或多个光学元件产生的像差的一个或多个自适应光学元件，所述一个或多个自适应光学元件沿着照明源和等离子体单元之间的照明路径定位。

公开(公告)号：US20150034838A1

公开(公告)日：2015-02-05

申请号：US14288092

申请日：2014-05-27

Applicant: KLA-TENCOR CORPORATION

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine

IPC: H05H1/24

CPC classification number: H05H1/24 ,  H01J61/30 ,  H01J65/04 ,  H05G2/003 ,  H05G2/008

Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The plasma cell also includes a top flow control element disposed above the plasma generation, which includes an internal channel configured to direct a plume of the plasma upward, and a bottom flow control element disposed below the plasma generation region, which includes an internal channel configured to direct gas upward toward the plasma generation region. The top flow control element and the bottom flow control element are arranged within the transmission element to form one or more gas return channels for transferring gas from a region above the plasma generation region to a region below the plasma generation region.

Abstract translation: 用于控制对流的等离子体单元包括被配置为从照明源接收照明的传输元件，以便在气体体积的等离子体产生区域内产生等离子体。 等离子体单元还包括设置在等离子体产生之上的顶部流量控制元件，其包括被配置为引导等离子体羽流向上的内部通道，以及设置在等离子体产生区域下方的底部流量控制元件，其包括配置在内部通道 以将气体向上引导到等离子体产生区域。 顶部流量控制元件和底部流量控制元件布置在传动元件内以形成用于将气体从等离子体产生区域上方的区域传送到等离子体产生区域下方的区域的一个或多个气体返回通道。

公开(公告)号：US20140367592A1

公开(公告)日：2014-12-18

申请号：US14476149

申请日：2014-09-03

Applicant: KLA-Tencor Corporation, a Delaware Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Alex Salnik ,  Anant Chimmalgi

IPC: H05G2/00

CPC classification number: H05G2/008 ,  G03F7/70016 ,  H01J61/02 ,  H01J61/025 ,  H01J61/04 ,  H01J61/302 ,  H01J61/33 ,  H01J65/04

Abstract: A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with at least one property that is varied to compensate for optical aberrations in the system.

Abstract translation: 激光持续等离子体照明器系统包括至少一个激光源以提供光。 至少一个反射器将来自激光光源的光聚焦在反射器的焦点处。 基本上充满气体的外壳位于反射器的焦点处或附近。 来自激光光源的光至少部分维持包含在外壳中的等离子体。 外壳具有至少一个具有至少一个属性的壁，该特性被改变以补偿系统中的光学像差。

公开(公告)号：US20140246971A1

公开(公告)日：2014-09-04

申请号：US14350289

申请日：2012-10-05

Applicant: CERAVISION LIMITED

Inventor： Paul Carpenter ,  Andrew Simon Neate

IPC: H01J19/36 ,  H01J65/04

CPC classification number: H01J19/36 ,  F21S8/086 ,  F21V29/507 ,  F21V29/74 ,  H01J65/04 ,  H01J65/044

Abstract: A LUWPL luminaire has a housing with a lower transparent closure and a heat dissipating top of cast aluminum. This has a suspension eye. The housing has an upper flange via which it is bolted with the interposition of a seal to a underside rim of the top. Within the rim, the underside is substantially flat, with a magnetron attachment boss and other attachment points. A magnetron is supported by being clamped by a saddle to the attachment boss at the magnetron's anode. The magnetron is fast with a transition box and a crucible support block. A bracket fixed to certain of the attachment points extends down from the top is screwed to the transition box. Thus the LUWPL parts are securely supported below the top.

Abstract translation: LUWPL灯具具有较低的透明封闭件和铸铝散热顶部的外壳。 这有一个暂停的眼睛。 壳体具有上凸缘，通过该上凸缘螺栓连接，并将密封件插入顶部的下侧边缘。 在边缘内，底面基本上平坦，具有磁控管附件凸台和其它连接点。 磁控管通过在磁控管的阳极被鞍座夹持到附件凸台而被支撑。 磁控管具有过渡箱和坩埚支撑块。 固定到从顶部向下延伸的某些附接点的托架被拧到过渡箱上。 因此，LUWPL部件牢固地支撑在顶部下方。

公开(公告)号：US08803423B2

公开(公告)日：2014-08-12

申请号：US13500312

申请日：2010-02-23

Applicant: Masakazu Sagawa ,  Shin Imamura ,  Toshiaki Kusunoki

Inventor： Masakazu Sagawa ,  Shin Imamura ,  Toshiaki Kusunoki

IPC: H01J17/00

CPC classification number: H01J17/00 ,  H01J11/22 ,  H01J11/34 ,  H01J11/50 ,  H01J17/04 ,  H01J17/066 ,  H01J17/20 ,  H01J17/49 ,  H01J61/16 ,  H01J65/04

Abstract: To obtain effective luminance and light efficiency while avoiding discharge, it is necessary to sufficiently increase a current luminous efficiency of gas and an electron emission efficiency of an electron source. In a fluorescent lamp, an anode electric field is increased by setting a pressure of a noble gas or a molecular gas enclosed to 10 kPa or higher, setting an anode voltage to 240 V or lower, and setting a substrate distance to 0.4 mm or smaller. Furthermore, the resulting effect that the current luminous efficiency is increased in proportion to the electric field is used. Also, by applying a MIM electron source having an electron emission efficiency exceeding 10% as an electron source, a non-discharge fluorescent lamp having a light emission luminance equal to or larger than 104 [cd/m2] and a light emission efficiency equal to or larger than 120 [lm/W] is achieved.

Abstract translation: 为了在避免放电的同时获得有效的亮度和光效率，必须充分提高气体的电流发光效率和电子源的电子发射效率。 在荧光灯中，通过将惰性气体或分子气体的压力设定为10kPa以上，将阳极电压设定为240V以下，将基板的距离设定为0.4mm以下，来增大阳极电场 。 此外，使用与电场成比例地增加当前发光效率的结果。 此外，通过应用电子发射效率超过10％的MIM电子源作为电子源，具有等于或大于104 [cd / m 2]的发光亮度和等于或等于的发光效率的非放电荧光灯 或大于120 [lm / W]。

公开(公告)号：US20130329204A1

公开(公告)日：2013-12-12

申请号：US13902285

申请日：2013-05-24

Applicant: ASML Netherlands B.V.

Inventor： Henricus Petrus Maria PELLEMANS ,  Pavel Stanislavovich ANTSIFEROV ,  Vladimir Mihailovitch KRIVTSUN ,  Johannes Matheus Marie DE WIT ,  Ralph Jozef Johannes Gerardus Anna Maria SMEETS ,  Gerbrand VAN DER ZOUW

IPC: H05H1/24 ,  G03F7/20

CPC classification number: H05H1/24 ,  G01N21/956 ,  G01N2201/061 ,  G03F7/20 ,  G03F7/70033 ,  G03F7/70483 ,  G03F7/70616 ,  G03F7/70641 ,  H01J61/02 ,  H01J61/54 ,  H01J61/545 ,  H01J65/04 ,  H05B41/38 ,  H05G2/003 ,  H05G2/008

Abstract: A laser driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a container containing a gas (e.g., Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. Plasma has an elongate form (L>d) and collecting optics is configured to collect photons emerging in the longitudinal direction from the plasma. The brightness of the plasma is increased compared with sources which collect radiation emerging transversely from the plasma. A metrology apparatus using the light source can achieve greater accuracy and/or throughput as a result of the increased brightness. Back reflectors may be provided. Microwave radiation may be used instead of laser radiation to form the plasma.

公开(公告)号：US08525138B2

公开(公告)日：2013-09-03

申请号：US13024027

申请日：2011-02-09

Applicant: Donald K. Smith ,  Matthew Besen ,  Huiling Zhu ,  Daniil Stolyarov ,  Hongke Ye ,  Gordon Hill ,  Ron Collins

Inventor： Donald K. Smith ,  Matthew Besen ,  Huiling Zhu ,  Daniil Stolyarov ,  Hongke Ye ,  Gordon Hill ,  Ron Collins

IPC: G01J1/00

CPC classification number: H05G2/008 ,  B82Y10/00 ,  G03F7/70033 ,  G21K5/00 ,  G21K5/04 ,  H01J61/16 ,  H01J65/04 ,  H05B41/382 ,  H05G2/001 ,  H05G2/003 ,  H05G2/005 ,  Y02B20/204 ,  Y10T29/49002

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

公开(公告)号：US20130215618A1

公开(公告)日：2013-08-22

申请号：US13877361

申请日：2011-08-17

Applicant: Shigeki Matsuura

Inventor： Shigeki Matsuura

IPC: F21V7/04

CPC classification number: F21V7/043 ,  H01J61/025 ,  H01J63/04 ,  H01J63/08 ,  H01J65/04

Abstract: This light source 1 is provided with a luminescent cylinder 3A housing a luminescent part 2 to generate light; a light guide cylinder 3B connected to the luminescent cylinder 3A on a one end side, and configured to guide the light generated by the luminescent part 2, to an exit window 4 provided on the other end side; and a cylindrical reflective cylinder 9 inserted and fixed between the exit window 4 of the light guide cylinder 3B and a portion connecting the luminescent cylinder 3A and the exit window 4, and having an inner wall surface as a reflective surface 9a to reflect the light.

Abstract translation: 该光源1设置有容纳发光部2以发光的发光筒3A; 导光筒3B，其在一端侧与发光筒3A连接，并被配置为将由发光部2产生的光引导到另一端侧的出射窗4; 以及插入并固定在导光筒3B的出射窗4与连接发光筒3A和出射窗4的部分之间并具有作为反射光的反射面9a的内壁面的筒状反射筒9。

公开(公告)号：US20120200613A1

公开(公告)日：2012-08-09

申请号：US13500312

申请日：2010-02-23

Applicant: Masakazu Sagawa ,  Shin Imamura ,  Toshiaki Kusunoki

Inventor： Masakazu Sagawa ,  Shin Imamura ,  Toshiaki Kusunoki

IPC: G09G5/10 ,  H01J3/36 ,  H01J63/04

CPC classification number: H01J17/00 ,  H01J11/22 ,  H01J11/34 ,  H01J11/50 ,  H01J17/04 ,  H01J17/066 ,  H01J17/20 ,  H01J17/49 ,  H01J61/16 ,  H01J65/04

Abstract: To obtain effective luminance and light efficiency while avoiding discharge, it is necessary to sufficiently increase a current luminous efficiency of gas and an electron emission efficiency of an electron source. In a fluorescent lamp, an anode electric field is increased by setting a pressure of a noble gas or a molecular gas enclosed to 10 kPa or higher, setting an anode voltage to 240 V or lower, and setting a substrate distance to 0.4 mm or smaller. Furthermore, the resulting effect that the current luminous efficiency is increased in proportion to the electric field is used. Also, by applying a MIM electron source having an electron emission efficiency exceeding 10% as an electron source, a non-discharge fluorescent lamp having a light emission luminance equal to or larger than 104 [cd/m2] and a light emission efficiency equal to or larger than 120 [lm/W] is achieved.

Abstract translation: 为了在避免放电的同时获得有效的亮度和光效率，必须充分提高气体的电流发光效率和电子源的电子发射效率。 在荧光灯中，通过将惰性气体或分子气体的压力设定为10kPa以上，将阳极电压设定为240V以下，将基板的距离设定为0.4mm以下，来增大阳极电场 。 此外，使用与电场成比例地增加当前发光效率的结果。 此外，通过应用电子发射效率超过10％的MIM电子源作为电子源，具有等于或大于104 [cd / m 2]的发光亮度和等于或等于的发光效率的非放电荧光灯 或大于120 [lm / W]。