Apparatus and method for estimating gaze from un-calibrated eye measurement points

    公开(公告)号:US09924865B2

    公开(公告)日:2018-03-27

    申请号:US15100228

    申请日:2014-11-28

    CPC classification number: A61B3/113 G06F3/013 G06F17/18

    Abstract: Some embodiments are directed to a system and a method for estimating gaze from a set of eye measurement points that are indicative of a gaze pattern of a user viewing a scene. Some other embodiments are directed to obtaining sets of eye measurement points from different users viewing the same scene. In another embodiment, the different sets of eye measurement points are mapped to a common coordinate system for reciprocal calibration In yet another embodiment, a scene transformation for mapping the common coordinate system to a coordinate system associated with the scene can be calculated by matching eye measurement points from the common coordinate system to interest points of the scene. The scene transformation is thereby calculated more accurately than individually calculated scene transformations, thereby providing a more accurate estimate of the gaze points.

    Inspection Apparatus, Inspection Method And Manufacturing Method
    38.
    发明申请
    Inspection Apparatus, Inspection Method And Manufacturing Method 有权
    检验仪器,检验方法及制造方法

    公开(公告)号:US20160061750A1

    公开(公告)日:2016-03-03

    申请号:US14838268

    申请日:2015-08-27

    Abstract: Metrology targets are formed on a substrate (W) by a lithographic process. A target (T) comprising one or more grating structures is illuminated with spatially coherent radiation under different conditions. Radiation (650) diffracted by from said target area interferes with reference radiation (652) interferes with to form an interference pattern at an image detector (623). One or more images of said interference pattern are captured. From the captured image(s) and from knowledge of the reference radiation a complex field of the collected scattered radiation at the detector. A synthetic radiometric image (814) of radiation diffracted by each grating is calculated from the complex field. From the synthetic radiometric images (814, 814′) of opposite portions of a diffractions spectrum of the grating, a measure of asymmetry in the grating is obtained. Using suitable targets, overlay and other performance parameters of the lithographic process can be calculated from the measured asymmetry.

    Abstract translation: 通过光刻工艺在基板(W)上形成计量目标。 包括一个或多个光栅结构的靶(T)在不同条件下被空间相干辐射照射。 从参考辐射(652)干涉的所述目标区域衍射的辐射(650)干扰以在图像检测器(623)处形成干涉图案。 捕获所述干涉图案的一个或多个图像。 从捕获的图像和参考辐射的知识中,在检测器处收集的散射辐射的复杂场。 从复场计算由每个光栅衍射的辐射的合成辐射图像(814)。 从光栅的衍射光谱的相对部分的合成辐射图像(814,814')获得光栅中的不对称度。 使用合适的目标,可以从测量的不对称性计算光刻过程的覆盖层和其他性能参数。

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