公开(公告)号：US2675734A

公开(公告)日：1954-04-20

申请号：US2675734D

IPC: G01J3/36

CPC classification number: G01J3/36

公开(公告)号：US2572119A

公开(公告)日：1951-10-23

申请号：US66253146

申请日：1946-04-16

Applicant: DIEKE GERHARD H

Inventor： DIEKE GERHARD H

IPC: G01J3/36

CPC classification number: G01J3/06 ,  G01J3/36

公开(公告)号：US12276546B2

公开(公告)日：2025-04-15

申请号：US17779393

申请日：2020-11-27

Applicant: ams Sensors Germany GmbH

Inventor： Gunter Siess ,  Frank Krumbein ,  Julius Komma ,  Thomas Nimz ,  Mahmoud Jazayerifar

IPC: G01J3/36 ,  G01J3/02 ,  G01J3/46 ,  H04N9/73

Abstract: An image-sensing device is disclosed, the image-sensing device comprising a multispectral sensor and a processor communicably coupled to the multispectral sensor. The processor is configured to determine an ambient light source classification based on a comparison of predefined spectral data to data corresponding to an output of the multispectral sensor. Also disclosed is a method of classifying an ambient light source by sensing a spectrum of light with a multispectral sensor; and determining an ambient light source classification based on a comparison of predefined spectral data to data corresponding to an output of the multispectral sensor. An associated computer program, computer-readable medium and data processing apparatus are also disclosed.

公开(公告)号：US12243887B2

公开(公告)日：2025-03-04

申请号：US17247589

申请日：2020-12-17

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. Ockenfuss

IPC: H01L27/146 ,  G01J1/04 ,  G01J3/12 ,  G01J3/26 ,  G01J3/28 ,  G01J3/36 ,  G01J5/02 ,  G01J5/0802 ,  G01J5/0808 ,  G01J5/0831 ,  G02B5/20 ,  G02B5/26 ,  G02B5/28 ,  H01L31/0216

Abstract: A device may include a filter array disposed on a substrate. The filter array may include a first mirror disposed on the substrate. The filter array may include a plurality of spacers disposed on the first mirror. A first spacer, of the plurality of spacers, may be associated with a first thickness. A second spacer, of the plurality of spacers, may be associated with a second thickness that is different from the first thickness. A first channel corresponding to the first spacer and a second channel corresponding to the second spacer may be associated with a separation width of less than approximately 10 micrometers (μm). The filter array may include a second mirror disposed on the plurality of spacers.

公开(公告)号：US20240429077A1

公开(公告)日：2024-12-26

申请号：US18821569

申请日：2024-08-30

Applicant: APPLIED MATERIALS, INC.

Inventor： Varoujan Chakarian ,  Blake W. Erickson

IPC: H01L21/67 ,  G01J3/02 ,  G01J3/32 ,  G01J3/36 ,  G01N33/00 ,  H01J37/32 ,  H01L21/66

Abstract: The disclosure describes apparatus and method for detecting an endpoint in plasma-assisted wafer processing in a chamber. A fiber array comprising a plurality of fibers collects optical emission light from the chamber during the plasma-assisted wafer processing. The fiber array is split into two or more groups of fibers, each group carrying a portion of the light to a segment of a photodetector. Each segment of photodetector has a corresponding narrowband optical filter designed for a specific range of wavelengths. A computer processor analyzes detected signals from the plurality of segments of the photodetector, and determines, based on the analysis of the detected signals, an endpoint of the plasma-assisted wafer processing as indicated by the presence or the absence of the one or more chemical species in the chamber. The photodetector can be based on photomultiplier tube (PMT) array or based on photodiodes (e.g., avalanche photodiodes (APDs)).

公开(公告)号：US20240410822A1

公开(公告)日：2024-12-12

申请号：US18808482

申请日：2024-08-19

Applicant: Apple Inc.

Inventor： Miikka M. Kangas ,  Mark Alan Arbore ,  David I. Simon ,  Michael J. Bishop ,  James W. Hillendahl ,  Robert Chen

IPC: G01N21/27 ,  G01J3/02 ,  G01J3/32 ,  G01J3/36 ,  G01J3/42 ,  G01J3/433 ,  G01J3/447 ,  G01N21/21 ,  G01N21/35 ,  G01N21/47 ,  G01N21/49

Abstract: This relates to systems and methods for measuring a concentration and type of substance in a sample at a sampling interface. The systems can include a light source, optics, one or more modulators, a reference, a detector, and a controller. The systems and methods disclosed can be capable of accounting for drift originating from the light source, one or more optics, and the detector by sharing one or more components between different measurement light paths. Additionally, the systems can be capable of differentiating between different types of drift and eliminating erroneous measurements due to stray light with the placement of one or more modulators between the light source and the sample or reference. Furthermore, the systems can be capable of detecting the substance along various locations and depths within the sample by mapping a detector pixel and a microoptics to the location and depth in the sample.

公开(公告)号：US12080574B2

公开(公告)日：2024-09-03

申请号：US16932630

申请日：2020-07-17

Applicant: APPLIED MATERIALS, INC.

Inventor： Varoujan Chakarian ,  Blake W Erickson

IPC: H01L21/67 ,  G01J3/02 ,  G01J3/32 ,  G01J3/36 ,  G01N33/00 ,  H01J37/32 ,  H01L21/66

CPC classification number: H01L21/67253 ,  G01J3/0218 ,  G01J3/32 ,  G01J3/36 ,  G01N33/0009 ,  H01J37/32963 ,  H01J37/32972 ,  H01J37/32981 ,  H01L22/26 ,  H01J2237/2445

Abstract: The disclosure describes apparatus and method for detecting an endpoint in plasma-assisted wafer processing in a chamber. A fiber array comprising a plurality of fibers collects optical emission light from the chamber during the plasma-assisted wafer processing. The fiber array is split into two or more groups of fibers, each group carrying a portion of the light to a segment of a photodetector. Each segment of photodetector has a corresponding narrowband optical filter designed for a specific range of wavelengths. A computer processor analyzes detected signals from the plurality of segments of the photodetector, and determines, based on the analysis of the detected signals, an endpoint of the plasma-assisted wafer processing as indicated by the presence or the absence of the one or more chemical species in the chamber. The photodetector can be based on photomultiplier tube (PMT) array or based on photodiodes (e.g., avalanche photodiodes (APDs)).

公开(公告)号：US12074184B2

公开(公告)日：2024-08-27

申请号：US17349718

申请日：2021-06-16

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Atsushi Ishikawa ,  Yasuhisa Inada

IPC: H04L27/14 ,  G01J3/26 ,  G01J3/28 ,  G01J3/36 ,  G02B5/20 ,  G02B5/28 ,  H01L27/146 ,  H04N25/13

CPC classification number: H01L27/1462 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/36 ,  G02B5/201 ,  G02B5/28 ,  H01L27/14627 ,  H01L27/14645 ,  H04N25/135

Abstract: A light detecting device includes: a filter array including filters two-dimensionally arrayed and an image sensor including light detection elements. Each of first and second filters included in the filters includes a first reflective layer, a second reflective layer, and an intermediate layer therebetween and has a resonance structure having resonant modes whose orders are different from each other. A refractive index and/or a thickness of the intermediate layer in the first and second filters is different depending on the filter. A transmission spectrum of each of the first and second filters has local maximum value of transmittance at each of wavelengths included in a wavelength region, and the wavelengths correspond to the resonant modes, respectively. The image sensor is disposed at a position where the image senor receives passing light that passes through the filter array, to detect components in the wavelengths included in the passing light.

公开(公告)号：US20240210244A1

公开(公告)日：2024-06-27

申请号：US18520284

申请日：2023-11-27

Applicant: Rebellion Photonics, Inc.

Inventor： Robert Timothy Kester ,  Nathan Adrian Hagen

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/36 ,  G01J5/00 ,  G01N21/3504

CPC classification number: G01J3/0232 ,  G01J3/0229 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/3504 ,  G01J2005/0077

Abstract: Various embodiments disclosed herein describe a divided-aperture infrared spectral imaging (DAISI) system that is adapted to acquire multiple IR images of a scene with a single-shot (also referred to as a snapshot). The plurality of acquired images having different wavelength compositions that are obtained generally simultaneously. The system includes at least two optical channels that are spatially and spectrally different from one another. Each of the at least two optical channels are configured to transfer IR radiation incident on the optical system towards an optical FPA unit comprising at least two detector arrays disposed in the focal plane of two corresponding focusing lenses. The system further comprises at least one temperature reference source or surface that is used to dynamically calibrate the two detector arrays and compensate for a temperature difference between the two detector arrays.

公开(公告)号：US20240151700A1

公开(公告)日：2024-05-09

申请号：US18499763

申请日：2023-11-01

Applicant: REBELLION PHOTONICS, INC.

Inventor： Robert Timothy KESTER ,  Nathan Adrian HAGEN

IPC: G01N33/00 ,  G01J3/02 ,  G01J3/28 ,  G01J3/32 ,  G01J3/36 ,  G01J3/42 ,  G01J5/00 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0808 ,  G01J5/53 ,  G01J5/60 ,  G01N21/3504 ,  H04N5/33 ,  H04N17/00

CPC classification number: G01N33/0044 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/32 ,  G01J3/36 ,  G01J3/42 ,  G01J5/0014 ,  G01J5/0806 ,  G01J5/0808 ,  G01J5/0896 ,  G01J5/53 ,  G01J5/602 ,  G01N21/3504 ,  H04N5/33 ,  H04N17/002 ,  G01J2003/1247 ,  G01J2003/2826 ,  G01J2003/2869 ,  G01J2005/0077 ,  G01J2005/604 ,  G01N2021/3531

Abstract: Various embodiments disclosed herein describe an infrared (IR) imaging system for detecting a gas. The imaging system can include an optical filter that selectively passes light having a wavelength in a range of 1585 nm to 1595 nm while attenuating light at wavelengths above 1600 nm and below 1580 nm. The system can include an optical detector array sensitive to light having a wavelength of 1590 that is positioned rear of the optical filter.