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公开(公告)号:US20240422989A1
公开(公告)日:2024-12-19
申请号:US18223043
申请日:2023-07-18
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chih-Wei Kuo , Chung-Yi Chiu
Abstract: A resistive memory device includes a dielectric layer, a trench, a first resistive switching element, a diode via structure, and a signal line structure. The trench is disposed in the dielectric layer. The first resistive switching element is disposed in the trench. The first resistive switching element includes a first bottom electrode, a first top electrode disposed above the first bottom electrode, and a first variable resistance layer disposed between the first bottom electrode and the first top electrode. The diode via structure is disposed in the dielectric layer and located under the trench, and the diode via structure is connected with the first bottom electrode. The signal line structure is disposed in the trench, a part of the signal line structure is disposed on the first resistive switching element, and the signal line structure is electrically connected with the first top electrode.
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公开(公告)号:US20240413225A1
公开(公告)日:2024-12-12
申请号:US18811736
申请日:2024-08-21
Applicant: UNITED MICROELECTRONICS CORP
Inventor: Chun-Hao Lin , Hsin-Yu Chen , Shou-Wei Hsieh
IPC: H01L29/66 , H01L21/762
Abstract: A semiconductor device includes a gate isolation structure on a shallow trench isolation (STI), a first epitaxial layer on one side of the gate isolation structure, a second epitaxial layer on another side of the gate isolation structure, first fin-shaped structures directly under the first epitaxial layer, and second fin-shaped structures directly under the second epitaxial layer, in which the STI surrounds the first fin-shaped structures and the second fin-shaped structures.
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公开(公告)号:US20240413199A1
公开(公告)日:2024-12-12
申请号:US18811821
申请日:2024-08-22
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Zhi-Cheng Lee , Chuang-Han Hsieh , Kai-Lin Lee
IPC: H01L29/06 , H01L21/8234 , H01L29/08 , H01L29/51 , H01L29/78
Abstract: A method for fabricating a semiconductor device includes the steps of first forming a gate dielectric layer on a substrate, forming a gate material layer on the gate dielectric layer, patterning the gate material layer and the gate dielectric layer to form a gate structure, removing a portion of the gate dielectric layer, forming a spacer adjacent to the gate structure and at the same time forming an air gap between the gate dielectric layer and the spacer, and then forming a source/drain region adjacent to two sides of the spacer.
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公开(公告)号:US20240413136A1
公开(公告)日:2024-12-12
申请号:US18223539
申请日:2023-07-18
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Tsung-Kai Yu , Chen-Hsiao Wang , Yi-Feng Hsu , Kai-Kuang Ho
IPC: H01L25/10 , H01L23/00 , H01L23/31 , H01L23/48 , H01L23/522
Abstract: The present invention provides a 3D integrated circuit structure formed by stacking semiconductor structures. The semiconductor structures form a multi-die heterogeneous 3D packaging by direct bonding the bonding pads of re-distribution layers. The same or different dies are used to produce the semiconductor structures through the back-end packaging process, and then hybrid bonding technology is used to stack and interconnect the semiconductor structures. The position of the bonding pad can be redefined by re-distribution layer, thereby overcoming the limitations of chip bonding pad position, chip size and quantity.
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公开(公告)号:US20240413106A1
公开(公告)日:2024-12-12
申请号:US18350755
申请日:2023-07-12
Applicant: United Microelectronics Corp.
Inventor: Chien-Ming Lai
IPC: H01L23/00 , H01L25/065
Abstract: A semiconductor device includes a substrate, a bonding structure and an adjustment layer. A bonding structure is located over the substrate. The adjustment layer is located on a bonding pad of the bonding structure.
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公开(公告)号:US20240407274A1
公开(公告)日:2024-12-05
申请号:US18219717
申请日:2023-07-10
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Yu-Huan Yeh , Chuan-Fu Wang
Abstract: A resistive switching device includes a substrate; a first dielectric layer on the substrate; a conductive via in the first dielectric layer; a bottom electrode on the conductive via and the first dielectric layer, a resistive switching layer on the bottom electrode; and a cone-shaped top electrode on the resistive switching layer. The cone-shaped top electrode can produce increased and concentrated electric field during operation, which facilitates the filament forming process.
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公开(公告)号:US20240407273A1
公开(公告)日:2024-12-05
申请号:US18218602
申请日:2023-07-06
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Hsiang-Hung Peng , Yu-Huan Yeh , Chuan-Fu Wang
Abstract: A resistive memory device includes a first dielectric layer, a via connection structure, and a resistive switching element. The via connection structure is disposed in the first dielectric layer, and the resistive switching element is disposed on the via connection structure and the first dielectric layer. The resistive switching element includes a titanium bottom electrode, a titanium top electrode, and a variable resistance material. The titanium top electrode is disposed above the titanium bottom electrode, and the variable resistance material is sandwiched between the titanium bottom electrode and the titanium top electrode in a vertical direction. The variable resistance material is directly connected with the titanium bottom electrode and the titanium top electrode, and the titanium bottom electrode is directly connected with the via connection structure.
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公开(公告)号:US20240404587A1
公开(公告)日:2024-12-05
申请号:US18218025
申请日:2023-07-04
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chun-Hsien Huang , Yu-Tse Kuo , Shu-Ru Wang , Li-Ping Huang , Chun-Yen Tseng
IPC: G11C11/412 , G11C5/06
Abstract: The invention provides a layout pattern of static random access memory (SRAM), which comprises a substrate, and a plurality of fin structures and a plurality of gate structures are located on the substrate to form a plurality of transistors. The plurality of transistors comprise a first pull-up transistor (PU1), a first pull-down transistor (PD1), a second pull-up transistor (PU2), a second pull-down transistor (PD2), a first access transistor (PG1A), a second access transistor (PG1B), a third access transistor (PG2A) and a fourth access transistor (PG2B). A first word line contact pad connected to a gate of the first access transistor (PG1A) and a first word line, and a second word line contact pad connected to a gate of the second access transistor (PG1B) and a second word line, the first word line contact pad and the second word line contact pad do not overlap in a vertical direction.
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公开(公告)号:US12161050B2
公开(公告)日:2024-12-03
申请号:US17944242
申请日:2022-09-14
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hui-Lin Wang , Ching-Hua Hsu , Chen-Yi Weng , Jing-Yin Jhang , Po-Kai Hsu
Abstract: The high-density MRAM device of the present invention has a second interlayer dielectric (ILD) layer covering the capping layer in the MRAM cell array area and the logic area. The thickness of the second ILD layer in the MRAM cell array area is greater than that in the logic area. The composition of the second ILD layer in the logic area is different from the composition of the second ILD layer in the MRAM cell array area.
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公开(公告)号:US20240397838A1
公开(公告)日:2024-11-28
申请号:US18795158
申请日:2024-08-05
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chia-Ching Hsu
Abstract: A semiconductor memory device includes a substrate; a first dielectric layer on the substrate; and bottom electrodes on the first dielectric layer. The bottom electrodes are arranged equidistantly in a first direction and extend along a second direction. A second dielectric layer is disposed on the first dielectric layer. Top electrodes are disposed in the second dielectric layer and arranged at intervals along the second direction. Each top electrode includes a lower portion located around each bottom electrode and a tapered upper portion. A third dielectric layer is disposed above the bottom electrodes and around the tapered upper portion. A resistive-switching layer is disposed between a sidewall of each bottom electrode and a sidewall of the lower portion and between the third dielectric layer and a sidewall of the tapered upper portion. An air gap is disposed in the third dielectric layer.
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