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    Apparatus for charged particle spectroscopy
    28.
    发明授权
    Apparatus for charged particle spectroscopy 失效
    带电粒子光谱仪器

    公开(公告)号：US4255656A

    公开(公告)日：1981-03-10

    申请号：US42439

    申请日：1979-05-25

    Applicant: Andrew Barrie ,  Quentin C. Herd

    Inventor： Andrew Barrie ,  Quentin C. Herd

    IPC: G01Q30/02 ,  G01N23/22 ,  G01Q30/04 ,  H01J39/00

    CPC classification number: G01N23/22 ,  G01N2223/084 ,  G01N2223/085 ,  G01N2223/316 ,  G01N2223/323

    Abstract: Charged-particle spectroscopy apparatus for the chemical analysis of a sample in which an apertured plate receives charged particles emitted from the sample and transmits them to an analyzer for analyzing the energies of the particles, the aperture of the plate being such as to restrict the particles passing therethrough to a pencil beam of particles from a selected area of the sample.

    Abstract translation: 用于对样品进行化学分析的带电粒子光谱仪器，其中孔板接收从样品发射的带电粒子并将其传输到用于分析颗粒能量的分析仪，板的孔径限制粒子 从样品的选定区域穿过其中的铅笔束。

    Image tube having output fluorescent screen coated with porous and solid aluminum layers
    29.
    发明授权
    Image tube having output fluorescent screen coated with porous and solid aluminum layers 失效
    具有输出荧光屏的图像管涂覆有多孔和固体铝层

    公开(公告)号：US4155024A

    公开(公告)日：1979-05-15

    申请号：US803349

    申请日：1977-06-03

    Applicant: Tomiya Sonoda

    Inventor： Tomiya Sonoda

    IPC: H01J29/18 ,  H01J29/28 ,  H01J39/00 ,  H01J39/18

    CPC classification number: H01J29/18 ,  H01J29/28

    Abstract: An image tube equipped with a fluorescent screen comprising a phosphor layer coated on a transparent substrate, a conductive porous substance layer formed on the surface of the phosphor layer, and a conductive solid substance layer formed on the surface of the porous layer. The image tube exhibits improved contrast and brightness.

    Abstract translation: 配备有荧光屏的图像管，其包括涂覆在透明基板上的荧光体层，形成在荧光体层的表面上的导电多孔物质层和形成在多孔层的表面上的导电固体物质层。 图像管显示改善的对比度和亮度。

    Charged-particle analyzer
    30.
    发明授权
    Charged-particle analyzer 失效
    充电粒子分析仪

    公开(公告)号：US4135088A

    公开(公告)日：1979-01-16

    申请号：US810970

    申请日：1977-06-28

    Applicant: Isao Ishikawa ,  Michiyasu Itoh ,  Katsuhisa Usami

    Inventor： Isao Ishikawa ,  Michiyasu Itoh ,  Katsuhisa Usami

    IPC: G01N23/227 ,  G01N23/225 ,  G05B7/02 ,  H01J49/44 ,  H01J49/48 ,  H01J39/00

    CPC classification number: G01N23/225 ,  H01J49/482 ,  H01J2237/05

    Abstract: A charged-particle beam correction arrangement for a charged-particle analyzer having deflecting electrodes which focus charged particles emitted from a sample onto a center axis, an extension thereof, or onto an identical circumference with its center on the axis, a slit which is disposed at the focus point, and an energy analyzer whose object point lies at the focus point. The charged-particle beam correction arrangement is disposed axially symmetrically in the vicinity of the path of the charged particles between the sample and the slit to correct a deformation in the focusing of the charged-particle beam. BACKGROUND OF THE INVENTIONThe present invention relates to a charged-particle analyzer.For the analysis of a feeble electron beam of low energy, such as Auger electrons and photoelectrons in the surface analysis, it is important to efficiently utilize the electrons emitted from a sample. Accordingly, it is necessary that the accepted solid angle (= the solid angle of electron rays entering an analyzing system/the entire solid angle of electron rays emitted from a sample) be wide.As an optimum structure based on such requirement, an analyzing equipment shown in FIG. 1 has been proposed (Japanese Patent Application No. 12283/76). The feature of this equipment is that a deflecting system consisting of two inner and outer electrodes is arranged axially symmetrically around a sample and that signals emitted from the sample and entering the deflecting system are caused to depict a greatly curved track, whereupon they are focused on the center axis of the equipment or a circumference with its center on the axis again. Further, at a stage succeeding the deflecting system, an analyzing system is arranged in such electrooptical relation that the point of the above focusing is considered as the emission point of the signals. Thus, an energy analysis of photo-electrons, Auger electrons, etc. is carried out.FIG. 1 is a constructional view showing the prior art equipment described above including an electron gun. An electron beam 2 produced from the electron gun is focused by a focusing lens 3, and irradiates a sample 4. Charged particles 5, such as Auger electrons, are emitted from the irradiated point P of the sample 4 in substantially the COS-Law spacial distribution. Among the charged particles, rays of electrons are surrounded by two cones whose vertexes are the point P and whose half vertical angles are .theta. + a and .theta. - a, which rays enter between deflecting electrodes 6 and 7. The deflecting electrodes 6 and 7 are disposed axially symmetrically and are L-shaped in section so as to form a double electrode system.Within the deflecting electrode system, the rays of electrons depict greatly curved tracks owing to a deflecting electric field. Further, the rays of electrons have the tracks corrected by an auxiliary electrode 8 and are converged in the first order of the angle a onto a slit 9 situated at a stage succeeding the auxiliary electrode 8. After passing through the slit 9, the rays travel so as to cross on the axis of the equipment. They are subjected then to the energy analysis by a cylindrical mirror type analyzer 10 arranged after the slit 9 with only electrons having certain specific energy being converged onto a detection slit 9' which is placed on the axis, signals being detected by a detector 11 which is disposed behind the detecting slit 9'.The energy analysis of the charged particles 5 emitted from the sample becomes possible in such a way that voltages to be applied to the deflecting electrodes 6, 7, the auxiliary electrode 8, and the electrode of the cylindrical mirror type analyzer 10 are appropriately selected with divider resistances 12, 13 and 14 connected to a power source 20 and then scanned at a fixed ratio.When it is desired to have a high sensitivity of analysis utilizing the aforedescribed analyzing system, the signal obtained from the sample must of course be received at the widest possible accepted solid angle as stated above. Additionally, the loss of signal between the deflecting system and the slit must be confined to a minimum. To this end, it is necessary that the rays of electrons at the time when they pass through the slit 9 have the best possible circularity so as to reduce the amount to which the rays are intercepted by the end face of the slit 9.In this respect, a glass plate coated with a phosphor was placed at the position of the slit 9 in the aforedescribed equipment, and the shape of the rays of electrons focused on this point was directly observed. It was determined that the rays of electrons were not truly circular, but rather often presented a ring shape deformed in one direction or a shape having a long tail at a certain part.The cause therefor was studied, and has been revealed to be a kind of electrooptical astigmatism attributed to the fact that the electrodes were not fixed coaxially or that the parallelism of each electrode was not maintained. Therefore, in constructing the equipment, careful attention was pair to the finish precision of the electrodes and the assembling was carefully executed. While considerable improvements were thus effected, it has been determined that a satisfactory result has not been attained.SUMMARY OF THE INVENTIONAn object of the present invention is to provide an improved charged-particle analyzer.Another object of the present invention is to provide a charged-particle analyzer which makes it possible to set a wide accepted solid angle for signals and to attach a sample of large area without greatly decreasing the accepted solid angle.These and other objects are attained by a charged-particle analyzer having an irradiation device for irradiating a sample with a primary beam, a deflecting electrode system for focusing charged particles emitted from the sample onto the center axis of the primary beam or an extension thereof or onto an identical circumference with its center located on the axis or the extension, a slit which is disposed at the focus point of the charged particles, an energy analyzing system whose object point lies at the focus point, a detector for detecting the charged particles analyzed by the energy analyzing system, and a charged-particle beam correction arrangement disposed axially symmetrically in the vicinity of the path of the charged particles between the sample and the slit.

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