公开(公告)号：US20170345693A1

公开(公告)日：2017-11-30

申请号：US15675825

申请日：2017-08-14

Applicant: Applied Materials, Inc.

Inventor： Kim VELLORE ,  Dinesh KANAWADE ,  Stephen MOFFATT ,  Aaron MILLER ,  Leonid M. TERTITSKI ,  Norman L. TAM ,  Michael LIU ,  Colin FOX

IPC: H01L21/67

CPC classification number: H01L21/67248 ,  H01L21/67115

Abstract: Embodiments of the present disclosure generally relate to methods and apparatus for visual lamp failure detection in a processing chamber, such as an RTP chamber. Visual feedback is facilitated through the use of a wide-angle lens positioned to view lamps within the process chamber. The wide-angle lens is positioned within a probe and secured using a spring in order to withstand high temperature processing. A camera coupled to the lens is adapted to capture an image of the lamps within the process chamber. The captured image of the lamps is then compared to a reference image to determine if the lamps are functioning as desired.

公开(公告)号：US20170306474A1

公开(公告)日：2017-10-26

申请号：US15517910

申请日：2015-11-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Byung-Sung Leo KWAK ,  Stephen MOFFATT

IPC: C23C14/56 ,  C23C14/58 ,  H01M10/0562 ,  H01M10/0585 ,  C23C14/08 ,  C23C14/04 ,  H01M10/04 ,  H01M4/485

CPC classification number: C23C14/568 ,  C23C14/048 ,  C23C14/08 ,  C23C14/22 ,  C23C14/5813 ,  H01M4/0404 ,  H01M4/0421 ,  H01M4/1391 ,  H01M4/485 ,  H01M4/525 ,  H01M6/40 ,  H01M10/0436 ,  H01M10/052 ,  H01M10/0562 ,  H01M10/0585

Abstract: A method of fabricating an electrochemical device in an apparatus may comprise: providing an electrochemical device substrate; depositing a device layer over the substrate; applying electromagnetic radiation to the device layer in situ to effect one or more of surface restructuring, recrystallization and densification of the device layer; repeating the depositing and the applying until a desired device layer thickness is achieved. Furthermore, the applying may be during the depositing. A thin film battery may comprise: a substrate; a current collector on the substrate; a cathode layer on the current collector; an electrolyte layer on the cathode layer; and a lithium anode layer on the electrolyte layer; wherein the LLZO electrolyte layer has a crystalline phase, no shorts due to cracks in the LLZO electrolyte layer, and no highly resistive interlayer at the interface between the electrolyte layer and the cathode layer.

公开(公告)号：US20160020117A1

公开(公告)日：2016-01-21

申请号：US14805232

申请日：2015-07-21

Applicant: Applied Materials, Inc.

Inventor： Aaron Muir HUNTER ,  Amikam SADE ,  Samuel C. HOWELLS ,  Douglas E. HOLMGREN ,  Bruce E. ADAMS ,  Theodore P. MOFFITT ,  Stephen MOFFATT

IPC: H01L21/324 ,  H01L21/67 ,  B23K26/70 ,  B23K26/073 ,  B23K26/08 ,  B23K26/00 ,  H01L21/268 ,  B23K26/0622

CPC classification number: B23K26/70 ,  B23K26/0732 ,  B23K26/082 ,  B23K26/352 ,  H01L21/268 ,  H01L21/67115

Abstract: Apparatus, system, and method for thermally treating a substrate. A source of pulsed electromagnetic energy can produce pulses at a rate of at least 100 Hz. A movable substrate support can move a substrate relative to the pulses of electromagnetic energy. An optical system can be disposed between the energy source and the movable substrate support, and can include components to shape the pulses of electromagnetic energy toward a rectangular profile. A controller can command the source of electromagnetic energy to produce pulses of energy at a selected pulse rate. The controller can also command the movable substrate support to scan in a direction parallel to a selected edge of the rectangular profile at a selected speed such that every point along a line parallel to the selected edge receives a predetermined number of pulses of electromagnetic energy.

Abstract translation: 用于热处理基底的装置，系统和方法。 脉冲电磁能源可以以至少100Hz的速率产生脉冲。 可移动衬底支撑件可以相对于电磁能的脉冲移动衬底。 光学系统可以设置在能量源和可移动衬底支撑件之间，并且可以包括将电磁能的脉冲朝向矩形轮廓成形的部件。 控制器可以命令电磁能量源以选定的脉冲速率产生能量脉冲。 控制器还可以以可选择的速度命令可移动衬底支撑件沿平行于所述矩形轮廓的选定边缘的方向进行扫描，使得沿着与所选边缘平行的线的每个点接收预定数量的电磁能量脉冲。

公开(公告)号：US20150124329A1

公开(公告)日：2015-05-07

申请号：US14594890

申请日：2015-01-12

Applicant: Applied Materials, Inc.

Inventor： Stephen MOFFATT ,  Douglas E. HOLMGREN ,  Samuel C. HOWELLS ,  Edric TONG ,  Bruce E. ADAMS ,  Jiping LI ,  Aaron Muir HUNTER

IPC: G02B27/10 ,  G02B27/14 ,  G02B27/12

CPC classification number: G02B27/106 ,  G02B17/0888 ,  G02B27/0025 ,  G02B27/10 ,  G02B27/1006 ,  G02B27/12 ,  G02B27/123 ,  G02B27/126 ,  G02B27/14 ,  G02B27/143 ,  G02B27/30

Abstract: Apparatus and methods for combining beams of amplified radiation are disclosed. A beam combiner has a collimating optic positioned to receive a plurality of coherent radiation beams at a constant angle of incidence with respect to an optical axis of the collimating optic. The respective angles of incidence may also be different in some embodiments. The collimating optic has an optical property that collimates the beams. The optical property may be refractive or reflective, or a combination thereof. A collecting optic may also be provided to direct the plurality of beams to the collimating optic. The beam combiner may be used in a thermal processing apparatus to combine more than two beams of coherent amplified radiation, such as lasers, into a single beam.

Abstract translation: 公开了用于组合放大辐射束的装置和方法。 光束组合器具有准直光学器件，其被定位成以相对于准直光学器件的光轴的恒定入射角接收多个相干辐射束。 在一些实施例中，相应的入射角也可以不同。 准直光学元件具有使光束准直的光学特性。 光学性质可以是折射或反射的，或其组合。 还可以提供收集光学器件以将多个光束引导到准直光学元件。 光束组合器可以用在热处理装置中，以将多于两个的相干放大辐射束（例如激光器）组合成单个光束。

公开(公告)号：US20140150712A1

公开(公告)日：2014-06-05

申请号：US14175110

申请日：2014-02-07

Applicant: Applied Materials, Inc.

Inventor： Stephen MOFFATT

IPC: C30B13/24

CPC classification number: H01L21/02686 ,  C30B13/24 ,  C30B29/403 ,  H01L21/02532 ,  H01L21/02568 ,  H01L21/2636 ,  H01L21/268 ,  H01L29/685 ,  H01L31/1872 ,  H01L33/0095 ,  Y02E10/50 ,  Y02P70/521

Abstract: A method and apparatus for forming a crystalline semiconductor layer on a substrate are provided. A semiconductor layer is formed by vapor deposition. A pulsed laser melt/recrystallization process is performed to convert the semiconductor layer to a crystalline layer. Laser, or other electromagnetic radiation, pulses are formed into a pulse train and uniformly distributed over a treatment zone, and successive neighboring treatment zones are exposed to the pulse train to progressively convert the deposited material to crystalline material.

Abstract translation: 提供了一种在基板上形成晶体半导体层的方法和装置。 通过气相沉积形成半导体层。 进行脉冲激光熔融/再结晶工艺以将半导体层转变成晶体层。 激光或其他电磁辐射脉冲形成脉冲序列并均匀地分布在处理区域上，并且连续的相邻处理区域暴露于脉冲序列以逐渐将沉积的材料转化为结晶材料。

公开(公告)号：US20140138362A1

公开(公告)日：2014-05-22

申请号：US14163309

申请日：2014-01-24

Applicant: Applied Materials, Inc.

Inventor： Stephen MOFFATT ,  Douglas E. HOLMGREN ,  Samuel C. HOWELLS ,  Edric TONG ,  Bruce E. ADAMS ,  Jiping LI ,  Aaron Muir HUNTER

IPC: H01L21/477 ,  B23K26/04 ,  B23K26/00

CPC classification number: H01L21/477 ,  B23K26/0006 ,  B23K26/03 ,  B23K26/032 ,  B23K26/04 ,  B23K26/0608 ,  B23K26/0622 ,  B23K26/08 ,  B23K26/127 ,  B23K26/354 ,  B23K2101/40 ,  B23K2103/56 ,  F27B5/14 ,  H01L21/268 ,  H01S3/0057

Abstract: The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. An energy source for the optical system is typically a plurality of lasers, which are combined to form the energy field.

Abstract translation: 本发明一般涉及一种光学系统，其能够在包含在基板的表面上的退火区域上可靠地传递均匀的能量。 光学系统适于在衬底的表面上的期望区域上传送或投影具有期望的二维形状的均匀量的能量。 用于光学系统的能量源通常是多个激光器，其被组合以形成能量场。