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公开(公告)号:US06558471B2
公开(公告)日:2003-05-06
申请号:US09771087
申请日:2001-01-26
IPC分类号: B08B100
CPC分类号: H01L21/67046 , B08B1/04 , B08B3/02
摘要: Methods and apparatuses are provided that remove a scrubber brush from contact with a wafer surface prior to slowing down the scrubber brush's rotational rate. The scrubbing method may include rotating a scrubber brush at a non-reduced rate, while the scrubber brush is in contact with the wafer and removing the scrubber brush from contact with the wafer while rotating the scrubber brush at the non-reduced rate. The scrubbing apparatus has a controller programmed to perform the scrubbing method.
摘要翻译: 提供了方法和装置,其在减缓洗涤器刷的旋转速率之前,将洗涤器刷与晶片表面接触。 洗涤方法可以包括以非降低的速率旋转洗涤器刷子,同时洗涤器刷子与晶片接触并且在以非减小的速率旋转洗涤器刷子的同时,使洗涤器刷子与晶片接触。 洗涤装置具有被编程为执行洗涤方法的控制器。
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32.
公开(公告)号:US06460551B1
公开(公告)日:2002-10-08
申请号:US09430345
申请日:1999-10-29
申请人: Boris Fishkin , Alexander Lerner , Jianshe Tang , Brian J. Brown
发明人: Boris Fishkin , Alexander Lerner , Jianshe Tang , Brian J. Brown
IPC分类号: B08B312
CPC分类号: H01L21/67057 , B08B3/12 , G10K11/28 , Y10S134/902
摘要: A Megasonic cleaning apparatus having at least one reflector (e.g., a parabolic or paraboloid reflector) positioned to collect otherwise wasted cleaning energy and redirect that energy to one or a plurality of positions on a wafer's edge is provided. A first embodiment comprises a complex parabolic reflector which has a width greater than that of the wafer and a preferred length approximately equal to the diameter of the wafer, and which is shaped to provide focal points which vary along the length of the parabolic reflector, such that energy striking the reflector at different points along the reflector's length is directed to a plurality of different points along the wafer's edge. A second embodiment comprises a simple parabolic reflector having a width greater than that of the wafer and a preferred length less than the diameter of the wafer, and which is provided to focus at a cord along the wafer's surface, effectively focusing cleaning energy on two points along the wafer's edge at any given time. Yet another embodiment of the invention comprises a paraboloid reflector having a width greater than that of the wafer and a preferred length which is substantially less than the diameter of the wafer and which is shaped to focus all collected energy to a single point on the wafer's edge. Multiple such reflectors may be positioned in the cleaning tank to optimize energy usage and wafer cleaning.
摘要翻译: 提供了一种具有至少一个反射器(例如,抛物面或抛物面反射器)的超声波清洗装置,其被定位成收集另外浪费的清洁能量并将该能量重定向到晶片边缘上的一个或多个位置。 第一实施例包括复杂的抛物面反射器,其宽度大于晶片的宽度,并且优选的长度近似等于晶片的直径,并且其被成形为提供沿着抛物面反射器的长度变化的焦点, 沿着反射器长度的不同点撞击反射器的能量被引导到沿着晶片边缘的多个不同点。 第二实施例包括具有大于晶片宽度的宽度的简单抛物面反射器,并且具有小于晶片直径的优选长度,并且其设置成沿着晶片表面聚焦在绳索处,有效地将清洁能量聚焦在两点上 在任何给定的时间沿晶圆的边缘。 本发明的另一个实施例包括具有大于晶片宽度的宽度的抛物面反射器,其优选长度基本上小于晶片的直径,并且其被成形为将所有收集的能量聚焦到晶片边缘上的单个点 。 可以将多个这样的反射器定位在清洁槽中以优化能量使用和晶片清洁。
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33.
公开(公告)号:US06412499B1
公开(公告)日:2002-07-02
申请号:US09656294
申请日:2000-09-06
申请人: Jianshe Tang , Brian J. Brown , Boris Fishkin
发明人: Jianshe Tang , Brian J. Brown , Boris Fishkin
IPC分类号: B08B312
CPC分类号: H01L21/67057 , B08B3/12 , Y10S134/902
摘要: A sonic tank for cleaning substrates is provided. The tank has two or more upwardly angled walls. Arrays of one or more transducers are positioned along at least two of the two or more angled walls. The transducer arrays are alternately energized maintaining nearly 100% substrate surface cleaning at any given time, and 50% duty cycle (or less) for each transducer array. The substrate supports are positioned such that nearly every point along the substrate's surface is contacted by energy from at least one transducer, and transducer opposing walls are positioned to avoid interfering reflections therefrom.
摘要翻译: 提供用于清洁基材的声波槽。 坦克有两个或更多个向上成角度的墙壁。 一个或多个换能器的阵列沿两个或多个成角度的壁中的至少两个定位。 换能器阵列交替通电,在任何给定时间保持接近100%的基板表面清洁,每个换能器阵列的占空比(或更小)为50%。 定位基板支架,使得沿着基板表面的几乎每个点都与来自至少一个换能器的能量接触,并且换能器相对的壁被定位以避免其干涉反射。
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公开(公告)号:US06409753B1
公开(公告)日:2002-06-25
申请号:US09426479
申请日:1999-10-26
申请人: Brian J. Brown , Timothy J. Ley
发明人: Brian J. Brown , Timothy J. Ley
IPC分类号: A61F206
CPC分类号: A61F2/915 , A61F2/89 , A61F2/90 , A61F2002/3011 , A61F2002/30324 , A61F2002/30329 , A61F2002/826 , A61F2002/91533 , A61F2002/9155 , A61F2002/91591 , A61F2220/0025 , A61F2230/0002 , A61F2250/0036
摘要: A flexible tubular stent including loosely interlocked annular elements without intersections or cross-over points.
摘要翻译: 柔性管状支架包括松散地互锁的环形元件,没有交叉点或交叉点。
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公开(公告)号:US06299698B1
公开(公告)日:2001-10-09
申请号:US09113447
申请日:1998-07-10
申请人: Ramin Emami , Brian J. Brown
发明人: Ramin Emami , Brian J. Brown
IPC分类号: B08B104
CPC分类号: H01L21/67028 , B08B1/04 , G11B23/505
摘要: An inventive brush and scrubbing device is provided for simultaneously scrubbing both planar and profiled (e.g., edge) surfaces of a thin disk such as a semiconductor wafer. The inventive brush has a contact surface having two portions, a planar portion for contacting a planar surface of a wafer, and a profiled portion for contacting an edge surface of a wafer. The profile of the profiled portion preferably follows the edge profile of a wafer to be cleaned by the brush. The profiled portion may have a higher modulus of elasticity than does the planar portion. Preferably the brushes are roller type PVA brushes having a plurality of nodules formed thereon.
摘要翻译: 提供了一种创新的刷子和擦洗装置,用于同时擦洗诸如半导体晶片的薄盘的平面和成型(例如,边缘)表面。 本发明的刷具有具有两个部分的接触表面,用于接触晶片的平面的平面部分和用于接触晶片的边缘表面的成型部分。 成形部分的轮廓优选地遵循待刷清洁的晶片的边缘轮廓。 成型部分可以具有比平坦部分更高的弹性模量。 优选地,刷子是在其上形成有多个结节的辊式PVA刷。
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公开(公告)号:US6096056A
公开(公告)日:2000-08-01
申请号:US262630
申请日:1999-03-04
申请人: Brian J. Brown
发明人: Brian J. Brown
CPC分类号: A61F2/958
摘要: An assembly for delivery and deployment of an inflation expandable stent within a vessel is comprised of a catheter, an inflation expandable stent, an expandable balloon, and a fugitive stent mounting device within the balloon. The assembly is used in a method for delivering and deploying a stent.
摘要翻译: 用于在容器内递送和展开膨胀扩张支架的组件由气囊内的导管,充气可膨胀支架,可膨胀气囊和逃逸支架安装装置构成。 该组件用于递送和展开支架的方法。
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公开(公告)号:US5507995A
公开(公告)日:1996-04-16
申请号:US274393
申请日:1994-07-12
CPC分类号: A61M25/0013 , A61M25/0043 , A61M25/0054 , A61M25/09 , A61M2025/0098 , A61M2025/09175
摘要: An intravascular catheter for providing access to distal vascular sites. The intravascular catheter comprises an elongate shaft with a lumen extending therethrough. The elongate shaft is comprised of a composite construction and has a proximal relatively stiff section, a distal section relatively more flexible than the proximal section, and an intermediate section between the proximal and the distal sections that provides a transition in flexibility between the proximal section and the distal section. The distal section has surface contours that impart flexibility to the distal section. A method for processing a tubular member with surface contours for use in a medical device, such as a catheter or guide wire, is also provided.
摘要翻译: 用于提供进入远端血管部位的血管内导管。 血管内导管包括具有延伸穿过其中的内腔的细长轴。 细长轴由复合结构组成,并具有近端相对较硬的部分,远端部分比近端部分相对更柔韧,以及近端部分和远端部分之间的中间部分,其在近端部分和近端部分之间提供柔性的转变 远端部分。 远端部分具有赋予远端部分柔性的表面轮廓。 还提供了一种用于处理用于医疗装置(例如导管或导丝)中的具有表面轮廓的管状构件的方法。
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公开(公告)号:US08668731B2
公开(公告)日:2014-03-11
申请号:US13531064
申请日:2012-06-22
IPC分类号: A61F2/82
CPC分类号: A61F2/915 , A61F2/91 , A61F2002/91533 , A61F2002/91541 , A61F2002/91583
摘要: A radially expandable stent comprising a plurality of spaced band-like elements and intersecting links is disclosed. The band-like elements have a generally serpentine configuration to provide continuous waves of generally sinusoidal character to each band-like element. The waves are characterized by a plurality of peaks and troughs taking a generally longitudinal direction along the cylinder such that the waves in the band-like elements open as the stent is expanded from a first diameter to a second diameter. The intersecting links are substantially U-shaped and terminate in first and second shanks. The first shank of a link emanates from a region between a peak and trough on a band-like element and the second shank of the link emanates from a region between a peak and trough on an adjacent band-like element.
摘要翻译: 公开了一种包括多个间隔开的带状元件和相交连接件的可径向扩张的支架。 带状元件具有大致蛇形结构,以向每个带状元件提供大致正弦曲线的连续波。 波的特征在于沿着圆柱体大致纵向方向的多个峰和谷,使得当支架从第一直径扩展到第二直径时,带状元件中的波浪打开。 交叉连接件基本上为U形并终止在第一和第二柄部中。 链节的第一柄从带状元件上的峰和谷之间的区域发出,并且链节的第二柄从相邻带状元件上的峰和谷之间的区域发出。
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公开(公告)号:US08449597B2
公开(公告)日:2013-05-28
申请号:US13301268
申请日:2011-11-21
申请人: Brian J. Brown
发明人: Brian J. Brown
CPC分类号: A61F2/82 , A61F2/88 , A61F2/89 , A61F2/91 , A61F2/915 , A61F2002/91508 , A61F2002/91516 , A61F2002/91525 , A61F2002/91533 , A61F2002/91558 , A61F2002/91583 , A61F2210/0019 , A61F2220/005 , A61F2220/0058 , A61F2230/0054 , A61F2250/0018
摘要: Segmented articulatable stent of open structure comprised of end-connected struts of first and second lengths making up first and second segments with angular interconnects between adjacent first and second segments.
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公开(公告)号:US08221491B1
公开(公告)日:2012-07-17
申请号:US09427291
申请日:1999-10-26
申请人: Paul H. Burmeister , Charles L. Euteneuer , Brian J. Brown , Paul J. Fordenbacher , Anthony C. Vrba
发明人: Paul H. Burmeister , Charles L. Euteneuer , Brian J. Brown , Paul J. Fordenbacher , Anthony C. Vrba
IPC分类号: A61F2/06
CPC分类号: A61F2/88 , A61F2/844 , A61F2/90 , A61F2/91 , A61F2/915 , A61F2002/91533 , A61F2002/9155 , A61F2002/91558 , A61F2002/91575 , A61F2210/0019 , A61F2210/0076 , A61F2220/0075 , A61F2250/0029 , A61F2250/0042 , A61L31/022
摘要: A new multiple component stent arrangement which allows for initial self-expansion and subsequent deformation to a final enlarged size.
摘要翻译: 一种新的多组分支架装置,其允许初始自膨胀和随后的变形到最终的放大尺寸。
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