Substrate testing cartridge and method for manufacturing same

    公开(公告)号:US11226367B2

    公开(公告)日:2022-01-18

    申请号:US16652174

    申请日:2018-08-21

    Abstract: The present invention relates to a substrate testing cartridge provided for simultaneously testing multiple substrates for which a substrate treatment process has been finished, and a method for manufacturing same. According to an embodiment of the present invention, a substrate testing cartridge comprises: a chuck member on which a substrate is placed; a probe card which contacts and tests the substrate and is positioned to face the chuck member with reference to the substrate; and coupling members which couple the substrate, the chuck member, and the probe card, wherein each coupling member comprises: a substrate coupling part which couples the substrate and the chuck member; and a chuck coupling part which couples the probe card and the chuck member.

    Cold crucible structure
    304.
    发明授权

    公开(公告)号:US11125504B2

    公开(公告)日:2021-09-21

    申请号:US16205154

    申请日:2018-11-29

    Abstract: A cold crucible structure according to an embodiment of the present invention includes a cold crucible structure according to an embodiment of the present invention includes: a cold crucible unit including hollow top and bottom caps, a plurality of segments connecting the top cap and the bottom cap, slits disposed between the segments, and a reaction area surrounded by the segments; and an induction coil unit disposed to cover the outer side of the cold crucible unit and disposed across the longitudinal directions of the segments and the slits, in which the diameter of the reaction area is defined as a crucible diameter, the crucible diameter is 100 to 300 mm, and a width of each of the slits is defined by d slit ≤ 0.3 × ∅ 50 (mm)(where dslit is the width of each of the slits and Ø is the crucible diameter).

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