Abstract:
A thermionic cathode includes an electron emitting tip, lanthanum hexaboride tip supporting heaters in close contact with both sides of the tip and supporting the tip, and elastic electroconductive members in pressure contact with outer surfaces of the tip supporting heaters for supplying electric current. The tip supporting heaters are obtained by cutting lanthanum hexaboride having high anisotropy due to its layered structure so as to form a pair of parallel planes perpendicular to a pressing direction when hot-pressed, and abrade-polishing the parallel planes. The tip supporting heaters are brought into close contact with the tip and the elastic electroconductive members at the resulting smooth surfaces thereof. The apparatus of the invention has a prolonged lifetime and high efficiency.
Abstract:
A thermionic cathode for an electron beam device is provided which comprises a first layer of thermoelectron emissive compound sharpened towards a point, a third layer of metal of high melting point and a second layer of reaction barrier interposed between the first and third layers, current terminals being attached to said third layer. According to the invention, a thermionic cathode capable of emitting stable electron beams of high intensity for a long period of time can be manufactured.
Abstract:
Electronic device comprising an evacuated envelope containing a main thermionic cathode heated solely by energetic electrons emitted from an unheated auxiliary field-emission cathode.
Abstract:
An improved electron tube is provided which eliminates the need for a heated electron source and affords simplified construction. The tube, a high vacuum tube, is capable of operating over an extended range of electrical potentials. The electron tube operates on the principle of electric field effect emission for the electron source, requiring neither gas, vapor nor a heated electrode in its envelope. Two active elements, an emitter and a collector, are enclosed in an evacuated chamber with outside connections to each element. The collector is a metal plate and the emitter is an oxide-metal composite which contains a very large number of metal filaments embedded in an insulating oxide matrix. The number of filaments normally exceed one million per square centimeter of exposed surface, having ends connected on the back side to a conducting plate for external connection.
Abstract:
An electron beam exposure apparatus, comprising an electron emitting apparatus including an extracting electrode and a plurality of electron emitting elements having end portions exposed individually in a plurality of openings formed in rows and columns on a principal face of the extracting electrode, a control power supply for applying a voltage between the extracting electrode and selected ones of the electron emitting elements to emit electrons from the selected electron emitting elements, an acceleration electrode in the form of a flat plate having a number of very small openings equal to the number of and corresponding to the electron emitting elements, and a converging electrode in the form of a flat plate having a number of very small openings equal to the number of and corresponding to the electron emitting elements.
Abstract:
Piled-up films composed of different materials or composed of the same material manufactured by different methods or different conditions are used as an insulating layer for a field-emission cold cathode. The insulating layer may have a composition which is varied continuously in the thickness direction. A cross-section of the insulating layer may be made uneven. Preferably, a triple junction in which a substrate, the insulating layer, and a vacuum are in contact with one another, is disposed at a position which can not be seen from outside the device.
Abstract:
An electron-emitting device comprises a pair of electrodes and an electroconductive thin film therebetween having an electron-emitting region. The electroconductive thin film is coated with an additional film at the electron-emitting region to provide an additional resistance within a range from 500 .OMEGA. to 100 k.OMEGA..
Abstract:
A ferroelectric cold cathode comprising a ferroelectric layer formed of a ferroelectric material and provided on its one surface with an emitter which is a projection having a sharp tip portion, a first electrode layer formed on one surface of the ferroelectric layer and having an opening allowing the sharp tip portion of the emitter to be exposed therethrough, and a second electrode layer formed on the other surface of the ferroelectric layer. When a voltage is applied between the first electrode and the second electrode, a dielectric polarization is reversed in the ferroelectric layer, resulting in the emission of electrons from the sharp tip portion of the emitter.