公开(公告)号：US20060163746A1

公开(公告)日：2006-07-27

申请号：US11042396

申请日：2005-01-25

申请人： Chen-Hua Yu ,  Shing-Chyang Pan ,  Shau-Lin Shue ,  Ching-Hua Hsieh ,  Cheng-Lin Huang ,  Hsien-Ming Lee ,  Jing-Cheng Lin

发明人： Chen-Hua Yu ,  Shing-Chyang Pan ,  Shau-Lin Shue ,  Ching-Hua Hsieh ,  Cheng-Lin Huang ,  Hsien-Ming Lee ,  Jing-Cheng Lin

IPC分类号： H01L23/48

CPC分类号： H01L23/53295 ,  H01L21/76805 ,  H01L21/76844 ,  H01L23/53238 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

摘要： An opening in a dielectric layer having a unique barrier layer structure is provided. In an embodiment, the opening is a via and a trench. The barrier layer, which may comprise one or more barrier layers, is formed such that the ratio of the thickness of the barrier layers along a sidewall approximately midway between the bottom of the trench and the top of the dielectric layer to the thickness of the barrier layers along the bottom of the trench is greater than about 0.55. In another embodiment, the ratio of the thickness of the barrier layers along a sidewall approximately midway between the bottom of the trench and the top of the dielectric layer to the thickness of the barrier layers along the bottom of the via is greater than about 1.0. An underlying conductive layer may be recessed.

摘要翻译： 提供具有独特的阻挡层结构的电介质层中的开口。 在一个实施例中，开口是通孔和沟槽。 可以形成阻挡层，其可以包括一个或多个阻挡层，使得阻挡层的厚度在沟槽的底部和电介质层的顶部之间的大致中间的侧壁与屏障的厚度之比 沿着沟槽底部的层大于约0.55。 在另一个实施例中，沿着沟槽底部和电介质层的顶部之间大约中间的侧壁的阻挡层的厚度与通孔底部的阻挡层的厚度之比大于约1.0。 潜在的导电层可以凹入。

公开(公告)号：US20060027925A1

公开(公告)日：2006-02-09

申请号：US11024916

申请日：2004-12-28

申请人： Cheng-Lin Huang ,  Ching-Hua Hsieh ,  Hsien-Ming Lee ,  Shing-Chyang Pan ,  Chao-Hsien Peng ,  Li-Lin Su ,  Jing-Cheng Lin ,  Shao-Lin Shue ,  Mong-Song Liang

发明人： Cheng-Lin Huang ,  Ching-Hua Hsieh ,  Hsien-Ming Lee ,  Shing-Chyang Pan ,  Chao-Hsien Peng ,  Li-Lin Su ,  Jing-Cheng Lin ,  Shao-Lin Shue ,  Mong-Song Liang

IPC分类号： H01L29/788

CPC分类号： H01L21/76844 ,  H01L21/76846 ,  H01L21/76862 ,  Y10S438/927

摘要： A composite barrier layer provides superior barrier qualities and superior adhesion properties to both dielectric materials and conductive materials as the composite barrier layer extends throughout the semiconductor device. The composite barrier layer may be formed in regions where it is disposed between two conductive layers and in regions where it is disposed between a conductive layer and a dielectric material. The composite barrier layer may consist of various pluralities of layers and the arrangement of layers that form the composite barrier layer may differ as the barrier layer extends throughout different sections of the device. Amorphous layers of the composite barrier layer are generally disposed to form boundaries with dielectric materials and crystalline layers are generally disposed to form boundaries with conductive materials such as interconnect materials.

摘要翻译： 当复合阻挡层延伸穿过整个半导体器件时，复合阻挡层为介电材料和导电材料提供优异的阻挡质量和优异的粘合性能。 复合阻挡层可以形成在其设置在两个导电层之间的区域中，并且在其布置在导电层和电介质材料之间的区域中。 复合阻挡层可以由各种多个层组成，并且形成复合阻挡层的层的布置可以随着阻挡层在装置的不同部分延伸而不同。 复合阻挡层的非晶层通常设置成与电介质材料形成边界，并且通常设置结晶层以与诸如互连材料的导电材料形成边界。

公开(公告)号：US20050245072A1

公开(公告)日：2005-11-03

申请号：US10833154

申请日：2004-04-28

申请人： Hsien-Ming Lee ,  Jing-Cheng Lin ,  Shing-Chyang Pan ,  Ming-Hsing Tsai ,  Hung-Wen Su ,  Shih-Wei Chou ,  Shau-Lin Shue ,  Kuo-Wei Cheng ,  Ting-Chu Ko

发明人： Hsien-Ming Lee ,  Jing-Cheng Lin ,  Shing-Chyang Pan ,  Ming-Hsing Tsai ,  Hung-Wen Su ,  Shih-Wei Chou ,  Shau-Lin Shue ,  Kuo-Wei Cheng ,  Ting-Chu Ko

IPC分类号： H01L21/288 ,  H01L21/4763 ,  H01L21/76 ,  H01L21/768

CPC分类号： H01L21/2885 ,  H01L21/76843 ,  H01L21/76861 ,  H01L21/76862 ,  H01L21/76873 ,  H01L21/76877

摘要： A method of electrochemical deposition (ECD) provides a barrier and a seed layer on a substrate. The surfaces of the substrate are pre-treated before a metal layer is electrochemically deposited thereon in an electrochemical plating cell with a physical or a chemical surface treatment process. The electrochemical plating cell is covered by a cap to prevent evaporation of the electrolyte solution. The electrochemical plating cell includes a substrate holder assembly with a lift seal, e.g., with a contact angle θ less than 90° between the lift seal and the substrate. The substrate holder assembly includes a substrate chuck at the rear side of the substrate.

摘要翻译： 电化学沉积（ECD）的方法在衬底上提供阻挡层和种子层。 在将金属层电化学沉积在具有物理或化学表面处理工艺的电化学镀覆电池中之前，对基板的表面进行预处理。 电化学镀覆电池被盖覆盖以防止电解质溶液的蒸发。 电化学电镀单元包括具有提升密封件的衬底保持器组件，例如在提升密封件和衬底之间的接触角θ小于90°。 衬底保持器组件包括在衬底的后侧的衬底卡盘。

公开(公告)号：US20050097769A1

公开(公告)日：2005-05-12

申请号：US10668291

申请日：2003-09-24

申请人： Jing-Cheng Lin ,  Shing-Chyang Pan ,  Hsien-Ming Lee ,  Hung-Wen Su ,  Shih-Wei Chou ,  Ming-Hsing Tsai ,  Shau-Lin Shue

发明人： Jing-Cheng Lin ,  Shing-Chyang Pan ,  Hsien-Ming Lee ,  Hung-Wen Su ,  Shih-Wei Chou ,  Ming-Hsing Tsai ,  Shau-Lin Shue

IPC分类号： H01L21/677 ,  F26B13/30

CPC分类号： H01L21/67781

摘要： A loadlock. The loadlock for wafers includes a chamber, a pedestal, a retractable shaft, and a bellows. The chamber has a plurality of walls and a bottom surface. The pedestal supports a cassette and is disposed in the chamber. The retractable shaft has a top end and a bottom end. The top end is connected to the pedestal and the bottom end is connected to the bottom surface as a reference for positioning the pedestal. The bellows has a first end and a second end. The first end is disposed on the pedestal and the second end is sealed at the bottom end of the retractable shaft. Preferably, the retractable shaft is fully enclosed by the bellows.

摘要翻译： 一个加载锁 用于晶片的负荷锁包括一个腔室，一个基座，一个伸缩轴和一个波纹管。 腔室具有多个壁和底面。 基座支撑盒并设置在腔室中。 伸缩轴具有顶端和底端。 顶端连接到基座，底端连接到底面作为基座的基准。 波纹管具有第一端和第二端。 第一端设置在基座上，第二端在可伸缩轴的底端被密封。 优选地，可伸缩轴被波纹管完全包围。